CN215573616U - Pressure sensor leakproofness detection device - Google Patents
Pressure sensor leakproofness detection device Download PDFInfo
- Publication number
- CN215573616U CN215573616U CN202120942714.XU CN202120942714U CN215573616U CN 215573616 U CN215573616 U CN 215573616U CN 202120942714 U CN202120942714 U CN 202120942714U CN 215573616 U CN215573616 U CN 215573616U
- Authority
- CN
- China
- Prior art keywords
- gas
- detection
- collecting
- pressure sensor
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses a pressure sensor tightness detection device, which comprises a rack, a detection frame, a trace gas collecting component, a trace gas detection component and an exhaust component, wherein the detection frame can be movably arranged on the rack along the up-down direction; the trace gas collecting component is arranged on the detection frame, a collecting cavity is formed in the trace gas collecting component, a communication detection port is formed in the top wall of the collecting cavity, a collecting port is formed in the bottom wall of the collecting cavity, and the collecting port is used for being downwards covered and arranged above the substrate; the tracer gas detection component comprises a gas production part arranged on the detection frame, and the gas production part extends into the communication detection port and is used for collecting gas in the collection cavity; the detection frame is located to the subassembly of airing exhaust, and the subassembly of airing exhaust is used for discharging the gas of collecting the intracavity to clear away the tracer gas of collecting the intracavity, avoid collecting the tracer gas accumulation of intracavity, cause the wrong report, the misdetection, thereby improve the accuracy that pressure sensor leakproofness detected, and can avoid frequently leading to the stop line to investigate and delay the production progress because of reporting to the police.
Description
Technical Field
The utility model relates to the technical field of pressure sensor detection, in particular to a device for detecting the tightness of a pressure sensor.
Background
The MEMS pressure sensor is applied to the field of automotive electronics and is mainly used for measuring air bag pressure, fuel oil pressure, engine oil pressure, air inlet pipeline pressure, tire pressure and the like, so that the sealing performance detection of the MEMS pressure sensor is particularly important.
At present, when the pressure sensor detects the tightness, because the tracer gas detector is very sensitive to tracer gas, if the pressure sensor leaks for a plurality of times, the concentration of the tracer gas in the air near the air suction port is increased, and when the next pressure sensor is tested, even if the next pressure sensor does not leak, the tracer gas remained in the air can prompt the tracer gas detector to alarm, so that misdetection is caused.
SUMMERY OF THE UTILITY MODEL
The utility model mainly aims to provide a pressure sensor tightness detection device, and aims to solve the problem that trace gas remaining in air near an air suction port of a trace gas detector can trigger the trace gas detector to alarm, so that misdetection is caused.
In order to achieve the above object, the present invention provides a device for detecting the sealing performance of a pressure sensor, in which a gas passage is formed in the pressure sensor, a substrate is covered on an upper end of the gas passage, and a pressure sensitive element is disposed on a side of the substrate facing the gas passage, the device for detecting the sealing performance of the pressure sensor including:
a rack;
the detection frame can move up and down and is arranged on the rack;
the tracer gas collecting component is arranged on the detection frame, a collecting cavity is formed in the tracer gas collecting component, a communication detection port is formed in the top wall of the collecting cavity, a collecting port is formed in the bottom wall of the collecting cavity, and the collecting port is used for being downwards covered and arranged above the substrate;
the tracer gas detection component comprises a gas production part arranged on the detection frame, and the gas production part extends into the communication detection port and is used for collecting gas in the collection cavity; and the number of the first and second groups,
and the exhaust assembly is arranged on the detection frame and used for exhausting the tracer gas in the collection cavity.
Optionally, the trace gas collection component comprises:
the connecting part is arranged on the detection frame, and a first cavity extending up and down is formed in the connecting part; and the number of the first and second groups,
the collecting part is arranged below the connecting part, a second chamber extending in the vertical direction is formed in the collecting part, and an upper opening of the second chamber is arranged corresponding to a lower opening of the first chamber;
the fixing part is arranged above the connecting part, a third chamber extending vertically is formed in the fixing part, and a lower opening of the third chamber is arranged corresponding to an upper opening of the first chamber;
the first chamber, the second chamber and the third chamber jointly form the collecting cavity, the lower opening of the second chamber forms the collecting opening, the upper opening of the third chamber forms the communication detection opening, and the side wall of the third chamber is abutted against the outer side face of the gas collecting part.
