CN215560619U

CN215560619U - Movable three-dimensional heating device for vacuum heat treatment

Info

Publication number: CN215560619U
Application number: CN202121734517.5U
Authority: CN
Inventors: 赵海燕; 李超; 唐海波; 赵文彪
Original assignee: Shenyang Fushi Equipment Design Co ltd
Current assignee: Shenyang Fushi Equipment Design Co ltd
Priority date: 2021-07-28
Filing date: 2021-07-28
Publication date: 2022-01-18
Anticipated expiration: 2031-07-28

Abstract

The utility model discloses a movable three-dimensional heating device for vacuum heat treatment, which comprises a heat insulation cover with an opening at the upper end, wherein the bottom of the heat insulation cover is connected with a lifting assembly for driving the heat insulation cover to move up and down, and a heat insulation base is arranged at the middle position of the bottom end in the heat insulation cover through a plurality of support rods. When the annular partition plate moves downwards, the annular inclined guide piece can be driven to move downwards through the connecting piece, at the moment, the plurality of sliding strips can be driven to move outwards together through the matching relationship between the annular inclined surface of the annular inclined guide piece and the inclined guide surface of the inclined guide block, so that the heating vertical strips are far away from the crucible, and the temperature of the crucible is further reduced.

Description

Movable three-dimensional heating device for vacuum heat treatment

Technical Field

The utility model relates to the technical field of heating devices, in particular to a movable three-dimensional heating device for vacuum heat treatment.

Background

Vacuum deposition is widely used in the fields of liquid crystal displays, semiconductors, solar cells, and the like, and in order to uniformly coat a deposition material on a substrate, the substrate is generally placed above an opening of a crucible, and the deposition material placed in the crucible is heated and evaporated by a heating system so as to be uniformly scattered on the substrate. The existing heating system adopts a heating mode of integrating a crucible with a heating wire, so that the temperature difference between the upper end and the lower end of the crucible is large easily, evaporation materials are heated unevenly when being evaporated, the evaporation quality is influenced, and the cooling speed of the crucible is slow after the evaporation is finished and the working efficiency is influenced due to the integrated structure.

The national intellectual property office grants a utility model patent named "mobile three-dimensional heating device for vacuum heat treatment" in 10/16/2020, and the application number is: 202020233756.1, which discloses the following technical proposal: the crucible heating device comprises a heat shield with an open upper end, wherein the bottom of the heat shield is connected with a lifting assembly driving the heat shield to move up and down, and a heating assembly used for heating a crucible is arranged in the heat shield. Heating element is including leaning on the electric heating plate to the crucible bottom, the middle part of electric heating plate is equipped with the through-hole, the through-hole outside is equipped with a plurality of circumference array distributions that are in recess on the electric heating plate. Heating elements for heating the bottom of the crucible are arranged in the through holes and the grooves together. The electric heating plate is also provided with a heat conduction ring … … which can be sleeved on the side wall of the crucible, the patent realizes the up-and-down movement of the heat shield through the lifting assembly, further realizes the up-and-down movement of the heating assembly, when the crucible works, the heating assembly moves up to heat the crucible, when the crucible works over or the heating temperature is too high, the heating assembly moves down and returns in time, and the cooling speed of the crucible is improved; the crucible bottom can be heated through the setting of electric heating plate and heating element, and the rethread heating vertical bar can conduct the heat on the heat conduction ring to the crucible lateral wall on to the heating of heat conduction ring uniformly for the crucible lateral wall is heated evenly, reduces the difference in temperature of lower extreme on the crucible, but it has following defect when using:

when the work of the crucible is not finished and the heating temperature is too high, at the moment, the heating assembly is moved downwards to return to lower the temperature of the crucible, so that the temperature inside the inner barrel is lost, and the temperature of the crucible is easily lowered too fast to heat the crucible again, so that the film coating effect is influenced.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to a mobile three-dimensional heating apparatus for vacuum heat treatment to solve the above-mentioned problems of the background art.

