CN112849772A - Vacuum box and helium mass spectrum sealing performance testing equipment - Google Patents
Vacuum box and helium mass spectrum sealing performance testing equipment Download PDFInfo
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- CN112849772A CN112849772A CN202110252255.7A CN202110252255A CN112849772A CN 112849772 A CN112849772 A CN 112849772A CN 202110252255 A CN202110252255 A CN 202110252255A CN 112849772 A CN112849772 A CN 112849772A
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- vacuum box
- sliding block
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
- B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
- B65D81/2007—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum
- B65D81/2038—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum with means for establishing or improving vacuum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
- B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
- B65D81/2069—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
Abstract
The invention discloses a vacuum box and helium mass spectrum tightness testing equipment, wherein the vacuum box comprises: the box body comprises a box main body and a box door body, and the box main body comprises an accommodating chamber; the translation driving mechanism is connected with the box door body and the box main body and is used for driving the box door body to slide relative to the box main body so as to open or close the accommodating chamber; the pressing mechanism comprises a pressing piece; when the door body slides to the position for closing the accommodating chamber, the pressing mechanism is suitable for driving the pressing piece to press or release the door body. The vacuum box adopts a translation type compression design, can automatically control the opening or closing of the box door, and has the characteristics of convenience in operation, small occupied space and good sealing effect. Helium mass spectrum leakproofness test equipment switches through two vacuum boxes, and when the product detection of one of them vacuum box was accomplished, another vacuum box just can detect, and two vacuum boxes can be in the process of test and helium recovery, cleaning, release vacuum simultaneously promptly, improve the detection efficiency of product.
Description
Technical Field
The invention relates to the technical field of tightness testing, in particular to a vacuum box and helium mass spectrum tightness testing equipment.
Background
The helium mass spectrometer leak detector is a special leak detector using helium as leak-indicating gas, and has the characteristics of stable performance and high sensitivity. The detector has the highest sensitivity in the vacuum leak detection technology and is the most popular leak detection instrument. With the development of new energy vehicles, the requirements on the sealing performance of power batteries, motors and motor drivers of the new energy vehicles are high. The reasons for the sealing performance requirement of the power battery are as follows: the battery pack/box body prevents short circuit caused by water inflow, liquid cooling pipelines in the battery pack are not allowed to leak, electrolyte in the battery unit is not allowed to leak, and moisture is not allowed. The sealing requirements of the motor and the motor driver are caused by the following reasons: the coolant seeps into the motor to affect the safety, performance and service life of the whole vehicle, and is an important factor for determining whether the whole vehicle can continuously and stably run. The traditional air tightness detection technology can not meet the requirement of a new energy automobile on air tightness, and the helium mass spectrum sealing equipment has the advantages of stability, reliability, high sensitivity and the like, and can better adapt to the requirement of the development of the sealing technology.
The detection process of the traditional helium mass spectrometry detection device is as follows: and placing the helium-filled product to be detected in a vacuum box, vacuumizing the vacuum box, detecting by using a helium mass spectrometer leak detector, obtaining the leakage rate of the product by using the helium mass spectrometer leak detector, and finally discharging helium. The traditional helium mass spectrometry detection equipment has the following problems: the door of the vacuum box adopts a turnover opening mode, the door of the vacuum box needs to be opened or closed under manual control, and the defects of troublesome operation, large occupied space and poor sealing effect exist. Because the vacuum box is designed to be thicker and heavier to prevent deformation during vacuum pumping, once the box body deforms, the sealing capability of a sealing plane can fail, and deformation fatigue and cracks occur in a welded part or a structurally fragile part of the box body during repeated tests to cause the box body to be scrapped, because the vacuum box is thicker and the door cover of the vacuum box is also heavier naturally, only one surface of the box body of the general turnover type opening door is fixed by a shaft (namely, the box body is provided with the door shaft like a door in a house) is active, the risk of sealing failure is higher than that of a translation type door, and the turnover type opening door is operated by hands with non-great strength, and if the turnover type opening door is operated by a hand, a large-volume air cylinder with a very large cylinder diameter is used for driving.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides the vacuum box which adopts a translation type compression design, can automatically control the opening or closing of the box door and has the characteristics of convenience in operation, small occupied space and good sealing effect.
The invention also aims to provide helium mass spectrum tightness testing equipment comprising the vacuum box.
One of the purposes of the invention is realized by adopting the following technical scheme:
a vacuum box, comprising:
the box body comprises a box main body and a box door body, and the box main body comprises an accommodating chamber;
the translation driving mechanism is connected with the box door body and the box main body and used for driving the box door body to slide relative to the box main body so as to open or close the accommodating chamber;
a hold-down mechanism comprising a hold-down member; when the box door body slides to the position for closing the accommodating chamber, the pressing mechanism is suitable for driving the pressing piece to press or release the box door body.
In an optional embodiment, the device further comprises a support frame, and the translation driving mechanism and the pressing mechanism are respectively mounted on the support frame; the support frame including the symmetry set up in first vertical support plate and the second vertical support plate of case main part left and right sides to and connect the first transverse connection board between first vertical support plate and second vertical support plate, first transverse connection board is located the top of case main part.
In an alternative embodiment, a backward inclined angle is formed between the box main body and a vertical plane, so that the box main body forms an inclined product placing opening; the box door body comprises a sealing cover part covering the product placing opening of the box main body, and the inclination angle of the sealing cover part is the same as that of the box main body; the first vertical supporting plate and the second vertical supporting plate are respectively provided with a front inclined plane with the same inclination angle as the box main body; the inclination angle is 10-30 degrees.
