CN215872492U - Pulse bias power supply with heat radiation structure - Google Patents

Pulse bias power supply with heat radiation structure Download PDF

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Publication number
CN215872492U
CN215872492U CN202122109745.XU CN202122109745U CN215872492U CN 215872492 U CN215872492 U CN 215872492U CN 202122109745 U CN202122109745 U CN 202122109745U CN 215872492 U CN215872492 U CN 215872492U
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power supply
heat dissipation
pulse bias
bias power
main body
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CN202122109745.XU
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吕忠毅
梁寅平
康凯
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Dalian Palite Electronic Technology Development Co ltd
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Dalian Palite Electronic Technology Development Co ltd
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Abstract

The utility model discloses a pulse bias power supply with a heat dissipation structure, which comprises a main body structure, mounting structures and connecting structures, wherein the mounting structures are mounted on two sides of the main body structure, and the connecting structures are mounted on the front side of the main body structure; the mounting structure includes: the connecting plates are arranged on two sides of the main body structure; the fixed clamping block is fixed on the inner side of the connecting plate; and the screw hole is formed in the surface of the fixed clamping block. This pulse bias voltage power supply with heat radiation structure, the major structure that sets up opens through the front side of boxboard and establishes the dead slot, make things convenient for connection structure to install with internal power, the connecting plate is installed to its boxboard both sides, the surface mounting of connecting plate has two radiator-grid simultaneously, increase its radiating effect, avoid its power inside to receive the high temperature and the condition emergence of breaking down, the backup pad is connected through T type fixture block and T type draw-in groove buckle, multiplicable its connectivity, the convenience is carried out the dismouting to it.