In order to achieve the purpose, the utility model provides the following technical scheme: a movable three-dimensional heating device for vacuum heat treatment comprises a heat shield with an opening at the upper end, wherein the bottom of the heat shield is connected with a lifting assembly for driving the heat shield to move up and down, a heat insulation base is arranged at the middle position of the bottom end in the heat shield through a plurality of support rods, an inner cylinder is arranged at the top of the heat insulation base, and an annular sealing plate is arranged between the top of the inner cylinder and the top of the heat shield;

a heating mechanism for heating the crucible is arranged in the inner barrel, the heating assembly comprises an electric heating plate which is arranged at the bottom end in the inner barrel and can be abutted to the bottom of the crucible, and a side heating assembly which is uniformly arranged on the side wall of the inner barrel in a penetrating and sliding manner along the circumferential direction, wherein the side heating assembly slides along the radial direction of the inner barrel;

the heater means further includes a driving assembly for driving the side heating assemblies to move together toward the center of the inner cylinder or to move together toward the outside of the inner cylinder.

Preferably, the side heating assembly comprises a sliding bar in sliding connection with the side wall of the inner barrel and a heating vertical bar arranged on one side of the sliding bar close to the center of the inner barrel.

Preferably, drive assembly including slide setting annular baffle between thermal-insulated base and thermal-insulated cover, set up the electric telescopic handle between annular baffle bottom and thermal-insulated cover bottom, slide the cyclic annular inclined plane of leading of setting on the thermal-insulated cover inside wall of annular baffle top, wherein, the cyclic annular inclined plane that the inboard of leading the inclined plane has the downward sloping, the intermediate position department that the heating was kept away from to the sliding strip was provided with leads the sloping, it is provided with the inclined plane of leading with the mutual matching of annular inclined plane line to lead one side that the sliding strip was kept away from to the sloping, it contradicts to lead the inclined plane go up and with annular inclined plane between through spline sliding connection, the cyclic annular inclined plane of leading of sliding strip one side is provided with the connecting piece between inclined plane and the annular baffle.

Preferably, the sliding strip, the corresponding inclined guide block, the corresponding annular inclined guide piece, the corresponding connecting piece and the corresponding annular plate are provided with a first lead leading-out channel, the inner cylinder and the heat insulation base are provided with a second lead leading-out channel, and the bottom of the heat insulation cover is provided with a main lead leading-out hole.

Compared with the prior art, the utility model has the beneficial effects that:

1. by arranging the driving component, when the crucible is applied and the heating temperature is too high or too low when the crucible is not finished, the output end of the electric telescopic rod can be controlled to move to drive the annular partition plate to move, when the annular partition plate moves downwards, the annular inclined guide piece can be driven to move downwards through the connecting piece, at the moment, the annular inclined surface of the annular inclined guide piece and the inclined guide surface of the inclined guide block are matched to drive the sliding strips to move outwards together, so that the heating vertical strips are far away from the crucible, thereby reducing the temperature of the crucible, when the annular clapboard moves upwards, the annular inclined guide piece can be driven to move upwards through the connecting piece, at the moment, the annular inclined surface of the annular inclined guide piece and the inclined guide surface of the inclined guide block are matched to drive the sliding strips to move inwards together, so that the heating vertical strips are close to the crucible, thereby raising the temperature of the crucible, not only avoiding temperature loss, but also avoiding the temperature of the crucible from dropping too fast.

2. The utility model discloses a set up the wire and draw forth passageway one, the wire is drawn forth passageway two and the hole is drawn forth to the total lead, the wire of electric heating plate is in proper order the wire draw forth passageway two and the total lead is drawn forth the hole and is derived and be connected with external power supply, and the wire draws forth passageway one, lead the sloping ring and lead sloping piece sliding range in the cyclic annular, the wire of heating vertical retort can loop through draw forth passageway one and the total lead is drawn forth the hole and is derived and be connected with external power supply, the wire is located inside the passageway, avoid the too high influence wire of heat exchanger inside temperature to use.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic top view of the heat shield of the present invention.

