CN215745211U - Substrate cleaning device and substrate cleaning equipment - Google Patents

Abstract

The utility model relates to the technical field of liquid crystal display, and discloses a substrate cleaning device and substrate cleaning equipment. The base plate cleaning device includes the blowing pipe subassembly, the air supply subassembly, first breathing pipe group, second breathing pipe group and breathing pipe subassembly, the export of blowing pipe subassembly is towards the base plate and is including the first blowing pipe group that the exit end extends along first incline direction and the second blowing pipe group that the exit end extends towards second incline direction, along the direction that is close to the base plate, the exit end of first blowing pipe group is close to the exit end of second blowing pipe group, the air supply subassembly can blow in the air that carries ultrasonic energy to the blowing pipe subassembly, the entry end of first breathing pipe group and the entry end of second breathing pipe group set up respectively in the both sides of blowing pipe subassembly, and the entry all is towards the base plate, the breathing pipe subassembly can provide the negative pressure for first breathing pipe group and second breathing pipe group. The substrate cleaning device and the substrate cleaning equipment can remove dust and heavy foreign matters on the surface of the substrate, and have good cleaning effect on the substrate.

Description

Substrate cleaning device and substrate cleaning equipment

Technical Field

The utility model relates to the technical field of liquid crystal display, in particular to a substrate cleaning device and substrate cleaning equipment.

Background

The forming process of the liquid crystal display panel generally includes: front array process, middle box forming process and back module assembling process. The middle-stage box forming process includes the attachment of a Thin Film Transistor (TFT) substrate and a Color Filter (CF) substrate, and plays a very critical role in cleaning the substrates before the TFT substrate and the CF substrate are attached.

Dry cleaning is an important way of cleaning a substrate, and in the prior art, dry cleaning generally comprises an air blowing mechanism and an air suction mechanism, wherein the air blowing mechanism blows air with ultrasonic energy to the substrate in a direction perpendicular to the surface of the substrate, so that ultrasonic energy is conducted to dust on the surface of the glass substrate, the dust is accelerated in movement, and the dust is separated from the glass substrate under the action of high-speed flowing air, so that the air suction mechanism sucks the dust away. However, in this method, it is difficult to blow glass debris or a foreign substance having a large weight off the surface of the substrate, and the cleaning effect of the substrate is not satisfactory.

Therefore, a substrate cleaning apparatus and a substrate cleaning apparatus are needed to solve the above problems.

SUMMERY OF THE UTILITY MODEL

A first object of the present invention is to provide a substrate cleaning apparatus capable of removing dust and heavy foreign matter on a surface of a substrate and having a good cleaning effect on the substrate.

A second object of the present invention is to provide a substrate cleaning apparatus, which can clean the surface of the substrate well by providing the substrate cleaning device.

In order to achieve the purpose, the utility model adopts the following technical scheme:

a substrate cleaning apparatus, comprising:

the outlet of the blowing pipe assembly faces the substrate, the blowing pipe assembly comprises a first blowing pipe assembly and a second blowing pipe assembly, the outlet end of the first blowing pipe assembly extends along a first inclined direction, the outlet end of the second blowing pipe assembly extends along a second inclined direction, and the outlet end of the first blowing pipe assembly is close to the outlet end of the second blowing pipe assembly along the direction close to the substrate;

the air source assembly can blow air carrying ultrasonic energy into the air blowing pipe assembly;

the inlet ends of the first air suction pipe group and the second air suction pipe group are respectively arranged at two sides of the air blowing pipe assembly, and the inlet ends of the first air suction pipe group and the second air suction pipe group face the substrate; and

and the suction assembly can provide negative pressure for the first suction pipe group and the second suction pipe group.

Optionally, a fan is arranged at the outlet end of the first blowing pipe group, so that the first blowing pipe group can blow out vortex airflow; and/or

And a fan is arranged at the outlet end of the second air blowing pipe group, so that the second air blowing pipe group can blow out vortex air flow.

Optionally, an included angle between the first inclined direction and the substrate is α, an included angle between the second inclined direction and the substrate is β, and α ═ β.

