CN215848166U - Flexible micro-gripper - Google Patents

Abstract

The application discloses flexible little holder relates to microdevice assembly technical field. The flexible micro-gripper comprises a mounting seat, a lever amplification mechanism and a first flexible parallelogram mechanism, wherein the lever amplification mechanism and the first flexible parallelogram mechanism are arranged on the mounting seat; the first flexible parallelogram mechanism is respectively connected with a first clamping arm and a first bridge amplifier, the lever amplification mechanism is respectively connected with a second bridge amplifier and a second flexible parallelogram mechanism, and the second flexible parallelogram mechanism is connected with a second clamping arm; and driving the first bridge amplifier, the first clamping arm moves along a first direction, driving the second bridge amplifier, and the second clamping arm moves along a second direction, wherein the first direction and the second direction are vertical to each other. The clamp can clamp and rub the tiny objects, and is beneficial to improving the applicability of use.

Description

Flexible micro-gripper

Technical Field

The application relates to the technical field of micro device assembly, in particular to a flexible micro gripper.

Background

The flexible mechanism utilizes the deformation of materials to transmit or convert motion, force and energy, and has the advantages of no assembly, no lubrication, no friction, no clearance and the like. The flexible micro-gripper is a typical application of a flexible mechanism, amplifies or transmits the input displacement of a driver by utilizing various delicate structures consisting of flexible hinges, finally drives a clamping jaw to complete the clamping action, and is widely applied to the fields of micro-operation and micro-assembly.

The flexible micro gripper serves as an end effector of the mechanical arm, and can pick up, transport, insert, release and the like tiny targets. At the very end, these operations still rely solely on the gripping function of the flexible micro-gripper. With the vigorous development of the micro-assembly technology, the functions of the micro-nano device are more and more complex, which puts higher performance requirements on the end effector, especially the flexible micro-gripper.

Most of the existing flexible micro-grippers have only one degree of freedom, and cannot meet the application field with higher requirements on the degree of freedom of the flexible micro-grippers, so that the application range of the flexible micro-grippers is severely limited.

SUMMERY OF THE UTILITY MODEL

The application aims to provide a flexible micro gripper, which can grip and rub micro objects and is beneficial to improving the use applicability.

The embodiment of the application is realized as follows:

the embodiment of the application provides a flexible micro-gripper, which comprises a mounting seat, a lever amplification mechanism and a first flexible parallelogram mechanism, wherein the lever amplification mechanism and the first flexible parallelogram mechanism are arranged on the mounting seat; the first flexible parallelogram mechanism is respectively connected with a first clamping arm and a first bridge amplifier, the lever amplification mechanism is respectively connected with a second bridge amplifier and a second flexible parallelogram mechanism, and the second flexible parallelogram mechanism is connected with a second clamping arm; and driving the first bridge amplifier, the first clamping arm moves along a first direction, driving the second bridge amplifier, and the second clamping arm moves along a second direction, wherein the first direction and the second direction are vertical to each other.

Optionally, the first bridge amplifier includes a first bridge amplifying mechanism, and a first driver disposed on the first bridge amplifying mechanism, the first bridge amplifying mechanism includes a first longitudinal beam and a second longitudinal beam disposed oppositely, the first longitudinal beam is connected to the first flexible parallelogram mechanism through a first flexible hinge, and a first fixing base is disposed on the second longitudinal beam.

Optionally, the two ends of the first longitudinal beam and the second longitudinal beam are respectively connected through a first base body, wherein a first preload piece is arranged on one of the first base bodies, and the first preload piece is connected with the first driver through a first gasket.

Optionally, the first flexible parallelogram mechanism includes a second fixed base connected to the mount, and a first cantilever beam disposed in parallel on the second fixed base, wherein two ends of the first cantilever beam are connected to the second fixed base and the first clamping arm through a second flexible hinge, respectively.

Optionally, the second bridge amplifier includes a second bridge amplification mechanism, and a second driver disposed on the second bridge amplification mechanism, the second bridge amplification mechanism includes a first beam and a second beam disposed oppositely, the first beam is connected to the lever amplification mechanism through a first connection beam, and a third fixing base is disposed on the second beam.

Optionally, two ends of the first cross beam and two ends of the second cross beam are respectively connected through a second base body, wherein a second preload piece is arranged on one of the second base bodies, and the second preload piece is connected with the second driver through a second gasket.

