CN215668028U - Spore germination mechanism research device based on dielectrophoresis - Google Patents

Spore germination mechanism research device based on dielectrophoresis Download PDF

Info

Publication number
CN215668028U
CN215668028U CN202120824249.XU CN202120824249U CN215668028U CN 215668028 U CN215668028 U CN 215668028U CN 202120824249 U CN202120824249 U CN 202120824249U CN 215668028 U CN215668028 U CN 215668028U
Authority
CN
China
Prior art keywords
electrode
dielectrophoresis
spore germination
micro
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN202120824249.XU
Other languages
Chinese (zh)
Inventor
吴文捷
常金辉
金涌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Mugu Biotechnology Co ltd
Original Assignee
Guangdong Mugu Biotechnology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Mugu Biotechnology Co ltd filed Critical Guangdong Mugu Biotechnology Co ltd
Priority to CN202120824249.XU priority Critical patent/CN215668028U/en
Application granted granted Critical
Publication of CN215668028U publication Critical patent/CN215668028U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Apparatus Associated With Microorganisms And Enzymes (AREA)

Abstract

The utility model discloses a device for researching spore germination mechanism based on dielectrophoresis, which comprises a micro-channel, a first electrode and a second electrode, wherein the first electrode and the second electrode are oppositely arranged at intervals to form the micro-channel; one end of the micro-channel is communicated with an inlet, and the other end of the micro-channel is communicated with an outlet. The spore germination mechanism research device can research the germination condition of spores in a communication mechanism deficiency state.

