CN215667379U - Waste water collection device for semiconductor processing - Google Patents

Waste water collection device for semiconductor processing Download PDF

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Publication number
CN215667379U
CN215667379U CN202023089078.5U CN202023089078U CN215667379U CN 215667379 U CN215667379 U CN 215667379U CN 202023089078 U CN202023089078 U CN 202023089078U CN 215667379 U CN215667379 U CN 215667379U
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water
activated carbon
collecting tank
layer
outlet pipe
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CN202023089078.5U
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钟兴进
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Guangzhou Honghao Optoelectronic Semiconductor Co ltd
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Guangzhou Honghao Optoelectronic Semiconductor Co ltd
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Abstract

The utility model relates to the field of semiconductors, in particular to a wastewater collection device for semiconductor processing, which comprises a collection box, wherein the collection box comprises a collection box, a water inlet pipe and a water discharge pipe, the water inlet pipe is positioned at the top of the collection box and extends into the collection box through the collection box, semiconductor wastewater is guided into the collection box through the water inlet pipe, particles in the wastewater are filtered through a microfiltration membrane in a microfiltration membrane filtering layer, peculiar smell and magazines in the wastewater are further cleaned through an activated carbon filtering net in an activated carbon filtering layer, the filtering effect is improved, the wastewater after the corrosivity in the wastewater is removed flows into a water collection tank for water collection, reverse osmosis of water in the water collection tank into the activated carbon filtering layer is prevented through a reverse osmosis layer, an electrolyzer is arranged in the water collection tank, the electrolyzer is started through an electrolyzer, the water in the water collection tank is electrolyzed to obtain electrolyzed water, and the bottom of the water collecting tank inclines towards the direction of the drain pipe, so that water in the water collecting tank can be drained quickly.

