CN215593182U

CN215593182U - Film coating plate frame temporary storage device of film coating machine

Info

Publication number: CN215593182U
Application number: CN202121802140.2U
Authority: CN
Inventors: 李由根; 李娜; 吴婷; 刘丹
Original assignee: Hongcheng Optical Products Co ltd
Current assignee: Hongcheng Optical Products Co ltd
Priority date: 2021-08-03
Filing date: 2021-08-03
Publication date: 2022-01-21
Anticipated expiration: 2031-08-03

Abstract

The utility model discloses a temporary storage device for a film coating plate frame of a film coating machine, which comprises an outer frame, and at least three isolation stand columns and at least two bearing pulley columns, wherein the isolation stand columns and the bearing pulley columns are rotatably connected with the outer frame, the isolation stand columns are arranged along the vertical direction, an isolation space for placing a film coating plate is formed between every two adjacent isolation stand columns at intervals, the bearing pulley columns are arranged along the horizontal direction, and the bearing pulley columns are arranged in the isolation space. The utility model can move out or put in the film plating frame according to the requirement in a time-saving and labor-saving way through the structure, thereby not only ensuring the cleanness degree of the film plating frame, but also ensuring the quality stability of the film plating product.

Description

Film coating plate frame temporary storage device of film coating machine

Technical Field

The utility model relates to the technical field of production of coating plates, in particular to a temporary storage device for a coating plate frame of a coating machine.

Background

In recent years, China has made great development in the field of semiconductor manufacturing, and the requirements on production technology are continuously improved.

As is known, the coating process is a critical part in the chip manufacturing process, and the magnetron sputtering coating process becomes one of the main coating techniques. The magnetron sputtering coating process is to place a target material on a cathode, collide positive ions with electrons through gas and collide the target material, sputtering is finally generated due to energy of sputtered atoms, and a film layer is formed on the surface of a substrate through deposition, and the process is called magnetron sputtering.

Magnetron sputtering is required to be deposited on a glass substrate, and the glass substrate needs to be placed on a film coating plate frame and enters a film coating chamber to complete sputtering, so that the film coating plate frame can directly influence the quality stability and the performance of the film coating plate. Therefore, special storage, maintenance and service of the plate frames are required.

At present, most of coating plate frames are scattered in a specified area and are not classified and placed, so that the plate frames are easy to deform and pollute.

Therefore, a temporary storage device for a coating plate rack of a coating machine is needed to solve the above problems.

SUMMERY OF THE UTILITY MODEL

The utility model provides a temporary storage device for a coating plate frame of a coating machine aiming at the defects of the prior art.

The technical scheme adopted by the utility model for realizing the purpose is as follows:

the utility model provides a coating machine coating film version frame temporary storage device, includes outer frame and is rotatable coupling's isolation stand and bearing pulley post with this outer frame, it has three at least to keep apart the stand, keep apart the stand and arrange along vertical direction, adjacent two be arranged and be formed with the isolation space that is used for placing the coating film version with spacing between the isolation stand, bearing pulley post has two at least, bearing pulley post arranges along the horizontal direction, just bearing pulley post set up in the isolation space.

The improved structure comprises an outer frame, wherein the outer frame comprises two support frames and two fixing columns, the two support frames are oppositely arranged, the number of the fixing columns is multiple, the fixing columns are arranged between the two support frames and connected with the two support frames, the bearing pulley columns are arranged between the two support frames, and the isolation upright columns are arranged on the fixing columns.

In a further improvement, the fixed column and the bearing pulley column are arranged in parallel with each other.

In a further improvement, each fixed column is provided with at least one isolation upright.

The improved structure comprises an outer frame, wherein the outer frame further comprises a baffle, the baffle is arranged in the vertical direction, the baffle is positioned between the two support frames and is connected with the two support frames, and the baffle is positioned in front of or behind the isolation space and is spaced from the isolation upright column by a certain distance.

The improved structure is characterized in that the supporting frame comprises vertical rods arranged in the vertical direction and horizontal rods arranged in the horizontal direction, the number of the vertical rods is two, the vertical rods are arranged at intervals and are arranged oppositely, the vertical rods are connected through the horizontal rods, and the number of the horizontal rods is two, and the horizontal rods are arranged at intervals.