Optionally, the lever amplification mechanism comprises a support beam and a third flexible hinge arranged on the support beam, and the support beam is connected with the mounting seat through the third flexible hinge; the first cross beam is connected with the supporting beam through the first connecting beam, the second flexible parallelogram mechanism is connected with the supporting beam through the second connecting beam, and the distance between the second connecting beam and the mounting seat is greater than that between the first connecting beam and the mounting seat.

Optionally, the second flexible parallelogram mechanism includes a fourth fixed base and a second cantilever beam parallel to the fourth fixed base, wherein two ends of the second cantilever beam are connected to the fourth fixed base and the second clamping arm through a fourth flexible hinge, respectively.

Optionally, one end of the second cantilever beam, which is far away from the fourth fixed base, is provided with a connecting block, the connecting block is connected with the second cantilever beam through a fourth flexible hinge, the connecting block is connected with the second clamping arm through a fifth flexible hinge, and the fifth flexible hinge is provided with a strain gauge.

Optionally, the first clamping arm and the second clamping arm together form a clamping jaw, and a U-shaped opening is provided on a side of the first clamping arm or the second clamping arm parallel to and opposite to the clamping jaw.

The beneficial effects of the embodiment of the application include:

the utility model provides a flexible little holder, through the mount pad, and set up the first flexible parallelogram mechanism on the mount pad, be connected with first centre gripping arm and first bridge amplifier on the first flexible parallelogram mechanism respectively, when driving the action of first bridge amplifier, first bridge amplifier drives first flexible parallelogram action, first flexible parallelogram drives first centre gripping arm and moves along first direction, so that first centre gripping arm is close to or keeps away from second centre gripping arm, thereby realize required centre gripping action. A lever amplification mechanism is arranged on the mounting seat, and a second bridge amplifier and a second flexible parallelogram mechanism are respectively arranged on the lever amplification mechanism. When the second bridge amplifier is driven, the first bridge amplifier drives the lever amplification mechanism to act, the lever amplification mechanism drives the second flexible parallelogram to act, and the second flexible parallelogram drives the second clamping arm to move along the second direction, so that the second clamping arm moves along the second clamping arm, and the required twisting action is realized. By adopting the mode, the micro objects can be clamped and rubbed, so that the two-dimensional operation on the target is ensured, and the use applicability is improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.

FIG. 1 is a schematic diagram of a flexible micro-gripper according to an embodiment of the present disclosure;

FIG. 2 is a schematic structural diagram of a mounting base coupled to a first flexible parallelogram mechanism according to an embodiment of the present application;

fig. 3 is a schematic structural diagram of a connection between a mounting seat and a lever amplification mechanism provided in an embodiment of the present application.

Icon: 100-flexible micro-gripper; 110-a mount; 120-lever amplification mechanism; 122-support beam; 124-a third flexible hinge; 126-a second connecting beam; 130-a first flexible parallelogram mechanism; 132-a second fixed base; 134-first cantilever beam; 136-a second flexible hinge; 140-a first gripper arm; a 142-U shaped opening; 150-a first bridge amplifier; 151-a first flexible hinge; 152-a first driver; 153-a first stringer; 154-a second stringer; 155-a first fixed base; 156-a first substrate; 157-a first preload member; 158-a first gasket; 160-a second bridge amplifier; 161-a second driver; 162-a first beam; 163-a second beam; 164-a first connecting beam; 165-a third stationary base; 166-a second substrate; 167-a second preload member; 168-a second shim; 170-a second flexible parallelogram mechanism; 172-a fourth stationary base; 174-a second cantilever beam; 176-a fourth flexible hinge; 180-a second gripper arm; 182-connecting block; 184-a fifth flexible hinge; 186-strain gage.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

In the description of the present application, it is also to be noted that, unless otherwise explicitly specified or limited, the terms "disposed" and "connected" are to be interpreted broadly, e.g., as being either fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.

The flexible micro gripper serves as an end effector of the mechanical arm, and can pick up, transport, insert, release and the like tiny targets. With the vigorous development of the micro-assembly technology, the functions of the micro-nano device are more and more complex, which puts higher performance requirements on the end effector, especially the flexible micro-gripper. For example, in fine alignment of the phase of an optical fiber, the conventional alignment method is to make a flexible micro-gripper clamp the optical fiber and then keep the axis of the optical fiber stationary, and to make the flexible micro-gripper rotate around the axis of the optical fiber to achieve the phase alignment. However, this approach suffers from low precision of overall rotation and small workspace for micro-assembly. Therefore, the structural design of the traditional flexible micro-gripper needs to be improved to improve the operating performance of the flexible micro-gripper, and the embodiment of the application especially provides the following scheme, so that the flexible micro-gripper can grip and twist micro objects, and is beneficial to improving the use applicability.