Optionally, the air source assembly includes a fan, a first air guide pipe and an ultrasonic transducer, one end of the first air guide pipe is communicated with an outlet of the fan, the other end of the first air guide pipe is communicated with an inlet end of the air blowing pipe assembly, and the ultrasonic transducer is arranged in the first air guide pipe and can enable air in the first air guide pipe to carry ultrasonic energy.

Optionally, the air source assembly further comprises a booster pump, and the first air guide pipe is communicated with the inlet end of the air blowing pipe assembly after passing through the booster pump.

Optionally, the inlet end of the first suction pipe group is obliquely arranged and is opposite to the substrate; and/or

The inlet end of the second suction pipe group is obliquely arranged and is opposite to the substrate.

Optionally, the first blowing pipe group comprises a plurality of first blowing pipes, an outlet end of each first blowing pipe is a first outlet end, and the plurality of first outlet ends are arranged in parallel along a first direction at intervals;

the second blowing pipe group comprises a plurality of second blowing pipes, the outlet ends of the second blowing pipes are second outlet ends, the second outlet ends are arranged in parallel at intervals along the first direction, and each second outlet end is opposite to one first outlet end.

Optionally, the first air suction pipe group comprises a plurality of first air suction pipes with inlet ends arranged in parallel, and the inlet end of each first air suction pipe is correspondingly arranged on one side of one first outlet end;

the second air suction pipe group comprises a plurality of second air suction pipes, and the inlet end of each second air suction pipe is correspondingly arranged on one side of one second outlet end.

Optionally, the first blowing pipe group comprises a plurality of first blowing pipes, an outlet end of each first blowing pipe is a first outlet end, and the plurality of first outlet ends are arranged in at least two rows extending along the first direction;

the second blowing pipe group comprises a plurality of second blowing pipes, the outlet ends of the second blowing pipes are second outlet ends, and the second outlet ends are arranged into at least two rows extending along the first direction.

A substrate cleaning apparatus includes a stage capable of carrying the substrate and the substrate cleaning device.

The utility model has the beneficial effects that:

according to the substrate cleaning device, under the operation of the air source assembly, the first air blowing pipe group and the second air blowing pipe group respectively blow air carrying ultrasonic energy to the surface of the substrate along the first inclined direction and the second inclined direction, so that not only can dust leave the surface of the substrate under the action of the ultrasonic energy, but also horizontal blowing force is generated on glass debris and other heavy foreign matters in the inclined air blowing direction, and the heavy foreign matters can also leave the surface of the substrate; the air along the first inclined direction and the second inclined direction blows the dust and the foreign matters leaving the substrate to the two sides of the blowing pipe assembly, and the inlet of the first suction pipe group and the inlet of the second suction pipe group are respectively arranged on the two sides of the blowing pipe assembly, so that the dust and the foreign matters leaving the surface of the substrate can be well sucked away. The substrate cleaning device can remove dust and heavy foreign matters on the surface of the substrate, and has good cleaning effect on the substrate.

The substrate cleaning device can clean the surface of the substrate well by arranging the substrate cleaning device.

Drawings

Fig. 1 is a front view of a substrate cleaning apparatus according to a first embodiment of the present invention;

FIG. 2 is a sectional view A-A of FIG. 1;

fig. 3 is a front view of a substrate cleaning apparatus according to a second embodiment of the present invention;

fig. 4 is a sectional view B-B in fig. 3.

In the figure:

100-a substrate;

1-an air blowing tube assembly; 11-a first set of insufflation tubes; 111-a first air blowing pipe; 112-a first outlet end; 12-a second set of insufflation tubes; 121-a second gas blowing pipe; 122-a second outlet end;

2-a gas source assembly; 21-a fan; 22-a first air duct; 23-a booster pump;

31-a first group of suction tubes; 311-a first inspiratory tube; 32-a second suction tube group; 321-a second suction pipe;

4-a getter assembly; 41-a vacuum pump; 42-a second air duct;

5-a fan.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting of the utility model. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.