Description

Spore germination mechanism research device based on dielectrophoresis
Technical Field
The utility model relates to the field of spore germination research, in particular to a spore germination mechanism research device based on dielectrophoresis.
Background
Germination is a key step in the process of changing spores into vegetative cells, and plays a significant role in microbiological detection, food sanitation and safety, nosocomial infection control and the like. Spore germination is affected by a variety of factors, including the formulation of the spore, the choice of germinant, the temperature and humidity of germination, and the like. Recent studies have shown that the germination processes of the spores are not independent of each other, and the spores that germinate earlier release certain chemicals to affect the yet-to-germinate spores, i.e., a communication mechanism exists between the spores, although the specific action principle and mode of the communication mechanism is not clear.
The current method for researching the communication mechanism of spore germination is mainly to observe the germination characteristics of a large number of single spores and analyze the germination correlation between adjacent spores by a statistical method. The method belongs to observational research, namely passively observing the germination condition of spores without actively controlling experimental conditions, and has the main defect that the principle of a communication mechanism of spore germination cannot be researched, namely that which chemical substance acts cannot be judged, and the condition of spore germination in a communication mechanism deficiency state cannot be known.
SUMMERY OF THE UTILITY MODEL
In order to solve the defects of the prior art, the utility model provides a spore germination mechanism research device based on dielectrophoresis, which can be used for researching the germination condition of spores in a communication mechanism deficiency state.
The technical problem to be solved by the utility model is realized by the following technical scheme:
a spore germination mechanism research device based on dielectrophoresis comprises a micro-channel, a first electrode and a second electrode, wherein the first electrode and the second electrode are oppositely arranged at intervals to form the micro-channel; one end of the gap between the first electrode and the second electrode is used as an inlet of the micro-channel, and the other end of the gap is used as an outlet of the micro-channel.
Furthermore, a first insulating surface is arranged on one surface, facing the second electrode, of the first electrode, and a second insulating surface is arranged on one surface, facing the first electrode, of the second electrode.
Further, the micro-channel is formed with a plurality of attachments for spore dielectrophoresis to attach on two side surfaces facing the first electrode and the second electrode.
Further, the attachment is formed by the first electrode and the second electrode protruding into the microchannel, respectively, or the attachment is formed by the first insulating surface and the second insulating surface protruding into the microchannel, respectively.
Further, the protruding length of the attachment body gradually increases along the inlet-to-outlet direction of the microchannel.
Further, the electrode structure also comprises a substrate base plate and a sealing cover plate which are arranged oppositely, and the first electrode and the second electrode are arranged between the substrate base plate and the sealing cover plate in a coplanar manner.
Further, a first insulating layer is arranged between the substrate base plate and the first electrode and the second electrode, and/or a second insulating layer is arranged between the sealing cover plate and the first electrode and the second electrode.
Furthermore, the first insulating layer is provided with a first isolation groove at the gap between the first electrode and the second electrode to serve as a part of the micro-channel; and/or the second insulating layer is provided with a second isolation groove at the gap between the first electrode and the second electrode to be used as a part of the micro-channel.
Furthermore, two side groove walls of the first isolation groove or the second isolation groove respectively cover one surface of the first electrode facing the second electrode and one surface of the second electrode facing the first electrode, so as to respectively form the first insulation surface and the second insulation surface.
Furthermore, the device also comprises a first connecting part and a second connecting part which are used for being connected with an alternating power supply, the first electrode is connected with the first connecting part, and the second electrode is connected with the second connecting part.
The utility model has the following beneficial effects: first electrode and second electrode constitute the two poles of the earth of electrophoresis electric field among this spore germination mechanism research device, clearance between first electrode and the second electrode forms microchannel, both ends opening form respectively the entry and the export of microchannel are worked as when first electrode and second electrode access alternating power supply respectively, first electrode and second electrode can form specific frequency's alternating electric field in the microchannel, can make the spore among the spore in the microchannel dielectrophoresis effect takes place and adheres to and fixes on the attachment, will germinate agent constantly follow the entry of microchannel lets in, flows from the export of microchannel flows in order to induce germinate spore on the attachment, the chemical substance who releases as communication media when the simultaneously flushes away spore sprouts to cut off the communication mechanism of spore when sprouting, the aim of researching the germination condition of the spores in the state of lacking a communication mechanism is fulfilled.
Drawings