In the figure: 1. a heat shield; 2. a strut; 3. a thermally insulated base; 4. an inner barrel; 5. an annular seal plate; 6. An electric heating plate; 7. a slide bar; 8. heating the vertical bar; 9. an annular partition plate; 10. an electric telescopic rod; 11. An annular ramp guide; 12. an annular bevel; 13. an incline guide block; 14. a guide slope; 15. a connecting member; 16. a first lead leading-out channel; 17. a second lead leading-out channel; 18. and a main lead leading-out hole.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-2, an embodiment of the present invention is shown: a movable three-dimensional heating device for vacuum heat treatment comprises a heat shield 1 with an opening at the upper end, wherein the bottom of the heat shield 1 is connected with a lifting assembly for driving the heat shield to move up and down, a heat insulation base 3 is arranged at the middle position of the bottom end in the heat shield 1 through a plurality of supporting rods 2, an inner cylinder 4 is arranged at the top of the heat insulation base 3, and an annular sealing plate 5 is arranged between the top of the inner cylinder 4 and the top of the heat shield 1;

a heating mechanism for heating the crucible is arranged in the inner barrel 4, the heating component comprises an electric heating plate 6 which is arranged at the bottom end in the inner barrel 4 and can be abutted to the bottom of the crucible, and a side heating component which is uniformly arranged on the side wall of the inner barrel 4 in a penetrating and sliding manner along the circumferential direction, wherein the side heating component slides along the radius direction of the inner barrel 4, and comprises a sliding strip 7 which is in sliding connection with the side wall of the inner barrel 4 and a heating vertical strip 8 which is arranged on one side of the sliding strip 7 close to the center of the inner barrel 4;

the heater component also comprises a driving component for driving the side heating component to move towards the center of the inner cylinder 4 or towards the outer side of the inner cylinder 4, the driving component comprises an annular partition plate 9 arranged between the heat insulation base 3 and the heat insulation cover 1 in a sliding way, an electric telescopic rod 10 arranged between the bottom of the annular partition plate 9 and the bottom of the heat insulation cover 1, and an annular inclined guide piece 11 arranged on the inner side wall of the heat insulation cover 1 above the annular partition plate 9 in a sliding way, the inner side of the annular inclined guide piece 11 is provided with an annular inclined plane 12 which inclines downwards, the middle position of one side, away from the heating vertical bar 8, of the sliding bar 7 is provided with an inclined guide block 13, one side, away from the sliding bar 7, of the inclined guide block 13 is provided with an inclined guide plane 14 which is matched with the annular inclined plane 12, the inclined guide plane 14 abuts against the annular inclined plane 12 and is in sliding connection with the annular inclined plane 12 through a spline, and a connecting piece 15 is arranged between the annular inclined guide piece 11 on one side of the sliding bar 7 and the annular partition plate 9;

the sliding strip 7, the corresponding inclined guide block 13, the corresponding annular inclined guide piece 11, the corresponding connecting piece 15 and the corresponding annular plate are provided with a first lead leading-out channel 16, the inner cylinder 4 and the heat insulation base 3 are provided with a second lead leading-out channel 17, and the bottom of the heat insulation cover 1 is provided with a main lead leading-out hole 18.

