CN215708233U - Mask raw material constant temperature device - Google Patents
Mask raw material constant temperature device Download PDFInfo
- Publication number
- CN215708233U CN215708233U CN202121906718.9U CN202121906718U CN215708233U CN 215708233 U CN215708233 U CN 215708233U CN 202121906718 U CN202121906718 U CN 202121906718U CN 215708233 U CN215708233 U CN 215708233U
- Authority
- CN
- China
- Prior art keywords
- vertical support
- support plate
- plate
- slider
- along
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a mask plate raw material constant temperature device, which comprises: the device comprises a bottom plate, a first vertical supporting plate, a second vertical supporting plate, a top plate, a first sliding block and a second sliding block. According to the scheme provided by the application, when the glass substrate needs to be placed on the first sliding blocks and the second sliding blocks, as the distance between every two adjacent first sliding blocks is adjustable, the distance between every two adjacent second sliding blocks is adjustable, and the position of each second sliding block corresponds to the position of each first sliding block, at the moment, after the distance between every two adjacent first sliding blocks is adjusted and the distance between every two adjacent second sliding blocks is adjusted, the glass substrates with different specifications can be conveniently stored; and because the first corner of each first slider on one side of the second vertical supporting plate is of a rounded corner structure, and the second corner of each second slider on one side of the first vertical supporting plate is of a rounded corner structure, when a glass substrate is placed between the first slider and the second slider, the glass substrate can be prevented from being scratched.
Description
Technical Field
The utility model relates to the technical field of equipment for masks, in particular to a constant temperature device for mask raw materials.
Background
The photolithographic Mask (also called Mask, Photomask, or reticle, english name Mask or Photomask, hereinafter collectively referred to as "Mask") is a precision coated glass substrate containing electronic circuit microscopic images, is a core component in the manufacturing process of electronic products in the information technology industry, and is used for transferring circuit patterns of designers to glass substrates or semiconductor wafers used by downstream products in a photolithographic way, and then performing subsequent processes until the finished products are obtained after packaging and testing are qualified. The mask is the standard and the blueprint of the photoetching copied graph, and any defect on the mask can greatly influence the precision of the final graph and directly influence the high-quality product rate of the final product.
The mask plate raw material is an unprocessed glass substrate, and in order to ensure that the temperature of the glass substrate is consistent with that of a cavity of a photoetching machine, the glass substrate is generally stored on a constant temperature device before exposure, the conventional constant temperature device is shown in fig. 5, the glass substrate 110 is in surface contact with a bump 100 on the inner part of the constant temperature device, the glass substrate is easily scratched, and the vertical distance between the bump and the bump is not adjustable, so that the glass substrates with different specifications are inconvenient to store.
SUMMERY OF THE UTILITY MODEL
Therefore, it is necessary to provide a mask blank raw material thermostat device, which solves the problems that the glass substrate is easily scratched when the glass substrate is stored in the conventional thermostat device, and the glass substrates with different specifications are inconvenient to store.
The utility model provides a mask plate raw material constant temperature device, which comprises: the device comprises a bottom plate, a first vertical supporting plate, a second vertical supporting plate, a top plate, a first sliding block and a second sliding block;
the bottom plate and the top plate are arranged in parallel at intervals, the first vertical supporting plate and the second vertical supporting plate are arranged in parallel at intervals, and the first vertical supporting plate and the second vertical supporting plate are positioned between the bottom plate and the top plate;
a plurality of first sliding blocks are arranged on one side, facing the second vertical supporting plate, of the first vertical supporting plate along the height direction, the distance between every two adjacent first sliding blocks is adjustable, each first sliding block extends along the height direction perpendicular to the first vertical supporting plate, a first corner, facing one side of the second vertical supporting plate, of each first sliding block is of a fillet structure, and the length, facing one side of the second vertical supporting plate, of each first sliding block along the height direction of the first vertical supporting plate is smaller than the length, facing one side of the corresponding first sliding block away from the second vertical supporting plate, of each first sliding block along the height direction of the first vertical supporting plate;
the second vertical supporting plate faces one side of the first vertical supporting plate and is provided with a plurality of second sliding blocks along the height direction, the position of each second sliding block corresponds to the position of each first sliding block, the distance between every two adjacent second sliding blocks is adjustable, each second sliding block extends along the height direction perpendicular to the second vertical supporting plate, each second sliding block faces a second corner on one side of the first vertical supporting plate and is of a fillet structure, and the length of each second sliding block facing one side of the first vertical supporting plate along the height direction of the second vertical supporting plate is smaller than the length of the corresponding second sliding block facing one side of the first vertical supporting plate along the height direction of the second vertical supporting plate.