FIG. 1 is an exploded schematic view of a spore germination mechanism research device provided by the present invention;
FIG. 2 is a schematic cross-sectional view of a research apparatus for spore germination mechanism provided by the present invention along the axial direction of a micro-channel;
FIG. 3 is a schematic cross-sectional view of a research apparatus for spore germination mechanism along a cross-section of a micro-channel according to the present invention;
FIG. 4 is a schematic diagram of a spore germination mechanism research device with a plurality of monomer structures provided by the utility model;
FIG. 5 is a schematic diagram of the preparation of the device for studying the mechanism of spore germination provided by the present invention;
FIG. 6 is a schematic illustration of the fixation of spores in a spore germination mechanism study device;
FIG. 7 is a schematic view of the distribution of flow velocity in the apparatus for studying the mechanism of spore germination provided by the present invention;
FIG. 8 is a schematic view showing the distribution of chemical substances released from spores in a microchannel without scouring;
FIG. 9 is a schematic view showing the distribution of chemical substances released from spores in a microchannel in the presence of a scouring;
FIG. 10 is a block diagram of the steps of a method for using the apparatus for studying spore germination mechanism provided by the present invention;
fig. 11 is a block diagram of the steps of the manufacturing method of the spore germination mechanism research device provided by the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Example one
1-3, a spore germination mechanism research device based on dielectrophoresis comprises a micro-channel 6, a first electrode 31 and a second electrode 34, wherein the first electrode 31 and the second electrode 34 are oppositely arranged at intervals to form the micro-channel 6; one end of the gap between the first electrode 31 and the second electrode 34 is used as an inlet 61 of the microchannel 6, and the other end is used as an outlet 62 of the microchannel 6.
In the research device for spore germination mechanism, a first electrode 31 and a second electrode 34 form two poles of an electrophoresis electric field, a gap between the first electrode 31 and the second electrode 34 forms a micro-channel 6, and two ends of the gap form an inlet 61 and an outlet 62 of the micro-channel 6 respectively, when the first electrode 31 and the second electrode 34 are respectively connected with an alternating power supply, the first electrode 31 and the second electrode 34 can form an alternating electric field with specific frequency in the micro-channel 6, so that spores in a spore suspension in the micro-channel 6 can generate dielectrophoresis action to be attached and fixed on two side surfaces of the micro-channel 6 as shown in figure 6, then an germinant is continuously introduced from the inlet 61 of the micro-channel 6 and flows out from the outlet 62 of the micro-channel 6 to induce the germinated spores attached and fixed on the two side surfaces of the micro-channel 6, and chemical substances which are released as communication media during germination are washed away, the method aims to cut off the communication mechanism of the spore during germination and realize the purpose of researching the germination condition of the spore in the state of lacking the communication mechanism.
The research device for the spore germination mechanism further comprises a first connecting part 33 and a second connecting part 36 which are used for being connected with an alternating power supply, the first electrode 31 is connected with the first connecting part 33 in the same layer through a first wire 32, and the second electrode 34 is connected with the second connecting part 36 in the same layer through a second wire 35.
In order to improve the attachment efficiency of spores, the microchannel 6 is formed with a plurality of attachments 63 for attachment during dielectrophoresis of spores on both side surfaces facing the first electrode 31 and the second electrode 34, the attachments 63 having a triangular shape with one corner protruding inward of the microchannel 6.
Preferably, the protruding length of the attachments 63 gradually increases along the direction from the inlet 61 to the outlet 62 of the microchannel 6, in this embodiment, as shown in fig. 4, a plurality of pairs of attachments 63 are equidistantly distributed in the direction from the inlet 61 to the outlet 62 of the microchannel 6, one of the attachments 63 in each pair is located on one side of the first electrode 31, the other attachment is located on one side of the second electrode 34, and the spacing between the attachments 63 in each pair gradually decreases in an equal difference manner of 80 μm, 70 μm, 60 μm and 50 μm, so that the minimum diameter of the microchannel 6 gradually decreases in an equal difference manner.
As shown in fig. 7, the fluid flow rate in the microchannel 6 becomes larger at the position of the attachment 63, and the smaller the diameter of the microchannel 6, the larger the corresponding fluid flow rate.
A first insulating surface 43 is provided on a side of the first electrode 31 facing the second electrode 34, and a second insulating surface 44 is provided on a side of the second electrode 34 facing the first electrode 31, so as to improve the insulating isolation between the first electrode 31 and the second electrode 34.
In this embodiment, the attachment 63 is formed by the first electrode 31 and the second electrode 2 protruding into the microchannel 6, respectively, and the first insulating surface 43 and the second insulating surface 44 have the same width throughout, but in a specific implementation, the attachment 63 may be formed by the first insulating surface 43 and the second insulating surface 44 protruding into the microchannel 6, and the first electrode 31 and the second electrode 34 have the same width throughout.
In this embodiment, the thickness of the first insulating surface 43 and the second insulating surface 44 is 8 to 10 μm.