Optionally, the fixing portion includes two fixing plates disposed opposite to each other in a horizontal direction, the two fixing plates are disposed above the connecting portion, and side surfaces of the two fixing plates clamp an outer side surface of the gas production portion.
Optionally, an annular sealing gasket is mounted on the end face of the collecting port.
Optionally, the side wall surface of the collecting cavity is set to be inwardly retracted from the collecting opening.
Optionally, the pressure sensor tightness detection device further includes an isolation hood, the isolation hood is disposed on the detection frame and surrounds the collection port to prevent the trace gas from diffusing, and an exhaust port is formed in a side wall of the isolation hood;
the exhaust assembly comprises a suction fan, and an exhaust inlet of the suction fan is communicated with an exhaust port of the isolation cover.
Optionally, the collecting part is an air suction pipe extending in the up-down direction, and the lower end of the air suction pipe extends into the communication detection port;
the trace gas detection component further comprises:
the detection main body is arranged on the rack;
one end of the transmission pipe is connected with the detection main body; and the number of the first and second groups,
the filter element is arranged on the detection frame, the filter element is connected to the other end of the transmission pipe, the upper end of the air suction pipe is connected to the filter element, and the gas collected by the air suction pipe is transmitted to the detection main body after being filtered by the filter element so as to detect the concentration of the tracer gas in the collected gas.
Optionally, a detection frame driving mechanism is arranged between the detection frame and the rack, the detection frame driving mechanism comprises a sliding table cylinder, one of a cylinder body and a sliding table of the sliding table cylinder is arranged on the rack, and the other is arranged on the detection frame.
Optionally, the rack is provided with a first mounting rack capable of moving in the left-right direction, and the detection rack is arranged on the first mounting rack.
Optionally, the pressure sensor tightness detection device further comprises a trace gas loading component, the trace gas loading component comprises a trace gas loading part, and the trace gas loading part is movably arranged on the rack up and down and used for moving up to the gas inlet butted with the gas channel.
According to the technical scheme, the device for detecting the sealing performance of the pressure sensor is provided, when the sealing performance is detected, firstly, the trace gas is introduced into a gas channel, if the pressure sensor does not leak, no trace gas exists in a collection cavity, and the gas production part does not detect the trace gas, so that the trace gas detection part cannot give an alarm. If the pressure sensor leaks, trace gas with certain concentration exists in the collection cavity, and the gas production part can give an alarm after detecting the trace gas. If several leaks occur in succession, or if the detection time is long, this may result in an increase in the concentration of the tracer gas in the collection chamber and trigger the tracer gas detection unit to alarm. Under the condition of continuous testing, the alarm of the trace gas detection component cannot be judged whether the alarm is caused by the leakage of the pressure sensor under detection or the trigger of the trace gas accumulated in the collection cavity, so that misdetection is easily caused. The pressure sensor tightness detection device comprises an air exhaust assembly, wherein the air exhaust assembly is used for exhausting gas in a collection cavity after a trace gas detection component detects that a pressure sensor leaks so as to remove trace gas in the collection cavity and avoid misinformation and misdetection caused by accumulation of the trace gas in the collection cavity, so that the pressure sensor tightness detection accuracy is improved, and delay of production progress due to line stop detection caused by frequent alarming can be avoided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an embodiment of a tightness detection device for a pressure sensor provided in the present invention;
FIG. 2 is a schematic view of a further angle of the tightness detection device of the pressure sensor shown in FIG. 1;
FIG. 3 is a schematic diagram of the trace gas collection component of the pressure sensor leak detection apparatus of FIG. 1;
fig. 4 is a cross-sectional view of the trace gas collection unit shown in fig. 3.