In an optional embodiment, the translation driving mechanism comprises a translation cylinder, a piston rod connecting piece and a translation guiding mechanism;
the box door body also comprises a first slide block connecting part and a second slide block connecting part which extend outwards along the left side and the right side of the sealing part;
the translation cylinder is fixedly arranged on the outer side wall of the first vertical supporting plate or the second vertical supporting plate;
the translation guide mechanism comprises a first guide assembly and a second guide assembly;
the first guide assembly comprises a first chain wheel arranged at the top of the first vertical support plate, a first chain arranged on the first chain wheel, a first front guide rail arranged on a front inclined plane of the first vertical support plate, a first front slide block in sliding fit with the first front guide rail, a first rear guide rail arranged on the rear side surface of the first vertical support plate, a first rear slide block in sliding fit with the first rear guide rail and a first slide block connecting assembly; one end of the first chain is fixedly connected with the first front sliding block, and the other end of the first chain is fixedly connected with the first rear sliding block; one end of the first sliding block connecting component is connected with the first front sliding block, and the other end of the first sliding block connecting component is connected with the first sliding block connecting part;
the second guide assembly comprises a second chain wheel arranged at the top of the second vertical support plate, a second chain arranged on the second chain wheel, a second front guide rail arranged on a front inclined plane of the second vertical support plate, a second front slide block in sliding fit with the second front guide rail, a second rear guide rail arranged on the rear side surface of the second vertical support plate, a second rear slide block in sliding fit with the second rear guide rail and a second slide block connecting assembly; one end of the second chain is fixedly connected with the second front sliding block, and the other end of the second chain is fixedly connected with the second rear sliding block; one end of the second sliding block connecting component is connected with the second front sliding block, and the other end of the second sliding block connecting component is connected with the second sliding block connecting part;
and a piston rod of the translation cylinder is fixedly connected with the first front sliding block or the second front sliding block through a piston rod connecting piece.
In an optional embodiment, a weight block is further disposed on the first rear slider and/or the second rear slider.
In an alternative embodiment, the first slider coupling assembly includes a first guide post, a first spring; one end of the first guide pillar is fixedly arranged on the first sliding block, the other end of the first guide pillar penetrates through the connecting part of the first sliding block and extends outwards, and a first limiting plate is arranged at the extending end of the first guide pillar; the first spring is sleeved on the first guide pillar between the first sliding block and the first sliding block connecting part;
the second sliding block connecting assembly comprises a second guide pillar and a second spring; one end of the second guide pillar is fixedly arranged on the second sliding block, the other end of the second guide pillar penetrates through the connecting part of the second sliding block and extends outwards, and a second limiting plate is arranged at the extending end of the second guide pillar; the second spring is sleeved on the second guide pillar between the second sliding block and the second sliding block connecting part.
In an optional embodiment, the door body further includes a pressure-bearing portion extending outward along the first slider connecting portion or the second slider connecting portion; the pressing mechanism further comprises a pressing cylinder fixedly mounted on the outer side wall of the first vertical supporting plate or the second vertical supporting plate, and the pressing piece comprises a fixing block and a pressing block which are arranged in parallel and a connecting block connected between the fixing block and the pressing block; one end of the fixed block is fixedly connected with a piston rod of the pressing cylinder, and the other end of the fixed block is fixedly connected with the pressing block through a connecting block; a channel for a pressure-bearing part to pass through is formed between the fixed block and the pressing block; when the box door body slides to the position for closing the accommodating chamber, the pressing cylinder is suitable for driving the pressing block to press or release the bearing part.
In an alternative embodiment, the number of the pressure bearing parts is two, and the two pressure bearing parts are symmetrically arranged at the outer sides of the first slide block connecting part and the second slide block connecting part; the number of the pressing mechanisms is two, and the pressing mechanisms are symmetrically arranged on the first vertical supporting plate and the second vertical supporting plate.
In an optional embodiment, a plurality of buffer members are arranged on the support frame, and an abutting member is arranged on the first front guide rail and the second front guide rail corresponding to each buffer member; the buffer piece is used for providing damping along the up-and-down sliding direction for the abutting piece.
The second purpose of the invention is realized by adopting the following technical scheme:
helium mass spectrometer leak tightness test equipment, characterized in that it comprises a vacuum box according to one of the objects of the present invention.
In an alternative embodiment, the number of the vacuum boxes is two, and the two vacuum boxes are respectively marked as a first vacuum box and a second vacuum box; the system also comprises a helium source, a helium mass spectrometer leak detector, a first vacuum pump, a second vacuum pump, a third vacuum pump and a helium recovery device;
the helium source is connected with the air inlet of the first vacuum box through a first helium conveying pipe, and is also connected with the air inlet of the second vacuum box through a second helium conveying pipe;
the air exhaust port of the first vacuum box is connected with the first vacuum pump through a first air exhaust pipe, and the air exhaust port of the second vacuum box is connected with the second vacuum pump through a second air exhaust pipe;
the inspection air vent of the first vacuum box is connected with the air inlet of the helium mass spectrometer leak detector through a first inspection air pipe, and the inspection air vent of the second vacuum box is connected with the air inlet of the helium mass spectrometer leak detector through a second inspection air pipe; the pumping port of the helium mass spectrometer leak detector is connected with the second vacuum pump through a pumping pipeline;
the helium recovery port of the first vacuum box is connected with the air inlet of the third vacuum pump through a first helium recovery air pipe, the helium recovery port of the second vacuum box is connected with the air inlet of the third vacuum pump through a second helium recovery air pipe, and the air outlet of the third vacuum pump is connected with the helium recovery device through a pipeline;
a first atmosphere pipeline and a second atmosphere pipeline communicated with the atmosphere are respectively arranged on the first vacuum box and the second vacuum box;
and the first helium conveying pipe, the second helium conveying pipe, the first exhaust pipe, the second exhaust pipe, the first inspection ventilating pipe, the second inspection ventilating pipe, the suction pipeline, the first helium recovery air pipe, the second helium recovery air pipe, the first atmosphere pipeline and the second atmosphere pipeline are all provided with electric control valves.