As shown in fig. 4, the spore germination mechanism research apparatus may include a plurality of single structures, each single structure including a micro channel 6, a first electrode 31, a first insulating surface 43, a first trace 32, a first connection portion 33, a second electrode 34, a second insulating surface 44, a second trace 35, a second connection portion 36, and the like.
The research device for the spore germination mechanism further comprises a substrate base plate 1 and a sealing cover plate 5 which are oppositely arranged, wherein the first electrode 31 and the second electrode 34 are arranged between the substrate base plate 1 and the sealing cover plate 5 in a coplanar manner; a first insulating layer 2 is further arranged between the substrate base plate 1 and the first electrode 31 and the second electrode 34, and a first isolation groove 21 is formed in the first insulating layer 2 at a gap between the first electrode 31 and the second electrode 34 to serve as a part of the microchannel 6; a second insulating layer 4 is further disposed between the sealing cover plate 5 and the first electrode 31 and the second electrode 34, a second isolation groove 41 is disposed in a gap between the first electrode 31 and the second electrode 34 of the second insulating layer 4, and is used as a part of the micro-channel 6, meanwhile, the second insulating layer 4 further covers a surface of the first electrode 31 facing the second electrode 34, and a surface of the second electrode 34 facing the first electrode 31, so as to form a first insulating surface 43 and a second insulating surface 44, respectively.
Of course, in a specific implementation, the first insulating surface 43 and the second insulating surface 44 can also be formed by covering the first insulating layer 2 on a side of the first electrode 31 facing the second electrode 34, and a side of the second electrode 34 facing the first electrode 31.
As shown in fig. 5, during the manufacturing process, firstly, a layer of insulating material is covered on the substrate 1 to form the first insulating layer 2, then a layer of electrode material is covered on the first insulating layer 2 to form the electrode layer 3, then the electrode layer 3 is etched to form the first electrode 31, the first trace 32, the first connection portion 33, the second electrode 34, the second trace 35, the second connection portion 36, the micro-channel 6, etc., then a layer of insulating material is covered on the etched electrode layer 3 and from the micro-channel 6 to form the second insulating layer 4, then the first insulating layer 2 and the second insulating layer 4 are simultaneously etched, the first isolation groove 21 and the second isolation groove 41 are etched at the positions of the first insulating layer 2 and the second insulating layer 4 corresponding to the micro-channel 6 to be used as a part of the micro-channel 6, wherein one side wall of the second isolation groove 41 is used as the first insulation surface 43, the other side wall is used as the second insulation surface 44, and finally a sealing cover plate 5 is covered on the second insulation layer 4 to seal the microchannel 6, and then holes are drilled at the inlet 61 and the outlet 62 of the sealing cover plate 5 corresponding to the microchannel 6 to communicate the inlet 61 and the outlet 62 with the outside.
In this embodiment, the substrate base plate 1 is a glass base plate, the sealing cover plate 5 is a PSMD cover plate, and the first insulating layer 2 and the second insulating layer 4 are both PDMS layers.
Dielectrophoresis is a phenomenon in which electrically neutral particles (e.g., cells, spores, etc.) move in a time-varying electric field of non-uniform intensity due to differences in polarization levels with the surrounding liquid. The magnitude of the dielectrophoretic force can be expressed by the following equation:
Figure 501782DEST_PATH_IMAGE002
wherein
Figure DEST_PATH_IMAGE003
Is the radius of the particle (assuming the particle is spherical),
Figure 559868DEST_PATH_IMAGE004
is the real dielectric constant of the solution, E is the local electric field applied to the particle,
Figure DEST_PATH_IMAGE005
is the operator of the real part of the operation,
Figure 254171DEST_PATH_IMAGE006
is a Clausius-Mossotti factor, also known as a frequency factor. The frequency factor reflects the relative polarization capability between the particle and the liquid and can be expressed by the following equation:
Figure 587063DEST_PATH_IMAGE008
wherein
Figure DEST_PATH_IMAGE009
Is the complex dielectric constant of the particle,
Figure 542381DEST_PATH_IMAGE010
is the complex dielectric constant of the liquid. And is
Figure 630422DEST_PATH_IMAGE012
Here, the
Figure DEST_PATH_IMAGE013
And
Figure 772822DEST_PATH_IMAGE014
respectively representing the real permittivity and real conductivity of the particle or liquid,
Figure DEST_PATH_IMAGE015
is the angular frequency of the electric field. From the expressions of dielectrophoresis, it can be seen that the size of the dielectrophoresis of a particle at a particular spatial location depends on the size of the particle (
Figure 112668DEST_PATH_IMAGE016
) And relative polarizability between particles and liquid: (
Figure DEST_PATH_IMAGE017
). When a particular angular frequency is selected
Figure 860175DEST_PATH_IMAGE018
When the particle is moving in a direction where the electric field gradient is high, it is called positive dielectrophoresis. When in use
Figure DEST_PATH_IMAGE019
When the particle is moving in a direction with a low electric field gradient, it is called negative dielectrophoresis.
Table 1 below shows the relevant parameters of the surrounding liquid and spores
Figure DEST_PATH_IMAGE021
Wherein
Figure 932167DEST_PATH_IMAGE022
A dielectric constant in vacuum of about 8.85X 10-12 F/m。