In one embodiment, the clamping device further comprises a screw rod and clamping plates, a groove is formed in one side, facing the second vertical supporting plate, of the first vertical supporting plate, a plurality of clamping plates are arranged in the groove in a direction parallel to the bottom plate, and the screw rod extends into the groove along the height direction of the first vertical supporting plate and then is connected with the clamping plates;
every the clamp plate is provided with a swivel nut respectively along screw rod axial both sides, swivel nut threaded connection is in on the screw rod, first slider corresponds the setting between two adjacent clamp plates.
In one embodiment, the clamping plate is provided with anti-slip threads on two sides along the axial direction of the screw rod.
In one embodiment, the clamping plate is provided with a through hole along the axial direction of the screw rod, and the through hole is in clearance fit with the screw rod.
In one embodiment, the handle is arranged on the side of the top plate facing away from the bottom plate.
In one embodiment, the handle has a center of gravity that is not coincident with the center of gravity of the top plate.
In one embodiment, the handle is provided with anti-skid lines.
In one embodiment, a plurality of air holes are uniformly distributed on the top plate.
In one embodiment, the air conditioner further comprises filter screens, and each air hole is provided with one filter screen.
The beneficial effects of the utility model include:
according to the mask blank raw material constant temperature device, when a glass substrate needs to be placed on the first sliding blocks and the second sliding blocks, the distance between every two adjacent first sliding blocks is adjustable, the distance between every two adjacent second sliding blocks is adjustable, the position of each second sliding block corresponds to the position of each first sliding block, and at the moment, the glass substrates with different specifications can be conveniently stored after the distance between every two adjacent first sliding blocks is adjusted and the distance between every two adjacent second sliding blocks is adjusted;
meanwhile, as the first corner of each first sliding block on one side facing the second vertical supporting plate is of a rounded corner structure, and the second corner of each second sliding block on one side facing the first vertical supporting plate is of a rounded corner structure, when the glass substrate is placed between the first sliding block and the second sliding block, the glass substrate can be prevented from being scratched;
furthermore, the length of one side of each first sliding block, which faces the second vertical supporting plate, along the height direction of the first vertical supporting plate is smaller than the length of one side, which is far away from the second vertical supporting plate, of the corresponding first sliding block along the height direction of the first vertical supporting plate, and the length of one side, which faces the first vertical supporting plate, of each second sliding block along the height direction of the second vertical supporting plate is smaller than the length of one side, which is far away from the first vertical supporting plate, of the corresponding second sliding block along the height direction of the second vertical supporting plate, namely the section of the first sliding block along the height direction of the first vertical supporting plate is trapezoidal, the section of the second sliding block along the height direction of the second vertical supporting plate is also trapezoidal, when the glass substrate is placed on the first sliding block and the second sliding block, one side of the glass substrate is in contact with the trapezoidal waist on the first sliding block, and the other side of the glass substrate is in contact with the trapezoidal waist on the second sliding block, thereby effectively reducing the contact area of the glass substrate with the first sliding block and the second sliding block and avoiding the scratch of the glass substrate.
Drawings
FIG. 1 is a schematic structural diagram of a reticle raw material thermostat provided in an embodiment of the present invention;
FIG. 2 is a side view of FIG. 1;
FIG. 3 is a top view of FIG. 1;
FIG. 4 is a schematic view of the first vertical support plate structure of FIG. 1;
fig. 5 is a schematic view of a conventional thermostat device.
The figures are labeled as follows:
10. a base plate; 20. a first vertical support plate; 201. a groove; 30. a second vertical support plate; 40. a top plate; 501. a first slider; 5011. a first corner; 502. a second slider; 5021. a second corner; 60. a handle; 70. air holes; 80. a screw; 90. a clamping plate; 100. a bump; 110. a glass substrate.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the utility model and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the utility model.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.
