CN215865576U - Piezoresistive ceramic pressure sensor - Google Patents
Piezoresistive ceramic pressure sensor Download PDFInfo
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- CN215865576U CN215865576U CN202121196162.9U CN202121196162U CN215865576U CN 215865576 U CN215865576 U CN 215865576U CN 202121196162 U CN202121196162 U CN 202121196162U CN 215865576 U CN215865576 U CN 215865576U
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Abstract
The utility model provides a piezoresistive ceramic pressure sensor, which comprises a ceramic seat, an elastic diaphragm and a sensor chip, wherein the elastic diaphragm is arranged on the ceramic seat; the end face of the ceramic seat is of a cube structure, and positioning grooves are respectively formed in four pins of the ceramic seat; the elastic membrane is connected to the upper end of the ceramic seat, and the sensor chip is arranged in the ceramic seat; the elastic membrane is provided with a bonding pad, a first resistor, a second resistor, a third resistor, a fourth resistor, a first trimming resistor, a second trimming resistor, a power supply anode, a power supply cathode, a signal output anode and a signal output cathode. According to the piezoresistive ceramic pressure sensor, the glass layer is arranged at the bottom of the ceramic seat to improve the stability and the pressure resistance after installation; two trimming resistors and two groups of thick film resistors which are connected in parallel are added on a spring diaphragm of the Wheatstone bridge, so that the balance of the Wheatstone bridge is ensured to a great extent, and the output signal is stable, reliable and high in precision.
Description
Technical Field
The utility model relates to the field of pressure sensors, in particular to a piezoresistive ceramic pressure sensor.
Background
The internet of things is continuously developed and stably well in recent years, and the use of the sensor is deeply applied to various fields such as scientific research, agriculture, national defense and the like. In the industrial chain of the internet of things, as a carrier for realizing the service of the internet of things, the sensor plays a crucial role in the field of the internet of things. The sensors play a significant role in intelligent medical treatment, intelligent power grids, intelligent home, intelligent monitoring and other large Internet of things systems. The sensor is a source for detecting and acquiring external information, is the most fundamental basis for the development of the Internet of things, gradually integrates the technologies of a semiconductor processing technology, a micro-motor processing technology, a thick film hybrid integrated processing technology and the like in production and processing, and is developing towards a large-scale industrial direction with systematization, intellectualization and high precision at present.
In the case of the individual controllers of modern automation systems, pressure detection takes a considerable weight. In some control devices with very high automation level, the more pressure that needs to be measured and controlled, the more pressure sensors are needed. Piezoresistive ceramic pressure sensors are made of ceramic materials refined by a special process, and ceramic is a well-known material with high elasticity, corrosion resistance, abrasion resistance, impact resistance and vibration resistance, so the piezoresistive ceramic pressure sensors are widely used. However, the existing piezoresistive ceramic pressure sensor has poor stability and poor pressure resistance after being installed, and the existing piezoresistive ceramic pressure sensor is difficult to balance a Wheatstone bridge, so that the output signal error is large and the accuracy is poor.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, the present invention is directed to a piezoresistive ceramic pressure sensor, which is used to solve the problems of poor stability, poor pressure resistance and poor output signal precision in the prior art.
In order to solve the technical problem, the utility model is realized as follows: a piezoresistive ceramic pressure sensor comprises a ceramic seat, an elastic diaphragm and a sensor chip; the end face of the ceramic seat is of a cube structure, and positioning grooves are formed in four pins of the ceramic seat respectively; the elastic membrane is connected to the upper end of the ceramic seat, and the sensor chip is arranged in the ceramic seat; the elastic membrane is provided with a bonding pad, a first resistor, a second resistor, a third resistor, a fourth resistor, a first trimming resistor, a second trimming resistor, a power supply anode, a power supply cathode, a signal output anode and a signal output cathode;
one end of the first trimming resistor and one end of the second trimming resistor are respectively connected with the anode of the power supply, the other end of the first trimming resistor is connected with one end of the third resistor, and the other end of the second trimming resistor is connected with one end of the fourth resistor; the other end of the third resistor is connected with one end of the second resistor, the other end of the fourth resistor is connected with one end of the first resistor, and the other end of the second resistor and the other end of the first resistor are both connected to the negative electrode of the power supply; the input end of the sensor chip is connected with the positive electrode of the power supply, the negative electrode of the power supply, the other end of the third resistor, the other end of the fourth resistor, one end of the second resistor and one end of the first resistor; the output end of the sensor chip is connected to the signal output anode and the signal output cathode.
Furthermore, a plurality of first thick film resistors which are connected in parallel are connected between the positive electrode of the power supply and one end of the first trimming resistor; and a plurality of second thick film resistors which are mutually connected in parallel are connected between the positive electrode of the power supply and one end of the second trimming resistor.
Further, the number of the first thick film resistors is 3, and the number of the second thick film resistors is 3.
Furthermore, the positioning groove is of a quarter-arc structure.
Furthermore, a plurality of elastic diaphragm mounting holes are formed in the elastic diaphragm, and the elastic diaphragm is connected to the upper end of the ceramic seat through the elastic diaphragm mounting holes.
Further, the number of the elastic diaphragm mounting holes is 4.
Furthermore, a plurality of ceramic seat mounting holes are also formed in the ceramic seat.
Further, the number of the ceramic seat mounting holes is 4.
Further, the bottom of the ceramic seat is also provided with a glass layer.
Further, the elastic membrane is an alumina ceramic substrate.
As described above, according to the piezoresistive ceramic pressure sensor, the stability and the pressure resistance after installation are improved by arranging the glass layer at the bottom of the ceramic seat; two trimming resistors and two groups of thick film resistors which are connected in parallel are added on a spring diaphragm of the Wheatstone bridge, so that the balance of the Wheatstone bridge is ensured to a great extent, and the output signal is stable, reliable and high in precision.
Drawings
FIG. 1 is a schematic structural diagram of a piezoresistive ceramic pressure sensor according to an embodiment of the present invention;
FIG. 2 is a side view of a piezoresistive ceramic pressure sensor according to an embodiment of the present invention;
fig. 3 is a circuit diagram of a piezoresistive ceramic pressure sensor according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will become apparent to those skilled in the art from the present disclosure.
Please refer to fig. 1 to 3. It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the conditions under which the present invention can be implemented, so that the present invention has no technical significance, and any structural modification, ratio relationship change, or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention. In addition, the terms "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for clarity of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the terms is not to be construed as a scope of the present invention.
As shown in fig. 1 to 3, the present invention provides a piezoresistive ceramic pressure sensor, which includes a ceramic base 1, an elastic diaphragm 2, and a sensor chip U1. The sensor chip U1 is placed in the ceramic seat 1, and the model of the sensor chip U1 is PGA 308. The terminal surface of ceramic seat 1 is the square structure, and four foot punishments on the ceramic seat 1 are equipped with constant head tank 3 respectively, and constant head tank 3 is the quarter circular arc structure for ceramic seat 1 installation is more stable, still is equipped with 4 ceramic seat mounting holes 6. The bottom of the ceramic base 1 is also provided with a glass layer 7, and the glass layer 7 enables the sensor to have good mechanical strength, good high temperature resistance and good low temperature resistance after being installed.
The spring diaphragm 2 is an alumina ceramic substrate, so that the Vickers hardness, the bending strength and the electric strength are high. And 4 elastic diaphragm mounting holes 5 are formed in the elastic diaphragm 2, and the elastic diaphragm 2 is connected to the upper end of the ceramic seat 1 through the elastic diaphragm mounting holes 5. The elastic diaphragm 2 is provided with a bonding pad 4, and the bonding pad 4 can be welded with other functional sensors, so that the piezoresistive ceramic pressure sensor is expanded. The elastic diaphragm 2 is further provided with a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a first trimming resistor R5, a second trimming resistor R6, 3 first thick-film resistors R7, 3 second thick-film resistors R8, a power supply anode VCC, a power supply cathode GND, a signal output anode OUT + and a signal output cathode OUT-.
One end of the first trimming resistor R5 and one end of the second trimming resistor R6 are respectively connected to the positive power VCC, the other end of the first trimming resistor R5 is connected to one end of the third resistor R3, and the other end of the second trimming resistor R6 is connected to one end of the fourth resistor R4. The other end of the third resistor R3 is connected to one end of the second resistor R2, the other end of the fourth resistor R4 is connected to one end of the first resistor R1, and the other ends of the second resistor R2 and the first resistor R1 are both connected to the power supply negative electrode GND. The input end of the sensor chip U1 is connected with a power supply anode VCC, a power supply cathode GND, the other end of a third resistor R3, the other end of a fourth resistor R4, one end of a second resistor R2 and one end of a first resistor R1; the output end of the sensor chip U1 is connected to the positive signal output pole OUT + and the negative signal output pole OUT-. 3 first thick film resistors R7 which are connected in parallel are connected between the power supply anode VCC and one end of the first trimming resistor R5, and 3 second thick film resistors R8 which are connected in parallel are connected between the power supply anode VCC and one end of the second trimming resistor R6.