Example one

The present embodiment provides a substrate cleaning device and a substrate cleaning apparatus, which can be used for cleaning a TFT substrate, a CF substrate, or other glass plate, and the like. The substrate cleaning apparatus includes a substrate cleaning device and a stage, the substrate 100 is supported on the stage, the substrate cleaning device can clean the substrate 100 on the stage, and in the present embodiment, the stage is horizontally disposed, and the substrate 100 is also horizontally fixed on the stage.

Fig. 1 is a front view of a substrate cleaning apparatus according to the present embodiment, and fig. 2 is a sectional view taken along line a-a of fig. 1. As shown in fig. 1 and 2, the substrate cleaning apparatus includes an air blowing tube assembly 1, an air supply assembly 2, a first air suction tube assembly 31, a second air suction tube assembly 32 and an air suction assembly 4, wherein an outlet of the air blowing tube assembly 1, an inlet of the first air suction tube assembly 31 and an inlet of the second air suction tube assembly 32 are all directed toward a substrate 100, the air blowing tube assembly 1 includes a first air blowing tube assembly 11 having an outlet end extending in a first oblique direction and a second air blowing tube assembly 12 having an outlet end extending in a second oblique direction, an outlet end of the first air blowing tube assembly 11 is adjacent to an outlet end of the second air suction tube assembly 12 in a direction close to the substrate 100, the air supply assembly 2 can blow air carrying ultrasonic energy into the air blowing tube assembly 1, the air passes through the first air blowing tube assembly 11 and the second air blowing tube assembly 12 and is blown toward the surface of the substrate 100 in an upside-down "eight" shape air flow direction, an inlet end of the first air suction tube assembly 31 and an inlet end of the second air suction tube assembly 32 are respectively disposed at both sides of the air blowing tube assembly 1, the suction assembly 4 is capable of providing negative pressure to the first and second suction tube sets 31 and 32.

In the substrate cleaning apparatus of the present embodiment, under the operation of the air source assembly 2, the first blowing tube set 11 and the second blowing tube set 12 blow air which is along the first inclined direction and the second inclined direction and carries ultrasonic energy to the surface of the substrate 100, so that not only dust can leave the surface of the substrate 100 under the action of the ultrasonic energy, but also horizontal blowing force is generated to the heavy foreign matters such as glass debris and the like in the inclined blowing direction of the air, and the heavy foreign matters can also leave the surface of the substrate 100; the air in the first and second inclined directions blows the dust and foreign matters leaving the substrate 100 to both sides of the blowing pipe assembly 1, and the inlet of the first suction pipe group 31 and the inlet of the second suction pipe group 32 are respectively provided to both sides of the blowing pipe assembly 1, so that the dust and foreign matters leaving the surface of the substrate 100 can be well sucked. The substrate cleaning apparatus of the present embodiment can remove dust and heavy foreign matter on the surface of the substrate 100, and has a good cleaning effect on the substrate 100. The substrate cleaning apparatus can clean the surface of the substrate 100 well by providing the substrate cleaning device.

Specifically, in the present embodiment, as shown in fig. 2, the first air suction tube group 31 is disposed on a side of the first air blowing tube group 11 facing away from the second air blowing tube group 12, and the second air suction tube group 32 is disposed on a side of the second air blowing tube group 12 facing away from the first air blowing tube group 11. In other embodiments, the second suction tube set 32 may be disposed on a side of the first blowing tube set 11 facing away from the second blowing tube set 12, and the first suction tube set 31 may be disposed on a side of the second blowing tube set 12 facing away from the first blowing tube set 11, and the effects of the two arrangements are the same.

Preferably, as shown in fig. 1, the first inclined direction has an angle α with the substrate 100, and the second inclined direction has an angle β with the substrate 100, where α is β, so as to facilitate the dust and foreign matters to be blown to move uniformly to both sides of the blow pipe assembly 1. In this embodiment, α ═ β ═ 45 °, in other embodiments, the actual angles of α and β may be set reasonably by combining factors such as the distance between the outlet of the blowpipe assembly 1 and the base plate 100, and the like, and are not limited herein.

