CN215548483U - Mobile platform suitable for processing of semiconductor equipment parts - Google Patents
Mobile platform suitable for processing of semiconductor equipment parts Download PDFInfo
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- CN215548483U CN215548483U CN202121659714.5U CN202121659714U CN215548483U CN 215548483 U CN215548483 U CN 215548483U CN 202121659714 U CN202121659714 U CN 202121659714U CN 215548483 U CN215548483 U CN 215548483U
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Abstract
The utility model relates to a movable platform suitable for processing semiconductor equipment parts, which comprises a base, wherein an X-axis slide rail is arranged on the base, an X-axis slide block is arranged on the X-axis slide rail, a Y-axis platform is arranged on the X-axis slide block, a Y-axis slide rail is arranged on the Y-axis platform, a Y-axis slide block is arranged on the Y-axis slide rail, the Y-axis sliding block is provided with a fixing platform, a guide rod is arranged on the fixing platform, a push plate is sleeved on the guide rod, a jacking cylinder is arranged on the fixing platform, a telescopic rod of the jacking cylinder is connected with the push plate, a micro-adjusting device is arranged on the push plate, a product fixing seat is arranged on the micro-adjusting device, a product fixing groove is formed in the product fixing seat, a plurality of fixing columns are arranged on the product fixing groove, the fixing columns correspond to the positioning holes of the products one to one, a clamping mechanism is arranged on the product fixing seat, and the clamping mechanism is located on the periphery of the product fixing groove. The utility model can realize high-efficiency accurate displacement and realize high-efficiency and accurate processing of products.
Description
Technical Field
The utility model relates to a movable platform suitable for processing semiconductor equipment parts.
Background
At present, in a processing machine tool, a mounting platform of the processing machine tool directly mounts a product on the mounting platform, and a processing tool of some processing machine tools cannot move and only can singly process the product, and meanwhile, the accuracy is not high, if defects on the quality of the product are caused.
In view of the above-mentioned drawbacks, the present designer is actively making research and innovation to create a new mobile platform suitable for processing semiconductor device components, so that the mobile platform has more industrial utility value.
SUMMERY OF THE UTILITY MODEL
In order to solve the above technical problems, an object of the present invention is to provide a movable platform suitable for processing semiconductor device components.
In order to achieve the purpose, the utility model adopts the following technical scheme:
a movable platform suitable for processing semiconductor equipment parts comprises a base, wherein an X-axis slide rail is arranged on the base, an X-axis slide block is arranged on the X-axis slide rail and is in driving connection with a first driving device, a Y-axis platform is arranged on the X-axis slide block, a Y-axis slide rail is arranged on the Y-axis platform, a Y-axis slide block is arranged on the Y-axis slide rail and is in driving connection with a second driving device, a fixed platform is arranged on the Y-axis slide block, a guide rod is arranged on the fixed platform, a push plate is sleeved on the guide rod, a jacking cylinder is arranged on the fixed platform, a telescopic rod of the jacking cylinder is connected with the push plate, a micro-adjusting device is arranged on the push plate, a product fixing seat is arranged on the micro-adjusting device, and a product fixing groove is formed in the product fixing seat, the product fixing device is characterized in that a plurality of fixing columns are arranged on the product fixing groove and correspond to the positioning holes of the product one by one, and a clamping mechanism is arranged on the product fixing seat and is located on the periphery of the product fixing groove and used for clamping the product.
Preferably, the moving platform is suitable for processing semiconductor equipment parts, and the fine adjustment device is a screw-driven rotary sliding table.
Preferably, the product fixing seat is provided with an aligner which is matched with the processing device.
Preferably, the mobile platform is suitable for processing semiconductor equipment parts, and the aligner is an infrared aligning device.
Preferably, the first driving device and the second driving device are both motors.
Preferably, the moving platform is suitable for processing semiconductor equipment parts, and the clamping mechanism is a cun clamp.