Description

Pulse bias power supply with heat radiation structure
Technical Field
The utility model relates to the technical field of bias power supplies, in particular to a pulse bias power supply with a heat dissipation structure.
Background
The bias voltage power supply is an important component in vacuum arc ion plating and other vacuum physical vapor deposition equipment, and provides negative (or positive) bias voltage for workpieces in a coating process flow.
In the process of using a bias power supply on the market, a power supply device does not have a good heat dissipation system, and high temperature generated inside the power supply is not easy to dissipate, so that faults are easy to generate inside the power supply.
SUMMERY OF THE UTILITY MODEL
The present invention provides a pulse bias power supply with a heat dissipation structure, so as to solve the problem that the power supply device itself of the bias power supply in the market has no good heat dissipation system during the use process, and the internal part of the power supply generates high temperature and is not easy to dissipate, thereby causing internal failure.
In order to achieve the purpose, the utility model provides the following technical scheme: a pulse bias power supply with a heat dissipation structure comprises a main body structure, mounting structures and connecting structures, wherein the mounting structures are mounted on two sides of the main body structure, and the connecting structures are mounted on the front side of the main body structure;
the mounting structure includes:
the connecting plates are arranged on two sides of the main body structure;
the fixed clamping block is fixed on the inner side of the connecting plate;
the screw hole is formed in the surface of the fixed clamping block;
a bolt mounted on an upper surface of the screw hole;
and the heat dissipation net is arranged on the surface of the connecting plate.
Preferably, the connecting plate and the fixing clamping block are welded into a whole, and the bolt and the fixing clamping block form a thread structure through a screw hole.
Preferably, the radiating nets are movably connected with the connecting plate, and the two groups of radiating nets are arranged.
Preferably, the main body structure comprises:
a box board disposed at a rear side of the connection structure;
and the connecting groove is arranged on the inner side of the box board in a circle.
Preferably, the connecting grooves are fixedly connected with the box plates, and the connecting grooves are symmetrically distributed along the vertical central axis of the box plates.
Preferably, the connection structure includes:
the T-shaped clamping groove is formed in the front side surface of the main body structure;
the T-shaped clamping block is connected to the inner front side of the T-shaped clamping groove;
the supporting plate is welded on the front side of the T-shaped fixture block;
a control panel mounted to a front side surface of the support plate.
Preferably, the T-shaped clamping blocks are connected with the supporting plate in a welding mode, and the supporting plate forms a clamping structure with the T-shaped clamping grooves through the T-shaped clamping blocks.
Preferably, the T-shaped clamping blocks are symmetrically distributed along the horizontal central axis of the supporting plate, and the T-shaped clamping blocks are T-shaped.
Compared with the prior art, the utility model has the beneficial effects that: this pulse bias voltage power supply with heat radiation structure, the major structure that sets up opens through the front side of boxboard and establishes the dead slot, make things convenient for connection structure to install with internal power, the connecting plate is installed to its boxboard both sides, the surface mounting of connecting plate has two radiator-grid simultaneously, increase its radiating effect, avoid its power inside to receive the high temperature and the condition emergence of breaking down, the backup pad is connected through T type fixture block and T type draw-in groove buckle, multiplicable its connectivity, the convenience is carried out the dismouting to it.
Through the setting of major structure, seted up the spread groove in the left and right sides of boxboard, the degree of depth and mounting structure's fixed fixture block length phase-match of its spread groove open at the front side of major structure simultaneously and establish the dead slot, make things convenient for connection structure and internal power source to install.
Through mounting structure's setting, be equipped with the round hole on the surface of connecting plate and be used for installing the radiator-grid, and the surface of every connecting plate all installs two radiator-grids, increases its radiating effect, avoids its power inside to receive the high temperature and the condition emergence of breaking down.
Through connection structure's setting, seted up T type draw-in groove at major structure's front side surface, be equipped with simultaneously at the inboard surface of backup pad with T type draw-in groove shape size assorted T type fixture block, be connected the backup pad through T type fixture block and T type draw-in groove buckle, multiplicable its connectivity, the convenience is carried out the dismouting to it.
Drawings
FIG. 1 is a schematic front perspective view of the present invention;
FIG. 2 is a schematic diagram of a front view of the explosive structure of the present invention;
FIG. 3 is a schematic view of a partial structure of a T-shaped fixture block according to the present invention.
In the figure: 1. a body structure; 101. a boxboard; 102. connecting grooves; 2. a mounting structure; 201. a connecting plate; 202. fixing the fixture block; 203. a screw hole; 204. a bolt; 205. a heat-dissipating web; 3. a connecting structure; 301. a T-shaped clamping groove; 302. a T-shaped fixture block; 303. a support plate; 304. a control panel.
Detailed Description
As shown in fig. 1-2, a pulse bias power supply with a heat dissipation structure includes: major structure 1, mounting structure 2 is installed to major structure 1's both sides, and connection structure 3 is installed to major structure 1's front side, and major structure 1 includes: a box board 101 provided on the rear side of the connecting structure 3; connecting groove 102, it sets up in the inboard a week of boxboard 101, be fixed connection between connecting groove 102 and the boxboard 101, and connecting groove 102 along the perpendicular middle axis symmetric distribution of boxboard 101, connecting groove 102 has been seted up in the left and right sides of boxboard 101, the degree of depth and the fixed fixture block 202 length phase-match of mounting structure 2 of its connecting groove 102, open the dead slot in main structure 1's front side simultaneously, make things convenient for connecting structure 3 to install with internal power supply, mounting structure 2 includes: connecting plates 201 provided on both sides of the main body structure 1; a fixed latch 202 fixed to the inner side of the connection plate 201; a screw hole 203 opened on the surface of the fixture 202; a bolt 204 mounted on the upper surface of the screw hole 203, the connecting plate 201 and the fixing block 202 are welded together, the bolt 204 and the fixing block 202 form a screw structure through the screw hole 203, the fixing block 202 is welded inside the connecting plate 201, the fixing block 202 is provided with a plurality of screw holes 203 for connecting with the box plate 101, the connecting plate 201 is fastened inside the connecting groove 102 through the fixing block 202, the box plate 101 is provided with screw holes 203 corresponding to the positions of the fixing blocks 202 at the upper end of the connecting groove 102, then the bolt 204 is mounted inside the screw holes 203 for fixing, so as to increase the sealing performance, meanwhile, the parts mounted and fixed through the bolt 204 are convenient to detach and overhaul, a heat dissipation net 205 is mounted on the surface of the connecting plate 201, the heat dissipation net 205 and the connecting plate 201 are movably connected, and two sets of heat dissipation nets 205 are provided, a circular hole is formed on the surface of the connecting plate 201 for mounting the heat dissipation net 205, and the surface of each connecting plate 201 is provided with two heat dissipation nets 205, so that the heat dissipation effect is improved, and the condition that the power supply is subjected to high temperature to cause failure is avoided.
As shown in fig. 3, a pulse bias power supply with a heat dissipation structure, the connection structure 3 includes: a T-shaped slot 301 opened in the front side surface of the main body structure 1; a T-shaped latch 302 connected to the inner front side of the T-shaped card slot 301; the support plate 303 is welded to the front side of the T-shaped fixture block 302, the T-shaped fixture block 302 is welded to the support plate 303, the support plate 303 forms a fastening structure with the T-shaped fastening block 302 to form a fastening structure, the T-shaped fastening groove 301 is formed in the front side surface of the main body structure 1, the T-shaped fixture block 302 matched with the T-shaped fastening groove 301 in shape and size is arranged on the inner side surface of the support plate 303, the support plate 303 is fastened to the T-shaped fastening groove 301 through the T-shaped fixture block 302 to be connected, so that the connectivity of the support plate can be improved, the support plate can be conveniently disassembled and assembled, the control panel 304 is mounted on the front side surface of the support plate 303, the T-shaped fixture blocks 302 are symmetrically distributed along the horizontal central axis of the support plate 303, the T-shaped fixture blocks 302 are in a T shape, the T-shaped fixture blocks 302 can increase the bearing force between the fastening grooves and the fixture blocks, and have better bearing force when being dragged.
In summary, in the pulse bias power supply with a heat dissipation structure, first, the connecting grooves 102 are formed on the left and right sides of the box plate 101, the depth of the connecting grooves 102 is matched with the length of the fixing fixture block 202 of the mounting structure 2, meanwhile, the front side of the main structure 1 is provided with a hollow groove to facilitate the mounting of the connecting structure 3 and an internal power supply, the fixing fixture block 202 is welded inside the connecting plate 201, and the fixing fixture block 202 is provided with a plurality of screw holes 203 for connecting with the box plate 101, the connecting plate 201 is fastened inside the connecting grooves 102 through the fixing fixture block 202, the box plate 101 on the upper end of the connecting groove 102 is provided with the screw holes 203 corresponding to the fixing fixture block 202, then the bolt 204 is mounted inside the screw holes 203 for fixing, so as to increase the sealing performance, meanwhile, the parts mounted and fixed through the bolt 204 are convenient to detach and overhaul, and a round hole is formed on the surface of the connecting plate 201 for mounting the heat dissipation mesh 205, and the surface of every connecting plate 201 all installs two radiator grilles 205, increase its radiating effect, avoid its power inside to receive high temperature and the condition emergence of breaking down, seted up T type draw-in groove 301 at the front side surface of major structure 1, the inboard surface of backup pad 303 is equipped with the T type fixture block 302 with T type draw-in groove 301 shape size assorted simultaneously, be connected backup pad 303 through T type fixture block 302 and T type draw-in groove 301 buckle, multiplicable its connectivity, conveniently carry out the dismouting to it, the T type fixture block 302 of T style of calligraphy can increase the bearing capacity between draw-in groove and the fixture block simultaneously, there is better holding power when dragging it.