Preferably, as shown in fig. 1 and 2, the first blowing pipe group 11 includes a plurality of first blowing pipes 111, an outlet end of the first blowing pipe 111 is a first outlet end 112, the plurality of first outlet ends 112 are spaced along a first direction, i.e., an X direction in fig. 2, the second blowing pipe group 12 includes a plurality of second blowing pipes 121, an outlet end of the second blowing pipes 121 is a second outlet end 122, the plurality of second outlet ends 122 are spaced along the first direction, and each second outlet end 122 is opposite to one first outlet end 112. Therefore, dust and impurities on each part of the substrate 100 along the X direction can be blown away from the substrate 100, and the substrate is ensured to be cleaned completely and completely.

Further, as shown in fig. 1 and 2, the first suction pipe group 31 includes a plurality of first suction pipes 311 having inlet ends arranged in parallel, the inlet end of each first suction pipe 311 is correspondingly disposed at one side of one first outlet end 112, and the second suction pipe group 32 includes a plurality of second suction pipes 321, the inlet end of each second suction pipe 321 is correspondingly disposed at one side of one second outlet end 122. Thereby ensuring that the dust and foreign substances blown up by the plurality of first blowing pipes 111 and the plurality of second blowing pipes 121 can be more sufficiently sucked by the first suction pipe group 31 and the second suction pipe group 32 to maintain a cleaner environment around the substrate cleaning apparatus.

Specifically, in this embodiment, the first blowing pipe 111, the second blowing pipe 121, the first suction pipe 311, and the second suction pipe 321 are all round pipes, and in other embodiments, the blowing pipe and the suction pipe may be square pipes or pipes with other cross sections, which is not limited herein. Further, as shown in fig. 1, for the first air blowing pipe 111, as long as the first outlet end 112 is ensured to extend along the first inclined direction, the first air blowing pipe 111 can blow the air flow along the first inclined direction, and the extending direction of the inlet end of the first air blowing pipe 111 can be flexibly set; similarly, the second blowpipe 121 may be provided with a flexible extension direction of the inlet end of the second blowpipe 121 as long as the extension direction of the second outlet end 122 is ensured in the second oblique direction.

Preferably, as shown in fig. 1, a fan 5 is disposed at the outlet end of the first blowing pipe group 11 to enable the first blowing pipe group 11 to blow out a vortex air flow, and a fan 5 is disposed at the outlet end of the second blowing pipe group 12 to enable the second blowing pipe group 12 to blow out a vortex air flow, so that the air blown by the blowing pipes toward the substrate 100 is more dispersed and uniform to improve the cleaning effect of the substrate 100. In this embodiment, the fans 5 are respectively disposed inside the first outlet end 112 and the second outlet end 122, but in other embodiments, the fans 5 may also be disposed at the outlet of the first blowing pipe 111 and the outlet of the second blowing pipe 121, which is not limited herein.

Preferably, as shown in fig. 1, the air source assembly 2 includes a blower 21, a first air guiding pipe 22 and an ultrasonic transducer, one end of the first air guiding pipe 22 is communicated with an outlet of the blower 21, the other end is communicated with an inlet end of the air blowing pipe assembly 1, and the ultrasonic transducer is disposed in the first air guiding pipe 22, so that ultrasonic energy can be carried by air in the first air guiding pipe 22. In this embodiment, the first air blowing pipe group 11 and the second air blowing pipe group 12 are connected to the first air guiding pipe 22 after being communicated, that is, air carrying ultrasonic energy can be provided for the two air blowing pipe groups through one set of blower 21 and the ultrasonic transducer. In other embodiments, the following may also be: the air source assembly 2 comprises two fans 21, each fan 21 is correspondingly provided with a first air guide pipe 22 and an ultrasonic transducer, the first air blowing pipe group 11 and the second air blowing pipe group 12 are respectively and correspondingly communicated with the two fans 21, namely the two fans 21 respectively supply air for the two air blowing pipe groups independently.

