CN215640954U - Equipment for manufacturing transmission electron microscope sample - Google Patents
Equipment for manufacturing transmission electron microscope sample Download PDFInfo
- Publication number
- CN215640954U CN215640954U CN202120928493.0U CN202120928493U CN215640954U CN 215640954 U CN215640954 U CN 215640954U CN 202120928493 U CN202120928493 U CN 202120928493U CN 215640954 U CN215640954 U CN 215640954U
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- axis movement
- movement mechanism
- lead screw
- electron microscope
- transmission electron
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 230000007246 mechanism Effects 0.000 claims abstract description 76
- 230000033001 locomotion Effects 0.000 claims abstract description 58
- 238000002360 preparation method Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 description 7
- 244000137852 Petrea volubilis Species 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000001493 electron microscopy Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
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Abstract
The utility model discloses equipment for manufacturing a transmission electron microscope sample, which comprises a base, wherein a multistage grinding disc is arranged on the base, X-axis motion mechanisms are arranged on two opposite sides of the multistage grinding disc, a Y-axis motion mechanism is arranged on the X-axis motion mechanism, a Z-axis motion mechanism is arranged on the Y-axis motion mechanism, a clamping mechanism and a laser ranging sensor are arranged on the Z-axis motion mechanism, the X-axis motion mechanism 1, the Y-axis motion mechanism 2 and the Z-axis motion mechanism 3 are respectively connected with a servo motor, and the servo motors and the laser ranging sensor 4 are connected on a controller.
Description
Technical Field
The utility model belongs to the technical field of thinning mechanical equipment, and relates to equipment for manufacturing a transmission electron microscope sample.
Background
The preparation of a transmission electron microscope sample is an important step in electron microscopy research, the preparation of the transmission electron microscope sample is generally divided into two steps, the first step is mechanical grinding, a sample to be observed is cut into sheets with the thickness of about 200-500 mu m according to a preset orientation, and then the sheets are mechanically thinned to the thickness of 30-50 mu m; and the second step is to select proper preparation methods for further thinning according to different requirements of materials and instruments and sample characteristics, such as a double-spraying thinning method, an ion thinning method and the like.
The current mechanical thinning method is a manual grinding method, and the manual grinding method is generally characterized in that grinding, thinning and measuring are carried out manually from small to large according to the type of metallographic abrasive paper so as to determine the thickness of a sample. However, the method has many problems, such as uneven grinding of the sample due to uneven force applied during sample grinding, sample scrapping due to uneven sample thickness, time and labor consumption in the manual thinning method for preparing the transmission sample, low success rate, poor dimensional accuracy of the obtained sheet, and the like.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide equipment for manufacturing a transmission electron microscope sample, which solves the problems that the sheet manufactured by the existing sample thinning equipment is poor in size precision and a micron-sized transmission sample is difficult to prepare.
The technical scheme adopted by the utility model is that the equipment for manufacturing the transmission electron microscope sample comprises a base, wherein a multistage sample grinding disc is arranged on the base, X-axis moving mechanisms are arranged on two opposite sides of the multistage sample grinding disc, a Y-axis moving mechanism is arranged on the X-axis moving mechanism, a Z-axis moving mechanism is arranged on the Y-axis moving mechanism, a clamping mechanism and a laser ranging sensor are arranged on the Z-axis moving mechanism, the X-axis moving mechanism, the Y-axis moving mechanism and the Z-axis moving mechanism are respectively connected with a servo motor, and the servo motors and the laser ranging sensor are all connected to a controller.
The utility model is also characterized in that the multi-stage sample grinding disc comprises at least two grinding discs with different mesh numbers, wherein the grinding discs in the multi-stage sample grinding disc are arranged on the top surface of the base in a straight shape.
The X-axis movement mechanism comprises a ball screw, the ball screw comprises a screw rod and a nut, the screw rod is connected with a servo motor, and the nut is connected with the Y-axis movement mechanism through a screw.
The X-axis movement mechanism comprises two ball screws which are oppositely arranged.
The X-axis movement mechanism comprises a sliding rail arranged in parallel with the screw rod, a sliding block is sleeved on the sliding rail, and the sliding block is connected with the Y-axis movement mechanism through a screw.
The Y-axis movement mechanism comprises a screw guide rail A and a screw sliding table A which are matched with each other, and the screw sliding table A is connected with the Z-axis movement mechanism through screws.
The Z-axis movement mechanism comprises a vertical screw guide rail B and a screw sliding table B, the screw sliding table B is sleeved on the screw guide rail B and is meshed with the screw thread on the screw guide rail B, and the laser ranging sensor and the clamping mechanism are both installed on the screw sliding table B.
The clamping mechanism is installed on the bottom surface of the lead screw sliding table B, and the laser ranging sensor is higher than the clamping mechanism.