The reference numbers illustrate:
the implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" appearing throughout includes three juxtapositions, exemplified by "A and/or B" including either A or B or both A and B. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The MEMS pressure sensor 200 is applied to the field of automotive electronics, and is mainly used for measuring air bag pressure, fuel pressure, engine oil pressure, intake duct pressure, tire pressure, and the like. The structure of the pressure sensor 200 includes a housing, an upper cover, a substrate, and a pressure-sensitive element; the shell is provided with an inner cavity with an open top, and the substrate is arranged in the inner cavity to divide the inner cavity into an upper cavity and a lower cavity which are independent; the lower end surface of the shell is provided with an air faucet which is communicated with the lower cavity, a transmission channel of the air faucet and the lower cavity form an air channel, and the pressure-sensitive element is arranged on one side of the substrate, which is positioned in the lower cavity; the upper cover is arranged at the opening at the top of the inner cavity.
The device 100 for detecting the sealing property of a pressure sensor according to the present invention is used for detecting the sealing property of a gas passage formed by a gas nozzle and a lower chamber after a substrate including a pressure sensitive element is bonded and before an upper cover is attached. Referring to fig. 1 to 4, the device 100 for detecting the tightness of a pressure sensor according to the present invention includes a rack 1, a detection frame 2, a trace gas collecting unit 3, a trace gas detecting unit 4, and an exhaust unit (not shown), wherein the detection frame 2 is movably mounted on the rack 1 in an up-down direction; the trace gas collecting component 3 is arranged on the detection frame 2, the trace gas collecting component 3 is provided with a collecting cavity 31, the top wall of the collecting cavity 31 is provided with a communication detection port 311, the bottom wall of the collecting cavity 31 is provided with a collecting port 312, and the collecting port 312 is used for covering downwards and arranged above the substrate; the tracer gas detection component 4 comprises a gas production part 41 arranged on the detection frame 2, and the gas production part 41 extends into the communication detection port 311 and is used for collecting gas in the collection cavity 31; the exhaust assembly is arranged on the detection frame 2 and used for exhausting the tracer gas in the collection cavity 31.
When the tightness is detected, firstly, the trace gas is introduced into the gas channel, if the pressure sensor 200 does not leak, the trace gas does not exist in the collection cavity 31, and the gas production part 41 does not detect the trace gas, so that the trace gas detection component 4 does not give an alarm. If the pressure sensor 200 leaks, the collection chamber 31 contains a certain concentration of trace gas, and the gas production unit 41 will alarm when detecting the trace gas. If several leaks occur in succession, or if the detection time is long, this may result in an increase in the concentration of the tracer gas in the collection chamber 31 and trigger the tracer gas detection unit 4 to alarm. In the case of continuous testing, it cannot be determined whether the alarm of the trace gas detection unit 4 is caused by a leak of the pressure sensor 200 being tested or by the activation of trace gas accumulated in the collection chamber 31, which is likely to cause a false test. The pressure sensor tightness detection device 100 comprises an exhaust assembly, wherein the exhaust assembly is used for exhausting gas in a collection cavity 31 after a trace gas detection component 4 detects that a pressure sensor 200 leaks, so that trace gas in the collection cavity 31 is eliminated, the trace gas in the collection cavity 31 is prevented from accumulating, false alarm and error detection are avoided, the tightness detection accuracy of the pressure sensor 200 is improved, and the delay of production progress due to line stop detection caused by frequent alarm can be avoided.
Further, the gas production portion 41 is a gas production portion 41 extending in the vertical direction, and the lower end of the gas production portion 41 extends into the communication detection port 311 to collect the gas in the collection chamber 31. The trace gas detection component 4 further comprises a detection body (not shown), a delivery pipe (not shown) and a filter element 42, the detection body being arranged on the rack 1; one end of the transmission pipe is connected with the detection main body; filter piece 42 and locate detection frame 2, filter piece 42 and connect in the other end of transmission pipe, and the upper end of gas production portion 41 is connected in filtering piece 42, and the gas of gas production portion 41 collection filters through filtering piece 42 and transmits to detecting the main part through the transmission pipe after getting rid of large particulate matter to detect by the concentration of tracer gas in the collection gas. The detecting frame 2 is provided with two connecting plates 22 which are oppositely arranged along the horizontal direction, and the side walls of the two connecting plates 22 clamp the outer side surfaces of the filter elements 42, so that the gas production part 41 can move along with the detecting frame 2. In addition, in this embodiment, the trace gas detection unit 4 is a hydrogen gas detector, and the trace gas is 95% nitrogen gas and 5% hydrogen gas.
