CN215569725U - MOCVD MO source steel cylinder hand valve device for photoelectric chip epitaxy - Google Patents
MOCVD MO source steel cylinder hand valve device for photoelectric chip epitaxy Download PDFInfo
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- CN215569725U CN215569725U CN202120380355.3U CN202120380355U CN215569725U CN 215569725 U CN215569725 U CN 215569725U CN 202120380355 U CN202120380355 U CN 202120380355U CN 215569725 U CN215569725 U CN 215569725U
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Abstract
The utility model relates to an MOCVD MO source steel cylinder hand valve device for photoelectric chip epitaxy, which comprises a steel cylinder, an inlet pipeline arranged on the steel cylinder, an outlet pipeline arranged on the steel cylinder, an inlet hand valve arranged on the inlet pipeline and an outlet hand valve arranged on the outlet pipeline, wherein a first sensing device used for detecting the opening and closing of the inlet hand valve is arranged on the inlet hand valve, a second sensing device used for detecting the opening and closing of the outlet hand valve is arranged on the outlet hand valve, and the first sensing device and the second sensing device are both connected with a sensing signal display mechanism. The utility model can detect the opening and closing state of the outlet hand valve through the first sensing device, can detect the opening and closing state of the inlet hand valve through the second sensing device, and displays the corresponding detection state through the sensing signal display mechanism to prompt the state of the hand valve, thereby avoiding economic loss and safety accidents caused by forgetting to close the hand valve.
Description
Technical Field
The utility model relates to a MOCVD MO source steel cylinder hand valve device for photoelectric chip epitaxy.
Background
The semiconductor such as gallium nitride, gallium arsenide, indium phosphide and the like has wide application prospect in the fields of photoelectrons and the like. In the industry, a Metal Organic Chemical Vapor Deposition (MOCVD) method is mainly adopted for epitaxial growth of semiconductor materials such as gallium nitride, gallium arsenide and indium phosphide, and when the method is used for epitaxial growth of the semiconductor materials such as gallium nitride, gallium arsenide and indium phosphide, the used main production raw materials are metal organic sources (MO sources), and the MO sources are carried into a reaction chamber by carrier gases such as high-purity nitrogen or high-purity hydrogen to participate in chemical reaction.
Traditional being used for MOCVD MO source steel bottle hand valve device includes inlet pipe way, entry hand valve, outlet pipe way, export hand valve, steel bottle body etc. MO source material is mainly stored in steel bottle body the inside, in the epitaxial growth technology process, gets into steel bottle body from inlet pipe way through carrier gas (H2), drives the inside saturated vapour pressure of steel bottle body through the mode of tympanic bulla in steel bottle body the inside to make the MO source flow into the reaction chamber from outlet pipe way. The MO source is divided into liquid and solid, and the characteristics of the MO source are flammable and explosive when meeting water and air. In normal state, the MO source steel cylinder inlet and outlet hand valves are in an open state. The MO source needs to be periodically replaced in the use process, the MO source is easily forgotten to be closed when replaced, the residual MO source is replaced by nitrogen, certain economic loss is caused, the risk of flammability and explosiveness (the actual case is too present), the phenomenon that the MO source hand valve is forgotten to be opened can also occur when the MO source is replaced, the MO source cannot flow into the reaction cavity in the process production process, and the efficiency and the safety of epitaxial growth of semiconductors such as gallium nitride, gallium arsenide and indium phosphide are seriously influenced.
Accordingly, the present inventors have made extensive studies to solve the above problems and have made the present invention.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a MOCVD MO source steel cylinder hand valve device for photoelectric chip epitaxy, which is simple in structure and safe to use.
In order to achieve the purpose, the utility model adopts the following technical scheme:
the utility model provides a MOCVD MO source steel bottle hand valve device for photoelectricity chip is epitaxial, includes the steel bottle, sets up the entry pipeline on the steel bottle, sets up export pipeline on the steel bottle, sets up the entry hand valve on the entry pipeline and sets up the export hand valve on export pipeline, be equipped with on the entry hand valve and be used for detecting the first sensing device that the entry hand valve was opened and close, be equipped with on the export hand valve and be used for detecting the second sensing device that the export hand valve was opened and close, first sensing device and second sensing device all are connected with sensing signal display mechanism.