Claims (8)

1. A pulse bias power supply with a heat dissipation structure comprises a main body structure (1), a mounting structure (2) and a connecting structure (3), and is characterized in that: mounting structures (2) are mounted on two sides of the main body structure (1), and a connecting structure (3) is mounted on the front side of the main body structure (1);
the mounting structure (2) comprises:
connecting plates (201) arranged on both sides of the main body structure (1);
a fixed latch (202) fixed to the inner side of the connecting plate (201);
the screw hole (203) is opened on the surface of the fixed fixture block (202);
a bolt (204) mounted on an upper surface of the screw hole (203);
a heat dissipating mesh (205) mounted on a surface of the connection plate (201).
2. The pulse bias power supply with heat dissipation structure of claim 1, wherein: the connecting plate (201) and the fixing clamping block (202) are welded into a whole, and the bolt (204) and the fixing clamping block (202) form a thread structure through the screw hole (203).
3. The pulse bias power supply with heat dissipation structure of claim 1, wherein: the heat dissipation net (205) is movably connected with the connecting plate (201), and two groups of heat dissipation nets (205) are arranged.
4. The pulse bias power supply with heat dissipation structure of claim 1, wherein: the body structure (1) comprises:
a box plate (101) provided on the rear side of the connecting structure (3);
and the connecting groove (102) is opened on the inner periphery of the box plate (101).
5. The pulse bias power supply with heat dissipation structure as defined in claim 4, wherein: the connecting grooves (102) are fixedly connected with the box plate (101), and the connecting grooves (102) are symmetrically distributed along the vertical middle axis of the box plate (101).
6. The pulse bias power supply with heat dissipation structure of claim 1, wherein: the connection structure (3) comprises:
a T-shaped slot (301) which is opened on the front side surface of the main body structure (1);
a T-shaped clamping block (302) connected to the inner front side of the T-shaped clamping groove (301);
a support plate (303) welded to the front side of the T-shaped fixture block (302);
a control panel (304) mounted to a front side surface of the support plate (303).
7. The pulse bias power supply with heat dissipation structure as defined in claim 6, wherein: the T-shaped fixture block (302) is connected with the support plate (303) in a welding mode, and the support plate (303) forms a clamping structure with the T-shaped clamping groove (301) through the T-shaped fixture block (302).
8. The pulse bias power supply with heat dissipation structure as defined in claim 6, wherein: the T-shaped fixture blocks (302) are symmetrically distributed along the horizontal central axis of the support plate (303), and the T-shaped fixture blocks (302) are T-shaped.
CN202122109745.XU 2021-09-02 2021-09-02 Pulse bias power supply with heat radiation structure Active CN215872492U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122109745.XU CN215872492U (en) 2021-09-02 2021-09-02 Pulse bias power supply with heat radiation structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122109745.XU CN215872492U (en) 2021-09-02 2021-09-02 Pulse bias power supply with heat radiation structure

Publications (1)

Publication Number Publication Date
CN215872492U true CN215872492U (en) 2022-02-18

Family

ID=80245193

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202122109745.XU Active CN215872492U (en) 2021-09-02 2021-09-02 Pulse bias power supply with heat radiation structure

Country Status (1)

Country Link
CN (1) CN215872492U (en)

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