Description

Waste water collection device for semiconductor processing
Technical Field
The utility model relates to the field of semiconductors, in particular to a wastewater collection device for semiconductor processing.
Background
Semiconductor waste water refers to waste water, sewage and waste liquid produced in the production process, wherein the waste water contains production materials, intermediate products and products which are lost along with water and pollutants produced in the production process, along with the rapid development of industry, the types and the quantity of the waste water are rapidly increased, the pollution to water is gradually wide and serious, the health and the safety of human beings are threatened, the semiconductor waste water is generally filtered by a waste water filtering device, the existing waste water filtering device is inconvenient to disassemble a filter screen due to the structural reason, the working efficiency of disassembling the filter screen is influenced, and the working efficiency of the waste water filtering device is influenced.
The prior patent CN211069178U discloses a filtering mechanism for semiconductor wastewater treatment, which comprises a semiconductor wastewater filter, a limiting block and a filtering device, wherein the limiting block is fixedly arranged at the inner middle end of the semiconductor wastewater filter, the filtering device is movably inserted inside the side surface of the limiting block, a clamping plate is fixedly arranged inside the filtering device, the side surfaces of the two ends of the clamping plate are respectively and fixedly connected with an air cylinder, one end of a connecting plate is fixedly connected with a fixed frame, the top surface of the fixed frame is fixedly connected with a sealing rubber ring, a supporting column is fixedly connected between the fixed frames, the top surface center of the fixed frame is clamped with a limiting frame, the center of the limiting frame is fixedly provided with a filter screen, the inner part of a threaded hole is spirally connected with a fastening screw, the device can not avoid the corrosivity of the semiconductor wastewater during use, and the semiconductor wastewater filter is easy to leak, when in use, the waste water is intelligently filtered, but the waste water cannot be collected, so that the use effect is influenced.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
Aiming at the defects of the prior art, the utility model provides the semiconductor processing wastewater collecting device which is efficient in collection and filtration.
(II) technical scheme
In order to achieve the purpose, the utility model provides the following technical scheme: the utility model relates to a wastewater collection device for semiconductor processing, which comprises a collection box, wherein the collection box comprises a collection box, a water inlet pipe and a water outlet pipe, the water inlet pipe is positioned at the top of the collection box and penetrates through the collection box to extend into the collection box, a limiting block is arranged at the penetrating part of the water inlet pipe and the collection box, two layers of the water inlet pipe are arranged, the water outlet pipe is positioned at one side of the collection box and penetrates through the collection box to extend into the collection box and is close to the bottom of the collection box, the water outlet pipe comprises an inner water outlet pipe and an outer water outlet pipe, the inner water outlet pipe is positioned inside the outer water outlet pipe, spiral threads are connected between the inner water outlet pipe and the outer water outlet pipe, a sealing valve is arranged at the end part of the water outlet pipe positioned in the collection box, a sealing gasket is arranged at the penetrating part of the water outlet pipe and the collection box, the micro-filtration membrane filtration layer, an active carbon layer, a reverse osmosis layer and a water collection tank are arranged, the collecting tank is located the bottom of collecting vat, the bottom of collecting tank is the tilting, and inclines to the drain pipe direction, be equipped with the electrolysis machine in the collecting vat, the electrolysis machine is located one side of collecting tank, and keeps away from the drain pipe, the outside of collecting box is equipped with the electrolysis machine, the electrolysis machine hangs in the outside of collecting box, be equipped with the wire between electrolysis machine and the electrolysis machine and be connected, the reverse osmosis level is in the top of collecting tank, be equipped with reverse osmosis net in the reverse osmosis layer, the active carbon layer is located the top of reverse osmosis layer, be equipped with the active carbon filter screen in the active carbon layer, the micro filtration membrane filter layer is located the top of active carbon layer, be equipped with the micro filtration membrane in the micro filtration membrane filter layer.
In order to improve the result of use of stopper, the stopper includes spacing piece and lower spacing piece, be equipped with the installing port on spacing piece and the lower spacing piece, the inlet tube passes through the installing port and is connected for the piece with last spacing piece and lower limit, be equipped with the connecting hole on spacing piece and the lower spacing piece, the connecting hole is located the edge of spacing piece and lower spacing piece, just be equipped with connecting bolt in the connecting hole, be equipped with fastening nut between connecting bolt and last spacing piece and the lower spacing piece.