In an optional embodiment, the vacuum chamber further comprises a nitrogen purging system, wherein the nitrogen purging system comprises a nitrogen source, a first nitrogen delivery pipe and a second nitrogen delivery pipe, the nitrogen source is connected with the nitrogen input port of the first vacuum chamber through the first nitrogen delivery pipe, and the nitrogen source is further connected with the nitrogen input port of the second vacuum chamber through the second nitrogen delivery pipe; and the first nitrogen conveying pipe and the second nitrogen conveying pipe are both provided with electric control valves.
In an optional embodiment, the self-checking system comprises a helium standard leak hole, a first self-checking gas pipe and a second self-checking gas pipe; the helium standard leak hole is connected with the first vacuum box through a first self-checking gas pipe and is also connected with the second vacuum box through a second self-checking gas pipe; and the first self-checking air pipe and the second self-checking air pipe are both provided with an electric control valve.
In an optional embodiment, the vacuum box further comprises a cabinet, a workbench for placing two vacuum boxes is arranged in the middle of the cabinet, and a first accommodating space for placing a first vacuum pump, a second vacuum pump and a third vacuum pump is arranged on the cabinet and below the workbench; a placing platform for placing the helium mass spectrometer leak detector is arranged in the middle of the back side of the workbench on the cabinet, so that the helium mass spectrometer leak detector is located between the vacuum box and the first vacuum pump in the height direction of the cabinet body.
Compared with the prior art, the invention has the beneficial effects that:
1. the vacuum box comprises a translation driving mechanism and a pressing mechanism, wherein the translation driving mechanism is used for driving the box door body to slide relative to the box main body so as to open or close the accommodating chamber; when the box door body slides to the position for closing the accommodating chamber, the pressing mechanism is suitable for driving the pressing piece to press or release the box door body. The sliding type compression design is adopted, the box door body can be automatically controlled to be opened or closed, and the sliding type compression box has the advantages of being convenient to operate, small in occupied space and good in sealing effect. The invention changes the turnover door opening into the translation door opening, the whole box door body can be compressed, the sealing reliability is improved, because the box door body is very thick and heavy, the invention also designs a counterweight mode, thus the opening and closing of the door can be realized by a smaller cylinder, and if the counterweight is not used, the cylinder for opening the door is much larger.
2. The helium mass spectrum tightness testing equipment has the following advantages:
a. through the switching of the first vacuum box and the second vacuum box, the helium mass spectrum can be always in a working state, and the testing efficiency is improved.
b. And a helium recovery system is added, and the recovered helium can be used for product testing, so that the helium utilization rate is improved, the testing cost is reduced, and the risk of polluting the helium mass spectrometer leak detector by directly discharging the helium can be prevented.
c. And a cleaning system is added, and the vacuum box is cleaned by nitrogen, so that the residual helium in the vacuum box can be effectively cleaned, and the reliability of test data is improved.
d. A self-test system is added to perform a self-test when data of the helium mass spectrometer leak detector is suspected.
e. The vacuum box can be compatible with testing various types of products.
f. The helium is filled into the product in the vacuum box, so that the step of filling the helium into the product before testing can be reduced, the automatic helium filling and recovery can be realized, and if the helium filling process is a helium filling process independent from the equipment, the automation degree is lower.
Drawings
Fig. 1 is a perspective view of a vacuum box of embodiment 1;
FIG. 2 is a perspective view of another angle of the vacuum box of embodiment 1;
FIG. 3 is a schematic structural view of a door body of the case of embodiment 1;
FIG. 4 is a perspective view of the helium mass spectrometer seal tightness test apparatus of example 2;
FIG. 5 is a perspective view of another angle of the helium mass spectrometer seal tightness test apparatus of example 2;
FIG. 6 is a schematic view showing a partial configuration of a helium mass spectrometer leak tightness test apparatus according to example 2;
FIG. 7 is a schematic view showing the piping connection of the helium mass spectrometer leak tightness test apparatus of example 2; in FIG. 7, P1-P13 and V1-V9 are all electric control valves; l is the first vacuum box 110, R is the second vacuum box 120; A. and B is a tested product.
In FIGS. 1-7: 100. a vacuum box; 10. a box body; 11. a box main body; 111. a housing chamber; 12. a door body; 121. a capping portion; 122. a first slider connecting portion; 123. a second slider connecting portion; 124. a pressure-bearing portion; 21. a translation cylinder; 22. a piston rod connector; 231. a first sprocket; 233. a first front rail; 234. a first front slider; 235. a first rear rail; 236. a first rear slider; 237. a first slider connection assembly; 2371. a first guide post; 2372. a first spring; 2373. a first limit plate; 241. a second sprocket; 243. a second front rail; 244. a second front slider; 245. a second rear rail; 246. a second rear slider; 247. a second slider connection assembly; 2471. a second guide post; 2472. a second spring; 2473. a second limiting plate; 25. a balancing weight; 31. a compression member; 311. a fixed block; 312. a compression block; 313. connecting blocks; 32. a pressing cylinder; 40. a support frame; 41. a first vertical support plate; 42. a second vertical support plate; 43. a first transverse connecting plate; 50. a buffer member; 60. an abutting member; 110. a first vacuum box; 120. a second vacuum box; 200. a source of helium gas; 300. a helium mass spectrometer leak detector; 400. a first vacuum pump; 500. a second vacuum pump; 600. a third vacuum pump; 711. a first helium gas delivery tube; 712. a second helium delivery tube; 721. a first exhaust tube; 722. a second extraction tube; 731. a first inspection breather pipe; 732. a second inspection vent pipe; 741. a suction duct; 751. a first helium recovery gas tube; 752. a second helium recovery gas pipe; 761. a first atmospheric conduit; 762. a second atmospheric conduit; 771. a nitrogen source; 773. a first nitrogen gas delivery pipe; 774. a second nitrogen gas delivery pipe; 781. a helium gas standard leak; 782. a first self-detecting gas pipe; 783. a second self-detecting gas pipe; 800. a cabinet; 810. a work table; 820. and (5) placing a platform.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and the detailed description, and it should be noted that any combination of the embodiments or technical features described below can be used to form a new embodiment without conflict. Except as specifically noted, the materials and equipment used in this example are commercially available. Examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present application. In the description of the present application, "a plurality" means two or more unless specifically stated otherwise.