Preferably, as shown in fig. 1, the gas source assembly 2 further comprises a booster pump 23, and the first air guiding pipe 22 is communicated with the inlet end of the blowpipe assembly 1 after passing through the booster pump 23. The booster pump 23 can increase the air pressure in the first air guiding pipe 22, and can also control the booster pump 23 to continuously and alternately boost and release pressure, so that the air blown out from the air blowing pipe group is ultrasonic pulse air flow, the oscillation effect of the air flow blown to the substrate is enhanced, the dust and heavier foreign matters on the substrate 100 are easier to leave the substrate 100, and the cleaning effect is improved.

Preferably, as shown in fig. 1, the air suction assembly 4 includes a vacuum pump 41 and a second air guide duct 42, one end of the second air guide duct 42 is communicated with the vacuum pump 41, and the other end is communicated with the outlet ends of the first air suction duct group 31 and the second air suction duct group 32. When the vacuum pump 41 is operated, the second air guide duct 42 causes a negative pressure to be formed at the inlet of the first suction pipe group 31 and the inlet of the second suction pipe group 32, thereby sucking dust and heavy impurities separated from the surface of the substrate 100 into the first suction pipe group 31 and the second suction pipe group 32. Specifically, in the present embodiment, each of the plurality of first intake pipes 311 of the first intake pipe group 31 and the plurality of second intake pipes 321 of the second intake pipe group 32 communicates with the second air guide pipe 42. Further, the first suction pipe 311 and the second suction pipe 321 are both circular pipes, and in other embodiments, the cross-sectional shapes of the first suction pipe 311 and the second suction pipe 321 are not particularly limited.

Preferably, as shown in fig. 1, the inlet end of the first suction pipe group 31 is obliquely disposed to face the substrate 100, and the inlet end of the second suction pipe group 32 is obliquely disposed to face the substrate 100. Under the condition that the pipe diameters of the first suction pipe 311 and the second suction pipe 321 are constant, the opening areas of the first suction pipe 311 and the second suction pipe 321 facing the substrate 100 are made larger, so that dust and impurities can be sucked more conveniently, and the cleaning effect of the substrate cleaning device is improved. In other embodiments, the first suction pipe 311 and the second suction pipe 321 may also be disposed perpendicular to the substrate 100, and are not limited herein.

Example two

The present embodiment provides a substrate cleaning apparatus and a substrate cleaning device, the inventive concept and general structure of which are the same as those of the first embodiment, and the differences are the specific structures of the first blowing tube group 11 and the second blowing tube group 12, and the same points in the present embodiment as those of the first embodiment are not described herein again, and the differences are:

fig. 3 is a front view of the substrate cleaning apparatus of the present embodiment, fig. 4 is a cross-sectional view taken along line B-B in fig. 3, and as shown in fig. 3 and fig. 4, the first blowing tube group 11 includes a plurality of first blowing tubes 111, an outlet end of the first blowing tubes 111 is a first outlet end 112, the plurality of first outlet ends 112 are arranged in two rows extending along the first direction, the second blowing tube group 12 includes a plurality of second blowing tubes 121, an outlet end of the second blowing tubes 121 is a second outlet end 122, and the plurality of second outlet ends 122 are arranged in two rows extending along the first direction. By increasing the number of rows of the first air blowing pipes 111 and the second air blowing pipes 121, dust and impurities on each part of the substrate 100 in the direction perpendicular to the X direction can be blown away from the substrate 100, so that the substrate is cleaner and more thorough.

Specifically, as shown in fig. 4, for the first inflation tube group 11, the first outlet ends 112 of each row are the same in number and are arranged opposite to each other one by one, and the inlet ends of the plurality of first suction tubes 311 of the first suction tube group 31 correspond to the first outlet ends 112 of any row one by one; similarly, for the second suction tube group 32, the number of the second outlet ends 122 in each row is the same, and the inlet ends of the second suction tubes 321 in the second suction tube group 32 are in one-to-one correspondence with the second outlet ends 122 in any row. In other embodiments, the number of columns included in the first inflation tube set 11 and the number of columns included in the second inflation tube set 12 are not particularly limited.