The specific use process is as follows: firstly, spore suspension is injected from the inlet 61 of the microchannel 6, after the spore suspension is filled in the whole microchannel 6, the alternating power supply connected with the first electrode 31 and the second electrode 34 is started to generate an alternating electric field, and spores move to the sharp corner of the attachment 63 under the action of dielectrophoresis; after the spores are fixed at the sharp corners of the attachments 63, the alternating electric field is maintained and the germinant is continuously injected from the inlets 61 of the micro-channels 6, at the moment, the germinant can induce the spores on the attachments 63 to germinate, and meanwhile, chemical substances released by the spores during germination are flushed away, so that the communication mechanism of the spores during germination is cut off.
When the germinant does not flow in the microchannel 6, the chemical substance released during germination of the spores is almost filled in the entire microchannel 6 after 140s due to the non-flushing effect as shown in fig. 8, and when the germinant is continuously injected and discharged in the microchannel 6, the chemical substance released during germination of the spores is not accumulated in the microchannel 6 after 140s due to the flushing effect as shown in fig. 9.
The following Table 2 shows the relevant parameters in the computer simulation
Figure 952076DEST_PATH_IMAGE024
Example two
As shown in fig. 10, the application method of the spore germination mechanism research device comprises the following steps:
step 1: providing the spore germination mechanism research device;
step 2: introducing spore suspension into the microchannel 6 of the spore germination mechanism research device through the inlet 61, and connecting the first electrode 31 and the second electrode 32 of the spore germination mechanism research device with an alternating power supply to generate an electrophoresis electric field with a specific alternating frequency in the microchannel 6, so that spores in the spore suspension in the microchannel 6 are subjected to dielectrophoresis action and are attached and fixed on the surfaces of the two sides of the microchannel 6;
and step 3: through entry 61 will germinate constantly lets in the microchannel 6 to the induction is attached to and is fixed in spore germination on microchannel 6 both sides surface, washes away the chemical substance as communication media that the spore released when sprouting simultaneously.
In the step 2, a spore suspension may be introduced into the microchannel 6 of the spore germination mechanism research apparatus, and then the first electrode 31 and the second electrode 32 of the spore germination mechanism research apparatus are connected to the alternating power supply, or the first electrode 31 and the second electrode 32 of the spore germination mechanism research apparatus are connected to the alternating power supply, and then the spore suspension is introduced into the microchannel 6 of the spore germination mechanism research apparatus, and the different sequences do not substantially affect the present case, and after spores are attached and fixed to the surfaces on the two sides of the microchannel 6, the remaining spore suspension flows away from the outlet 62; when after the required quantity of research is reached to the spore that adheres to fixedly on the surface of microchannel 6 both sides, just can stop to let in the spore turbid liquid in the microchannel 6 to under the condition of keeping switch on alternating current power supply, continuously to let in the microchannel 6 germinate in order to induce to adhere to and be fixed in the spore germination on the surface of microchannel 6 both sides, the germinate is followed export 62 can take away the chemical substance as communication media that the spore released when sprouting when flowing away to cut off the communication mechanism of spore when sprouting, realize studying the purpose of the germination condition of spore under the communication mechanism deletion state.
EXAMPLE III
As shown in fig. 11, the manufacturing method of the device for studying spore germination mechanism includes the following steps:
step 1: covering a layer of insulating material on the substrate base plate 1 to form the first insulating layer 2;
step 2: covering the first insulating layer 2 with a layer of electrode material to form the electrode layer 3;
and step 3: etching the electrode layer 3 to form a first electrode 31 and a second electrode 32, wherein the first electrode 31 and the second electrode 32 are oppositely arranged at intervals to form a micro-channel 6; one end of the gap between the first electrode 31 and the second electrode 32 is used as an inlet 61 of the micro-channel 6, and the other end is used as an outlet 62 of the micro-channel 6;
and 4, step 4: manufacturing and covering a layer of insulating material on the etched electrode layer 3 and in the micro-channel 6 to form the second insulating layer 4;
and 5: etching the first insulating layer 2 and the second insulating layer 4 to respectively etch a first isolation groove 21 and a second isolation groove 41 at positions of the first insulating layer 2 and the second insulating layer 4 corresponding to the microchannel 6, where the first isolation groove 21 and the second isolation groove 41 are part of the microchannel 6, and two side groove walls of the second isolation groove 41 respectively cover a surface of the first electrode 31 facing the second electrode 32 and a surface of the second electrode 32 facing the first electrode 31 to respectively form a first insulating surface 43 of the first electrode 31 and a second insulating surface 44 of the second electrode 32;
step 6: the sealing cover plate 5 is covered on the etched second insulating layer 4 to seal the micro-channel 6, and then holes are drilled at the sealing cover plate 5 corresponding to the inlet 61 and the outlet 62 of the micro-channel 6 to communicate the inlet 61 and the outlet 62 with the outside.
The above-mentioned embodiments only express the embodiments of the present invention, and the description is more specific and detailed, but not understood as the limitation of the patent scope of the present invention, but all the technical solutions obtained by using the equivalent substitution or the equivalent transformation should fall within the protection scope of the present invention.

