CN215667142U - Electromagnetic pulse micro-volume high-speed forming reinforcement structure of micro device - Google Patents
Electromagnetic pulse micro-volume high-speed forming reinforcement structure of micro device Download PDFInfo
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Abstract
The utility model relates to an electromagnetic pulse micro-volume high-speed forming reinforcement structure of a micro device, which comprises a fixed column, a first-stage adjustable plate, a first-stage amplifying connecting rod hinge structure and a second-stage reinforcement connecting rod hinge structure; the first-stage amplification connecting rod hinge structure comprises a first-stage amplifier and an inverted V-shaped connecting rod hinge structure, and the second-stage reinforcement connecting rod hinge structure comprises a second-stage amplifier and a rhombic connecting rod hinge structure; the upper end of the inverted V-shaped connecting rod hinge structure is hinged with the bottom end of the first-level amplifier, the left bottom end and the right bottom end of the inverted V-shaped connecting rod hinge structure are hinged with the inner ends of the left diamond-shaped connecting rod hinge structure and the right diamond-shaped connecting rod hinge structure respectively, the upper end and the lower end of each of the two diamond-shaped connecting rod hinge structures are symmetrically hinged and installed on the first-level adjustable plate and the sliding block on the second-level amplifier respectively, and the outer ends of the two diamond-shaped connecting rod hinge structures are connected with the left fixing column and the right fixing column respectively. The utility model can realize initial 3.7 times of force increasing, and the force increasing times are increased along with the increase of the stroke, thereby being particularly beneficial to the micro-segment replication of micro-volume forming tail-section micro parts.
Description
Technical Field
The utility model relates to the field of advanced processing and manufacturing of electromagnetic pulses and the field of micro-volume forming, in particular to an electromagnetic pulse micro-volume high-speed forming and boosting structure of a micro device.
Background
With the rapid development of science and technology, modern manufacturing industry has also been developed at a high speed, and various manufacturing techniques and processing methods such as bamboo shoots in spring after rain, are new and are different day by day. Economic construction and development are greatly improved, the harsh modern economic environment also puts higher requirements on products in the market, and the products are required to be lean and refined. Many products are also being miniaturized and miniaturized, especially in the fields of aerospace, precision machine tools, precision instruments and medical instruments with high technological content, and micro devices are increasingly widely used.
At present, the micro-processing technology of micro-devices mainly depends on technologies such as photoetching, silicon micro-processing, chemical etching and the like, but the technologies cannot meet the processing of three-dimensional micro-devices with complex shapes, and meanwhile, the micro-processing of increasingly developed new materials cannot be carried out, so that the application of the new materials is greatly limited.
Further, micro-machining techniques for forming micro-members such as micro-electric discharge machining, micro-machining, laser micro-machining, ultrasonic micro-machining methods, and the like have respective machining application ranges and limitations, and for example, the preliminary preparation process of micro-electric discharge machining is complicated, the machining material is limited, and the machining efficiency is low; the precision and the size of the micro-part which can be processed by micro-cutting are limited; the laser micromachining and ultrasonic micromachining methods cannot arrange auxiliary equipment when processing some micro parts with complex profiles, optical components for guiding light in the laser micromachining and acoustic electrodes in the ultrasonic micromachining have problems, and optical paths cannot be designed to reach required specific processing areas in the laser micromachining.
In addition, at present, micro-device processing is carried out through micro-volume forming, and micro features on a micro die can be precisely re-engraved on the micro device, so that the micro device with a complex and precise structure can be obtained, and the micro device is low in energy consumption, high in efficiency and suitable for mass production.
In the field of micro-volume forming, a plurality of scholars at home and abroad conduct extensive research and study, and a reverse extrusion micro-forming mechanical system is designed by Y.saotome (J.Mater.Process.Tech.2000,119:307-311) of the university of Gunma in Japan, and a micro gear with the modulus of 10 microns is manufactured by using the system. Chinese patent 200810023264.3 provides a basic device for micro-volume forming by laser impact, and a novel process method such as welding and riveting a workpiece by using instantaneous peak force generated by electromagnetic pulse has incomparable advantages of the conventional process. The electromagnetic pulse process parameter control is simple, the process is simple and efficient, and the method is suitable for mass production.