Referring to fig. 1, the present embodiment provides a flexible micro-gripper 100, which includes a mounting base 110, and a lever magnifying mechanism 120 and a first flexible parallelogram mechanism 130 disposed on the mounting base 110; the first flexible parallelogram mechanism 130 is respectively connected with a first clamping arm 140 and a first bridge amplifier 150, the lever amplification mechanism 120 is respectively connected with a second bridge amplifier 160 and a second flexible parallelogram mechanism 170, and the second flexible parallelogram mechanism 170 is connected with a second clamping arm 180; the first bridge amplifier 150 is driven, the first clamp arm 140 is moved in a first direction, the second bridge amplifier 160 is driven, and the second clamp arm 180 is moved in a second direction, wherein the first direction and the second direction are perpendicular to each other.

Specifically, the installation form of the installation base 110 is not particularly limited in the embodiment of the present application, as long as the required fixing and supporting functions can be satisfied, for example, the installation base 110 may adopt a "Z" shape, a "1" shape, a "7" shape, or other structures, so as to realize the connection and fixation of the lever amplification mechanism 120 and the first flexible parallelogram mechanism 130.

By respectively arranging the first clamping arm 140 and the first bridge amplifier 150 on the first flexible parallelogram mechanism 130, when the first bridge amplifier 150 is driven, the first bridge amplifier 150 drives the first flexible parallelogram mechanism 130 to move, so that the first clamping arm 140 translates towards the direction of the second clamping arm 180, and the clamping action of the first clamping arm 140 and the second clamping arm 180 is realized.

By respectively arranging the second bridge amplifier 160 and the second flexible parallelogram 170 on the lever amplification mechanism 120, when the second bridge amplifier 160 is driven, the second bridge amplifier 160 drives the lever amplification mechanism 120 to act, and the lever amplification mechanism 120 drives the second flexible parallelogram 170 to move. Thus, by adopting the three-stage serial amplification structure, the long-stroke movement of the second clamping arm 180, i.e., the twisting movement of the second clamping arm 180 along the length of the first clamping arm 140, can be realized. By adopting the above form, the first clamping arm 140 can move along the first direction to clamp the tiny objects, and the second clamping arm 180 can move along the second direction to rub the tiny objects, so that the two-dimensional operation of the target is ensured, and the device has the advantages of compact structure, parallel clamping, large working stroke and the like.

The flexible micro-gripper 100 provided by the embodiment of the application, through the mounting base 110, and the first flexible parallelogram mechanism 130 arranged on the mounting base 110, the first flexible parallelogram mechanism 130 is connected with the first gripping arm 140 and the first bridge amplifier 150 respectively, when the first bridge amplifier 150 is driven to act, the first bridge amplifier 150 drives the first flexible parallelogram to act, and the first flexible parallelogram drives the first gripping arm 140 to move along the first direction, so that the first gripping arm 140 is close to or far away from the second gripping arm 180, thereby realizing the required gripping action. By providing the lever amplification mechanism 120 on the mount 110 and providing the second bridge amplifier 160 and the second flexible parallelogram mechanism 170 on the lever amplification mechanism 120, respectively. When the second bridge amplifier 160 is driven, the first bridge amplifier 150 drives the lever amplifying mechanism 120 to act, the lever amplifying mechanism 120 drives the second flexible parallelogram to act, and the second flexible parallelogram drives the second clamping arm 180 to move along the second direction, so that the second clamping arm 180 moves along the second clamping arm 180, and the required twisting action is realized. By adopting the mode, the micro objects can be clamped and rubbed, so that the two-dimensional operation on the target is ensured, and the use applicability is improved.

As shown in fig. 1 and 2, the first bridge amplifier 150 includes a first bridge amplifying mechanism, and a first driver 152 disposed on the first bridge amplifying mechanism, the first bridge amplifying mechanism includes a first longitudinal beam 153 and a second longitudinal beam 154 disposed oppositely, the first longitudinal beam 153 is connected to the first flexible parallelogram mechanism 130 by a first flexible hinge 151, and a first fixing base 155 is disposed on the second longitudinal beam 154.

