CN215833436U

CN215833436U - Piezoelectric ceramic needle seat and probe station

Info

Publication number: CN215833436U
Application number: CN202121266451.1U
Authority: CN
Inventors: 吴贵阳; 杨应俊
Original assignee: Silicon Electric Semiconductor Equipment Shenzhen Co ltd
Current assignee: Silicon Electric Semiconductor Equipment Shenzhen Co ltd
Priority date: 2021-06-08
Filing date: 2021-06-08
Publication date: 2022-02-15
Anticipated expiration: 2031-06-08

Abstract

The utility model relates to a piezoelectric ceramic type needle base and a probe station. The piezoelectric ceramic needle base is used for performing needle inserting test on the core particles; the piezoelectric ceramic type needle seat comprises a base part and a probe part, wherein the probe part is used for installing a probe for testing core particles, and the probe part is connected to the base part through a piezoelectric ceramic driver; the piezoelectric ceramic driver is connected with an electric signal in a direction perpendicular to the connecting line of the piezoelectric ceramic driver connected with the probe part and the base part respectively; the probe part is controlled to move relative to the base part by controlling the electric signal of the piezoelectric ceramic driver, so that the probe is stopped against/away from the core particles; the probe station is provided with the piezoelectric ceramic type needle seat. The probe has high motion control precision, stable needle mark consistency and accurate and reliable core grain test result.

Description

Piezoelectric ceramic needle seat and probe station

Technical Field

The utility model relates to a piezoelectric ceramic type needle base and a probe station.

Background

In a contact type core particle test occasion, the movement of the probe is controlled to realize that the probe is stopped against/away from the core particle, and when the probe is stopped against the core particle, an electric signal is communicated to realize the detection of the core particle; the conventional probe is controlled by a motor, and the motor control structure has heavy whole structure and low precision; and the acting force of the probe on the core particles is unstable, so that the needle marks on the core particles are inconsistent, and the problem of relatively low accuracy of the final test structure is caused.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problems, the utility model provides a structure for driving a probe to move by using a piezoelectric ceramic driver instead of a conventional motor, namely a piezoelectric ceramic type needle base and a probe station.

The technical scheme of the utility model is as follows: a piezoelectric ceramic needle base is used for carrying out needle insertion test on core particles; the piezoelectric ceramic type needle seat comprises a base part and a probe part, wherein the probe part is used for installing a probe for testing core particles, and the probe part is connected to the base part through a piezoelectric ceramic driver; the piezoelectric ceramic driver is connected with an electric signal in a direction perpendicular to the connecting line of the piezoelectric ceramic driver connected with the probe part and the base part respectively; the probe part is controlled to move relative to the base part by controlling the electric signal of the piezoelectric ceramic driver, so that the probe is stopped against/away from the core particles.

Furthermore, two electrodes of the electrical signal connected with the piezoelectric ceramic driver are respectively located at two corresponding sides of the piezoelectric ceramic driver, so that the piezoelectric ceramic driver can do telescopic motion along a linear direction under the control of the electrical signal.

Furthermore, the electric signal that piezoceramics driver connects corresponds two electrodes, and an electrode is located piezoceramics driver one side, and another electrode is located piezoceramics driver middle part, makes piezoceramics driver be the concertina movement along pitch arc direction under the control of electric signal.

Furthermore, the piezoelectric ceramic driver is respectively connected with the base part and the probe part through conductive silver paste.

Furthermore, the probe part comprises a cantilever part, a needle clamp and a probe, and the cantilever part is connected with the piezoelectric ceramic driver; the probe is fixed on the needle clamp; the needle clip is connected with the cantilever part; the probe is insulated and disconnected from the cantilever part.

Further, the cantilever part is horizontally arranged, and at least one side of the upper side and the lower side of the cantilever part is provided with a strain gauge, and the strain gauge is used for detecting the deformation of the cantilever part.

Furthermore, the cantilever part is provided with a through hole along a direction perpendicular to the extending direction of the cantilever part and perpendicular to the movement direction of the probe.

Further, the probe moves in a vertical direction.

Furthermore, the two piezoelectric ceramic drivers are far away from each other and are opposite in movement direction, so that arc-shaped movement control of the probe part relative to the base part is realized.

A probe station is used for testing core particles and is provided with the piezoelectric ceramic type needle base.

