CN215494542U - Remove high accuracy vision mask exposure all-in-one - Google Patents
Remove high accuracy vision mask exposure all-in-one Download PDFInfo
- Publication number
- CN215494542U CN215494542U CN202121646083.3U CN202121646083U CN215494542U CN 215494542 U CN215494542 U CN 215494542U CN 202121646083 U CN202121646083 U CN 202121646083U CN 215494542 U CN215494542 U CN 215494542U
- Authority
- CN
- China
- Prior art keywords
- light guide
- light
- guide body
- light source
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 31
- 239000011521 glass Substances 0.000 claims abstract description 31
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 19
- 239000011651 chromium Substances 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims abstract description 6
- 238000000576 coating method Methods 0.000 claims description 23
- 239000011248 coating agent Substances 0.000 claims description 19
- DIOZVWSHACHNRT-UHFFFAOYSA-N 2-(2-prop-2-enoxyethoxy)ethanol Chemical compound OCCOCCOCC=C DIOZVWSHACHNRT-UHFFFAOYSA-N 0.000 claims description 3
- ZFTFAPZRGNKQPU-UHFFFAOYSA-N dicarbonic acid Chemical compound OC(=O)OC(O)=O ZFTFAPZRGNKQPU-UHFFFAOYSA-N 0.000 claims description 3
- 230000031700 light absorption Effects 0.000 claims description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052753 mercury Inorganic materials 0.000 claims description 3
- 239000005304 optical glass Substances 0.000 claims description 3
- 229920000515 polycarbonate Polymers 0.000 claims description 3
- 239000004417 polycarbonate Substances 0.000 claims description 3
- 229920002635 polyurethane Polymers 0.000 claims description 3
- 239000004814 polyurethane Substances 0.000 claims description 3
- 229920006305 unsaturated polyester Polymers 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- 230000000007 visual effect Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000011358 absorbing material Substances 0.000 description 3
- 238000000018 DNA microarray Methods 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- -1 acryl Chemical group 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
Images
Abstract
A movable high-precision vision mask exposure all-in-one machine comprises a multi-dimensional mechanical arm, a parallel light source, a light guide assembly and a CCD (charge coupled device) positioning system, wherein the light guide assembly is a light guide body with a three-dimensional structure, a glass chromium plate with a planar structure or a mask made of optical materials, or a combination of the light guide body and the glass chromium plate or the light guide body and the mask; the light guide body is provided with a light guide-in surface and a light guide-out surface which are oppositely arranged, and parallel light generated by the parallel light source is emitted into the light guide body through the light guide-in surface and then is emitted out in parallel through the light guide-out surface; when the light guide assembly is a light guide body, the light guide surface and the light guide surface of the light guide body are processed into corresponding shapes according to the images to be exposed; when the light guide assembly is a combination of the light guide body and the glass chromium plate or the light guide body and the mask, the light guide body is attached to and connected to the light emitting surface of the parallel light source, and the glass chromium plate or the mask is correspondingly attached to and connected to the light emitting surface of the light guide body. The movable high-precision vision mask exposure all-in-one machine can carry out automatic continuous exposure operation on the object to be exposed on the production line, and has high movement efficiency and high operation efficiency.
Description
Technical Field
The utility model relates to the technical field of mask exposure, in particular to a mobile high-precision vision mask exposure all-in-one machine.
Background
In a common mask exposure process, a mask film with a pattern is generally manufactured, then the mask film is manually covered on a UV ink layer to be exposed, the position is aligned by naked eyes, the mask film is fixed by an adhesive tape, and then the pattern is exposed by an exposure source. However, there are technical problems in that: the non-planar exposure mask film is manually aligned, so that the difficulty is high, the precision is low and the efficiency is low; non-planar exposure does not control the exposure source well; moreover, the film is easily damaged by repeated operation.
In order to meet the higher demand for production, it is necessary to improve the existing mask exposure process and the related equipment.
SUMMERY OF THE UTILITY MODEL
Based on the technical scheme, the utility model provides a mobile high-precision vision mask exposure all-in-one machine, which aims to solve the technical problems of high difficulty, low precision and low efficiency of mask exposure equipment in the prior art due to manual alignment.
In order to achieve the above object, the present invention provides a mobile high-precision vision mask exposure all-in-one machine, which comprises a multi-dimensional mechanical arm moving freely, and a parallel light source, a light guide assembly and a CCD positioning system which are connected to the front end of the multi-dimensional mechanical arm in an integrated manner, wherein:
the light guide assembly is attached to and connected with the light emitting surface of the parallel light source, the parallel light generated by the parallel light source is emitted out through the light guide assembly and is exposed through the photosensitive coating of the object to be exposed, and the CCD positioning system is used for positioning an exposure position;
the light guide assembly is a light guide body with a three-dimensional structure, a glass chromium plate with a planar structure or a mask made of optical materials, or a combination of the light guide body and the glass chromium plate or the light guide body and the mask;
the light guide body is provided with two light guide surfaces, namely a light guide surface and a light guide surface, which are oppositely arranged, and parallel light generated by the parallel light source is guided into the light guide body through the light guide surface and then is emitted in parallel through the light guide surface;
when the light guide assembly is a light guide body, the light guide surface and the light guide surface of the light guide body are processed into corresponding shapes according to the images to be exposed;
when the light guide assembly is the combination of the light guide body and the glass chromium plate or the light guide body and the mask, the light guide body is attached and connected to the light emitting surface of the parallel light source, and the glass chromium plate or the mask is correspondingly attached and connected to the light emitting surface of the light guide body.
As a further preferable technical solution of the present invention, a region of the light emitting surface of the parallel light source to which the light guide element is not attached is shielded by a light absorbing material.
In a further preferred embodiment of the present invention, the light guide has a light absorbing coating on the other wall surfaces except the light-introducing surface and the light-discharging surface.
As a further preferable aspect of the present invention, the light guide surface of the light guide body is a plane or a curved surface.
As a further preferable technical solution of the present invention, the light guide and the mask are made of allyl diglycol dicarbonate, acryl, polycarbonate, unsaturated polyester, polyurethane, or optical glass.
As a further preferable technical solution of the present invention, the front end of the multi-dimensional robot arm may be simultaneously installed with a plurality of parallel light sources, and each parallel light source corresponds to at least one light guide body assembly.
In a further preferred embodiment of the present invention, the collimated light source is a mercury lamp light source or an LED light source in a UV band.
As a further preferable technical scheme of the present invention, the multi-dimensional mechanical arm has at least four axes to drive the parallel light source, the light guide assembly and the CCD positioning system to freely rotate 360 degrees, and to move up and down and horizontally.
As a further preferable technical solution of the present invention, the multi-dimensional mechanical arm includes a vertical lifting module and a horizontal traversing module, the horizontal traversing module and the vertical lifting module are arranged in a cross manner, the vertical lifting module is used for driving the horizontal traversing module to move up and down, and the parallel light source, the light guide assembly and the CCD positioning system are integrally connected to the horizontal traversing module and are driven by the horizontal traversing module to move horizontally.
As a further preferred technical scheme of the utility model, the all-in-one machine further comprises a main control system, the multi-dimensional mechanical arm, the parallel light source and the CCD positioning system are all controlled by the main control system, and under the control of the main control system, the multi-dimensional mechanical arm accurately moves the parallel light source to the exposure position according to the positioning information of the CCD positioning system to perform exposure operation.
According to the mobile high-precision vision mask exposure all-in-one machine, by adopting the technical scheme, in the exposure operation, the light guide component is driven by the multi-dimensional mechanical arm to rapidly and accurately move to the exposed surface, the exposure position is locked by the CCD positioning system, the exposure surface of the light guide component can be tightly attached to the coating to be exposed, then the photosensitive coating is exposed according to the requirement, and the light guide component rapidly returns to the designated position after the exposure is finished, so that the automatic production operation is realized, the exposure precision is high, and the production efficiency is high; the utility model can be applied to the production line, carries out automatic continuous exposure operation on the horizontal plane and the non-horizontal plane of an object to be exposed on the production line, has high moving efficiency and high operating efficiency, and can not be carried out by the traditional film exposure, thereby improving the precision and the efficiency and reducing the production cost.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
FIG. 1 is a schematic structural diagram of an example provided by a mobile high-precision vision mask exposure machine;
FIG. 2 is a schematic structural diagram of another example provided by the mobile high-precision vision mask exposure all-in-one machine;
FIG. 3 is a schematic structural diagram of an example of a light guide connected to a collimated light source;
FIG. 4 is a schematic view of a pattern of rings;
FIG. 5 is a schematic diagram of an example of a light guide;
FIG. 6 is a schematic view of a light guide body coated with a light absorbing coating;
FIG. 7 is a schematic view of an example of a structure provided by a glass chromium plate connected to a collimated light source;
FIG. 8 is a schematic diagram of the mobile high-precision vision mask exposure all-in-one machine of the present invention performing horizontal exposure;
FIG. 9 is a schematic diagram of the mobile high-precision vision mask exposure all-in-one machine for vertical exposure according to the present invention.
In the figure: 101. the device comprises a multi-dimensional mechanical arm, 201, a light guide assembly, 202, a light guide body, 203, a light absorption coating, 204, a glass chromium plate, 301, a parallel light source, 302, a light absorption material, 401, a CCD positioning system, 501 and an object to be exposed.
The objects, features and advantages of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The utility model will be further described with reference to the accompanying drawings and specific embodiments. In the preferred embodiments, the terms "upper", "lower", "left", "right", "middle" and "a" are used for clarity of description only, and are not used to limit the scope of the utility model, and the relative relationship between the terms and the terms is not changed or modified substantially without changing the technical content of the utility model.
As shown in fig. 1 to 9, the present invention provides a mobile high-precision vision mask exposure all-in-one machine, which comprises a multi-dimensional mechanical arm 101 capable of moving freely, and a parallel light source 301, a light guide assembly 201 and a CCD positioning system 401 integrally connected to the front end of the multi-dimensional mechanical arm 101.
The light guide assembly 201 is attached to and connected to the light emitting surface of the parallel light source 301, parallel light generated by the parallel light source 301 is emitted through the light guide assembly 201 and is exposed to the photosensitive coating of the object to be exposed 501, the CCD positioning system 401 is used for positioning an exposure position, and the parallel light source 301 is a mercury lamp light source or an LED light source of a UV wave band.
The area of the light-emitting surface of the parallel light source 301 not attached with the light guide element 201 is shielded by the light-absorbing material 302, and preferably, the light-absorbing material 302 is easily cleaned off from the light-emitting surface of the parallel light source 301 for brushing again, so that the same parallel light source 301 can be matched with light guide elements 201 with different structures and sizes.
The light guide assembly 201 is a light guide 202 with a three-dimensional structure, a glass chrome plate 204 with a planar structure, or a mask made of an optical material, or a combination of the light guide 202 and the glass chrome plate 204 or the light guide 202 and the mask. When the light guide assembly 201 is a combination of the light guide body 202 and the glass chrome plate 204 or the light guide body 202 and the mask, the light guide body 202 is attached to and connected to the light emitting surface of the parallel light source 301, and the glass chrome plate 204 or the mask is correspondingly attached to and connected to the light emitting surface of the light guide body 202.
The light guide 202 has two light guide surfaces, namely a light guide surface and a light guide surface, which are arranged oppositely, and the parallel light generated by the parallel light source 301 is guided into the light guide 202 through the light guide surface and then is emitted in parallel through the light guide surface.
The light guide 202 and the mask are made of allyl diglycol dicarbonate, acrylic, polycarbonate, unsaturated polyester, polyurethane or optical glass, and of course, other optical materials may be used, which is not illustrated here.
The front end of the multi-dimensional mechanical arm can be simultaneously provided with a plurality of parallel light sources, and each parallel light source corresponds to at least one light guide body assembly. If multiple groups of parallel light sources are configured at the front end of the multi-dimensional mechanical arm, different patterns at different positions can be respectively exposed one by one according to requirements.
The light guide surface of the light guide 202 is a plane or a curved surface so as to meet the structure of the exposure surface (the surface where the photosensitive coating is located) of the object 501 to be exposed, and in the exposure process, the light guide surface of the light guide 202 is completely attached to the exposure surface of the object 501 to be exposed.