As shown in fig. 1, in an embodiment of the present invention, a reticle raw material thermostat is provided, including: the structure comprises a bottom plate 10, a first vertical support plate 20, a second vertical support plate 30, a top plate 40, a first slider 501 and a second slider 502, wherein the bottom plate 10 and the top plate 40 are arranged in parallel at intervals, the first vertical support plate 20 and the second vertical support plate 30 are arranged in parallel at intervals, and the first vertical support plate 20 and the second vertical support plate 30 are positioned between the bottom plate 10 and the top plate 40;
a plurality of first sliders 501 are arranged on one side, facing the second vertical support plate 30, of the first vertical support plate 20 along the height direction, the distance between every two adjacent first sliders 501 is adjustable, each first slider 501 extends along the height direction perpendicular to the first vertical support plate 20, a first corner 5011 of one side, facing the second vertical support plate 30, of each first slider 501 is of a rounded corner structure, and the length of one side, facing the second vertical support plate 30, of each first slider 501 along the height direction of the first vertical support plate 20 is smaller than the length of one side, facing away from the second vertical support plate 30, of the corresponding first slider 501 along the height direction of the first vertical support plate 20;
the second vertical support plate 30 is provided with a plurality of second sliders 502 along the height direction on one side facing the first vertical support plate 20, the position of each second slider 502 corresponds to the position of each first slider 501, the distance between two adjacent second sliders 502 is adjustable, each second slider 502 extends along the height direction perpendicular to the second vertical support plate 30, a second corner 5021 of each second slider 502 on one side facing the first vertical support plate 20 is a rounded corner structure, and the length of each second slider 502 along the height direction of the second vertical support plate 30 on one side facing the first vertical support plate 20 is smaller than the length of the corresponding second slider 502 along the height direction of the second vertical support plate 30 on one side far away from the first vertical support plate 20.
By adopting the technical scheme, when the glass substrate needs to be placed on the first sliding blocks 501 and the second sliding blocks 502, the distance between two adjacent first sliding blocks 501 is adjustable, the distance between two adjacent second sliding blocks 502 is adjustable, and the position of each second sliding block 502 corresponds to the position of each first sliding block 501, at the moment, the glass substrates with different specifications can be conveniently stored after the distance between two adjacent first sliding blocks 501 and the distance between two adjacent second sliding blocks 502 are adjusted;
meanwhile, since the first corner 5011 of each first slider 501 on the side facing the second vertical support plate 30 is in a rounded structure and the second corner 5021 of each second slider 502 on the side facing the first vertical support plate 20 is in a rounded structure, when a glass substrate is placed between the first slider 501 and the second slider 502, the glass substrate can be prevented from being scratched;
further, since the length of the side of each first slider 501 facing the second vertical support plate 30 in the height direction of the first vertical support plate 20 is smaller than the length of the side of the corresponding first slider 501 facing away from the second vertical support plate 30 in the height direction of the first vertical support plate 20, and the length of the side of each second slider 502 facing the first vertical support plate 20 in the height direction of the second vertical support plate 30 is smaller than the length of the side of the corresponding second slider 502 facing away from the first vertical support plate 20 in the height direction of the second vertical support plate 30, that is, the cross section of the first slider 501 in the height direction of the first vertical support plate 20 is trapezoidal, the cross section of the second slider 502 in the height direction of the second vertical support plate 30 is also trapezoidal, when glass substrates are placed on the corresponding first slider 501 and second slider 502, one side of the glass substrate contacts with the trapezoidal waist on the first slider 501, the other side of the glass substrate is in contact with the trapezoidal waist on the second slider 502, at this time, the contact between one side of the glass substrate and the trapezoidal on the first slider 501 is line contact, the contact between the other side of the glass substrate and the trapezoidal on the second slider 502 is also line contact, as shown in fig. 5, because the contact between the existing glass substrate 110 and the bump 100 is surface contact, and the contact between the glass substrate and the first slider 501 and the contact between the glass substrate and the second slider 502 in the application are line contacts, the contact area between the glass substrate and the first slider 501 and the contact area between the glass substrate and the second slider 502 are effectively reduced, and the scratch of the glass substrate is avoided.
In some embodiments, as shown in fig. 4 in combination with fig. 1, the reticle raw material thermostatic apparatus in the present application further includes a screw 80 and clamping plates 90, wherein a groove 201 is provided on a side of the first vertical support plate 20 facing the second vertical support plate 30, a plurality of clamping plates 90 are provided in the groove 201 along a direction parallel to the bottom plate 10, and the screw 80 extends into the groove 201 along a height direction of the first vertical support plate 20 and then is connected to the clamping plates 90; each clamping plate 90 is provided with a rotating nut along both sides of the screw 80 in the axial direction, the rotating nut is connected to the screw 80 in a threaded manner, and the first sliding block 501 is correspondingly arranged between two adjacent clamping plates 90.