The utility model has the beneficial effects that: the probe has high motion control precision, stable needle mark consistency and accurate and reliable core grain test result.

Drawings

FIG. 1 is a first embodiment of a piezo-ceramic type needle holder according to the present invention;

FIG. 2 is a second embodiment of the piezo-ceramic type needle holder of the present invention;

FIG. 3 shows a third embodiment of the piezo-ceramic type needle holder according to the present invention;

FIG. 4 shows a fourth embodiment of the piezo-ceramic type needle holder according to the present invention;

FIG. 5 shows a fifth embodiment of the piezo-ceramic type needle holder according to the present invention;

FIG. 6 is a schematic view of the probe portion according to the present invention.

Detailed Description

In order to facilitate the understanding of the technical solutions of the present invention by those skilled in the art, the technical solutions of the present invention will be described in further detail with reference to specific examples.

As shown in fig. 1, 2, 3, 4 and 5, a piezoelectric ceramic type needle base 100 is used for needle insertion testing (also called spot testing) of core particles, and the basic principle is to electrically connect the core particles (LED core particles, semiconductor core particles, or other components) through probes 20 so as to test electrical parameters of the core particles or other parameters needing electrical conduction testing; the piezoelectric ceramic type needle stand 100 comprises a base part 30 and a probe part 40, wherein the base part 30 is used for installing and fixing the piezoelectric ceramic type needle stand 100, namely, the position of a core particle to be tested is determined relative to the base part 30, the movement control of the probe 20 relative to the core particle is realized by controlling the movement of the probe 20 relative to the base part 30, and the needle insertion (contact) or the separation of the probe 20 to the core particle is completed; the probe part 40 is used for installing a probe 20 for testing core particles, and the probe 20 is a consumable material, so that the probe 20 can be conveniently replaced; the probe part 40 is connected to the base part 30 through a piezoelectric ceramic driver 50; the piezoelectric ceramic driver 50 is a piezoelectric ceramic unit, a piezoelectric ceramic unit combination, a driver using piezoelectric ceramic as a driving source and the like which realize the motion control in the piezoelectric ceramic deformation direction by electrically controlling the piezoelectric ceramic deformation, and the like, and the piezoelectric ceramic driver 50 is connected with an electric signal in a connecting line direction a which is perpendicular to the piezoelectric ceramic driver 50 and is respectively connected with the probe part 40 and the base part 30, and the displacement motion caused by the piezoelectric ceramic driver 50 through the current control drives the probe part 40 to move relative to the base part 30, so as to realize the motion control of the probe 20 relative to the core particles; the movement of the probe part 40 relative to the base part 30 is controlled by the electrical signal control of the piezoceramic driver 50, so that the probe 20 is stopped against/away from the core particle.

By adopting the technical scheme, the precision of the motion control of the piezoelectric ceramic driver 50 is higher than that of the probe part 40 driven by a conventional motor, so that the probe 20 can be precisely controlled relative to the core grains, the consistency of the needle marks after the core grain pricking test is kept, and the appearance quality after the batch core grain pricking test is improved.

As shown in fig. 1, fig. 2, fig. 3, fig. 4 and fig. 5, two electrodes of an electrical signal connected to the piezoelectric ceramic driver 50 are respectively located at two corresponding sides of the piezoelectric ceramic driver 50, so that the piezoelectric ceramic driver 50 makes a telescopic motion along a linear direction under the control of the electrical signal; thereby realizing the motion control of the probe part 40; by adopting the technical scheme, the linear motion of the piezoelectric ceramic driver 50 is directly controlled by the electric signal, the piezoelectric ceramic driver 50 with a simple structure can be selected, and the structure is simple.

As shown in fig. 1, 2, 3, 4 and 5, the electrical signal connected to the piezoceramic driver 50 corresponds to two electrodes, one electrode is located at one side of the piezoceramic driver 50, and the other electrode is located at the middle of the piezoceramic driver 50, where "middle" is not limited to the middle position of the piezoceramic driver 50, but is not limited to the non-lateral position of the piezoceramic driver 50; the piezoelectric ceramic driver 50 makes telescopic motion along the arc direction under the control of the electric signal; that is, a part of the piezoelectric ceramic driver 50 is deformed under the control of an electric signal, and a part adjacent to the deformed part is fixed for receiving the electric signal, thereby realizing the deformation control of the bending of the piezoelectric ceramic driver 50.