In the description of the present application, it should be noted that unless otherwise specifically stated or limited, the terms "connected," "communicating," and "connected" are to be construed broadly, e.g., as meaning a fixed connection, a connection through an intervening medium, a connection between two elements, or an interaction between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
The terms "first," "second," and the like in the description and in the claims of the present application and in the above-described drawings are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Example 1:
referring to fig. 1-3, a vacuum box 100 includes:
a box body 10, wherein the box body 10 comprises a box main body 11 and a box door body 12, and the box main body 11 comprises an accommodating chamber 111;
the translation driving mechanism is connected with the box door body 12 and the box main body 11 and is used for driving the box door body 12 to slide relative to the box main body 11 so as to open or close the accommodating chamber 111;
a pressing mechanism including a pressing member 31; the pressing mechanism is adapted to drive the pressing member 31 to press or release the door body 12 when the door body 12 is slid to a position to close the accommodation chamber 111.
In this embodiment, the box main body 11 and the box door 12 of the vacuum box 100 may both be made of thick stainless steel plates, so as to ensure that the box body 10 does not deform during the vacuum-pumping process, and thus the box door 12 does not deform during the sealing process, and is better attached to the box main body 11 for sealing. In addition, the structure of the stainless steel vacuum box 100 uses a welding technology, and has both economic performance and technical performance, so that in order to ensure the accuracy of the test, the roughness of the welding seam needs to be ensured and the welding seam is prevented from having fine gaps; surface roughness requirements of the weld: ra is less than or equal to 0.3 mu m, and l is 2.5 mm.
In the preferred embodiment of the present invention, the present invention further comprises a supporting frame 40, wherein the translation driving mechanism and the pressing mechanism are respectively installed on the supporting frame 40; the support frame 40 includes a first vertical support plate 41 and a second vertical support plate 42 symmetrically disposed on the left and right sides of the box main body 11, and a first transverse connecting plate 43 connected between the first vertical support plate 41 and the second vertical support plate 42, and the first transverse connecting plate 43 is located above the box main body 11. Therefore, enough installation positions can be reserved, the interference of the translation driving mechanism and the pressing mechanism on the sliding of the box door body 12 is avoided, and the box door has the advantage of convenience in dismounting.
In the preferred embodiment of the present invention, a backward inclined angle is formed between the box main body 11 and the vertical plane, so that the box main body 11 forms an inclined product placing opening; the box door body 12 includes a cover portion 121 covering the product placement opening of the box main body 11, and the inclination angle of the cover portion 121 is the same as the inclination angle of the box main body 11; the first vertical support plate 41 and the second vertical support plate 42 each have a forward inclined surface at the same inclination angle as the box main body 11. Preferably, the angle of inclination is 10 ° to 30 °. More preferably, the inclination angle is 20 °. The design has the following advantages: the device is convenient for the tested product to be put in and taken out, and can also quickly clean the helium gas remained in the vacuum box 100.
In the preferred embodiment of the present invention, the translation driving mechanism comprises a translation cylinder 21, a piston rod connecting member 22, and a translation guiding mechanism;
the door body 12 further includes a first slider connecting portion 122 and a second slider connecting portion 123 extending outward along the left and right sides of the capping portion 121;
the translation cylinder 21 is fixedly arranged on the outer side wall of the first vertical supporting plate 41;
the translation guide mechanism comprises a first guide assembly and a second guide assembly;
the first guide assembly includes a first sprocket 231 disposed on the top of the first vertical support plate 41, a first chain (not shown in the figure) disposed on the first sprocket 231, a first front rail 233 disposed on the front inclined surface of the first vertical support plate 41, a first front slider 234 slidably fitted on the first front rail 233, a first rear rail 235 disposed on the rear side surface of the first vertical support plate 41, a first rear slider 236 slidably fitted on the first rear rail 235, and a first slider connection assembly 237; one end of a first chain (not shown in the figure) is fixedly connected with the first front slide block 234, and the other end thereof is fixedly connected with the first rear slide block 236; one end of the first slider connecting assembly 237 is connected to the first front slider 234, and the other end thereof is connected to the first slider connecting portion 122;
the second guide assembly comprises a second chain wheel 241 arranged at the top of the second vertical support plate 42, a second chain (not shown in the figure) arranged on the second chain wheel 241, a second front guide rail 243 arranged on the front inclined surface of the second vertical support plate 42, a second front slider 244 in sliding fit with the second front guide rail 243, a second rear guide rail 245 arranged on the rear side surface of the second vertical support plate 42, a second rear slider 246 in sliding fit with the second rear guide rail 245 and a second slider connecting assembly 247; one end of a second chain (not shown) is fixedly connected to the second front slider 244, and the other end thereof is fixedly connected to the second rear slider 246; one end of the second slider connecting assembly 247 is connected to the second front slider 244, and the other end thereof is connected to the second slider connecting portion 123;
the piston rod of the translation cylinder 21 is fixedly connected with the first front slide 234 through the piston rod connector 22. The design is like this, owing to adopt two sets of sprocket drive mechanism for the translation process is more steady, and work efficiency is high.