Specifically, the first driver 152 may be a piezoelectric ceramic actuator, and when a certain voltage is applied to the piezoelectric ceramic actuator, the first driver 152 pushes the first longitudinal beam 153 to move in a direction close to the first flexible parallelogram mechanism 130 according to the inverse piezoelectric effect principle. At this time, since the first fixing base 155 is disposed on the second longitudinal beam 154, the second longitudinal beam 154 cannot move, and the displacement of the first longitudinal beam 153 is amplified, so that the first longitudinal beam 153 drives the first flexible parallelogram mechanism 130 to move through the first flexible hinge 151, and then the first flexible parallelogram mechanism 130 drives the first clamping arm 140 to approach the second clamping arm 180, thereby realizing the clamping action. When the driving voltage is removed from the first driver 152, the first driver 152 contracts in length, and the elastic deformation of the material is recovered to drive the second longitudinal beam 154 to move in the opposite direction, so as to recover to the state before the movement.

As shown in fig. 2, the first longitudinal beam 153 and the second longitudinal beam 154 are connected at both ends by first base bodies 156, respectively, wherein a first pre-tightening member 157 is provided on one of the first base bodies 156, and the first pre-tightening member 157 is connected to the first actuator 152 by a first spacer 158.

Specifically, the two ends of the first longitudinal beam 153 and the second longitudinal beam 154 are respectively connected through the first base 156, which is beneficial to ensuring the structural stability of the first bridge amplifier 150, so as to realize stable transmission. By providing a first preload element 157 on one of the first substrates 156 and connecting the first preload element 157 to the first driver 152 via a first spacer 158, it is advantageous to adjust the initial state of the first bridge amplifier 150 to calibrate the first bridge amplifier 150 and protect the first driver 152 via the first spacer 158 to reduce the chance of failure.

As shown in fig. 1 and 2, the first flexible parallelogram mechanism 130 includes a second fixed base 132 connected with the mounting base 110, and a first cantilever beam 134 disposed in parallel on the second fixed base 132, wherein both ends of the first cantilever beam 134 are connected with the second fixed base 132 and the first clamping arm 140 through a second flexible hinge 136, respectively.

Specifically, the mounting base 110 and the second fixing base 132 may be connected separately or integrally formed, as long as the connection stability can be ensured. Through parallel arrangement of the first cantilever beams 134 on the second fixed base 132, two ends of the first cantilever beams 134 are respectively connected with the second fixed base 132 and the first clamping arm 140 through the second flexible hinge 136, which is beneficial to ensuring the straightness of the first clamping arm 140 during movement, avoiding the first clamping arm 140 from deviating during movement, and being beneficial to ensuring the clamping quality.

As shown in fig. 1 and 3, the second bridge amplifier 160 includes a second bridge amplifying mechanism including a first beam 162 and a second beam 163 disposed oppositely, the first beam 162 is connected to the lever amplifying mechanism 120 via a first connecting beam 164, and a second driver 161 disposed on the second bridge amplifying mechanism, and a third fixing base 165 is disposed on the second beam 163.

Specifically, the second driver 161 may also be a piezoelectric ceramic actuator, and when a certain voltage is applied to the piezoelectric ceramic actuator, according to the principle of inverse piezoelectric effect, the second driver 161 may push the first beam 162 to move toward the direction close to the lever amplification mechanism 120. At this time, since the third fixing base 165 is disposed on the second beam 163, the second beam 163 cannot move, and the displacement of the first beam 162 is amplified, so that the first beam 162 drives the lever amplification mechanism 120 to move through the first connecting beam 164, and then the lever amplification mechanism 120 drives the second clamping arm 180 to move along the second clamping arm 180, thereby implementing the twisting motion. When the driving voltage is removed from the second driver 161, the second driver 161 contracts in length, and the elastic deformation of the material is recovered to drive the second beam 163 to move in the opposite direction, so as to recover to the state before the movement.

As shown in fig. 3, the two ends of the first beam 162 and the second beam 163 are connected by a second base 166, wherein one of the second base 166 is provided with a second preload member 167, and the second preload member 167 is connected to the second driver 161 by a second spacer 168.