The multi-dimensional mechanical arm 101 is provided with at least four shafts, so that the parallel light source 301, the light guide assembly 201 and the CCD positioning system 401360 can be driven to rotate freely, and the multi-dimensional mechanical arm can lift and move horizontally, can expose an exposure surface upwards or downwards or left or right or obliquely according to the position of the exposure surface, and is convenient and flexible to use.
Preferably, the all-in-one machine further comprises a main control system, the multi-dimensional mechanical arm 101, the parallel light source 301 and the CCD positioning system 401 are all controlled by the main control system, and under the control of the main control system, the multi-dimensional mechanical arm 101 accurately moves the parallel light source 301 to the exposure position according to the positioning information of the CCD positioning system 401 to perform exposure operation. After giving the exposure instruction through major control system, multidimension degree arm 101 can accurately remove leaded light subassembly 201 rapidly to by the exposure face on, after locking the exposure position through CCD positioning system 401, hug closely the coating of waiting to expose with the exposure face of leaded light subassembly 201, then expose the sensitization coating as required, get back to the assigned position rapidly after the exposure is accomplished, wait for next instruction. If the object 501 to be exposed is on the production line of automatic pick-and-place, the automatic continuous exposure operation can be set, and the method has the advantages of high moving efficiency and high operation efficiency, but the traditional film exposure cannot be realized, so that the precision and the efficiency are improved, and the production cost is reduced.
Example 1
Referring to fig. 3, when the light guide assembly 201 is a light guide 202, the light guide-in surface and the light guide-out surface of the light guide 202 are respectively processed into corresponding shapes according to the images to be exposed, for example, when we want to expose an annular pattern as shown in fig. 4, we first need to make a light guide 202 whose light guide-in surface and light guide-out surface are the same as the annular pattern, and the three-dimensional structure of the light guide 202 is a circular ring column structure as shown in fig. 5.
Referring to fig. 6, the other wall surfaces of the light guide 202 except the light-guiding surface and the light-guiding surface are coated with light-absorbing coatings 203, in this embodiment, the light-guiding surface and the light-guiding surface are two end surfaces of a circular cylinder, and the other side wall surfaces of the circular cylinder except the two end surfaces are coated with the light-absorbing coatings 203, so that the light-absorbing coatings 203 are arranged to make parallel light parallel to enter the light guide 202 and then exit in parallel. If the side wall surfaces are free of the light absorbing coating 203, the non-parallel incident light will reflect multiple times along the side walls, thereby affecting the accurate exposure of the photosensitive coating.
Example 2
Referring to fig. 7, when the light guide element 201 is a glass chrome plate 204, the glass chrome plate 204 is closely attached to the light emitting surface of the parallel light source 301, the glass chrome plate 204 belongs to the prior art, and the specific structure thereof is not described in detail herein. Compared with the traditional film exposure, the glass chromium plate 204 and the parallel light source 301 are integrally arranged and are driven to move by the multi-dimensional mechanical arm 101, the flexibility and the convenience of operation are improved, the parallel light source 301, the glass chromium plate 204 and the photosensitive coating are almost tightly connected, scattered light interference is avoided, and the highlight precision and the exposure quality are improved. The traditional parallel light source 301 is at a certain distance from the film, so that scattered light easily irradiates the photosensitive coating, and the exposure effect and quality are affected. The glass chromium plate 204 is used for photoetching a mask to accurately expose the photosensitive coating, and can be widely applied to the production and manufacture of microelectronic chips, biochips, electronic components, sensors and optical components.
Example 3
According to specific requirements, the glass chrome plate 204 can be directly attached to the parallel light source 301 and can also be used in combination with the light guide body 202, when the light guide assembly 201 is the combination of the light guide body 202 and the glass chrome plate 204, the light guide body 202 is attached to and connected to the light emitting surface of the parallel light source 301, the glass chrome plate 204 is attached to and connected to the light emitting surface of the light guide body 202, parallel light generated by the parallel light source 301 is transmitted through the light guide body 202 and then is emitted in parallel through the glass chrome plate 204, and the pattern of the parallel light is exposed to the photosensitive coating through the glass chrome plate 204.