The electromagnetic pulse is used as micro volume forming power source, and the forming force of instantaneous explosion of the electromagnetic pulse is used. However, although the traditional explosion forming can also obtain high strain rate, the safety is poor, and the process parameters are difficult to control. In addition, in the micro-volume forming process, the electromagnetic pulse can provide instantaneous ultrahigh dynamic loading, the magnitude of the electromagnetic force is adjusted by increasing the discharge voltage, but sometimes the conditions such as material insulation, coil strength and the like limit, the discharge voltage cannot be greatly increased, the yield strength of some metal materials is higher, the method for increasing the forming force by increasing the discharge energy also provides high requirements for the insulation of the coil and a circuit system and the coil strength, and the requirements are difficult to achieve at present.
Disclosure of Invention
The utility model provides an electromagnetic pulse micro-volume high-speed forming reinforcement structure of a micro device aiming at the insufficient forming force of electromagnetic pulse volume forming, and aims to increase the electromagnetic pulse forming force under a discharge voltage.
In order to achieve the purpose, the utility model adopts the following technical scheme:
the electromagnetic pulse micro-volume high-speed forming reinforcement structure of the microdevice is characterized in that the reinforcement structure comprises a fixed column, a first-stage adjustable plate, a first-stage amplifying connecting rod hinge structure and a second-stage reinforcement connecting rod hinge structure; the first-stage amplification connecting rod hinge structure comprises a first-stage amplifier and an inverted V-shaped connecting rod hinge structure, and the second-stage reinforcement connecting rod hinge structure comprises a second-stage amplifier and a rhombic connecting rod hinge structure; the primary adjustable plate and the secondary amplifier are respectively and horizontally connected with the fixed columns fixed on the left side and the right side of the boosting structure, the secondary amplifier can slide along the fixed columns, and the output end of the primary amplifier is arranged in the center of the primary adjustable plate; the upper end of the inverted V-shaped connecting rod hinge structure is hinged with the bottom end of the primary amplifier, the left bottom end and the right bottom end of the inverted V-shaped connecting rod hinge structure are hinged with the inner ends of the two rhombic connecting rod hinge structures which are symmetrically distributed left and right, the upper end and the lower end of each of the two rhombic connecting rod hinge structures are symmetrically hinged and mounted on the sliding blocks on the primary adjustable plate and the secondary amplifier respectively, the sliding blocks can synchronously slide along the surfaces of the primary adjustable plate and the secondary amplifier, and the outer ends of the two rhombic connecting rod hinge structures are connected with the left fixing column and the right fixing column respectively; the workpiece is placed right below the output end of the secondary amplifier.
Furthermore, the inverted V-shaped connecting rod hinge structure is positioned right below the primary amplifier and consists of two inverted V-shaped connecting rods and a mounting block; the upper ends of the two inverted V-shaped connecting rods are respectively hinged with the mounting block at the bottom end of the primary amplifier, and the lower ends of the two inverted V-shaped connecting rods are respectively hinged with the inner ends of the two rhombic connecting rod hinge structures which are symmetrically distributed left and right.
Further, the force-increasing structure also comprises a secondary adjustable plate; the secondary adjustable plate is horizontally arranged on the left fixed column and the right fixed column, and the primary adjustable plate and the secondary adjustable plate can respectively move up and down along the fixed columns; the output end of the secondary amplifier is arranged in the center of the secondary adjustable plate, and the secondary amplifier is positioned below the primary amplifier.
Furthermore, the rhombic connecting rod hinge structure consists of a rhombic boosting structure connecting rod, a composite hinge and the sliding block; the 4 rhombic force-increasing structure connecting rods are enclosed into a rhombic structure, the upper end, the lower end and the outer end of the rhombic structure are respectively hinged to the sliding block through 2 rhombic force-increasing structure connecting rods, and the inner end of the rhombic structure is hinged to the inverted V-shaped structure connecting rod through the composite hinge.
Furthermore, the left end and the right end of the first-stage adjustable plate and the second-stage adjustable plate are horizontally arranged on the two fixing columns through nuts respectively.
Furthermore, a first-stage guide sleeve and a second-stage guide sleeve are respectively arranged at the centers of the first-stage adjustable plate and the second-stage adjustable plate, and the output ends of the first-stage amplifier and the second-stage amplifier respectively penetrate through the first-stage guide sleeve and the second-stage guide sleeve for guiding.
Further, the first-stage amplifier and the second-stage amplifier are coaxially arranged up and down.