In use, the distance between two adjacent clamping plates 90 along the axial direction of the screw 80 is adjusted so that the distance corresponds to the thickness of the corresponding glass substrate, and then the rotating nuts on both sides of each clamping plate 90 are fastened, and at this time, the corresponding first slide block 501 is put between two adjacent clamping plates 90. The distance between the clamping plates 90 is adjustable, so that the position of the first sliding block 501 on the clamping plates 90 can also be adjusted;
further, the connection structure of the second vertical support plate 30 and the second slider 502 in the present application is the same as the connection structure of the first vertical support plate 20 and the first slider 501, and not described in detail here, and after the distance between two adjacent first sliders 501 and the distance between two adjacent second sliders 502 are adjusted, glass substrates of different specifications can be conveniently stored.
In some embodiments, in order to improve the stability of the connection between the first sliding block 501 and the clamping plate 90, the clamping plate 90 in the present application is provided with anti-slip threads on both sides along the axial direction of the screw 80.
In some embodiments, the clamping plate 90 of the present application is provided with a through hole along the axial direction of the screw 80, and the through hole is in clearance fit with the screw 80. The through hole is in clearance fit with the screw 80, so that the clamping plate 90 can be conveniently moved along the axial direction of the screw 80.
In some embodiments, as shown in fig. 2, the reticle stock thermostat of the present application further comprises a handle 60, the handle 60 being disposed on a side of the top plate 40 facing away from the base plate 10. The handle 60 is arranged to facilitate taking of the whole device.
Further, as shown in fig. 3, the center of gravity of the handle 60 in the present invention does not coincide with the center of gravity of the top plate 40, and the center of gravity of the handle 60 is away from the storage opening side of the glass substrate, so that the center of gravity of the entire device is tilted backward, and the glass substrate is prevented from falling out from the front opening when the glass substrate is taken and placed.
In some embodiments, the handle 60 in this application is provided with anti-skidding line, and the setting of anti-skidding line has effectively increased the frictional action of handle 60, avoids taking place to skid when taking.
In some embodiments, as shown in fig. 3, a plurality of air holes 70 are uniformly distributed on the top plate 40, and the air holes 70 are arranged to allow an air flow to pass through from inside to outside, so as to achieve the effect of cleaning the glass substrate.
Further, mask version raw and other materials constant temperature equipment in this application still includes the filter screen, all is provided with a filter screen on every gas pocket 70, and the setting of filter screen has avoided debris from the external world to fall into the glass substrate in the device on.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the utility model. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (9)
1. A mask blank raw material constant temperature device is characterized by comprising: the device comprises a bottom plate (10), a first vertical support plate (20), a second vertical support plate (30), a top plate (40), a first sliding block (501) and a second sliding block (502);
the bottom plate (10) and the top plate (40) are arranged in parallel at intervals, the first vertical support plate (20) and the second vertical support plate (30) are arranged in parallel at intervals, and the first vertical support plate (20) and the second vertical support plate (30) are positioned between the bottom plate (10) and the top plate (40);
a plurality of first sliding blocks (501) are arranged on one side, facing the second vertical support plate (30), of the first vertical support plate (20) along the height direction, the distance between every two adjacent first sliding blocks (501) is adjustable, each first sliding block (501) extends along the height direction perpendicular to the first vertical support plate (20), a first corner (5011) on one side, facing the second vertical support plate (30), of each first sliding block (501) is of a rounded corner structure, and the length of one side, facing the second vertical support plate (30), of each first sliding block (501) along the height direction of the first vertical support plate (20) is smaller than the length of the corresponding side, facing away from the second vertical support plate (30), of each first sliding block (501) along the height direction of the first vertical support plate (20);
a plurality of second sliders (502) are arranged on one side, facing the first vertical support plate (20), of the second vertical support plate (30) along the height direction, the position of each second slider (502) corresponds to the position of each first slider (501), the distance between every two adjacent second sliders (502) is adjustable, each second slider (502) extends along the height direction perpendicular to the second vertical support plate (30), and a second corner (5021) on one side, facing the first vertical support plate (20), of each second slider (502) is of a rounded corner structure, and the length of one side, facing the first vertical support plate (20), of each second slider (502) along the height direction of the second vertical support plate (30) is smaller than the length of one side, away from the first vertical support plate (20), of the corresponding second slider (502) along the height direction of the second vertical support plate (30).
2. The reticle raw material thermostat device according to claim 1, further comprising a screw (80) and a clamping plate (90), wherein a groove (201) is formed in one side of the first vertical support plate (20) facing the second vertical support plate (30), a plurality of clamping plates (90) are arranged in the groove (201) along a direction parallel to the bottom plate (10), and the screw (80) extends into the groove (201) along the height direction of the first vertical support plate (20) and then is connected with the clamping plates (90);
each clamping plate (90) is provided with a rotating nut along two axial sides of the screw (80), the rotating nuts are in threaded connection with the screw (80), and the first sliding blocks (501) are correspondingly arranged between every two adjacent clamping plates (90).