With the above technical solution, the bending deformation of the piezoelectric ceramic driver 50 is used to realize the arc-shaped movement of the probe part 40 relative to the base part 30 to abut against/separate from the core particle.

As shown in fig. 1, 2, 3, 4 and 5, the piezoelectric ceramic driver 50 is connected to the base 30 and the probe 40 respectively through conductive silver paste, where the conductive silver paste is used as an adhesive for connection, which can reduce the weight of the piezoelectric ceramic type mounting 100 compared to a connection method that adds other components (such as screws); compared with a non-material-added (such as ultrasonic welding) connecting mode, the connecting method is convenient to operate, simple and reliable.

As shown in fig. 1, 2, 3, 4, 5 and 6, the probe portion 40 includes a cantilever portion 41, a probe clip 42 and a probe 20, and the cantilever portion 41 is connected to a piezoceramic driver 50; the probe 20 is fixed to the needle holder 42, where the needle holder 42 is not used to limit the probe 20 to be fixed to the needle holder 42 in a clamping manner, but is only used to illustrate that the connection between the probe 20 and the needle holder 42 is a detachable connection, such as a clamping type; other structures for fixing the probe 20 should belong to the same or equivalent technical solution of the needle clamp 42; the needle clip 42 is connected with the cantilever part 41; the probe 42 is insulated and disconnected from the cantilever part 41, that is, the probe 42 must be of a structure with a conductive tip, but an electrical signal of the tip cannot be conducted to the cantilever part; this structure now includes: the contact part of the probe 42 and the needle clamp 42 is made of insulating materials, the probe 42 is in insulating connection with the needle clamp 42, the contact part of the needle clamp 42 and the cantilever part 41 is made of insulating materials, the needle clamp 42 is in insulating connection with the cantilever part 41, and the cantilever part 41 is made of insulating materials; the technical scheme is adopted to reduce the influence of the deformation of the cantilever part 41 on the electrical parameters of the probe 20.

As shown in fig. 1, 2, 3, 4, 5 and 6, the cantilever portion 41 is horizontally disposed, and at least one side of the upper side and the lower side of the cantilever portion 41 is provided with a strain gauge 411, the strain gauge 411 is adhered to the surface of the cantilever portion 41 by glue, and the inner part of the strain gauge is a resistance wire structure. The metal wire changes due to the tiny deformation of the surface of the object, and the resistance of the resistance wire is measured along with the linear change, so that the tiny displacement of the surface of the object is measured. The stress of the cantilever part 41 in the piezoelectric ceramic needle seat 100 and the micro displacement of the surface of an object satisfy a certain linear relationship, and the applied force can cause the resistance change of the strain gauge 411, thereby indirectly measuring the stress condition; the cantilever part 41 is acted by the piezoelectric ceramic driver 50, the probe 20 is acted by the core particles to generate acting force on the cantilever part 41, the cantilever part 41 generates deformation, and the strain gauge 411 is used for detecting the deformation of the cantilever part 41 so as to detect the acting force of the core particles on the probe 20; the control of the probe 20 on the action force of the core particles is realized by controlling the action force of the piezoelectric ceramic driver 50, so that the probe 20 can act on the core particles to generate consistent needle marks and make full contact, and the electrical parameter accuracy of the core particle test and the appearance consistency of the core particles after the test are improved.

As shown in fig. 1, 2, 3, 4, 5 and 6, the cantilever portion 41 is provided with a through hole 412 along a direction perpendicular to the extending direction of the cantilever portion 41 and perpendicular to the moving direction of the probe 20; the through hole 412 can reduce the weight of the cantilever portion 41, increase the elastic modulus of the cantilever portion 41, and increase the deformation of the cantilever portion 41 by the through hole 412 under the premise that the stress of the cantilever portion 41 is constant, so that the strain gauge 411 can be tested more accurately and reliably.

As shown in fig. 5, the probe 20 moves in the vertical direction, that is, the piezoceramic driver 50 can extend and contract in the vertical linear direction, and the probe 20 is also configured to move in the vertical direction, so that the amount of movement of the piezoceramic driver 50 in the vertical direction is consistent with the amount of movement of the probe 20, and the movement control is more accurate and reliable.