The utility model has the beneficial effects that:
the method for micro-volume high-speed forming by using electromagnetic pulse is simple and practical, has simple process and wide application range, adopts the electromagnetic pulse as the forming force source for micro-volume forming of the micro device, and has the characteristics of ultrahigh pressure, ultrahigh strain rate and extremely short loading time. According to the utility model, through the inverted V-shaped connecting rod hinge structure and the symmetrical diamond-shaped connecting rod hinge structure, electromagnetic force can be amplified by multiple times, the problems that three-dimensional complex devices are difficult to form and materials with large flow stress are difficult to form by a conventional micro-processing method are solved, and micro features on a micro die can be accurately copied to a micro workpiece. The utility model has reasonable design, reliable structure and simple process, and is beneficial to batch production.
The utility model has the advantages of large adjustment range of the size of the formable material and the processable micro device, strong processing adaptability and large processing flexibility, and can carry out micro forming from conventional metal materials, amorphous materials, superplastic materials and composite materials to materials and powder materials which are difficult to process. And also provides guidance for other micro-plastic forming.
Drawings
FIG. 1 is a schematic diagram of an electromagnetic pulse micro high-speed volume shaping boosting configuration of a micro-device of the present invention;
FIG. 2 is a graph showing the relationship between the angle beta and the force-increasing factor of the hinge structure of the diamond-shaped connecting rod of the present invention.
Wherein: 1-a first-stage amplifier, 2-a first-stage guide sleeve, 3-a diamond reinforcement structure connecting rod, 4-a compound hinge, 5-a second-stage amplifier, 6-a second-stage guide sleeve, 7-a miniature blank, 8-a base, 9-a second-stage adjustable plate, 10-a fixed column, 11-a sliding block, 12-an inverted V-shaped structure connecting rod, 13-a first-stage adjustable plate and 14-a nut.
Detailed Description
In order to make those skilled in the art better understand the technical solutions of the present application, the present invention will be further described in detail below with reference to the accompanying drawings and examples.
The terms of orientation such as up, down, left, right, front, and rear in the present specification are established based on the positional relationship shown in the drawings. The corresponding positional relationship may also vary depending on the drawings, and therefore, should not be construed as limiting the scope of protection.
In the present invention, the terms "mounted," "connected," "fixed," and the like are to be understood in a broad sense, and for example, may be fixedly connected, detachably connected, integrally connected, mechanically connected, electrically connected or capable of communicating with each other, directly connected, indirectly connected through an intermediate medium, or communicated between two components, or interacting between two components. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The present embodiment describes an electromagnetic pulse micro-volume high-speed forming force-increasing structure of a micro device, which is a two-stage force-increasing structure, different from a conventional electromagnetic pulse micro-volume forming loading mode, and aiming at the difficulty that a material in micro-volume forming needs a huge forming force in a mold to copy a micro section, the present embodiment amplifies an initial electromagnetic force by several times, and can effectively perform a plurality of micro-volume forming such as micro extrusion, micro forging, micro pressing and the like on a plurality of materials such as a metal material, an amorphous material, a superplastic material, a composite material and the like.
As shown in fig. 1, the first-stage amplifier 1 and the inverted V-shaped link hinge structure form a first-stage amplification link hinge structure for first-stage amplification of the electromagnetic force, and the second-stage amplifier 5 and the rhombic link hinge structure form a second-stage boosting link hinge structure for second-stage amplification of the electromagnetic force.
The output end of the first-stage amplifier 1 is arranged in the center of the first-stage adjustable plate 13, the second-stage amplifier 5 is arranged under the first-stage amplifier 1, the output end of the second-stage amplifier is arranged in the center of the second-stage adjustable plate 9, the output ends of the two amplifiers are coaxially arranged, and the left end and the right end of the second-stage amplifier 5 are connected with the fixed columns 10 which are symmetrically arranged on the base 8 in the left-right direction and can slide up and down along the fixed columns 10. The left end and the right end of the first-stage adjustable plate 13 and the second-stage adjustable plate 9 are horizontally arranged on the fixed column 10 through nuts 14 respectively, and the heights of the first-stage adjustable plate 13 and the second-stage adjustable plate 9 can be adjusted through the nuts 14 respectively so as to adapt to the forming stroke and the micro blanks 7 with different heights. The miniature blank 7 is placed on a base 8 directly below the output of the secondary amplifier 5.
The inverted V-shaped connecting rod hinge structure and the rhombic connecting rod hinge structure are arranged between the primary amplifier 1 and the secondary amplifier 5, and can amplify the electromagnetic force by multiple times.
The inverted V-shaped connecting rod hinge structure is positioned right below the primary amplifier 1 and consists of two inverted V-shaped connecting rods 12 and a mounting block. The two connecting rods 12 with the inverted V-shaped structures are connected in an inverted V shape, the upper ends of the connecting rods are respectively hinged with the mounting block arranged at the bottom end of the primary amplifier 1 and can be driven by the mounting block to lift, and the lower ends of the connecting rods are respectively hinged with the inner ends of the rhombic connecting rod hinge structures which are symmetrically distributed left and right through the composite hinges 4. When the inverted V-shaped structure connecting rods 12 are stressed, the included angle between the two inverted V-shaped structure connecting rods 12 and the included angle theta between the two inverted V-shaped structure connecting rods and the rhombic connecting rod hinge structure can be changed through hinging.
The rhombic connecting rod hinge structure consists of a rhombic boosting structure connecting rod 3, a composite hinge 4 and a sliding block 11. 4 rhombus reinforcement structure connecting rods 3 enclose a rhombus structure, wherein the upper end, the lower end and the outer end of the rhombus structure are respectively hinged with 2 rhombus reinforcement structure connecting rods 3 on a sliding block 11, the inner end of the rhombus structure realizes the hinged connection of the 2 rhombus reinforcement structure connecting rods 3 and an inverted V-shaped structure connecting rod 12 through a composite hinge 4, the inner end of the rhombus structure in the embodiment refers to one end close to the center of the reinforcement structure, namely the adjacent end of the 2 rhombus connecting rod hinge structures, and the outer end of the rhombus structure refers to the other end symmetrical to the inner end, namely one end connected with a fixed column 10.
The upper and lower sliders 11 are respectively arranged on the first-stage adjustable plate 13 and the second-stage amplifier 5, and the connecting rod 3 of the diamond reinforcement structure can synchronously slide along the surfaces of the first-stage adjustable plate 13 and the second-stage amplifier 5 in the forming process. The sliders 11 at the outer ends of the left and right rhombic connecting rod hinge structures are respectively installed on the left and right fixed columns 10 and can slide up and down along the fixed columns 10 according to forming requirements.
In addition, in this embodiment, the centers of the first-stage adjustable plate 13 and the second-stage adjustable plate 9 are respectively provided with the first-stage guide sleeve 2 and the second-stage guide sleeve 6, the output ends of the first-stage amplifier 1 and the second-stage amplifier 5 are respectively installed on the first-stage adjustable plate 13 and the second-stage adjustable plate 9 through the first-stage guide sleeve 2 and the second-stage guide sleeve 6, and guidance is performed by the first-stage guide sleeve 2 and the second-stage guide sleeve 6, so that the force application direction of the electromagnetic force F is ensured to be unchanged.
After electrifying, strong instantaneous electromagnetic force F generated by electromagnetic pulse acts on the primary amplifier 1, the primary amplifier 1 transmits the electromagnetic force F to the compound hinge 4 through the inverted V-shaped structure connecting rod 12, then the electromagnetic force F is further amplified through the rhombus connecting rod hinge structures which are symmetrically distributed at the left and the right and is transmitted to the upper end of the secondary amplifier 5, the secondary amplifier 5 further amplifies the value of the electromagnetic force F and then moves downwards to act on the micro blank 7 (namely a workpiece or a die) to apply pressure on the micro blank 7, the impact peak pressure exceeds the dynamic yield strength of the micro blank 7 material, so that the micro blank 7 is subjected to plastic forming, the micro volume high-speed forming of the micro blank 7 is completed, and a micro device matched with the die shape is obtained.
Micro-volume forming of various complex shapes of the micro-sized blank 7 can also be achieved if a micro-mold is placed under the secondary amplifier 5. The electromagnetic force of electromagnetic pulse is used as a forming force source for micro-volume forming of the micro-device, an external power supply is utilized to charge a capacitor of an electromagnetic pulse generator through a rectifying circuit, the capacitor stores electric energy, the capacitor is controlled by a discharging switch to discharge electricity to a coil, the copper plate right below the coil generates eddy current and Lorentz force (namely electromagnetic force) is generated, and the Lorentz force is used as forming force to convert the electric energy into mechanical energy.
The electromagnetic force is amplified by a plurality of times through the primary amplifier 1, the inverted V-shaped connecting rod hinge structure, the diamond-shaped connecting rod hinge structure and the secondary amplifier 5, the peak value of the impact pressure exceeds the dynamic yield strength of the material of the micro-blank 7, the micro-characteristics of the die are prompted to be repeatedly engraved on the micro-device, the micro-volume forming of the micro-blank 7 is completed, and the micro-device matched with the shape of the die is obtained.
In the present embodiment, only the micro free heading of the cylindrical blank is taken as an example for explanation, and initially, the diamond-shaped force-increasing structure connecting rod 3 (length 100mm) of the diamond-shaped connecting rod hinge structure has an initial angle β of 15 ° with the vertical line, and the inverted V-shaped structure connecting rod 12 (length 200mm) of the inverted V-shaped connecting rod hinge structure has an initial angle θ of 25 ° with the horizontal line. In the forming process, the electromagnetic force F acts on the primary amplifier 1 firstly, then the electromagnetic force F is transmitted to the inverted V-shaped structure connecting rod 12 through the mounting block below the primary amplifier 1, and the inverted V-shaped structure connecting rod 12 transmits the electromagnetic force F to the rhombic reinforcement structure connecting rod 3 through the compound hinge 4; along with the downward movement of the first-stage amplifier 1, the mounting block on the inverted V-shaped structure connecting rod 12 is forced to move downward, the angle theta of the inverted V-shaped structure connecting rod 12 is reduced, the diamond force-increasing structure connecting rod 3 is subjected to main power due to the composite hinge end of the diamond force-increasing structure connecting rod, the sliding blocks 11 at the upper end and the lower end of the diamond connecting rod hinge structure can move in parallel with the contact surfaces of the first-stage adjustable plate 13 and the second-stage amplifier 5, at the moment, the sliding blocks 11 at the outer end of the diamond connecting rod hinge structure are fixed, the angle beta of the sliding blocks can be forced to be reduced, the second-stage amplifier 5 is pushed to move downward, and forming force is applied to the micro blank 7 or a micro die and the like.
The heights of the first-stage adjustable plate 13 and the second-stage adjustable plate 9 are initially adjusted by using a rotating nut 14 according to the required heights of the diamond connecting rod hinge structure, the micro blank 7, the micro die and the like.
According to the different requirements of the micro-blank 7 on the size of forming load and micro-forming process, single or multiple impact loading can be adopted, and multi-step micro-plastic forming can be simply realized.
The reinforcement times at different angles realized by the forming process are shown in fig. 2, and it can be seen that the reinforcement times are increased along with the increase of the die stroke, the reinforcement structure can amplify the electromagnetic force F by at least 3.7 times, and along with the forming process, the secondary amplifier 5 moves downwards under the action of the rhombic connecting rod hinge structure, the smaller the angles theta and beta are, the more obvious the forming force reinforcement effect is, which is very beneficial to the micro-feature repeated engraving of the micro-volume forming end section.
In addition, the force-increasing structure of the present embodiment may be modified or deformed to be suitable for other plastic forming methods.
While the principles of the utility model have been described in detail in connection with the preferred embodiments thereof, it will be understood by those skilled in the art that the foregoing embodiments are merely illustrative of exemplary implementations of the utility model and are not limiting of the scope of the utility model. The details of the embodiments are not to be interpreted as limiting the scope of the utility model, and any obvious changes, such as equivalent alterations, simple substitutions and the like, based on the technical solution of the utility model, can be interpreted without departing from the spirit and scope of the utility model.
Claims (7)
1. The electromagnetic pulse micro-volume high-speed forming reinforcement structure of the microdevice is characterized by comprising a fixed column (10), a primary adjustable plate (13), a primary amplification connecting rod hinge structure and a secondary reinforcement connecting rod hinge structure; the first-stage amplification connecting rod hinge structure comprises a first-stage amplifier (1) and an inverted V-shaped connecting rod hinge structure, and the second-stage boosting connecting rod hinge structure comprises a second-stage amplifier (5) and a rhombic connecting rod hinge structure; the primary adjustable plate (13) and the secondary amplifier (5) are respectively and horizontally connected with the fixed columns (10) fixed on the left side and the right side of the boosting structure, the secondary amplifier (5) can slide along the fixed columns (10), and the output end of the primary amplifier (1) is installed in the center of the primary adjustable plate (13); the upper end of the inverted V-shaped connecting rod hinge structure is hinged with the bottom end of the primary amplifier (1), the left bottom end and the right bottom end of the inverted V-shaped connecting rod hinge structure are hinged with the inner ends of the two diamond-shaped connecting rod hinge structures which are symmetrically distributed left and right, the upper end and the lower end of each of the two diamond-shaped connecting rod hinge structures are symmetrically hinged and installed on the first-stage adjustable plate (13) and the sliding block (11) on the second-stage amplifier (5) respectively, the sliding blocks (11) can synchronously slide along the surfaces of the first-stage adjustable plate (13) and the second-stage amplifier (5), and the outer ends of the two diamond-shaped connecting rod hinge structures are connected with the left fixing column (10) and the right fixing column (10) respectively; the workpiece is placed right below the output end of the secondary amplifier (5).
2. The electromagnetic pulse micro-volume high-speed forming force-increasing structure of a micro-device according to claim 1, wherein the inverted V-shaped connecting rod hinge structure is positioned right below the primary amplifier (1) and consists of two inverted V-shaped connecting rods (12) and a mounting block; the upper ends of the two inverted V-shaped connecting rods (12) are respectively hinged with the mounting block at the bottom end of the primary amplifier (1), and the lower ends of the two inverted V-shaped connecting rods are respectively hinged with the inner ends of the two rhombic connecting rod hinge structures which are symmetrically distributed at the left and right.
3. The electromagnetic pulse micro-volume high-speed shaping booster structure of a micro-device according to claim 1, wherein the booster structure further comprises a secondary adjustable plate (9); the secondary adjustable plate (9) is horizontally arranged on the left fixed column (10) and the right fixed column (10), and the primary adjustable plate (13) and the secondary adjustable plate (9) can respectively move up and down along the fixed columns (10); the output end of the secondary amplifier (5) is arranged in the center of the secondary adjustable plate (9), and the secondary amplifier (5) is positioned below the primary amplifier (1).
4. The electromagnetic pulse micro-volume high-speed forming force-increasing structure of a micro device according to claim 2, wherein the diamond-shaped connecting rod hinge structure is composed of a diamond-shaped force-increasing structure connecting rod (3), a compound hinge (4) and the sliding block (11); the 4 rhombic force-increasing structure connecting rods (3) are enclosed to form a rhombic structure, the upper end, the lower end and the outer end of the rhombic structure are respectively provided with 2 rhombic force-increasing structure connecting rods (3) which are hinged on the sliding block (11), and the inner end of the rhombic structure is hinged with the inverted V-shaped structure connecting rod (12) through the composite hinge (4) by virtue of the 2 rhombic force-increasing structure connecting rods (3).
5. The electromagnetic pulse micro-volume high-speed forming and force-increasing structure of a micro-device according to claim 3, wherein the left and right ends of the primary adjustable plate (13) and the secondary adjustable plate (9) are horizontally mounted on the two fixed columns (10) through nuts (14), respectively.
6. The structure of micro-volume high-speed forming and force-increasing of electromagnetic pulses of micro-devices according to claim 3, wherein a primary guide sleeve (2) and a secondary guide sleeve (6) are respectively arranged at the center of the primary adjustable plate (13) and the center of the secondary adjustable plate (9), and the output ends of the primary amplifier (1) and the secondary amplifier (5) are respectively guided through the primary guide sleeve (2) and the secondary guide sleeve (6).
7. The electromagnetic pulse micro-volume high-speed shaping booster structure of a micro-device according to claim 1, wherein the primary amplifier (1) and the secondary amplifier (5) are coaxially arranged one above the other.
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| CN113247858A (en) * | 2021-05-12 | 2021-08-13 | 湖南大学 | Electromagnetic pulse micro-volume high-speed forming reinforcement structure of micro device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113247858A (en) * | 2021-05-12 | 2021-08-13 | 湖南大学 | Electromagnetic pulse micro-volume high-speed forming reinforcement structure of micro device |
| CN113247858B (en) * | 2021-05-12 | 2024-05-14 | 湖南大学 | Electromagnetic pulse micro-volume high-speed forming reinforcement structure of micro device |
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