The door closing process is as follows: the translation cylinder 21 drives the piston rod to move downwards, the piston rod drives the piston rod connecting piece 22 to move downwards, and the piston rod connecting piece 22 sequentially passes through the first front slide block 234, the first slide block connecting component 237 and the first slide block connecting part 122 to drive the box door body 12 to move downwards along the first front guide rail 233 and further can slide to a preset position to close the accommodating chamber 111; in the moving process of the door body 12, the first front sliding block 234 drives the first rear sliding block 236 to move upwards along the first rear guide rail 235 through the first chain (not shown in the figure) and the first chain wheel 231; the second slider connecting portion 123 of the door body 12 drives the second front slider 244 to move down along the second front rail 243 through the second slider connecting assembly 247, and the second front slider 244 drives the second rear slider 246 to move up along the second rear rail 245 through the second chain (not shown in the figure) and the second sprocket 241;
the door opening process is as follows: the translation cylinder 21 drives the piston rod to move upwards, the piston rod drives the piston rod connecting piece 22 to move upwards, and the piston rod connecting piece 22 sequentially passes through the first front slide block 234, the first slide block connecting assembly 237 and the first slide block connecting part 122 to drive the box door body 12 to move upwards along the first front guide rail 233, and then can slide to a preset position to open the accommodating chamber 111; in the moving process of the box door body 12, the first front sliding block 234 drives the first rear sliding block 236 to move downwards along the first rear guide rail 235 through the first chain (not shown in the figure) and the first chain wheel 231; the second slider connecting portion 123 of the door body 12 drives the second front slider 244 to move up along the second front guide rail 243 through the second slider connecting assembly 247, and the second front slider 244 drives the second rear slider 246 to move down along the second rear guide rail 245 through the second chain (not shown in the figure) and the second chain wheel 241;
in the preferred embodiment of the present invention, a weight 25 is further disposed on the first rear slider 236 and/or the second rear slider 246. In the practical application process, because the volume of the box door body 12 is large and heavy, when the box door body 12 is reset, an air cylinder with a long range and large tension is needed, the volume of the air cylinder meeting the two conditions is large, and therefore the tension for pulling the box door body 12 can be reduced by arranging the balancing weight 25.
In the preferred embodiment of the present invention, the first slider coupling assembly 237 includes a first guide post 2371, a first spring 2372; one end of the first guide post 2371 is fixedly mounted on the first slider, and the other end thereof passes through the first slider connecting portion 122 to extend outward, and the extending end of the first guide post 2371 is provided with a first limit plate 2373; the first spring 2372 is sleeved on the first guide post 2371 between the first slider and the first slider connecting portion 122; the second slider coupling assembly 247 includes a second guide post 2471, a second spring 2472; one end of the second guide post 2471 is fixedly mounted on the second slider, and the other end thereof passes through the second slider connecting part 123 to extend outwards, and the extending end of the second guide post 2471 is provided with a second limiting plate 2473; the second spring 2472 is sleeved on the second guide post 2471 between the second slider and the second slider connecting portion 123. By the design, the first spring 2372 and the second spring 2472 are matched with the pressing air cylinder 32 to realize the functions of automatically springing open and pressing, and the pressing air cylinder 32 is arranged on the support frame 40 to increase the pressing force and strength. In addition, the first limit plate 2373 and the second limit plate 2473 can limit the pop-up position.
In the preferred embodiment of the present invention, the door body 12 further includes a pressure-bearing portion 124 extending outwardly along the first slider connecting portion 122 and the second slider connecting portion 123; the pressing mechanism further comprises a pressing cylinder 32 fixedly mounted on the outer side wall of the first vertical support plate 41, and the pressing piece 31 comprises a fixed block 311, a pressing block 312 and a connecting block 313 connected between the fixed block 311 and the pressing block 312, wherein the fixed block 311 and the pressing block 312 are arranged in parallel; one end of the fixed block 311 is fixedly connected with the piston rod of the pressing cylinder 32, and the other end thereof is fixedly connected with the pressing block 312 through a connecting block 313; a passage for the pressure-bearing part 124 to pass through is formed between the fixed block 311 and the pressing block 312; the pressing cylinder 32 is adapted to drive the pressing block 312 to press or release the pressing portion 124 when the door body 12 is slid to a position to close the accommodation chamber 111.
In the preferred embodiment of the present invention, the number of the pressure receiving portions 124 is two, and they are symmetrically disposed at the outer sides of the first slider connecting portion 122 and the second slider connecting portion 123; the number of the pressing mechanisms is two, and they are symmetrically installed on the first vertical support plate 41 and the second vertical support plate 42. By the design, stress of each point is uniform during sealing, and the sealing effect is better.
In the preferred embodiment of the present invention, a plurality of buffering members 50 are disposed on the supporting frame 40, and an abutting member 60 is disposed on the first front rail 233 and the second front rail 243 corresponding to each buffering member 50; the buffer member 50 serves to provide damping in the up-down sliding direction to the abutting member 60. Since the weight of the door 12 is large, the buffering members 50 must be disposed at both the upper limit position and the lower limit position of the translation of the door 12, so as to perform the buffering and shock-absorbing functions.
In a preferred embodiment of the present invention, the box body 11 may further be provided with a clamping mechanism for clamping the product to be tested.
Example 2:
referring to fig. 4-7, a helium mass spectrometer seal tightness test apparatus includes the vacuum box 100 of example 1.