Example 4
Referring to fig. 2, the multi-dimensional robot arm 101 includes a vertical lifting module and a horizontal traversing module, the horizontal traversing module and the vertical lifting module are arranged in a cross manner, the vertical lifting module is used for driving the horizontal traversing module to move up and down, and the parallel light source 301, the light guide assembly 201 and the CCD positioning system 401 are integrally connected to the horizontal traversing module and are driven by the horizontal traversing module to move horizontally.
In order to make the technical solution of the present invention more understandable to those skilled in the art, the following detailed description describes the working principle:
during exposure operation, firstly, the object 501 to be exposed is placed at a set position, and the exposure surface of the object can be upward or downward or left or right according to actual needs and is fixed so as to prevent the light guide component 201 from moving when the object is touched;
and then operating a main control system (such as a control computer), moving the multidimensional mechanical arm until the light guide surface of the light guide component 201 is close to a coating to be exposed, then performing deviation rectification and alignment by the CCD according to an algorithm and a positioning mark, continuously fine-adjusting the position of the multidimensional mechanical arm until the light guide surface is accurately attached to the photosensitive coating, then controlling a timing switch of the parallel light source 301 to perform exposure for a certain time according to requirements, after the exposure is finished, resetting the multidimensional mechanical arm to return to a specified position for standby, taking away the exposed object, and finishing the whole process.
When different patterns of different objects need to be exposed, different light guide assemblies 201 (light guide 202 or glass chromium plate 204, or combination of the light guide 202 and the glass chromium plate 204) are replaced, and different exposure positions can be adjusted.
Although specific embodiments of the present invention have been described above, it will be appreciated by those skilled in the art that these are merely examples and that many variations or modifications may be made to the embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims.
Claims (10)
1. The utility model provides a remove high accuracy vision mask exposure all-in-one which characterized in that, includes the multidimension degree arm that freely removes, and an organic whole is connected parallel light source, leaded light subassembly and CCD positioning system at the front end of multidimension degree arm, wherein:
the light guide assembly is attached to and connected with the light emitting surface of the parallel light source, the parallel light generated by the parallel light source is emitted out through the light guide assembly and is exposed through the photosensitive coating of the object to be exposed, and the CCD positioning system is used for positioning an exposure position;
the light guide assembly is a light guide body with a three-dimensional structure, a glass chromium plate with a planar structure or a mask made of optical materials, or a combination of the light guide body and the glass chromium plate or the light guide body and the mask;
the light guide body is provided with two light guide surfaces, namely a light guide surface and a light guide surface, which are oppositely arranged, and parallel light generated by the parallel light source is guided into the light guide body through the light guide surface and then is emitted in parallel through the light guide surface;
when the light guide assembly is a light guide body, the light guide surface and the light guide surface of the light guide body are processed into corresponding shapes according to the images to be exposed;
when the light guide assembly is the combination of the light guide body and the glass chromium plate or the light guide body and the mask, the light guide body is attached and connected to the light emitting surface of the parallel light source, and the glass chromium plate or the mask is correspondingly attached and connected to the light emitting surface of the light guide body.
2. The integrated mobile high-precision vision mask exposure machine according to claim 1, wherein the region on the light-emitting surface of the parallel light source to which the light guide component is not attached is shielded by a light absorption material.
3. The integrated moving high-precision visual mask exposure machine according to claim 1, wherein the other wall surfaces of the light guide body except the light-guiding surface and the light-guiding surface are coated with light-absorbing coatings.
4. The integrated mobile high-precision vision mask exposure machine according to claim 1, wherein the light guide surface of the light guide body is a plane or a curved surface.
5. The moving high-precision vision mask exposure all-in-one machine as claimed in claim 1, wherein the light guide and the mask are made of allyl diglycol dicarbonate, acrylic, polycarbonate, unsaturated polyester, polyurethane or optical glass.
6. The integrated mobile high-precision vision mask exposure machine according to claim 1, wherein a plurality of parallel light sources can be simultaneously installed at the front end of the multi-dimensional mechanical arm, and each parallel light source corresponds to at least one light guide body assembly.
7. The integrated machine of claim 1, wherein the parallel light source is a mercury lamp light source or a UV-band LED light source.
8. The integrated machine for moving high-precision vision mask exposure according to claim 1, wherein the multi-dimensional mechanical arm has at least four axes to drive the parallel light source, the light guide assembly and the CCD positioning system to freely rotate 360 degrees, and to move up and down and horizontally.
9. The integrated mobile high-precision vision mask exposure machine according to claim 1, wherein the multi-dimensional mechanical arm comprises a vertical lifting module and a horizontal traversing module, the horizontal traversing module is arranged in a cross with the vertical lifting module, the vertical lifting module is used for driving the horizontal traversing module to move up and down, and the parallel light source, the light guide assembly and the CCD positioning system are integrally connected to the horizontal traversing module and driven by the horizontal traversing module to move horizontally.
10. The integrated mobile high-precision visual mask exposure machine according to any one of claims 1 to 9, further comprising a master control system, wherein the multi-dimensional mechanical arm, the parallel light source and the CCD positioning system are controlled by the master control system, and under the control of the master control system, the multi-dimensional mechanical arm accurately moves the parallel light source to an exposure position according to the positioning information of the CCD positioning system to perform exposure operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121646083.3U CN215494542U (en) | 2021-07-19 | 2021-07-19 | Remove high accuracy vision mask exposure all-in-one |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121646083.3U CN215494542U (en) | 2021-07-19 | 2021-07-19 | Remove high accuracy vision mask exposure all-in-one |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215494542U true CN215494542U (en) | 2022-01-11 |
Family
ID=79728018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121646083.3U Active CN215494542U (en) | 2021-07-19 | 2021-07-19 | Remove high accuracy vision mask exposure all-in-one |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215494542U (en) |
-
2021
- 2021-07-19 CN CN202121646083.3U patent/CN215494542U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5089185A (en) | Optical molding method | |
| US20150323730A1 (en) | Method for Manufacturing Large-Size Light-Guide Sheet by Using Mask | |
| EP2058728A2 (en) | Optical waveguide for touch screen and touch screen using the same | |
| CN102313913B (en) | Optical sheet laminating method, optical sheet laminating device and program used therewith, and display device | |
| CN102317683B (en) | Manufacturing method of light guide plate, light guide plate, backlight apparatus, illumination apparatus, and partition board apparatus | |
| KR20100007736A (en) | Optical waveguide for touch panel and touch panel using the same | |
| US20130139712A1 (en) | Roller-based imprinting system | |
| CN107561876A (en) | A kind of new mask-free photolithography system and its technological process | |
| EP3462081B1 (en) | Optical body, method for manufacturing optical body, and light-emitting apparatus | |
| EP2077419A2 (en) | Optical waveguide device for touch panel and touch panel using the same | |
| US20110089010A1 (en) | Complex sheet structure and cover lens assembly | |
| CN106527057A (en) | Laser direct writing system and method suitable for curved mobile phone glass | |
| CN105388707A (en) | Drawing apparatus | |
| CN102103332A (en) | High-speed digital scanning direct write photoetching device | |
| CN111025852B (en) | Exposure machine and alignment method thereof | |
| KR20120017403A (en) | Optical waveguide for touch panel | |
| CN103257483A (en) | Method for manufacturing liquid crystal display device | |
| CN215494542U (en) | Remove high accuracy vision mask exposure all-in-one | |
| CN111025855A (en) | Non-contact automatic center alignment overlay projection photoetching machine | |
| CN112099304A (en) | Novel optical screen preparation method | |
| CN206139987U (en) | Carry out accurate glyptic equipment with laser to light guide plate | |
| CN201993577U (en) | High-speed digital scanning and direct writing photoetching device | |
| WO2011039864A1 (en) | Method for manufacturing light guide plate, and light guide plate | |
| CN111522091B (en) | Glass light guide plate, production process thereof and display device | |
| CN106873314A (en) | The digitlization made for high accuracy half tone is two-sided while direct write exposure sources |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231228 Address after: 518000, Tianxin Community, Shijing Street, Pingshan District, Shenzhen City, Guangdong Province, with Building 9, West First Building 101, Fuyu Industrial Zone Patentee after: Shenzhen Xinyue Abrasive Tools Co.,Ltd. Address before: 516000 room 07, floor 39, building a, Chengjie international business center, intersection of Danshui Donghua Avenue and Baiyun Road, Huiyang District, Huizhou City, Guangdong Province Patentee before: Huizhou Qiquan Intelligent Technology Co.,Ltd. |