The utility model is not limited to the specific structure of the trace gas collecting member 3 as long as the collecting chamber 31 is formed. The present invention is not limited to the specific structure in which the trace gas collecting member 3 is mounted on the detection frame 2, and may be fixed to the detection frame 2 so as to move up and down with the detection frame 2. In one embodiment, the trace gas collecting element 3 comprises a collecting cover, the inner cavity of the collecting cover forms the collecting chamber 31, the lower port of the collecting cover forms the collecting port 312 for covering the upper opening of the inner cavity of the housing of the pressure sensor 200, and the top wall of the collecting cover forms the communication detecting port 311. The pressure sensor tightness detection device 100 further comprises a gas collecting channel connecting rod, the gas collecting channel connecting rod extends horizontally, one end of the gas collecting channel connecting rod is connected (e.g., in threaded connection) with the gas collecting channel, and the other end of the gas collecting channel connecting rod is mounted on the detection frame 2.
In this embodiment, referring to fig. 3, the trace gas collecting member 3 includes a connecting portion 33, a collecting portion 32, and a fixing portion 34, the connecting portion 33 is disposed on the detecting frame 2, and the connecting portion 33 is formed with a first chamber 331 extending in the vertical direction; the collecting part 32 is arranged on the connecting part 33 and is positioned below the connecting part 33, the collecting part 32 is provided with a second chamber 321 which extends up and down, and the upper opening of the second chamber 321 is arranged corresponding to the lower opening of the first chamber 331; the fixing portion 34 is disposed above the connecting portion 33, the fixing portion 34 is formed with a third chamber 341 extending upward and downward, and a lower opening of the third chamber 341 is disposed corresponding to an upper opening of the first chamber 331; the first chamber 331, the second chamber 321, and the third chamber 341 together form the collection chamber 31, the lower opening of the second chamber 321 forms the collection port 312, the upper opening of the third chamber 341 forms the communication detection port 311, and the side wall of the third chamber 341 abuts against the outer side surface of the gas production portion 41. In the present invention, the fixing portion 34 and the collecting portion 32 are provided separately on the upper and lower end surfaces of the connecting portion 33, so that the connecting structure of the trace gas collecting member 3 and the detecting frame 2 is simplified. Moreover, the side wall of the third chamber 341 abuts against the outer side surface of the gas production portion 41, so that the gas production portion 41 can be strengthened and fixed, and the trace gas leaked from the pressure sensor 200 can be prevented from escaping from the collection cavity 31 and being undetected, so that the pressure sensor 200 is judged to be leakage-free by mistake.
It should be noted that, in other embodiments of the present invention, the fixing portion 34 may also be separately connected to the detecting frame 2, for example, in the above-mentioned embodiment that adopts the gas collecting channel, the pressure sensor tightness detecting apparatus 100 further includes a gas production portion connecting rod, which is extended along the horizontal direction and is connected to the gas production portion 41 (for example, by bonding), and the other end is installed on the detecting frame 2.
Further, the fixing portion 34 includes two fixing plates 342 disposed opposite to each other in the horizontal direction, the two fixing plates 342 are disposed at the connecting portion 33, and side walls of the two fixing plates 342 clamp an outer side surface of the gas production portion 41 to reinforce the fixing of the gas production portion 41.
Further, the side wall surface of the collection cavity 31 is arranged to be inwardly contracted from the collection port 312 upwards to reduce the volume of the collection cavity 31, so that the volume of trace gas required by the trace gas detection component for alarming is reduced, and the cost is saved. Specifically, in the present embodiment, the sidewall surface of the second chamber 321 is disposed in an inverted conical shape from bottom to top.