3. The reticle raw material thermostat according to claim 2, wherein the clamp plate (90) is provided with anti-slip threads on both sides in the axial direction of the screw (80).
4. The reticle raw material thermostat according to claim 2, wherein the clamp plate (90) is provided with a through hole in an axial direction of the screw (80), the through hole being clearance-fitted with the screw (80).
5. The reticle stock thermostat of claim 1, further comprising a handle (60), the handle (60) being disposed on a side of the top plate (40) facing away from the base plate (10).
6. The reticle stock thermostat of claim 5, wherein a center of gravity of the handle (60) is not coincident with a center of gravity of the top plate (40).
7. The reticle stock thermostat of claim 5, wherein the handle (60) is provided with anti-slip threads.
8. The reticle stock thermostat of claim 1, wherein the top plate (40) has a plurality of air holes (70) uniformly distributed therein.
9. The reticle raw material thermostat according to claim 8, further comprising a filter screen, one filter screen being provided on each of the air holes (70).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121906718.9U CN215708233U (en) | 2021-08-13 | 2021-08-13 | Mask raw material constant temperature device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121906718.9U CN215708233U (en) | 2021-08-13 | 2021-08-13 | Mask raw material constant temperature device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215708233U true CN215708233U (en) | 2022-02-01 |
Family
ID=79996315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121906718.9U Active CN215708233U (en) | 2021-08-13 | 2021-08-13 | Mask raw material constant temperature device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215708233U (en) |
-
2021
- 2021-08-13 CN CN202121906718.9U patent/CN215708233U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI276188B (en) | Wafer shape evaluating method and device producing method, wafer and wafer selecting method | |
| JPH0444307A (en) | Manufacture of semiconductor device | |
| JP4917835B2 (en) | Exposure apparatus having substrate chuck flatness maintaining means | |
| JPH02143544A (en) | Semiconductor device provided with vernier pattern for mesh matching use | |
| CN109884862B (en) | Overlay deviation compensation device and method in three-dimensional memory exposure system | |
| CN108766901B (en) | Method for detecting flatness of wafer worktable | |
| CN215708233U (en) | Mask raw material constant temperature device | |
| CN101295130B (en) | Light shield detecting method | |
| US20090316980A1 (en) | Method and apparatus for matching defect distribution pattern | |
| JP2005188944A (en) | Line width measuring method, substrate processing method, substrate processing device, and substrate cooling process unit | |
| JP2014229910A (en) | Stepper chuck for wafer or flat glass exposure system | |
| US7550237B2 (en) | Systems and methods for determining width/space limits for mask layout | |
| CN112882340B (en) | Photomask, monitoring wafer and method for monitoring wafer surface cleaning precision | |
| CN212411011U (en) | Even gluey chromium version inspection device | |
| US6974650B2 (en) | Method of correcting a mask layout | |
| CN113348543A (en) | Substrate holder for use in a lithographic apparatus and device manufacturing method | |
| CN110119065B (en) | Graph optimization method and mask preparation method | |
| WO2000021345A1 (en) | Manufacturing method of wiring circuit board, and wiring circuit board | |
| JP2560011Y2 (en) | Substrate cassette | |
| CN114091291B (en) | Monitoring method and system for semiconductor layout | |
| CN112614805A (en) | Wafer carrying platform for photoetching machine | |
| CN102452637A (en) | Novel device for nanometer (micrometer) spherical membrane and automatic boundary finishing technology | |
| JP2007173435A (en) | Optimal focus position detection method, and manufacturing method of semiconductor device | |
| CN107966884B (en) | Method for detecting position of photomask box | |
| US10865139B2 (en) | Large-size synthetic quartz glass substrate, evaluation method, and manufacturing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518000 The first floor of plant 4 #, Shengzuozhi Science and Technology Industrial Park, north of Xinyu Road, Shajing Street, Bao'an District, Shenzhen, Guangdong Patentee after: Shenzhen Longtu Optical Mask Co.,Ltd. Address before: 518000 The first floor of plant 4 #, Shengzuozhi Science and Technology Industrial Park, north of Xinyu Road, Shajing Street, Bao'an District, Shenzhen, Guangdong Patentee before: SHENZHEN LONGTU PHOTOMASK CO.,LTD. |
|
| CP01 | Change in the name or title of a patent holder |