The improved structure is characterized in that one of the two horizontal rods, which is positioned above the horizontal rods, is fixed at the top of the vertical rod, and the other of the two horizontal rods, which is positioned below the horizontal rods, is away from the bottom of the vertical rod by a certain distance and is provided with the isolation upright post.

In a further improvement, the baffle is fixed on the vertical rod.

In a further improvement, the fixed column is an angle iron.

In a further improvement, the support frame is an angle iron support frame.

The utility model has the beneficial effects that: the temporary storage device for the coating plate frame of the coating machine comprises an outer frame, and at least three isolation upright columns and at least two bearing pulley columns which are rotatably connected with the outer frame, wherein the isolation upright columns are arranged along the vertical direction, an isolation space for placing a coating plate is formed between every two adjacent isolation upright columns at intervals, the bearing pulley columns are arranged along the horizontal direction, and the bearing pulley columns are arranged in the isolation space. Therefore, when the film plating frame is in actual use, the film plating frames of the same type can be placed in the same isolation space, and the rotatable isolation upright columns are arranged on the two sides of the isolation space and the rotatable bearing pulley columns are arranged at the bottom of the isolation space, so that the film plating frames can be conveniently taken out or put in according to needs, the cleanness degree of the film plating frames is ensured, and the quality stability of film plating products can be ensured.

The utility model is further described with reference to the following detailed description and accompanying drawings.

Drawings

FIG. 1 is a schematic perspective view of a temporary storage device of a coating plate rack of a coating machine according to the present invention;

FIG. 2 is a front view of a temporary storage device of a coating plate rack of a coating machine of the present invention;

FIG. 3 is a side view of the temporary storage device of the coating plate rack of the coating machine of the utility model;

FIG. 4 is a top view of the temporary storage device of the coating plate rack of the coating machine of the present invention.

Detailed Description

The following description is only a preferred embodiment of the present invention, and does not limit the scope of the present invention.

Referring to fig. 1 to 4, the temporary storage device 100 for a coating plate rack of a coating machine of the present invention includes an outer frame 10, and at least three isolation columns 20 and at least three bearing pulley columns 30 rotatably connected to the outer frame 10, wherein the isolation columns 20 are arranged along a vertical direction, an isolation space 100a for placing a coating plate is formed between two adjacent isolation columns 20 at intervals, at least two bearing pulley columns 30 are arranged, the bearing pulley columns 30 are arranged along a horizontal direction, and the bearing pulley columns 30 are disposed in the isolation space 100 a.

Referring to fig. 1 to 4, the outer frame 10 includes two support frames 11 and two fixing posts 12, the two support frames 11 are disposed opposite to each other, the fixing posts 12 are disposed between the two support frames 11 and connected to the two support frames 11, the bearing pulley posts 30 are disposed between the two support frames 11, and the isolation upright posts 20 are disposed on the fixing posts 12. Specifically, the fixed columns 12 and the load-bearing pulley columns 30 are arranged in parallel, and each fixed column 12 is provided with at least one isolation upright column 20, so that the coated plate can move in the isolation space 100a as required.

With continued reference to fig. 1 to 4, the outer frame 10 further includes a baffle 13, the baffle 13 is disposed along the vertical direction, the baffle 13 is disposed between and connected to the two support frames 11, the baffle 13 is disposed in front of or behind the isolation space 100a and spaced apart from the isolation upright 20 by a certain distance, that is, the isolation upright 20 is not disposed on the front-most or rear-most fixing post 12, but the baffle 13 is installed, but is not limited thereto. For example, the baffle 13 is fixed to the vertical rod.

With continued reference to fig. 1 to 4, the supporting frame 11 includes two vertical rods 111 arranged along the vertical direction and two horizontal rods 112 arranged along the horizontal direction, the two vertical rods 111 are arranged oppositely and at intervals, the two vertical rods 111 are connected by the horizontal rods 112, the two horizontal rods 112 are arranged at intervals between the two horizontal rods 112. Preferably, one of the two horizontal rods 112, which is located at the upper side, is fixed at the top of the vertical rod 111, and one of the two horizontal rods 112, which is located at the lower side, is at a certain distance from the bottom of the vertical rod 111 and is provided with the isolation upright post 20; therefore, when the coated plate is placed in the isolation space 100a, the bottom of the coated plate still has a certain height from the ground, so that the coated plate can be effectively prevented from being contaminated and damaged.