In the preferred embodiment of the present invention, the number of the vacuum boxes 100 is two, which are respectively designated as a first vacuum box 110 and a second vacuum box 120; the helium mass spectrometer leak detector further comprises a helium source 200, a helium mass spectrometer leak detector 300, a first vacuum pump 400, a second vacuum pump 500, a third vacuum pump 600 and a helium recovery device;
the pumping port of the first vacuum box 110 is connected to the first vacuum pump 400 through a first pumping pipe 721, and the pumping port of the second vacuum box 120 is connected to the second vacuum pump 500 through a second pumping pipe 722;
the inspection vent of the first vacuum box 110 is connected to the inlet of the helium mass spectrometer leak detector 300 by a first inspection vent 731, and the inspection vent of the second vacuum box 120 is connected to the inlet of the helium mass spectrometer leak detector 300 by a second inspection vent 732; the pumping port of the helium mass spectrometer leak detector 300 is connected with a second vacuum pump 500 through a pumping pipeline 741;
a helium recovery port of the first vacuum box 110 is connected with an air inlet of the third vacuum pump 600 through a first helium recovery air pipe 751, a helium recovery port of the second vacuum box 120 is connected with an air inlet of the third vacuum pump 600 through a second helium recovery air pipe 752, and an air outlet of the third vacuum pump 600 is connected with a helium recovery device through a pipeline;
a first atmosphere pipeline 761 and a second atmosphere pipeline 762 communicated with the atmosphere are respectively arranged on the first vacuum box 110 and the second vacuum box 120;
the first helium delivery pipe 711, the second helium delivery pipe 712, the first air pumping pipe 721, the second air pumping pipe 722, the first inspection air pipe 731, the second inspection air pipe 732, the suction pipeline 741, the first helium recovery air pipe 751, the second helium recovery air pipe 752, the first atmosphere pipeline 761 and the second atmosphere pipeline 762 are all provided with electric control valves.
In the preferred embodiment of the present invention, a nitrogen purging system is further included, the nitrogen purging system includes a nitrogen source 771, a first nitrogen delivery tube 773 and a second nitrogen delivery tube 774, the nitrogen source 771 is connected to the nitrogen input port of the first vacuum chamber 110 through the first nitrogen delivery tube 773, and the nitrogen source 771 is further connected to the nitrogen input port of the second vacuum chamber 120 through the second nitrogen delivery tube 774; the first nitrogen delivery pipe 773 and the second nitrogen delivery pipe 774 are provided with electric control valves. Therefore, the nitrogen gas is used for cleaning the vacuum box 100, so that the helium gas remained in the vacuum box 100 can be effectively cleaned, and the reliability of test data is improved.
In the preferred embodiment of the present invention, the self-test system further comprises a helium gas standard leak 781, a first self-test gas pipe 782 and a second self-test gas pipe 783; the helium standard leak 781 is connected with the first vacuum box 110 through a first self-checking air pipe 782, and the helium standard leak 781 is also connected with the second vacuum box 120 through a second self-checking air pipe 783; and the first self-checking air pipe 782 and the second self-checking air pipe 783 are both provided with an electric control valve. A self-test may be performed when data is suspected for helium mass spectrometer leak detector 300.
In the preferred embodiment of the present invention, the vacuum box further comprises a cabinet 800, a workbench 810 for placing two vacuum boxes 100 is disposed in the middle of the cabinet 800, and a first accommodating space for placing the first vacuum pump 400, the second vacuum pump 500 and the third vacuum pump 600 is disposed below the workbench 810 on the cabinet 800; a placement platform 820 for placing the helium mass spectrometer leak detector 300 is provided on the cabinet 800 in the middle of the back side of the table 810, so that the helium mass spectrometer leak detector 300 is located between the vacuum box 100 and the first vacuum pump 400 in the height direction of the cabinet. Specifically, the placement of helium mass spectrometer leak detector 300 requires a source of vibration that is remote from first vacuum pump 400 and cannot be higher than stainless steel vacuum box 100 because vacuum box 100 will discharge residual helium from the test into the atmosphere during purging, which will rise up in the helium atmosphere and potentially contaminate the helium mass spectrometer.
Referring to FIG. 7, P1-P13 and V1-V9 are electrically controlled valves; l is the first vacuum box 110, R is the second vacuum box 120; the product is placed in a vacuum box 100 and is tested by filling helium, and A, B is the tested product.
The first vacuum pump 400 functions to change the atmosphere in the first vacuum box 110 and the second vacuum box 120 to vacuum.
The second vacuum pump 500 functions to provide an operating environment for the helium mass spectrometer leak detector 300.
The third vacuum pump 600 is used for pumping the helium gas to the helium gas recovery system for recycling.
The helium standard leak 781 functions as a self test for the device.
The process of detecting the tightness of the equipment comprises the following steps: the first vacuum box 110 and the second vacuum box 120 are vacuumized, helium is filled in the vacuum box 100 for a product to be detected, the product of the first vacuum box 110 or the product of the second vacuum box 120 is selected to be detected, the helium mass spectrometer leak detector 300 detects the product, the helium mass spectrometer leak detector 300 obtains the leakage rate of the product, the helium is discharged to a recovery system, the vacuum box 100 is cleaned by nitrogen, and finally the vacuum is released. Through the switching of the first vacuum box 110 and the second vacuum box 120, when the product detection of one vacuum box 100 is finished, the other vacuum box 100 can perform detection, namely, the two vacuum boxes 100 can be simultaneously in the processes of testing, helium recovery, cleaning and vacuum release, so that the product detection efficiency is improved. And a CNAS approved helium standard leak 781 calibrated by a laboratory is arranged on the device, so that the accuracy and reliability of detection data are ensured.
The working process of the equipment is as follows:
1. placing the tested product into a vacuum box 100, and connecting the tested product with a helium gas outlet in the vacuum box 100;
2. the first vacuum pump 400 pumps out the gas in the vacuum box 100 to make the environment in the vacuum box 100 vacuum, and then the helium gas supply system is used for filling helium gas into the product to be tested;
3. after a period of time, the helium mass spectrometer leak detector 300 detects the time and the leakage rate of the product, and the third vacuum pump 600 pumps the helium gas of the product test into a recovery system for the next test cycle;
4. after the helium gas is recovered, the vacuum box 100 is purged by the nitrogen purging system.