In addition, an annular sealing gasket 313 is mounted on the end face of the collection port 312 to be in sealing abutment with the upper end face of the housing of the pressure sensor 200, so that the trace gas in the inner cavity completely enters the collection cavity 31 and is prevented from leaking out. On the one hand can practice thrift tracer gas in order reduce cost, on the other hand because contain hydrogen in the tracer gas in this application, reduces the tracer gas and leaks also can reduce the concentration of hydrogen in the air.
In consideration of the accident that the increase of the hydrogen concentration in the air may cause explosion, and the like, in order to prevent the trace gas from diffusing to a larger range, in this embodiment, the pressure sensor tightness detection apparatus 100 further includes a shielding case 5, the shielding case 5 is disposed on the detection frame 2 and surrounds the collection port 312 to prevent the trace gas from diffusing, and an exhaust port 51 is formed on a side wall of the shielding case 5; the exhaust assembly comprises a suction fan (not shown), and the suction port of the suction fan is communicated with the exhaust port 51 of the isolation cover 5. The cage 5 encloses and locates outside collecting port 312 to prevent tracer gas to the wider range diffusion, and the cooperation uses the suction fan, with the hydrogen emission to the outside atmosphere in workshop, reduce the hydrogen concentration in the workshop. In this embodiment, the suction fan sucks the gas in the shielding case 5 immediately after the alarm of the trace gas detecting unit 4, and two exhaust ports 51 of the shielding case 5 are provided to allow the suction fan to suck the gas into the shielding case 5 when the suction fan sucks the gas. In another embodiment, the suction fan sucks out the gas in the shielding case 5 after the trace gas detecting component 4 gives an alarm and the detecting frame 2 moves upwards to separate from the pressure sensor 200, and at this time, the shielding case 5 only needs to be provided with one exhaust port 51.
Referring further to fig. 1, a carriage driving mechanism is provided between the carriage 2 and the gantry 1 to drive the carriage 2 to move in the up-and-down direction. The specific structure of the driving mechanism of the detection frame is not limited in the utility model, and in one embodiment, the driving mechanism of the detection frame comprises a screw-nut mechanism and a driving motor, wherein the screw-nut mechanism comprises a driving screw and a nut which are matched with each other, the driving screw extends along the vertical direction and is rotatably arranged on the table frame 1 around the axis of the driving screw, and the nut is fixed on the detection frame 2; the driving motor is installed on the rack 1 and drives the shaft to be connected with the driving screw rod, and the driving motor drives the driving screw rod to rotate, so that the sliding block drives the detection rack 2 to move up and down. In this embodiment, the detecting frame driving mechanism includes a first sliding table cylinder 21, one of the first cylinder body and the first sliding table of the first sliding table cylinder 21 is disposed on the table frame 1, and the other is disposed on the detecting frame 2. Further, a first cylinder body of the first slide table cylinder 21 is provided in the stage 1, and the first slide table is provided in the inspection frame 2. The driving of the sliding table cylinder is more stable, so that the trace gas collecting component 3 is stably covered on the pressure sensor 200, and the impact on the pressure sensor 200 is reduced.
The rack 1 is provided with a first mounting rack 6 which can move left and right, and the detection rack 2 is arranged on the first mounting rack 6. Specifically, a second cylinder 11 is further disposed between the first mounting frame 6 and the rack 1, one of a second cylinder body and a second guide rod of the second cylinder 11 is disposed on the rack 1, and the other is disposed on the first mounting frame 6. In this embodiment, the second cylinder of the second cylinder 11 is disposed on the table 1, and the second rod is disposed on the first mounting frame 6.
In addition, in this embodiment, the pressure sensor tightness detection apparatus 100 further includes a trace gas loading unit 7, the trace gas loading unit 7 includes a trace gas loading portion 71, and the trace gas loading portion 71 is provided on the stage 1 movably in the up-down direction, and is configured to move up to the gas inlet of the docking gas passage. Specifically, the pressure sensor tightness detection device 100 further includes a gas loading frame, the gas loading frame is movably disposed on the rack 1 in the up-down direction, the trace gas loading unit 71 is disposed on the gas loading frame, and specifically, the trace gas loading unit 71 is screwed to the gas loading frame. Further, a third sliding table cylinder 72 is arranged between the gas loading frame and the rack 1, one of a third cylinder body and a third sliding table of the third sliding table cylinder 72 is arranged on the gas loading frame, and the other is arranged on the rack 1. In this implementation, the third cylinder is located rack 1, and the third slip table is located gas loading frame.