In order to improve the filtering effect, be equipped with the cotton filter screen in the spacing piece of going up, be equipped with the nanofiltration membrane in the spacing piece down.
In order to prevent blockage, the top of the upper limiting block is provided with an anti-blocking hole.
In order to improve the fixing effect of the limiting block, a clamping block is arranged on the side edge of the limiting block, a clamping groove is formed in the top of the collecting box, and the limiting block is connected with the collecting box through the clamping block and the clamping groove.
In order to improve the collecting effect, the number of the water inlet pipes is at least two.
In order to improve the odor filtering effect, the activated carbon filtering layer comprises a first activated carbon filtering layer and a second activated carbon filtering layer, wherein a first activated carbon filtering net is arranged in the first activated carbon filtering layer, and a second activated carbon filtering net is arranged in the second activated carbon filtering layer.
In order to observe the filtering state conveniently, the front side of the collecting box is provided with at least two observation ports.
(III) advantageous effects
Compared with the prior art, the utility model provides a wastewater collection device for semiconductor processing, which has the following beneficial effects:
the semiconductor processing wastewater collection device guides semiconductor wastewater into the collection box through the water inlet pipe, particles in the wastewater are filtered through a microfiltration membrane in a microfiltration membrane filter layer at first, then peculiar smell and magazines in the wastewater are further cleaned through an activated carbon filter screen in an activated carbon layer, the filtering effect is improved, the wastewater after the corrosivity in the wastewater is removed flows into the water collection tank for water collection, reverse osmosis of water in the water collection tank into the activated carbon layer is prevented through a reverse osmosis layer, an electrolyzer is arranged in the water collection tank and is started through an electrolyzer, the water in the water collection tank is electrolyzed to obtain electrolyzed water, the bottom of the water collection tank inclines towards the direction of the drain pipe, the water in the water collection tank can be quickly discharged, the water inlet pipe is provided with an inner drain pipe and an outer drain pipe through two layers, the drain pipe is provided with the inner drain pipe, and the water inlet pipe and the drain pipe are prevented from being corroded by the semiconductor wastewater to leak, the sealing performance of the connection between the inner water drainage pipe and the outer water drainage pipe is improved through the sealing valve.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic front view of the present invention;
FIG. 3 is a schematic top view of a stopper according to the present invention;
FIG. 4 is a schematic view of the internal structure of the limiting block of the drawings of the present invention;
FIG. 5 is a schematic view of the drain pipe of the present invention;
in the figure: 1. a collection box; 2. collecting tank; 3. a limiting block; 4. a water inlet pipe; 5. a connecting valve; 6. a microfiltration membrane filtration layer; 7. a first activated carbon filter layer; 8. a second activated carbon filter layer; 9. a water collection tank; 10. A reverse osmosis net; 11. a second activated carbon filter screen; 12. a first activated carbon filter screen; 13. a microfiltration membrane; 14. an electrolysis machine; 15. an electrolyzer; 16. an outer drainage pipe; 17. an inner drain pipe; 18. a sealing valve; 19. A gasket; 20. a viewing port; 21. a clamping block; 22. an installation port; 23. connecting holes; 24. preventing the hole from being blocked; 25. helical thread; 26. an upper limit block; 27. a lower limiting block; 28. a nanofiltration membrane; 29. cotton filter screen; 30. A connecting bolt; 31. fastening a nut;
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the wastewater collection device for semiconductor processing of the present invention comprises a collection box 1, wherein the collection box 1 comprises a collection tank 2, a water inlet pipe 4 and a water outlet pipe, the water inlet pipe 4 is located at the top of the collection box 1 and extends into the collection tank 2 through the collection box 1, a limiting block 3 is arranged at the penetration position of the water inlet pipe 4 and the collection box 1, the water inlet pipe 4 is provided with two layers, the water outlet pipe is located at one side of the collection box 1 and extends into the collection tank 2 through the collection box 1 and is close to the bottom of the collection box 1, the water outlet pipe comprises an inner water outlet pipe and an outer water outlet pipe 16, the inner water outlet pipe 17 is located inside the outer water outlet pipe 16, a spiral thread 25 is arranged between the inner water outlet pipe 17 and the outer water outlet pipe 16 for connection, a sealing valve 18 is arranged at the end of the