Specifically, the two ends of the first beam 162 and the second beam 163 are respectively connected through the second base 166, which is beneficial to ensuring the structural stability of the second bridge amplifier 160, so as to realize stable transmission. By providing a second preload member 167 on one of the second substrates 166, and connecting the second preload member 167 to the second driver 161 via a second spacer 168, it is advantageous to adjust the initial state of the second bridge amplifier 160 to calibrate the second bridge amplifier 160, and protect the second driver 161 via the second spacer 168, thereby reducing the occurrence of malfunction.

The piezoelectric ceramic actuator is adopted for displacement driving, and the piezoelectric ceramic actuator has the advantages of small size, low energy consumption, high response speed, high resolution and the like. The first preload member 157 and the second preload member 167 may employ preload bolts, which is advantageous for reducing the cost, simplifying the arrangement, and reducing the difficulty of operation.

As shown in fig. 1 and 3, the lever amplification mechanism 120 includes a support beam 122, and a third flexible hinge 124 disposed on the support beam 122, wherein the support beam 122 is connected to the mounting base 110 by the third flexible hinge 124; the first beam 162 is connected to the support beam 122 through the first connection beam 164, the second flexible parallelogram mechanism 170 is connected to the support beam 122 through the second connection beam 126, and the distance between the second connection beam 126 and the mounting base 110 is greater than the distance between the first connection beam 164 and the mounting base 110.

Specifically, the first beam 162 is connected with the supporting beam 122 of the lever amplifying mechanism 120 through the first connecting beam 164, the second driver 161 drives the first beam 162 to move, when the first beam 162 drives the supporting beam 122 to move through the first connecting beam 164, the supporting beam 122 deflects through the third flexible hinge 124 and the mounting seat 110, and the distance between the second connecting beam 126 and the mounting seat 110 is greater than the distance between the first connecting beam 164 and the mounting seat 110, so that the second connecting beam 126 has a larger displacement, and thus a three-stage series amplifying structure is realized, and a long-stroke twisting is realized.

As shown in fig. 3, the second flexible parallelogram mechanism 170 includes a fourth fixed base 172, and a second cantilever beam 174 disposed in parallel on the fourth fixed base 172, wherein both ends of the second cantilever beam 174 are connected to the fourth fixed base 172 and the second clamp arm 180 respectively through a fourth flexible hinge 176.

Specifically, the second cantilever beam 174 is arranged on the fourth fixed base 172 in parallel, and two ends of the second cantilever beam 174 are connected with the fourth fixed base 172 and the second clamping arm 180 through the fourth flexible hinge 176, so that straightness of the second clamping arm 180 during movement is guaranteed, the second clamping arm 180 is prevented from deviating during movement, and quality during twisting is guaranteed.

It will be appreciated that, in order to ensure the stability of the overall structure of the flexible micro-gripper 100, the mounting base 110, the first fixing base 155, the second fixing base 132, the third fixing base 165 and the fourth fixing base 172 can be all fixedly disposed on the same carrier board, so as to achieve stable connection and positioning. When connecting, the through holes can be arranged at corresponding positions to be connected through the fasteners.

As shown in fig. 3, a connection block 182 is disposed at an end of second cantilever beam 174 far from fourth fixed base 172, connection block 182 is connected to second cantilever beam 174 via a fourth flexible hinge 176, and connection block 182 is connected to second clamping arm 180 via a fifth flexible hinge 184, and a strain gauge 186 is disposed on fifth flexible hinge 184.

Specifically, since the connection block 182 is connected to the second clamping arm 180 through the fifth flexible hinge 184, if the clamping force is too large during clamping a tiny object, the fourth flexible hinge 176 may deform to ensure the stability of the clamping force. In addition, by providing the strain gauge 186 on the fifth flexible hinge 184, the clamping force can be monitored, thereby facilitating better adjustment of the operating condition of the flexible micro-gripper 100 according to the use situation.

The flexible micro-holder 100 provided by the embodiment of the application can adopt an integrated single-piece asymmetric structure, different manufacturing modes can be selected according to different processing materials, for example, a metal material can adopt a wire cut electrical discharge machining technology, a plastic material can adopt a 3D printing technology, and the flexible micro-holder can be flexibly arranged according to actual needs. In addition, the flexible hinge adopted in the embodiment can adopt a rectangular flexible hinge, the rectangular flexible hinge is convenient to process, simple in structure and large in rotation range, and the operation difficulty and the use cost are favorably reduced.