The first resistor R1, the second resistor R2, the third resistor R3 and the fourth resistor R4 form a Wheatstone bridge, when the spring diaphragm 2 is stressed and deformed, the bridge is driven to output change, and after temperature compensation processing is carried OUT on the sensor chip U1, corresponding electric signals are output from a signal output positive pole OUT + and a signal output negative pole OUT-. When the bridge arms in the bridge are unbalanced, the first trimming resistor R5 is trimmed by laser to detect whether the bridge circuit is balanced, and then the bridge arms are trimmed by 3 first thick film resistors R7 to achieve the aim of bridge arm balance. When the bridge arms in the bridge are not balanced, the second trimming resistor R6 can be subjected to laser trimming to detect whether the bridge circuit is balanced or not, and then the aim of bridge arm balance is achieved by performing trimming through 3 second thick film resistors R8. Therefore, stability influence caused by repeated laser trimming on the first trimming resistor R5 or the second trimming resistor R6 is avoided, and balance of the bridge is further improved.
In summary, according to the piezoresistive ceramic pressure sensor disclosed by the utility model, the stability and the pressure resistance after installation are improved by arranging the glass layer at the bottom of the ceramic seat; two trimming resistors and two groups of thick film resistors which are connected in parallel are added on a spring diaphragm of the Wheatstone bridge, so that the balance of the Wheatstone bridge is ensured to a great extent, and the output signal is stable, reliable and high in precision. Therefore, the present invention effectively overcomes various disadvantages of the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the utility model. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. A piezoresistive ceramic pressure sensor is characterized by comprising a ceramic seat (1), an elastic diaphragm (2) and a sensor chip; the end face of the ceramic base (1) is of a cube structure, and positioning grooves (3) are respectively formed in four feet of the ceramic base (1); the elastic diaphragm (2) is connected to the upper end of the ceramic seat (1), and the sensor chip is arranged in the ceramic seat (1); the elastic diaphragm (2) is provided with a bonding pad (4), a first resistor, a second resistor, a third resistor, a fourth resistor, a first trimming resistor, a second trimming resistor, a power supply anode, a power supply cathode, a signal output anode and a signal output cathode;
one end of the first trimming resistor and one end of the second trimming resistor are respectively connected with the anode of the power supply, the other end of the first trimming resistor is connected with one end of the third resistor, and the other end of the second trimming resistor is connected with one end of the fourth resistor; the other end of the third resistor is connected with one end of the second resistor, the other end of the fourth resistor is connected with one end of the first resistor, and the other end of the second resistor and the other end of the first resistor are both connected to the negative electrode of the power supply; the input end of the sensor chip is connected with the positive electrode of the power supply, the negative electrode of the power supply, the other end of the third resistor, the other end of the fourth resistor, one end of the second resistor and one end of the first resistor; the output end of the sensor chip is connected to the signal output anode and the signal output cathode.
2. The piezoresistive ceramic pressure sensor according to claim 1, wherein a plurality of first thick-film resistors connected in parallel are connected between the positive power supply and one end of the first trimming resistor; and a plurality of second thick film resistors which are mutually connected in parallel are connected between the positive electrode of the power supply and one end of the second trimming resistor.
3. The piezoresistive ceramic pressure sensor according to claim 2, wherein the number of said first thick-film resistors is 3, and the number of said second thick-film resistors is 3.
4. A piezoresistive ceramic pressure sensor according to claim 1, wherein the positioning slot (3) is of quarter-circular arc configuration.
5. The piezoresistive ceramic pressure sensor according to claim 1, wherein a plurality of elastic diaphragm mounting holes (5) are further formed in the elastic diaphragm (2), and the elastic diaphragm (2) is connected to the upper end of the ceramic base (1) through the elastic diaphragm mounting holes (5).
6. A piezoresistive ceramic pressure sensor according to claim 5, wherein the number of said elastic diaphragm mounting holes (5) is 4.
7. The piezoresistive ceramic pressure sensor according to claim 1, wherein the ceramic base (1) is further provided with a plurality of ceramic base mounting holes (6).
8. A piezoresistive ceramic pressure sensor according to claim 7, wherein the number of ceramic seat mounting holes (6) is 4.
9. A piezoresistive ceramic pressure sensor according to claim 1, wherein the bottom of the ceramic base (1) is further provided with a glass layer (7).
10. A piezoresistive ceramic pressure sensor according to claim 1, wherein the elastic diaphragm (2) is an alumina ceramic substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121196162.9U CN215865576U (en) | 2021-05-31 | 2021-05-31 | Piezoresistive ceramic pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121196162.9U CN215865576U (en) | 2021-05-31 | 2021-05-31 | Piezoresistive ceramic pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215865576U true CN215865576U (en) | 2022-02-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121196162.9U Active CN215865576U (en) | 2021-05-31 | 2021-05-31 | Piezoresistive ceramic pressure sensor |
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| CN (1) | CN215865576U (en) |
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2021
- 2021-05-31 CN CN202121196162.9U patent/CN215865576U/en active Active
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