Claims (11)

1. A spore germination mechanism research device based on dielectrophoresis is characterized by comprising a micro-channel, a first electrode and a second electrode, wherein the first electrode and the second electrode are oppositely arranged at intervals to form the micro-channel; one end of the gap between the first electrode and the second electrode is used as an inlet of the micro-channel, and the other end of the gap is used as an outlet of the micro-channel.
2. The dielectrophoresis-based spore germination mechanism study device according to claim 1, wherein a first insulating surface is provided on a side of the first electrode facing the second electrode, and a second insulating surface is provided on a side of the second electrode facing the first electrode.
3. The dielectrophoresis-based spore germination mechanism research apparatus according to claim 1 or 2, wherein the micro channel is formed with attachments for spore dielectrophoresis on both surfaces facing the first electrode and the second electrode.
4. The dielectrophoresis-based spore germination mechanism study device according to claim 2, wherein the attachment is formed by the first insulating surface and the second insulating surface protruding into the microchannel, respectively.
5. The dielectrophoresis-based spore germination mechanism study device according to claim 3, wherein the attachment is formed by protruding the first electrode and the second electrode into the microchannel.
6. The dielectrophoresis-based spore germination mechanism study device according to claim 3, wherein the projected length of the attachment gradually increases in the inlet-to-outlet direction of the microchannel.
7. The dielectrophoresis-based spore germination mechanism research apparatus according to claim 1, further comprising a substrate base plate and a sealing cover plate which are oppositely arranged, wherein the first electrode and the second electrode are arranged coplanar between the substrate base plate and the sealing cover plate.
8. The dielectrophoresis-based spore germination mechanism research apparatus according to claim 7, wherein a first insulating layer is further provided between the substrate base plate and the first and second electrodes, and/or a second insulating layer is further provided between the sealing cover plate and the first and second electrodes.
9. The dielectrophoresis-based spore germination mechanism study device according to claim 8, wherein the first insulating layer is provided with a first isolation groove at a gap between the first electrode and the second electrode as a part of the microchannel; and/or the second insulating layer is provided with a second isolation groove at the gap between the first electrode and the second electrode to be used as a part of the micro-channel.
10. The dielectrophoresis-based spore germination mechanism study device according to claim 9, wherein two side walls of the first isolation groove or the second isolation groove respectively cover a side of the first electrode facing the second electrode and a side of the second electrode facing the first electrode to form a first insulating surface and a second insulating surface, respectively.
11. The dielectrophoresis-based spore germination mechanism research apparatus according to claim 1, further comprising a first connection portion and a second connection portion for connection with an alternating power supply, the first electrode being connected to the first connection portion, the second electrode being connected to the second connection portion.
CN202120824249.XU 2021-04-21 2021-04-21 Spore germination mechanism research device based on dielectrophoresis Expired - Fee Related CN215668028U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202120824249.XU CN215668028U (en) 2021-04-21 2021-04-21 Spore germination mechanism research device based on dielectrophoresis