As a preferable mode of the present invention, the inlet hand valve includes a first valve body disposed in the inlet pipe and a first rotary valve rod disposed on the first valve body for controlling opening and closing of the first valve body, the outlet hand valve includes a second valve body disposed in the outlet pipe and a second rotary valve rod disposed on the second valve body for controlling opening and closing of the second valve body, the first sensing device is disposed on the first rotary valve rod, and the second sensing device is disposed on the second rotary valve rod.
As a preferable mode of the present invention, the first rotary valve stem is provided with a first hand valve, the first sensing device is provided on the first hand valve, the second rotary valve stem is provided with a second hand valve, and the second sensing device is provided on the second hand valve.
In a preferred embodiment of the present invention, the first sensor device and the second sensor device are both distance sensors.
In a preferred embodiment of the present invention, the distance sensor is a laser sensor.
In a preferred embodiment of the present invention, the inlet pipe and the outlet pipe are both hard pipes.
As a preferable mode of the present invention, the inlet pipe is sleeved with a first movable nut, an inlet end of the inlet pipe is provided with a first limiting flange for limiting the first movable nut to slide out, one axial end of the first movable nut is provided with a first limiting portion corresponding to the first limiting flange, the present invention further includes a gas input pipe, the gas input pipe is provided with a first threaded portion corresponding to the first movable nut, and a first sealing gasket is arranged between the gas input pipe and the inlet pipe.
As a preferable mode of the present invention, the outlet pipe is sleeved with a second movable nut, an outlet end of the outlet pipe is provided with a second limit flange for limiting the second movable nut to slide out, one end of the second movable nut along the axial direction is provided with a second limit portion corresponding to the second limit flange, the present invention further includes a gas output pipe, the gas output pipe is provided with a second threaded portion corresponding to the second movable nut, and a second sealing gasket is arranged between the gas output pipe and the outlet pipe.
In a preferred embodiment of the present invention, the sensing signal display means is a buzzer or an alarm lamp.
After the technical scheme of the utility model is adopted, the opening and closing state of the outlet hand valve can be detected through the first sensing device, the opening and closing state of the inlet hand valve can be detected through the second sensing device, the corresponding detection state is displayed through the sensing signal display mechanism, the state of the hand valve is prompted, and economic loss and safety accidents caused by forgetting to close the hand valve are avoided.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic view of the connection of the gas input pipe and the inlet pipe in the present invention.
Fig. 3 is a schematic view of the connection of the gas outlet pipe and the outlet pipe in the present invention.
In the figure:
First rotary valve stem 42 first hand valve 43
Second rotary valve stem 52 second hand valve 53
First movable nut 70 first limit part 71
Second movable nut 80 and second position-limiting part 81
Detailed Description
In order to further explain the technical solution of the present invention, the following detailed description is made with reference to the embodiments.
Referring to fig. 1 to 3, an MOCVD MO source steel cylinder hand valve device for photoelectric chip epitaxy includes a steel cylinder 30, an inlet pipeline 10 disposed on the steel cylinder 30, an outlet pipeline 20 disposed on the steel cylinder 30, an inlet hand valve 40 disposed on the inlet pipeline 10, and an outlet hand valve 50 disposed on the outlet pipeline 20, an outlet end of the inlet pipeline 10 is lower than an outlet end of the outlet pipeline 20, a first sensing device 61 for detecting an opening and closing of the inlet hand valve 40 is disposed on the inlet hand valve 40, when the inlet hand valve 40 is closed or opened, the first sensing device 61 can obtain a signal, a second sensing device 62 for detecting an opening and closing of the outlet hand valve 50 is disposed on the outlet hand valve 50, and when the outlet hand valve 50 is closed or opened, the second sensing device 62 can obtain a signal. The first sensing device 61 and the second sensing device 62 are connected with a sensing signal display mechanism, in an embodiment, the sensing signal display mechanism is a buzzer 101 and/or a warning lamp 102, and the buzzer 101 and the warning lamp 102 are connected to the PLC controller 100.