It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the utility model and are not to be construed as limitations of the embodiments of the present invention, but may be modified in various embodiments and applications by those skilled in the art according to the spirit of the present invention, and the content of the present description should not be construed as a limitation of the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (10)

1. A substrate cleaning apparatus, comprising:

the outlet of the air blowing pipe assembly (1) faces the substrate (100), the air blowing pipe assembly (1) comprises a first air blowing pipe assembly (11) with the outlet end extending along a first inclined direction and a second air blowing pipe assembly (12) with the outlet end extending along a second inclined direction, and the outlet end of the first air blowing pipe assembly (11) is close to the outlet end of the second air blowing pipe assembly (12) along the direction close to the substrate (100);

a gas source assembly (2) capable of blowing air carrying ultrasonic energy into the insufflation tube assembly (1);

a first suction pipe group (31) and a second suction pipe group (32), the inlet ends of which are respectively arranged at two sides of the air blowing pipe assembly (1), and the inlet ends are towards the substrate (100); and

a suction assembly (4) capable of providing a negative pressure to the first suction tube group (31) and the second suction tube group (32).

2. A substrate cleaning apparatus according to claim 1, wherein a fan (5) is provided at an outlet end of the first blowing tube group (11) to enable the first blowing tube group (11) to blow a whirling airflow; and/or

And a fan (5) is arranged at the outlet end of the second air blowing pipe group (12) so that the second air blowing pipe group (12) can blow vortex air flow.

3. The substrate cleaning apparatus according to claim 1, wherein the first inclined direction makes an angle α with the substrate (100), and the second inclined direction makes an angle β with the substrate (100), α ═ β.

4. The substrate cleaning apparatus according to claim 1, wherein the air source assembly (2) comprises a blower (21), a first air guiding pipe (22) and an ultrasonic transducer, one end of the first air guiding pipe (22) is communicated with an outlet of the blower (21), the other end of the first air guiding pipe is communicated with an inlet end of the air blowing pipe assembly (1), and the ultrasonic transducer is arranged in the first air guiding pipe (22) and can enable air in the first air guiding pipe (22) to carry ultrasonic energy.

5. The substrate cleaning apparatus according to claim 4, wherein the gas source assembly (2) further comprises a booster pump (23), and the first air guiding pipe (22) is communicated with the inlet end of the air blowing pipe assembly (1) after passing through the booster pump (23).

6. The substrate cleaning apparatus according to claim 1, wherein the inlet end of the first suction pipe group (31) is disposed obliquely and opposite to the substrate (100); and/or

The inlet end of the second suction pipe group (32) is obliquely arranged and is opposite to the substrate (100).

7. The substrate cleaning apparatus according to any one of claims 1 to 6, wherein the first blowing pipe group (11) includes a plurality of first blowing pipes (111), an outlet end of the first blowing pipes (111) is a first outlet end (112), and the plurality of first outlet ends (112) are arranged in parallel at intervals in a first direction;

the second blowing pipe group (12) comprises a plurality of second blowing pipes (121), the outlet ends of the second blowing pipes (121) are second outlet ends (122), the second outlet ends (122) are arranged in parallel at intervals along a first direction, and each second outlet end (122) is opposite to one first outlet end (112).

8. A substrate cleaning apparatus according to claim 7, wherein the first suction pipe group (31) comprises a plurality of first suction pipes (311) having inlet ends arranged in parallel, and the inlet end of each of the first suction pipes (311) is arranged at one side of one of the first outlet ends (112);

the second suction pipe group (32) comprises a plurality of second suction pipes (321), and the inlet end of each second suction pipe (321) is correspondingly arranged on one side of one second outlet end (122).

9. The substrate cleaning apparatus according to any one of claims 1 to 6, wherein the first blowing pipe group (11) includes a plurality of first blowing pipes (111), the outlet ends of the first blowing pipes (111) are first outlet ends (112), and the plurality of first outlet ends (112) are arranged in at least two rows extending in the first direction;

the second air blowing pipe group (12) comprises a plurality of second air blowing pipes (121), the outlet ends of the second air blowing pipes (121) are second outlet ends (122), and the second outlet ends (122) are arranged into at least two rows extending along the first direction.

10. A substrate cleaning apparatus, characterized by comprising a stage capable of carrying the substrate (100) and the substrate cleaning device of any one of claims 1 to 9.

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