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202120824249.XU CN215668028U (en) 2021-04-21 2021-04-21 Spore germination mechanism research device based on dielectrophoresis

Publications (1)

Publication Number Publication Date
CN215668028U true CN215668028U (en) 2022-01-28

Family

ID=79970812

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202120824249.XU Expired - Fee Related CN215668028U (en) 2021-04-21 2021-04-21 Spore germination mechanism research device based on dielectrophoresis

Country Status (1)

Country Link
CN (1) CN215668028U (en)

Similar Documents

Publication Publication Date Title
US8927988B2 (en) Self-sealed fluidic channels for a nanopore array
US6896780B2 (en) Microelectrode, microelectrode array and method for manufacturing the microelectrode
KR102060099B1 (en) Vertical nano-gap electrodes for dielectrophoresis, method for preparation thereof, method for trapping and separating particles using the same
WO2022041597A1 (en) High-resolution in-situ fluid turbulence heating chip of transmission electron microscope
CN106629575B (en) Heater-type microsensor and its manufacture method
CN105772118A (en) SERS (Surface Enhanced Raman Spectroscopy) microfluidic chip with enhanced substrate integrated on ITO conductive glass and preparation method for SERS microfluidic chip
JP4677832B2 (en) Microfluidic substrate for cell fusion, microfluidic structure for cell fusion using the same, and cell fusion method
CN108706543A (en) A kind of nano-pore manufacturing method accurately controlled
KR20130096744A (en) Molecular delivery with nanowires
CN110329984B (en) Method and device for preparing solid-state nanopore based on dry etching
CN215668028U (en) Spore germination mechanism research device based on dielectrophoresis
US20120019270A1 (en) Microfabricated pipette and method of manufacture
CN113198553B (en) Application method and manufacturing method of spore germination mechanism research device based on dielectrophoresis
CN106206213A (en) Method for preparing organic microchannel plate by adopting MEMS (micro-electromechanical systems) process
Pandey et al. Characterization of a MEMS BioChip for planar patch-clamp recording
Mehran et al. Controllable silicon nano-grass formation using a hydrogenation assisted deep reactive ion etching
CN106556677A (en) A kind of three-dimensional porous graphene extra-thin film gas sensor and preparation method thereof
Zhang et al. A one-step molded microfluidic chip featuring a two-layer silver-PDMS microelectrode for dielectrophoretic cell separation
CN212932449U (en) High-resolution in-situ fluid turbulence heating chip for transmission electron microscope
CN106085845A (en) Cell electroporation chip apparatus based on U-shaped groove microelectrode array and processing method thereof
CN104897728B (en) Nano-pore detecting system based on micro-nano hole pattern integrated morphology and preparation method thereof
Triroj et al. Gas-assisted focused ion beam fabrication of gold nanoelectrode arrays in electron-beam evaporated alumina films for microfluidic electrochemical sensors
WO2012026942A1 (en) Devices and methods for electroosmotic transport of non-polar solvents
Boscardin et al. Silicon buried channels for pixel detector cooling
Kolmakov Membrane-based environmental cells for SEM in liquids

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20220128

CF01 Termination of patent right due to non-payment of annual fee