5. The vacuum box 100 exhausts, namely the vacuum environment of the vacuum box 100 is broken, the box door body 12 of the vacuum box 100 is opened after the exhaust is finished, and the product is taken out, so that one-time product test is finished.
Other examples are as follows:
the pressing mechanism and the translation driving mechanism can also adopt a hydraulic oil cylinder as a power source, and can be adjusted correspondingly according to the requirements of users. While only certain features and embodiments of the application have been illustrated and described, many modifications and changes may occur to those skilled in the art (e.g., variations in sizes, dimensions, structures, shapes and proportions of the various elements, mounting arrangements, use of materials, colors, orientations, etc.) without materially departing from the scope and spirit of the invention in the claims.
Finally, it should be noted that: the above embodiments are only preferred embodiments of the present invention, and the protection scope of the present invention should not be limited thereby, and any insubstantial changes and substitutions made by those skilled in the art based on the present invention are within the protection scope of the present invention.
Claims (14)
1. A vacuum box, comprising:
the box body comprises a box main body and a box door body, and the box main body comprises an accommodating chamber;
the translation driving mechanism is connected with the box door body and the box main body and used for driving the box door body to slide relative to the box main body so as to open or close the accommodating chamber;
a hold-down mechanism comprising a hold-down member; when the box door body slides to the position for closing the accommodating chamber, the pressing mechanism is suitable for driving the pressing piece to press or release the box door body.
2. The vacuum box according to claim 1, further comprising a support frame, wherein the translation driving mechanism and the pressing mechanism are respectively mounted on the support frame; the support frame including the symmetry set up in first vertical support plate and the second vertical support plate of case main part left and right sides to and connect the first transverse connection board between first vertical support plate and second vertical support plate, first transverse connection board is located the top of case main part.
3. The vacuum box as claimed in claim 2, wherein the box body forms a rearwardly inclined angle of inclination with a vertical plane such that the box body forms an inclined product placement port; the box door body comprises a sealing cover part covering the product placing opening of the box main body, and the inclination angle of the sealing cover part is the same as that of the box main body; the first vertical supporting plate and the second vertical supporting plate are respectively provided with a front inclined plane with the same inclination angle as the box main body; the inclination angle is 10-30 degrees.
4. The vacuum box of claim 3, wherein the translation drive mechanism comprises a translation cylinder, a piston rod connection, a translation guide mechanism;
the box door body also comprises a first slide block connecting part and a second slide block connecting part which extend outwards along the left side and the right side of the sealing part;
the translation cylinder is fixedly arranged on the outer side wall of the first vertical supporting plate or the second vertical supporting plate;
the translation guide mechanism comprises a first guide assembly and a second guide assembly;
the first guide assembly comprises a first chain wheel arranged at the top of the first vertical support plate, a first chain arranged on the first chain wheel, a first front guide rail arranged on a front inclined plane of the first vertical support plate, a first front slide block in sliding fit with the first front guide rail, a first rear guide rail arranged on the rear side surface of the first vertical support plate, a first rear slide block in sliding fit with the first rear guide rail and a first slide block connecting assembly; one end of the first chain is fixedly connected with the first front sliding block, and the other end of the first chain is fixedly connected with the first rear sliding block; one end of the first sliding block connecting component is connected with the first front sliding block, and the other end of the first sliding block connecting component is connected with the first sliding block connecting part;
the second guide assembly comprises a second chain wheel arranged at the top of the second vertical support plate, a second chain arranged on the second chain wheel, a second front guide rail arranged on a front inclined plane of the second vertical support plate, a second front slide block in sliding fit with the second front guide rail, a second rear guide rail arranged on the rear side surface of the second vertical support plate, a second rear slide block in sliding fit with the second rear guide rail and a second slide block connecting assembly; one end of the second chain is fixedly connected with the second front sliding block, and the other end of the second chain is fixedly connected with the second rear sliding block; one end of the second sliding block connecting component is connected with the second front sliding block, and the other end of the second sliding block connecting component is connected with the second sliding block connecting part;
and a piston rod of the translation cylinder is fixedly connected with the first front sliding block or the second front sliding block through a piston rod connecting piece.
5. The vacuum box as claimed in claim 4, characterized in that a weight is further provided on the first rear slider and/or the second rear slider.
6. The vacuum box of claim 4, wherein the first slider connection assembly comprises a first guide post, a first spring; one end of the first guide pillar is fixedly arranged on the first sliding block, the other end of the first guide pillar penetrates through the connecting part of the first sliding block and extends outwards, and a first limiting plate is arranged at the extending end of the first guide pillar; the first spring is sleeved on the first guide pillar between the first sliding block and the first sliding block connecting part;
the second sliding block connecting assembly comprises a second guide pillar and a second spring; one end of the second guide pillar is fixedly arranged on the second sliding block, the other end of the second guide pillar penetrates through the connecting part of the second sliding block and extends outwards, and a second limiting plate is arranged at the extending end of the second guide pillar; the second spring is sleeved on the second guide pillar between the second sliding block and the second sliding block connecting part.
7. The vacuum box according to claim 3, wherein the box door body further comprises a pressure-bearing portion extending outward along the first slider connecting portion or the second slider connecting portion; the pressing mechanism further comprises a pressing cylinder fixedly mounted on the outer side wall of the first vertical supporting plate or the second vertical supporting plate, and the pressing piece comprises a fixing block and a pressing block which are arranged in parallel and a connecting block connected between the fixing block and the pressing block; one end of the fixed block is fixedly connected with a piston rod of the pressing cylinder, and the other end of the fixed block is fixedly connected with the pressing block through a connecting block; a channel for a pressure-bearing part to pass through is formed between the fixed block and the pressing block; when the box door body slides to the position for closing the accommodating chamber, the pressing cylinder is suitable for driving the pressing block to press or release the bearing part.