As a preferred mode of the present invention, the inlet hand valve 40 includes a first valve body 41 disposed in the inlet pipe 10 and a first rotary valve rod 42 disposed on the first valve body 41 for controlling the opening and closing of the first valve body 41, the outlet hand valve 50 includes a second valve body 51 disposed in the outlet pipe 20 and a second rotary valve rod 52 disposed on the second valve body 51 for controlling the opening and closing of the second valve body 51, the first sensing device 61 is disposed on the first rotary valve rod 42, and the second sensing device 62 is disposed on the second rotary valve rod 52.
In a preferred embodiment of the present invention, the first rotary valve stem 42 is provided with a first hand wheel 43, the first sensor device 61 is provided on the first hand wheel 43, the second rotary valve stem 52 is provided with a second hand wheel 53, and the second sensor device 62 is provided on the second hand wheel 53. The first hand wheel 43 can be moved toward or away from the first valve body 41 by rotating the first hand wheel 43, so that the first sensing device 61 is moved toward or away from the first valve body 41, and the second hand wheel 53 can be moved toward or away from the second valve body 51 by rotating the second hand wheel 53, so that the second hand wheel 53 is moved toward or away from the second valve body 51.
In a preferred embodiment of the present invention, the first sensor device 61 and the second sensor device 62 are both distance sensors, and the first sensor device 61 obtains a signal by a change in the distance between the first hand wheel 43 and the first valve body 41, and the second sensor device 62 obtains a signal by a change in the distance between the second hand wheel 53 and the second valve body 51. Specifically, the distance Sensor is a Sensor laser ranging Sensor, and the sensing distance can be 4-6 cm.
In a preferred embodiment of the present invention, the inlet pipe 10 and the outlet pipe 20 are both hard pipes, preferably metal pipes.
As a preferred aspect of the present invention, the inlet pipe 10 is sleeved with a first movable nut 70, the inlet end of the inlet pipe 10 is provided with a first limiting flange 11 for limiting the first movable nut 70 to slide out, one end of the first movable nut 70 in the axial direction is provided with a first limiting portion 71 corresponding to the first limiting flange 11, the inlet pipe further includes a gas input pipe 91, the gas input pipe 91 is provided with a first threaded portion 93 corresponding to the first movable nut 70, and a first sealing gasket 72 is arranged between the gas input pipe 91 and the inlet pipe 10. In use, the first movable nut 70 is slid and rotated so that the first movable nut 70 is screwed onto the first screw portion 93, thereby connecting the gas inlet pipe 91 to the inlet pipe 10, sealing the connection between the gas inlet pipe 91 and the inlet pipe 10 by the first sealing gasket 72, and unscrewing the first movable nut 70 from the gas inlet pipe 91 when replacing the cylinder 30. When the steel cylinder 30 is replaced, the inlet hand valve 40 is closed, and the gas is repeatedly pumped and filled into the part of the inlet pipeline 10 above the inlet hand valve 40, so that residual substances in the part are replaced, the safety is ensured, and the loss is avoided.
As a preferred mode of the present invention, the outlet pipe 20 is sleeved with a second movable nut 80, an outlet end of the outlet pipe 20 is provided with a second limiting flange 21 for limiting the second movable nut 80 to slide out, one end of the second movable nut 80 in the axial direction is provided with a second limiting portion 81 corresponding to the second limiting flange 21, the present invention further includes a gas output pipe 92, the gas output pipe 92 is provided with a second threaded portion 94 corresponding to the second movable nut 80, and a second sealing gasket 82 is arranged between the gas output pipe 92 and the outlet pipe 20. When the steel cylinder 30 is replaced, the outlet hand valve 50 is closed, and the part of the outlet pipeline 20 above the outlet hand valve 50 is repeatedly pumped and filled with gas, so that residual substances in the part are replaced, and the installation is ensured and the loss is avoided.
The product form of the present invention is not limited to the embodiments, and any suitable changes or modifications of the similar ideas by anyone should be considered as not departing from the patent scope of the present invention.