The working principle is as follows: when the crucible is applied, when the crucible is not finished and the heating temperature is too high or too low, the output end of the electric telescopic rod 10 can be controlled to move to drive the annular partition plate 9 to move, when the annular partition plate 9 moves downwards, the annular guide inclined piece 11 can be driven to move downwards through the connecting piece 15, at the moment, the plurality of sliding strips 7 can be driven to move outwards together through the matching relation between the annular inclined surface 12 of the annular guide inclined piece 11 and the guide inclined surface 14 of the guide inclined block 13, so that the heating vertical strip 8 is far away from the crucible, the temperature of the crucible is further reduced, when the annular partition plate 9 moves upwards, the annular guide inclined piece 11 can be driven to move upwards through the matching relation between the annular inclined surface 12 of the annular guide inclined piece 11 and the guide inclined surface 14 of the guide inclined block 13, the plurality of sliding strips 7 can be driven to move inwards together, so that the heating vertical strip 8 is close to the crucible, and the temperature of the crucible is further raised, and the temperature loss is avoided, and the phenomenon that the temperature of the crucible is reduced too fast is avoided, the arranged first lead leading-out channel 16, the second lead leading-out channel 17 and the main lead leading-out hole 18 are avoided, the leads of the electric heating plate 6 are led out from the second lead leading-out channel 17 and the main lead leading-out hole 18 in sequence and are connected with an external power supply, the first lead leading-out channel 16 leads the leads of the heating vertical bars 8 to be led out from the first lead leading-out channel 16 and the main lead leading-out hole 18 in sequence and connected with the external power supply within the sliding range of the annular inclined guide piece 11 and the inclined guide block 13, and the leads are positioned in the channels, so that the situation that the use of the leads is influenced by the overhigh temperature in the heat insulation cover 1 is avoided.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the utility model can be made, and equivalents and modifications of some features of the utility model can be made without departing from the spirit and scope of the utility model.

Claims

1. A movable three-dimensional heating device for vacuum heat treatment comprises a heat insulation cover (1) with an opening at the upper end, wherein the bottom of the heat insulation cover (1) is connected with a lifting assembly for driving the heat insulation cover to move up and down, and the movable three-dimensional heating device is characterized in that a heat insulation base (3) is arranged at the middle position of the bottom end in the heat insulation cover (1) through a plurality of supporting rods (2), an inner cylinder (4) is arranged at the top of the heat insulation base (3), and an annular sealing plate (5) is arranged between the top of the inner cylinder (4) and the top of the heat insulation cover (1);

the heating mechanism for heating the crucible is arranged in the inner barrel (4), and comprises an electric heating plate (6) which is arranged at the bottom end in the inner barrel (4) and can be abutted to the bottom of the crucible, and a side heating assembly which is uniformly arranged on the side wall of the inner barrel (4) in a penetrating and sliding mode along the circumferential direction, wherein the side heating assembly slides along the radius direction of the inner barrel (4);

the heater component also comprises a driving component for driving the side heating component to move towards the center of the inner cylinder (4) or towards the outer side of the inner cylinder (4).

2. The mobile three-dimensional heating apparatus for vacuum heat treatment according to claim 1, wherein: the side heating assembly comprises a sliding strip (7) in sliding connection with the side wall of the inner barrel (4) and a heating vertical strip (8) arranged on one side, close to the center of the inner barrel (4), of the sliding strip (7).

3. The mobile three-dimensional heating apparatus for vacuum heat treatment according to claim 2, wherein: drive assembly including slip setting annular baffle (9) between thermal-insulated base (3) and thermal-insulated cover (1), set up electric telescopic handle (10) between annular baffle (9) bottom and thermal-insulated cover (1) bottom, slip setting cyclic annular on thermal-insulated cover (1) inside wall of annular baffle (9) top lead sloping (11), wherein, the cyclic annular that leads sloping (11) inboard has downward sloping annular inclined plane (12), the intermediate position department that heating vertical retort (8) one side was kept away from in slip strip (7) is provided with leads sloping block (13), the one side that leads sloping block (13) to keep away from slip strip (7) is provided with leads inclined plane (14) that matches each other with annular inclined plane (12) line, lead inclined plane (14) and contradict and be in annular inclined plane (12) go up and through spline sliding connection between with annular inclined plane (12), it is provided with between annular to lead sloping (11) and the annular baffle (9) of slip strip (7) one side to be connected And (15).

4. The mobile three-dimensional heating apparatus for vacuum heat treatment according to claim 3, wherein: slide bar (7), correspond to lead sloping block (13), correspond cyclic annular and lead sloping piece (11), correspond connecting piece (15) and correspond and be provided with the wire on the annular slab and draw forth passageway (16), be provided with the wire on inner tube (4) and thermal-insulated base (3) and draw forth passageway two (17), the bottom of heat shield (1) is provided with total wire and draws forth hole (18).