Further, the rack 1 is provided with a second mounting rack which can move in the left-right direction, and the gas loading rack is arranged on the second mounting rack. Specifically, a fourth cylinder 73 is further disposed between the second mounting frame and the rack 1, one of a fourth cylinder body and a fourth guide rod of the fourth cylinder 73 is disposed on the rack 1, and the other is disposed on the second mounting frame. In this embodiment, the fourth cylinder of the fourth cylinder 73 is disposed on the table 1, and the fourth push rod is disposed on the second mounting frame.
Further, the trace gas loading part 7 includes a gas tank (not shown) and a gas pipe (not shown), and the gas tank is connected to the trace gas loading part 71 through the gas pipe to ventilate the pressure sensor 200.
In the present invention, the trace gas loading unit 7 may be integrated into the pressure sensor leak tightness detection apparatus 100 of the present application, or may be separately provided.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications and equivalents of the technical solutions of the present invention, which are made by using the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A pressure sensor leakproofness detection device, the pressure sensor is formed with the gas passage in the gas passage's upper end cover is equipped with the base plate, the base plate is towards one side of gas passage is equipped with pressure sensitive element, its characterized in that, pressure sensor leakproofness detection device includes:
a rack;
the detection frame can move up and down and is arranged on the rack;
the tracer gas collecting component is arranged on the detection frame, a collecting cavity is formed in the tracer gas collecting component, a communication detection port is formed in the top wall of the collecting cavity, a collecting port is formed in the bottom wall of the collecting cavity, and the collecting port is used for being downwards covered and arranged above the substrate;
the tracer gas detection component comprises a gas production part arranged on the detection frame, and the gas production part extends into the communication detection port and is used for collecting gas in the collection cavity; and the number of the first and second groups,
and the exhaust assembly is arranged on the detection frame and used for exhausting the tracer gas in the collection cavity.
2. The pressure sensor leak detection apparatus of claim 1, wherein the trace gas collection component comprises:
the connecting part is arranged on the detection frame, and a first cavity extending up and down is formed in the connecting part; and the number of the first and second groups,
the collecting part is arranged below the connecting part, a second chamber extending in the vertical direction is formed in the collecting part, and an upper opening of the second chamber is arranged corresponding to a lower opening of the first chamber;
the fixing part is arranged above the connecting part, a third chamber extending vertically is formed in the fixing part, and a lower opening of the third chamber is arranged corresponding to an upper opening of the first chamber;
the first chamber, the second chamber and the third chamber jointly form the collecting cavity, the lower opening of the second chamber forms the collecting opening, the upper opening of the third chamber forms the communication detection opening, and the side wall of the third chamber is abutted against the outer side face of the gas collecting part.
3. The device for detecting the tightness of a pressure sensor according to claim 2, wherein the fixing portion includes two fixing plates disposed opposite to each other in a horizontal direction, the two fixing plates are disposed above the connecting portion, and side surfaces of the two fixing plates clamp an outer side surface of the gas collection portion.
4. The pressure sensor tightness detection device of claim 1, wherein an annular packing is installed at an end surface of the collection port.
5. The pressure sensor leak tightness test device according to claim 1, wherein the side wall surface of the collection chamber is recessed upward from the collection port.
6. The pressure sensor leak detection device of claim 1, further comprising a shielding enclosure disposed on the test frame and surrounding the collection port for preventing diffusion of the trace gas, wherein a side wall of the shielding enclosure is formed with an exhaust port;
the exhaust assembly comprises a suction fan, and an exhaust inlet of the suction fan is communicated with an exhaust port of the isolation cover.