Z axle motion includes the curb plate, and both ends all are provided with the mount pad of installation lead screw guide rail B about the curb plate, and fixture bottom is less than curb plate lower extreme mount pad bottom surface, and laser rangefinder sensor installs on lead screw slip table B keeps away from the side of curb plate.
The full-automatic transmission sample thinning equipment has the advantages that the full-automatic transmission sample thinning equipment is formed by the X-axis movement mechanism, the Y-axis movement mechanism, the Z-axis movement mechanism, the multi-stage sample grinding disc, the clamping mechanism and the laser ranging sensor, the thickness of a sample can be monitored in real time, the movement track of the sample is controlled according to the real-time thickness of the sample and the target thickness, the sample thinning efficiency is improved, the sample thinning precision is also improved, the structure is simple, the occupied space is small, the assembly and disassembly are convenient, the practicability is high, transmission samples with various thicknesses can be manufactured by the full-automatic transmission sample thinning equipment, the operation is simple, and the precision is high.
Drawings
FIG. 1 is a schematic perspective view of an apparatus for producing a TEM sample according to the present invention;
FIG. 2 is a schematic plan view of an apparatus for producing a TEM sample according to the present invention;
FIG. 3 is a schematic top view of an apparatus for manufacturing a TEM sample according to the present invention;
FIG. 4 is a schematic side view of an apparatus for producing a TEM sample according to the present invention;
FIG. 5 is a schematic flow chart of an apparatus for manufacturing a TEM sample according to the present invention.
In the figure, 1, an X-axis movement mechanism, 2, a Y-axis movement mechanism, 3, a Z-axis movement mechanism, 4, a laser ranging sensor, 5, a slide rail, 6, a slide block, 7, a clamping mechanism, 8, a base, 9, a multi-stage sample grinding disc, 11, a ball screw, 111, a screw rod, 112, a nut, 21, a screw guide rail A, 22, a screw sliding table A, 31, a screw guide rail B, 32, a screw sliding table B, 33, a side plate, 34, a mounting seat, 91.600# grinding disc and 92.1500# grinding disc.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
The utility model discloses equipment for manufacturing a transmission electron microscope sample, and relates to the equipment shown in the figures 1 and 2, the equipment comprises a base 8, a multistage sample grinding disc 9 is arranged on the base 8, X-axis moving mechanisms 1 are arranged on two opposite sides of the multistage sample grinding disc, a Y-axis moving mechanism 2 is arranged on the X-axis moving mechanism 1, a Z-axis moving mechanism 3 is arranged on the Y-axis moving mechanism 2, a clamping mechanism 7 and a laser ranging sensor 4 are arranged on the Z-axis moving mechanism 3, the X-axis moving mechanism 1, the Y-axis moving mechanism 2 and the Z-axis moving mechanism 3 are respectively connected with a servo motor, the servo motor and the laser ranging sensor 4 are connected onto a controller, and the controller is a computer.
The detection distance of the laser distance measuring sensor 4 is 30 +/-5 mm, and the detection precision is 0.01 mu m.
The multi-stage grinding plate 9 comprises two grinding plates with different meshes, namely a 600# grinding plate 91 and a 1500# grinding plate 92, which are arranged on the top surface of the base 8 in a straight line shape, wherein the grinding plates are grinding plates of sand paper in the embodiment, and the sand paper is fixed on the top of the grinding plates.
Referring to fig. 3 and 4, the X-axis movement mechanism 1 includes a ball screw 11, the ball screw 11 includes a screw 111 and a nut 112, the screw 111 is connected with a servo motor, and the nut 112 is connected with the Y-axis movement mechanism 2 by a screw.
The X-axis movement mechanism 1 comprises a sliding rail 5 arranged in parallel with the screw rod 111, a sliding block 6 is sleeved on the sliding rail 5, and the sliding block 6 is connected with the Y-axis movement mechanism 2 through a screw.
The Y-axis movement mechanism 2 comprises a lead screw guide rail A21 and a lead screw sliding table A22 which are matched, and the lead screw sliding table A22 is connected with the Z-axis movement mechanism 3 through screws.
Z axle motion 3 includes curb plate 33, and both ends all are provided with the mount pad 34 of installation lead screw guide rail B31 about the curb plate 33, and fixture 7 bottom is less than the mount pad 34 bottom surface of curb plate 33 lower extreme, and laser rangefinder sensor 4 is installed on the side of lead screw slip table B32 keeping away from curb plate 33, and laser rangefinder sensor 4 is installed in sample clamping device top 5cm department.
Referring to fig. 5, when the full-automatic transmission sample thinning device of the utility model is used, a sample is fixed at the bottom of a Z-axis movement mechanism 3 through a clamping mechanism 7, a preset thickness of the sample is set in a controller, the Z-axis movement mechanism 3 is moved to the position above a low-mesh grinding disc, the sample is then lowered to the surface of the grinding disc, the bottom surface of the sample is completely contacted with the grinding disc, a laser ranging sensor 4 is started, if the measured thickness of the sample is more than 100 μm, a servo motor of an X-axis movement mechanism is started, the servo motor drives a screw rod 111 to rotate, a nut 112 is driven to reciprocate on the screw rod 111, the nut 112 drives a Y-axis movement mechanism 2 and the Z-axis movement mechanism 3 to horizontally reciprocate, the sample is driven to reciprocate on the low-mesh grinding disc until the thickness of the sample is equal to 100 μm, the Z-axis movement mechanism 3 is moved to the position above the high-mesh grinding disc, and the sample is controlled to reciprocate on the high-mesh grinding disc, until the sample thickness equals the predetermined thickness of the sample.
If the measured thickness of the sample is less than or equal to 100 mu m, the Z-axis movement mechanism 3 is moved to the position above the high-mesh grinding disc, the bottom surface of the sample is completely contacted with the grinding disc, and the sample is controlled to move back and forth on the high-mesh grinding disc until the thickness of the sample is equal to the preset thickness of the sample.
Claims (9)
1. The utility model provides an equipment of preparation TEM sample, a serial communication port, including base (8), be provided with multistage grinding appearance dish (9) on base (8), multistage grinding appearance dish (9) relative both sides are provided with X axle motion (1), be provided with Y axle motion (2) on X axle motion (1), be provided with Z axle motion (3) on Y axle motion (2), install fixture (7) and laser range finding sensor (4) on Z axle motion (3), X axle motion (1), Y axle motion (2) and Z axle motion (3) all respectively are connected with servo motor, servo motor and laser range finding sensor (4) all are connected on the controller.
2. The apparatus for manufacturing transmission electron microscope samples according to claim 1, characterized in that the multi-stage grinding plate (9) comprises at least two grinding plates with different mesh numbers, and the grinding plates in the multi-stage grinding plate are arranged on the top surface of the base (8) in a straight line shape.
3. The apparatus for manufacturing transmission electron microscope samples according to claim 1, characterized in that the X-axis movement mechanism (1) comprises a ball screw (11), the ball screw (11) comprises a screw rod (111) and a nut (112), the screw rod (111) is connected with a servo motor, and the nut (112) is connected with the Y-axis movement mechanism (2) through a screw.
4. An apparatus for manufacturing transmission electron microscope samples according to claim 3, characterized in that the X-axis movement mechanism (1) comprises two oppositely arranged ball screws (11).
5. The device for manufacturing the transmission electron microscope sample according to claim 3, wherein the X-axis movement mechanism (1) comprises a sliding rail (5) arranged in parallel with the screw rod (111), a sliding block (6) is sleeved on the sliding rail (5), and the sliding block (6) is connected with the Y-axis movement mechanism (2) through a screw.
6. The equipment for manufacturing the transmission electron microscope sample is characterized in that the Y-axis movement mechanism (2) comprises a lead screw guide rail A (21) and a lead screw sliding table A (22) which are matched, and the lead screw sliding table A (22) is connected with the Z-axis movement mechanism (3) through screws.
7. The equipment for manufacturing the transmission electron microscope sample according to claim 6, wherein the Z-axis movement mechanism (3) comprises a vertical lead screw guide rail B (31) and a lead screw sliding table B (32), the lead screw sliding table B (32) is sleeved on the lead screw guide rail B (31) and is meshed with threads on the lead screw guide rail B (31), and the laser ranging sensor (4) and the clamping mechanism (7) are both installed on the lead screw sliding table B (32).
8. The apparatus for manufacturing transmission electron microscope samples according to claim 7, characterized in that the clamping mechanism (7) is mounted on the bottom surface of the screw slide B (32), and the laser ranging sensor (4) is higher than the clamping mechanism (7).
9. The device for manufacturing the transmission electron microscope sample according to claim 7, wherein the Z-axis movement mechanism (3) comprises a side plate (33), the upper end and the lower end of the side plate (33) are respectively provided with a mounting seat (34) for mounting the lead screw guide rail B (31), and the bottom of the clamping mechanism (7) is lower than the bottom surface of the mounting seat (34) at the lower end of the side plate (33).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120928493.0U CN215640954U (en) | 2021-04-30 | 2021-04-30 | Equipment for manufacturing transmission electron microscope sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120928493.0U CN215640954U (en) | 2021-04-30 | 2021-04-30 | Equipment for manufacturing transmission electron microscope sample |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215640954U true CN215640954U (en) | 2022-01-25 |
Family
ID=79937260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120928493.0U Expired - Fee Related CN215640954U (en) | 2021-04-30 | 2021-04-30 | Equipment for manufacturing transmission electron microscope sample |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215640954U (en) |
-
2021
- 2021-04-30 CN CN202120928493.0U patent/CN215640954U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220125 |