As shown in fig. 1 and 2, the first clamping arm 140 and the second clamping arm 180 together form a clamping jaw, and one side of the first clamping arm 140 or the second clamping arm 180, which is opposite to the parallel side, is provided with a U-shaped opening 142.

Specifically, the arrangement form of the first clamping arm 140 and the second clamping arm 180 is not particularly limited in the embodiment of the present application, as long as stable clamping and mutual twisting can be achieved. For example, the first gripper arm 140 may have an "L" configuration and the second gripper arm 180 may have an "I" configuration. In addition, the front half part of the U-shaped opening 142 can be consistent with the V-shaped opening, and the V-shaped tip is changed into an arc tangent to two sides of the V-shaped opening inside the opening to form the U-shaped opening 142 in the embodiment of the present application, so as to avoid the occurrence of the stress concentration phenomenon and improve the service life of the flexible micro-gripper 100.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. A flexible micro-gripper is characterized by comprising a mounting seat, a lever amplification mechanism and a first flexible parallelogram mechanism, wherein the lever amplification mechanism and the first flexible parallelogram mechanism are arranged on the mounting seat; the first flexible parallelogram mechanism is respectively connected with a first clamping arm and a first bridge amplifier, the lever amplification mechanism is respectively connected with a second bridge amplifier and a second flexible parallelogram mechanism, and the second flexible parallelogram mechanism is connected with a second clamping arm; and driving the first bridge amplifier, the first clamping arm moves along a first direction, driving the second bridge amplifier, and the second clamping arm moves along a second direction, wherein the first direction and the second direction are vertical to each other.

2. The flexible micro-gripper of claim 1, wherein said first bridge amplifier comprises a first bridge amplifier mechanism comprising a first opposing longitudinal beam and a second longitudinal beam, said first longitudinal beam coupled to said first flexible parallelogram mechanism by a first flexible hinge, and a first driver disposed on said first bridge amplifier mechanism, said second longitudinal beam having a first fixed base disposed thereon.

3. The flexible microcartridge of claim 2, wherein said first and second stringers are joined at opposite ends by respective first base members, one of said first base members having a first preload member disposed thereon, said first preload member being connected to said first actuator by a first spacer.

4. The flexible micro-gripper of claim 1, wherein the first flexible parallelogram mechanism comprises a second fixed base connected to the mount, and a first cantilever beam disposed in parallel on the second fixed base, wherein two ends of the first cantilever beam are connected to the second fixed base and the first gripper arm by a second flexible hinge, respectively.

5. The flexible micro-gripper of any one of claims 1-4, wherein said second bridge amplifier comprises a second bridge amplification mechanism, and a second driver disposed on said second bridge amplification mechanism, said second bridge amplification mechanism comprising a first beam and a second beam disposed opposite to each other, said first beam being connected to said lever amplification mechanism via a first connecting beam, said second beam having a third fixed base disposed thereon.

6. The flexible microcartridge of claim 5, wherein said first and second beams are connected at each end by a second base, one of said second bases having a second preload member disposed thereon, said second preload member being connected to said second actuator by a second spacer.

7. The flexible micro-gripper of claim 5, wherein said lever amplification mechanism comprises a support beam, and a third flexible hinge disposed on the support beam, said support beam connected to said mount by said third flexible hinge; the first cross beam is connected with the supporting beam through the first connecting beam, the second flexible parallelogram mechanism is connected with the supporting beam through the second connecting beam, and the distance between the second connecting beam and the mounting seat is greater than that between the first connecting beam and the mounting seat.

8. The flexible micro-gripper of claim 7, wherein the second flexible parallelogram mechanism comprises a fourth fixed base, and a second cantilever beam disposed in parallel on the fourth fixed base, wherein two ends of the second cantilever beam are connected to the fourth fixed base and the second gripper arm by a fourth flexible hinge, respectively.

9. The flexible microcapper according to claim 8, wherein an end of the second cantilever beam remote from the fourth fixed base is provided with a connecting block, the connecting block is connected to the second cantilever beam by the fourth flexible hinge, and the connecting block is connected to the second clamping arm by a fifth flexible hinge, the fifth flexible hinge is provided with a strain gauge.

10. The flexible micro-gripper of any one of claims 1-4, wherein the first gripper arm and the second gripper arm together form a jaw, and wherein the parallel opposing sides of the first gripper arm or the second gripper arm are provided with a U-shaped opening.

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