8. The vacuum box according to claim 7, wherein the number of the pressing portions is two, and the two pressing portions are symmetrically arranged at the outer sides of the first slider connecting portion and the second slider connecting portion; the number of the pressing mechanisms is two, and the pressing mechanisms are symmetrically arranged on the first vertical supporting plate and the second vertical supporting plate.
9. The vacuum box as claimed in claim 4, wherein a plurality of buffers are arranged on the supporting frame, and an abutting part is arranged on the first front rail and the second front rail corresponding to each buffer; the buffer piece is used for providing damping along the up-and-down sliding direction for the abutting piece.
10. Helium mass spectrometer leak tightness test device, characterized in that it comprises a vacuum box according to any one of claims 1 to 9.
11. The helium mass spectrometer tightness test device according to claim 10, wherein the number of the vacuum boxes is two, and the two vacuum boxes are respectively marked as a first vacuum box and a second vacuum box; the system also comprises a helium source, a helium mass spectrometer leak detector, a first vacuum pump, a second vacuum pump, a third vacuum pump and a helium recovery device;
the helium source is connected with the air inlet of the first vacuum box through a first helium conveying pipe, and is also connected with the air inlet of the second vacuum box through a second helium conveying pipe;
the air exhaust port of the first vacuum box is connected with the first vacuum pump through a first air exhaust pipe, and the air exhaust port of the second vacuum box is connected with the second vacuum pump through a second air exhaust pipe;
the inspection air vent of the first vacuum box is connected with the air inlet of the helium mass spectrometer leak detector through a first inspection air pipe, and the inspection air vent of the second vacuum box is connected with the air inlet of the helium mass spectrometer leak detector through a second inspection air pipe; the pumping port of the helium mass spectrometer leak detector is connected with the second vacuum pump through a pumping pipeline;
the helium recovery port of the first vacuum box is connected with the air inlet of the third vacuum pump through a first helium recovery air pipe, the helium recovery port of the second vacuum box is connected with the air inlet of the third vacuum pump through a second helium recovery air pipe, and the air outlet of the third vacuum pump is connected with the helium recovery device through a pipeline;
a first atmosphere pipeline and a second atmosphere pipeline communicated with the atmosphere are respectively arranged on the first vacuum box and the second vacuum box;
and the first helium conveying pipe, the second helium conveying pipe, the first exhaust pipe, the second exhaust pipe, the first inspection ventilating pipe, the second inspection ventilating pipe, the suction pipeline, the first helium recovery air pipe, the second helium recovery air pipe, the first atmosphere pipeline and the second atmosphere pipeline are all provided with electric control valves.
12. The helium mass spectrometer seal tightness test device according to claim 11, further comprising a nitrogen purge system comprising a nitrogen source, a first nitrogen delivery pipe and a second nitrogen delivery pipe, the nitrogen source being connected to the nitrogen input port of the first vacuum box through the first nitrogen delivery pipe, the nitrogen source being further connected to the nitrogen input port of the second vacuum box through the second nitrogen delivery pipe; and the first nitrogen conveying pipe and the second nitrogen conveying pipe are both provided with electric control valves.
13. The helium mass spectrometer seal tightness test device according to claim 11, further comprising a self-test system comprising a helium gas standard leak, a first self-test gas tube and a second self-test gas tube; the helium standard leak hole is connected with the first vacuum box through a first self-checking gas pipe and is also connected with the second vacuum box through a second self-checking gas pipe; and the first self-checking air pipe and the second self-checking air pipe are both provided with an electric control valve.
14. The helium mass spectrometer tightness test device according to claim 12, further comprising a cabinet, wherein a workbench for placing two vacuum boxes is arranged in the middle of the cabinet, and a first accommodating space for placing a first vacuum pump, a second vacuum pump and a third vacuum pump is arranged on the cabinet below the workbench; a placing platform for placing the helium mass spectrometer leak detector is arranged in the middle of the back side of the workbench on the cabinet, so that the helium mass spectrometer leak detector is located between the vacuum box and the first vacuum pump in the height direction of the cabinet body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110252255.7A CN112849772A (en) | 2021-03-08 | 2021-03-08 | Vacuum box and helium mass spectrum sealing performance testing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110252255.7A CN112849772A (en) | 2021-03-08 | 2021-03-08 | Vacuum box and helium mass spectrum sealing performance testing equipment |
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| CN112849772A true CN112849772A (en) | 2021-05-28 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114184329A (en) * | 2021-10-18 | 2022-03-15 | 上海贤日测控科技有限公司 | Leak detection mechanism |
| CN115655591A (en) * | 2022-11-11 | 2023-01-31 | 安徽诺益科技有限公司 | Self-inspection device and self-inspection method of helium mass spectrometer leak detector |
| CN115773845A (en) * | 2023-02-13 | 2023-03-10 | 上腾科技(广州)有限公司 | Electrolyte leakage standard calibrating device |
-
2021
- 2021-03-08 CN CN202110252255.7A patent/CN112849772A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114184329A (en) * | 2021-10-18 | 2022-03-15 | 上海贤日测控科技有限公司 | Leak detection mechanism |
| CN115655591A (en) * | 2022-11-11 | 2023-01-31 | 安徽诺益科技有限公司 | Self-inspection device and self-inspection method of helium mass spectrometer leak detector |
| CN115773845A (en) * | 2023-02-13 | 2023-03-10 | 上腾科技(广州)有限公司 | Electrolyte leakage standard calibrating device |
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