water outlet pipe located in the collection tank 2, and a sealing gasket 19 is arranged at the penetration position of the water outlet pipe and the collection box 1, the collecting tank 2 comprises a microfiltration membrane filtering layer 6, an activated carbon layer, a reverse osmosis layer and a water collecting tank 9, the water collecting tank 9 is positioned at the bottom of the collecting tank 2, the bottom of the water collecting tank 9 is inclined, and is inclined towards the direction of the water discharge pipe, an electrolyzer 15 is arranged in the collecting tank 2, the electrolyzer 15 is positioned at one side of the water collecting tank 9, and is far away from the water discharge pipe, the outer side of the collecting box 1 is provided with an electrolysis machine 14, the electrolysis machine 14 is hung at the outer side of the collecting box 1, the electrolyzer 14 is connected with the electrolyzer 15 through a lead, the reverse osmosis layer is positioned above the water collecting tank 9, a reverse osmosis net 10 is arranged in the reverse osmosis layer, the activated carbon layer is positioned above the reverse osmosis layer, an activated carbon filter screen is arranged in the activated carbon layer, the microfiltration membrane filter layer 6 is positioned above the activated carbon layer, and a microfiltration membrane 13 is arranged in the microfiltration membrane filter layer 6.
When the device is used, semiconductor wastewater is led into the collecting tanks 1 through the water inlet pipe 4, the water inlet pipe 4 ensures the stability of connection between the collecting tanks 1 through the limiting blocks 3, particles in the wastewater are filtered through the microfiltration membrane 13 in the microfiltration membrane filtering layer 6 in the collecting tank 2, peculiar smell and magazines in the wastewater are further cleaned through the activated carbon filtering net in the activated carbon layer, the filtering effect is improved, the wastewater after the corrosivity in the wastewater is removed flows into the water collecting tank 9 for water collection, the reverse osmosis layer prevents the water in the water collecting tank 9 from reversely permeating into the activated carbon layer, the water collecting tank 9 is internally provided with the electrolyzer 15, the electrolyzer 15 is started through the electrolyzer 14 to electrolyze the water in the water collecting tank 9 to obtain electrolyzed water, the bottom of the water collecting tank 9 inclines towards the direction of the water drainage pipe, and the water in the water collecting tank 9 can be quickly discharged, the water inlet pipe 4 is provided with two layers and the water outlet pipe is provided with the inner water outlet pipe 17 and the outer water outlet pipe 16, so that the water inlet pipe 4 and the water outlet pipe are prevented from being corroded by semiconductor waste water and leaking, and the tightness of connection between the inner water outlet pipe 17 and the outer water outlet pipe 16 is improved through the sealing valve 18.
In order to improve the result of use of stopper 3, stopper 3 includes spacing piece 26 and lower spacing piece 27, be equipped with installing port 22 on spacing piece 26 and the lower spacing piece 27 down, inlet tube 4 is connected for the piece through installing port 22 and last spacing piece 26 and lower limit, be equipped with connecting hole 23 on spacing piece 26 and the lower spacing piece 27 down, connecting hole 23 is located the edge of spacing piece 26 and lower spacing piece 27 down, just be equipped with connecting bolt 30 in the connecting hole 23, be equipped with fastening nut 31 between connecting bolt 30 and last spacing piece 26 and the lower spacing piece 27 down, make stopper 3 conveniently dismantle, look over the jam condition in stopper 3 and the inlet tube 4.
In order to improve the filtering effect, a cotton filter screen 29 is arranged in the upper limiting block 26, and a nanofiltration membrane 28 is arranged in the lower limiting block 27, so that large particles in the semiconductor wastewater are filtered in advance and prevented from falling into the collection box 1.
In order to prevent blockage, the top of the upper limiting block 263 is provided with an anti-blocking hole 24, and when the limiting block 3 is blocked, waste water is discharged from the anti-blocking hole 24.
In order to improve the fixing effect of the limiting block 3, a clamping block 21 is arranged on the side edge of the limiting block 3, a clamping groove is formed in the top of the collecting box 1, and the limiting block 3 is connected with the collecting box 1 through the clamping block 21 and the clamping groove.
In order to improve the collection effect, inlet tube 4 is equipped with two at least, through two inlet tube 4 for collect the speed.
In order to improve the odor filtering effect, the activated carbon filtering layer comprises a first activated carbon filtering layer 7 and a second activated carbon filtering layer 8, a first activated carbon filtering net 12 is arranged in the first activated carbon filtering layer 7, and a second activated carbon filtering net 11 is arranged in the second activated carbon filtering layer 8.
In order to observe the filtering state conveniently, the front side of the collecting box 1 is provided with at least two observation ports 20.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

1. The waste water collecting device for semiconductor processing is characterized by comprising a collecting box (1), wherein the collecting box (1) comprises a collecting tank (2), a water inlet pipe (4) and a water outlet pipe, the water inlet pipe (4) is positioned at the top of the collecting box (1) and penetrates through the collecting box (1) to extend into the collecting tank (2), a limiting block (3) is arranged at the penetrating position of the water inlet pipe (4) and the collecting box (1), the water inlet pipe (4) is provided with two layers, the water outlet pipe is positioned at one side of the collecting box (1), penetrates through the collecting box (1) to extend into the collecting tank (2), is close to the bottom of the collecting box (1), the water outlet pipe comprises an inner water outlet pipe (17) and an outer water outlet pipe (16), the inner water outlet pipe (17) is positioned inside the outer water outlet pipe (16), and spiral grains (25) are arranged between the inner water outlet pipe (17) and the outer water outlet pipe (16) for connecting, the end part of the drain pipe, which is positioned in the collecting tank (2), is provided with a sealing valve (18), a sealing gasket (19) is arranged at the penetrating part of the drain pipe and the collecting tank (1), the collecting tank (2) comprises a microfiltration membrane filter layer (6), an activated carbon layer, a reverse osmosis layer and a water collecting tank (9), the water collecting tank (9) is positioned at the bottom of the collecting tank (2), the bottom of the water collecting tank (9) is inclined and inclines towards the direction of the drain pipe, an electrolyzer (15) is arranged in the collecting tank (2), the electrolyzer (15) is positioned at one side of the water collecting tank (9) and is far away from the drain pipe, the outer side of the collecting tank (1) is provided with an electrolyzer (14), the electrolyzer (14) is hung at the outer side of the collecting tank (1), a lead is arranged between the electrolyzer (14) and the electrolyzer (15) for connection, and the reverse osmosis layer is positioned above the water collecting tank (9), the reverse osmosis membrane is characterized in that a reverse osmosis net (10) is arranged in the reverse osmosis layer, the activated carbon layer is positioned above the reverse osmosis layer, an activated carbon filter screen is arranged in the activated carbon layer, the microfiltration membrane filter layer (6) is positioned above the activated carbon layer, and a microfiltration membrane (13) is arranged in the microfiltration membrane filter layer (6).
2. The wastewater collection device for semiconductor processing according to claim 1, wherein the stopper (3) comprises an upper stopper (26) and a lower stopper (27), the upper stopper (26) and the lower stopper (27) are provided with mounting ports (22), the water inlet pipe (4) is connected with the upper stopper (26) and the lower stopper through the mounting ports (22), the upper stopper (26) and the lower stopper (27) are provided with connecting holes (23), the connecting holes (23) are located at the corners of the upper stopper (26) and the lower stopper (27), the connecting holes (23) are provided with connecting bolts (30), and fastening nuts (31) are arranged between the connecting bolts (30) and the upper stopper (26) and the lower stopper (27).
3. The wastewater collection device for semiconductor processing according to claim 2, wherein a cotton filter screen (29) is provided in the upper limiting block (26), and a nanofiltration membrane (28) is provided in the lower limiting block (27).
4. The wastewater collection apparatus for semiconductor processing according to claim 2, wherein the upper stopper (26) is provided with an anti-clogging hole (24) at the top.
5. The wastewater collection device for semiconductor processing according to claim 1, wherein a clamping block (21) is arranged on the side of the limiting block (3), a clamping groove is arranged on the top of the collection box (1), and the limiting block (3) is connected with the collection box (1) through the clamping block (21) and the clamping groove.
6. The wastewater collection device for semiconductor processing according to claim 1, wherein at least two water inlet pipes (4) are provided, and the water inlet pipes (4) are provided with connecting valves (5).
7. The wastewater collection device for semiconductor processing according to claim 1, wherein the activated carbon layer comprises a first activated carbon filter layer (7) and a second activated carbon filter layer (8), a first activated carbon filter mesh (12) is provided in the first activated carbon filter layer (7), and a second activated carbon filter mesh (11) is provided in the second activated carbon filter layer (8).
8. The wastewater collection device for semiconductor processing according to claim 1, wherein the collection tank (1) is provided with at least two observation ports (20) at the front side thereof, and the observation ports (20) are provided.
CN202023089078.5U 2020-12-18 2020-12-18 Waste water collection device for semiconductor processing Active CN215667379U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202023089078.5U CN215667379U (en) 2020-12-18 2020-12-18 Waste water collection device for semiconductor processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202023089078.5U CN215667379U (en) 2020-12-18 2020-12-18 Waste water collection device for semiconductor processing

Publications (1)

Publication Number Publication Date
CN215667379U true CN215667379U (en) 2022-01-28

Family

ID=79949482

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202023089078.5U Active CN215667379U (en) 2020-12-18 2020-12-18 Waste water collection device for semiconductor processing

Country Status (1)

Country Link
CN (1) CN215667379U (en)

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