By the scheme, the utility model at least has the following advantages:
the utility model can make the product accurate to the appointed position through the multi-axis movement, and meanwhile, the more accurate position is realized through the micro-adjusting device and the contraposition device matched with the micro-adjusting device, thereby improving the accuracy of the product. The utility model has simple structure, convenient installation and maintenance, and can realize high-efficiency movement and improve the working efficiency.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural view of the present invention.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and is therefore not to be construed as limiting the utility model.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
Examples
As shown in fig. 1, a movable platform suitable for processing semiconductor device components comprises a base 1, wherein an X-axis slide rail 2 is arranged on the base 1, an X-axis slide block 3 is arranged on the X-axis slide rail 2, the X-axis slide block 3 is in driving connection with a first driving device, a Y-axis platform 4 is arranged on the X-axis slide block 3, a Y-axis slide rail 5 is arranged on the Y-axis platform 4, a Y-axis slide block 6 is arranged on the Y-axis slide rail 5, the Y-axis slide block 6 is in driving connection with a second driving device, a fixed platform 7 is arranged on the Y-axis slide block 6, a guide rod 8 is arranged on the fixed platform 7, a push plate 9 is sleeved on the guide rod 8, a jacking cylinder 10 is arranged on the fixed platform 7, a telescopic rod of the jacking cylinder 10 is connected with the push plate 9, a micro-adjustment device 11 is arranged on the push plate 9, a product fixing seat 12 is arranged on the micro-adjustment device 11, the product fixing device is characterized in that a product fixing groove is formed in the product fixing seat 12, a plurality of fixing columns 13 are arranged on the product fixing groove, the fixing columns 13 correspond to positioning holes of a product one by one, a clamping mechanism 14 is arranged on the product fixing seat 12, and the clamping mechanism 14 is located on the periphery of the product fixing groove and used for clamping the product.
The micro-adjustment device 11 is a screw drive rotary sliding table.
In the utility model, the product fixing seat 12 is provided with an aligner which is matched with a processing device. Wherein, the aligner is an infrared aligning device.
The first driving device and the second driving device are both motors.
The clamping mechanism 14 is a cun clamp.
In the utility model, 4 guide rods 8 are arranged, and the push plate 9 is sleeved on the guide rods.
The working principle of the utility model is as follows:
during specific work, a product is firstly placed in the product fixing groove, and then the position of the product is adjusted through the first driving device, the second driving device, the air cylinder and the micro-adjusting device, so that the product reaches a specified position, and the processing device is convenient to process the product.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, it should be noted that, for those skilled in the art, many modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (6)
1. A moving platform suitable for processing of semiconductor equipment parts is characterized in that: comprises a base (1), an X-axis slide rail (2) is arranged on the base (1), an X-axis slide block (3) is arranged on the X-axis slide rail (2), the X-axis slide block (3) is in drive connection with a first drive device, a Y-axis platform (4) is arranged on the X-axis slide block (3), a Y-axis slide rail (5) is arranged on the Y-axis platform (4), a Y-axis slide block (6) is arranged on the Y-axis slide rail (5), the Y-axis slide block (6) is in drive connection with a second drive device, a fixed platform (7) is arranged on the Y-axis slide block (6), a guide rod (8) is arranged on the fixed platform (7), a push plate (9) is sleeved on the guide rod (8), a jacking cylinder (10) is arranged on the fixed platform (7), and a telescopic rod of the jacking cylinder (10) is connected with the push plate (9), the product clamping device is characterized in that a micro-adjusting device (11) is arranged on the push plate (9), a product fixing seat (12) is arranged on the micro-adjusting device (11), a product fixing groove is formed in the product fixing seat (12), a plurality of fixing columns (13) are arranged on the product fixing groove, the fixing columns (13) correspond to positioning holes of a product one by one, a clamping mechanism (14) is arranged on the product fixing seat (12), and the clamping mechanism (14) is located on the periphery of the product fixing groove and used for clamping the product.
2. The mobile platform of claim 1, wherein the mobile platform is adapted for processing of semiconductor device components, and further comprises: the fine adjustment device (11) is a screw drive rotary sliding table.
3. The mobile platform of claim 1, wherein the mobile platform is adapted for processing of semiconductor device components, and further comprises: and the product fixing seat (12) is provided with an aligner which is matched with the processing device.
4. The mobile platform of claim 3, wherein the mobile platform is adapted for processing of semiconductor device components, and further comprises: the aligner is an infrared aligning device.
5. The mobile platform of claim 1, wherein the mobile platform is adapted for processing of semiconductor device components, and further comprises: the first driving device and the second driving device are both motors.
6. The mobile platform of claim 1, wherein the mobile platform is adapted for processing of semiconductor device components, and further comprises: the clamping mechanism (14) is a cun clamp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121659714.5U CN215548483U (en) | 2021-07-21 | 2021-07-21 | Mobile platform suitable for processing of semiconductor equipment parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121659714.5U CN215548483U (en) | 2021-07-21 | 2021-07-21 | Mobile platform suitable for processing of semiconductor equipment parts |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215548483U true CN215548483U (en) | 2022-01-18 |
Family
ID=79827148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121659714.5U Active CN215548483U (en) | 2021-07-21 | 2021-07-21 | Mobile platform suitable for processing of semiconductor equipment parts |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215548483U (en) |
-
2021
- 2021-07-21 CN CN202121659714.5U patent/CN215548483U/en active Active
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