As shown in fig. 1, there are two piezoelectric ceramic drivers 50, and the two piezoelectric ceramic drivers 50 are disposed away from each other and have opposite movement directions, so as to control the arc-shaped movement of the probe portion 40 relative to the base portion 30; the arcuate movement of the probe portion 40 relative to the base portion 30 is controlled by two piezo ceramic actuators 50 moving in opposite directions; simple and reliable, and high accuracy.

As shown in fig. 1, a connecting elastic sheet 60 is arranged between the base part 30 and the probe part 40; the connecting elastic sheet 60 can adapt to deformation along with the deformation of the piezoelectric ceramic driver 50, and when the piezoelectric ceramic driver 50 performs telescopic motion in a linear direction, the connecting elastic sheet 60 can realize telescopic motion; when the probe part 40 is bent, the connecting elastic sheet 60 can also realize the bending movement; of course, the connecting elastic sheet 60 only needs to be able to realize the function that can be used in cooperation with the corresponding piezoelectric ceramic driver 50, and is not limited to the connecting elastic sheet 60 that needs to be able to realize all possible functions of the piezoelectric ceramic driver 50; thereby enhancing the stability of the movement of the probe portion 40. Of course, in other embodiments of the present invention, the stability of the movement of the probe unit 40 can be enhanced by providing the connection spring 60.

As shown in fig. 1, 2, 3, 4, 5 and 6, a probe station for testing core particles is provided with the above piezoelectric ceramic type needle holder 100, that is, the above piezoelectric ceramic type needle holder 100 is used in the field of probe station.

The above are preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. It should be recognized that non-inventive variations and modifications to the disclosed embodiments of the utility model that may occur to those skilled in the art upon a reading of the foregoing teachings are also within the scope of the utility model as claimed and disclosed.

Claims

1. A piezoelectric ceramic needle base is used for carrying out needle insertion test on core particles; piezoelectric ceramic formula needle file includes basal portion and probe portion, probe portion is used for the installation to the core grain probe of testing, its characterized in that: the probe part is connected to the base part through a piezoelectric ceramic driver; the piezoelectric ceramic driver is connected with an electric signal in a direction perpendicular to the connecting line of the piezoelectric ceramic driver connected with the probe part and the base part respectively; the probe part is controlled to move relative to the base part by controlling the electric signal of the piezoelectric ceramic driver, so that the probe is stopped against/away from the core particles.

2. The piezoceramic wafer of claim 1, wherein: two electrodes of the electric signal connected with the piezoelectric ceramic driver are respectively positioned at two corresponding sides of the piezoelectric ceramic driver, so that the piezoelectric ceramic driver does telescopic motion along the linear direction under the control of the electric signal.

3. The piezoceramic wafer of claim 1, wherein: the electric signal that piezoceramics driver connects corresponds two electrodes, and one electrode is located piezoceramics driver one side, and another electrode is located piezoceramics driver middle part, makes piezoceramics driver do concertina movement along pitch arc direction under the control of electric signal.

4. The piezoceramic wafer of claim 1, wherein: the piezoelectric ceramic driver is respectively connected with the base part and the probe part through conductive silver paste.

5. The piezoceramic wafer of claim 1, wherein: the probe part comprises a cantilever part, a needle clamp and a probe, and the cantilever part is connected with the piezoelectric ceramic driver; the probe is fixed on the needle clamp; the needle clip is connected with the cantilever part; the probe is insulated and disconnected from the cantilever part.

6. The piezoceramic wafer of claim 5, wherein: the cantilever part is horizontally arranged, and at least one side of the upper side and the lower side of the cantilever part is provided with a strain gauge which is used for detecting the deformation of the cantilever part.

7. The piezoceramic wafer of claim 6, wherein: the cantilever part is provided with a through hole along the direction vertical to the extension direction of the cantilever part and the motion direction of the probe.

8. The piezoceramic wafer of claim 7, wherein: the probe moves in a vertical direction.

9. The piezoceramic wafer of claim 1, wherein: the two piezoelectric ceramic drivers are far away from each other and opposite in movement direction, so that arc-shaped movement control of the probe part relative to the base part is realized.

10. A piezo-ceramic needle mount according to any one of claims 1 to 9, wherein: and a connecting elastic sheet is arranged between the base part and the probe part.

11. A probe station for testing a core pellet, comprising: the probe station is provided with a piezoceramic wafer stand according to any one of claims 1 to 10.