It should be noted that in the present embodiment, the supporting frame 11 is an angle iron supporting frame 11, that is, the vertical rod 111 and the horizontal rod 112 are both angle irons; meanwhile, the fixing columns 12 are also angle irons, so that the manufacturing and production cost can be effectively reduced, and the structural stability of the film plating frame temporary storage device 100 of the film plating machine is ensured. Of course, in other embodiments, the supporting frame 11 and the fixing column 12 may be other structures familiar to those skilled in the art, and may be, for example, a flat plate-shaped connecting member or a cylindrical connecting member, so that the utility model is not limited thereto.

The utility model has the beneficial effects that: the film plating frame temporary storage device 100 of the film plating machine comprises an outer frame 10, and at least three isolation upright columns 20 and at least two bearing pulley columns 30 which are rotatably connected with the outer frame 10, wherein the isolation upright columns 20 are arranged along the vertical direction, an isolation space 100a for placing a film plating plate is formed between every two adjacent isolation upright columns 20 at intervals, the bearing pulley columns 30 are arranged along the horizontal direction, and the bearing pulley columns 30 are arranged in the isolation space 100 a. Therefore, when the film plating frame is in practical use, the film plating frames of the same type can be placed in the same isolation space 100a, and the rotatable isolation upright columns 20 are arranged on the two sides of the isolation space 100a, and the rotatable bearing pulley columns 30 are arranged at the bottom of the isolation space 100a, so that the film plating frames can be conveniently taken out or put in according to needs, the cleanness degree of the film plating frames is ensured, and the quality stability of film plating products can be ensured.

The utility model is not limited to the above embodiment, and other temporary storage devices for coating frames of coating machines, which are obtained by adopting the same or similar structure or device as the above embodiment of the utility model, are within the protection scope of the utility model.

Claims

1. The utility model provides a coating machine coating film version frame temporary storage device which characterized in that: including outer frame and with this outer frame be rotatable coupling's isolation stand and bearing pulley post, the isolation stand has three at least, the isolation stand is arranged along vertical direction, adjacent two it arranges and is formed with the isolation space that is used for placing the coating film version to be at the interval between the isolation stand, bearing pulley post has two at least, bearing pulley post arranges along the horizontal direction, just bearing pulley post set up in the isolation space.

2. The coating machine coating plate frame temporary storage device of claim 1, which is characterized in that: the outer frame comprises two support frames and two fixing columns, the two support frames are oppositely arranged, the number of the fixing columns is multiple, the fixing columns are installed between the two support frames and connected with the two support frames, the bearing pulley columns are installed between the two support frames, and the isolation stand columns are installed on the fixing columns.

3. The coating machine coating plate frame temporary storage device of claim 2, which is characterized in that: the fixed columns and the bearing pulley columns are arranged in parallel.

4. The coating machine coating plate frame temporary storage device of claim 2, which is characterized in that: at least one isolation upright is mounted on each fixing column.

5. The coating machine coating plate frame temporary storage device of claim 2, which is characterized in that: the outer frame further comprises a baffle which is arranged in the vertical direction, the baffle is positioned between the two support frames and connected with the two support frames, and the baffle is positioned in front of or behind the isolation space and spaced from the isolation upright column by a certain distance.

6. The coating machine coating plate frame temporary storage device of claim 5, which is characterized in that: the support frame includes the vertical pole that arranges along vertical direction and the horizon bar that arranges along the horizontal direction, vertical pole has two, two vertical pole is the interval and arranges mutually just, two pass through between the vertical pole the horizon bar realizes connecting, the horizon bar has two, two be arranged at interval between the horizon bar.

7. The coating machine coating plate frame temporary storage device of claim 6, which is characterized in that: one of the two horizontal rods, which is positioned above, is fixed at the top of the vertical rod, and one of the two horizontal rods, which is positioned below, has a certain distance from the bottom of the vertical rod and is provided with the isolation upright post.

8. The coating machine coating plate frame temporary storage device of claim 7, which is characterized in that: the baffle is fixed on the vertical rod.

9. The coating machine coating plate frame temporary storage device of claim 2, which is characterized in that: the fixed column is angle iron.

10. The coating machine coating plate frame temporary storage device of claim 2, which is characterized in that: the support frame is an angle iron support frame.