Claims (9)
1. The utility model provides a steel bottle hand valve device of MOCVD MO source for photoelectricity chip is epitaxial, includes the steel bottle, sets up the entry pipeline on the steel bottle, sets up the export pipeline on the steel bottle, sets up the entry hand valve on the entry pipeline and sets up the export hand valve on the export pipeline, its characterized in that: the inlet hand valve is provided with a first sensing device for detecting the opening and closing of the inlet hand valve, the outlet hand valve is provided with a second sensing device for detecting the opening and closing of the outlet hand valve, and the first sensing device and the second sensing device are both connected with a sensing signal display mechanism.
2. The MOCVD MO source steel cylinder hand valve device for photovoltaic chip epitaxy as claimed in claim 1, wherein: the inlet hand valve comprises a first valve body arranged in the inlet pipeline and a first rotary valve rod arranged on the first valve body and used for controlling the first valve body to open and close, the outlet hand valve comprises a second valve body arranged in the outlet pipeline and a second rotary valve rod arranged on the second valve body and used for controlling the second valve body to open and close, the first sensing device is arranged on the first rotary valve rod, and the second sensing device is arranged on the second rotary valve rod.
3. The MOCVD MO source steel cylinder hand valve device for photovoltaic chip epitaxy as claimed in claim 2, wherein: the first rotary valve rod is provided with a first hand valve, the first sensing device is arranged on the first hand valve, the second rotary valve rod is provided with a second hand valve, and the second sensing device is arranged on the second hand valve.
4. The MOCVD MO source steel cylinder hand valve device for photovoltaic chip epitaxy of claim 3, wherein: the first sensing device and the second sensing device are both distance sensors.
5. The MOCVD MO source steel cylinder hand valve device for photovoltaic chip epitaxy according to claim 4, wherein: the distance sensor is a laser sensor.
6. The MOCVD MO source steel cylinder hand valve device for photovoltaic chip epitaxy as claimed in claim 5, wherein: the inlet pipeline and the outlet pipeline are both hard pipes.
7. The MOCVD MO source steel cylinder hand valve device for photovoltaic chip epitaxy of claim 6, wherein: the inlet pipeline is sleeved with a first movable nut, the inlet end of the inlet pipeline is provided with a first limiting flange used for limiting the first movable nut to slide out, one axial end of the first movable nut is provided with a first limiting portion corresponding to the first limiting flange, the inlet pipeline further comprises a gas input pipeline, a first thread portion corresponding to the first movable nut is arranged on the gas input pipeline, and a first sealing gasket is arranged between the gas input pipeline and the inlet pipeline.
8. The MOCVD MO source steel cylinder hand valve device for photovoltaic chip epitaxy of claim 7, wherein: the outlet pipeline is sleeved with a second movable nut, the outlet end of the outlet pipeline is provided with a second limiting flange used for limiting the second movable nut to slide out, a second limiting portion corresponding to the second limiting flange is arranged at one axial end of the second movable nut, the gas output pipeline is further provided with a second threaded portion corresponding to the second movable nut, and a second sealing gasket is arranged between the gas output pipeline and the outlet pipeline.
9. The MOCVD MO source steel cylinder hand valve device for photovoltaic chip epitaxy according to any one of claims 1 to 8, characterized in that: the sensing signal display mechanism is a buzzer or an alarm lamp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120380355.3U CN215569725U (en) | 2021-02-19 | 2021-02-19 | MOCVD MO source steel cylinder hand valve device for photoelectric chip epitaxy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120380355.3U CN215569725U (en) | 2021-02-19 | 2021-02-19 | MOCVD MO source steel cylinder hand valve device for photoelectric chip epitaxy |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215569725U true CN215569725U (en) | 2022-01-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120380355.3U Active CN215569725U (en) | 2021-02-19 | 2021-02-19 | MOCVD MO source steel cylinder hand valve device for photoelectric chip epitaxy |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215569725U (en) |
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2021
- 2021-02-19 CN CN202120380355.3U patent/CN215569725U/en active Active
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