7. The pressure sensor sealability detection apparatus of claim 2 wherein the collecting portion is an air intake tube extending in the up-down direction, and a lower end of the air intake tube extends into the communication detection port;
the trace gas detection component further comprises:
the detection main body is arranged on the rack;
one end of the transmission pipe is connected with the detection main body; and the number of the first and second groups,
the filter element is arranged on the detection frame, the filter element is connected to the other end of the transmission pipe, the upper end of the air suction pipe is connected to the filter element, and the gas collected by the air suction pipe is transmitted to the detection main body after being filtered by the filter element so as to detect the concentration of the tracer gas in the collected gas.
8. The pressure sensor tightness detection device according to claim 1, wherein a detection frame driving mechanism is provided between the detection frame and the stage frame, the detection frame driving mechanism includes a slide table cylinder, one of a cylinder body and a slide table of the slide table cylinder is provided on the stage frame, and the other is provided on the detection frame.
9. The apparatus of claim 1, wherein the stage is provided with a first mounting frame movable in left and right directions, and the detecting frame is provided to the first mounting frame.
10. The pressure sensor leak detection apparatus of claim 1, further comprising a trace gas loading member including a trace gas loading portion provided to the stage movably in an up-down direction for moving up to a gas inlet port that interfaces with the gas passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120942714.XU CN215573616U (en) | 2021-04-30 | 2021-04-30 | Pressure sensor leakproofness detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120942714.XU CN215573616U (en) | 2021-04-30 | 2021-04-30 | Pressure sensor leakproofness detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215573616U true CN215573616U (en) | 2022-01-18 |
Family
ID=79858603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120942714.XU Active CN215573616U (en) | 2021-04-30 | 2021-04-30 | Pressure sensor leakproofness detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215573616U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114939546A (en) * | 2022-04-27 | 2022-08-26 | 武汉飞恩微电子有限公司 | Fault monitoring and early warning device for sensor production and testing method thereof |
-
2021
- 2021-04-30 CN CN202120942714.XU patent/CN215573616U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114939546A (en) * | 2022-04-27 | 2022-08-26 | 武汉飞恩微电子有限公司 | Fault monitoring and early warning device for sensor production and testing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN215573616U (en) | Pressure sensor leakproofness detection device | |
| KR20030001281A (en) | Method and device for tank leakage diagnosing using reference measuring methods | |
| CN112849772A (en) | Vacuum box and helium mass spectrum sealing performance testing equipment | |
| US20110127284A1 (en) | Fuel tank | |
| JPS59170739A (en) | Leak inspecting method of tank | |
| US10732150B2 (en) | Sensor having magnetic boundary seal | |
| JP4968668B2 (en) | Leak inspection device for housing etc. | |
| CN209340158U (en) | Water pump air-tightness detection device with error-disable function | |
| CN213455952U (en) | High-stability monocrystalline silicon differential pressure sensor | |
| CN215178593U (en) | Rubber seal airtightness detection device | |
| CN213903545U (en) | Detect camera bellows device and chemiluminescence immunoassay appearance | |
| CN216050472U (en) | Automatic air tightness detection tool for plastic fuel tank production line | |
| CN115127737A (en) | Tightness detection device | |
| US5277057A (en) | Gasoline detecting device | |
| JP4338572B2 (en) | Leak inspection method and leak sensor device for underground tank | |
| CN214407944U (en) | Negative pressure test device | |
| CN112362862A (en) | Detection camera bellows | |
| CN111964983A (en) | Smoke and dust flue gas sampling check out test set of taking U-shaped three-way pipe | |
| CN111579166A (en) | EVAP system fuel vapor leakage detection device | |
| CN112067200A (en) | Pressure pipeline inspection and detection device | |
| JP4336236B2 (en) | Tank leak detection device | |
| CN212031523U (en) | Device for off-line testing representativeness of activated carbon sample cup | |
| CN215931219U (en) | Immersion type automobile air cylinder sealing performance detection device | |
| CN215065087U (en) | Detection mechanism for detecting pipeline sealing performance | |
| CN109238585A (en) | Air-tightness testing device is used in a kind of production of oil discharging seat |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |