CN215449889U - Pre-alignment device for photoetching process - Google Patents
Pre-alignment device for photoetching process Download PDFInfo
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- CN215449889U CN215449889U CN202122138221.3U CN202122138221U CN215449889U CN 215449889 U CN215449889 U CN 215449889U CN 202122138221 U CN202122138221 U CN 202122138221U CN 215449889 U CN215449889 U CN 215449889U
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- rotating shaft
- base
- elastic
- shaped rod
- fixedly connected
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Abstract
The utility model discloses a pre-alignment device for a photoetching process, which relates to the technical field of photoetching pre-alignment devices and comprises a base; the bottom end of the base is fixedly connected with a bottom plate; the bottom end of the bottom plate is vertically provided with a rotating shaft; the rotating shaft is connected with the motor through a transmission mechanism; the rotating shaft is connected with an elastic fixing component which can fix every 5-10 degrees of rotation. According to the utility model, by arranging the elastic fixing component, the base is fixedly connected with the rotating shaft through the bottom plate, when the rotating shaft is driven by the motor to rotate, after the rotating shaft stops, the rotating shaft can be driven to further rotate slightly under the elastic force of the spring of the locking block due to the existence of the locking block until the locking block is clamped into the clamping groove, so that the rotating shaft can rotate at an angle which is an integral multiple of 5 degrees and 10 degrees, and the rotation consistency can be ensured.
Description
Technical Field
The utility model relates to the technical field of photoetching pre-alignment devices, in particular to a pre-alignment device for a photoetching process.
Background
A photolithography (photolithography) process is an important step in a semiconductor device manufacturing process, and a geometric pattern structure is generally defined on a photoresist layer by exposure and development, and then a pattern on a photomask is transferred onto a substrate such as a silicon wafer, glass, or the like through an etching process. In the photolithography process, after a substrate, such as a silicon wafer, is placed on a corresponding support surface of a photolithography apparatus, pre-positioning of the position of the silicon wafer and pre-orientation of the direction of the silicon wafer are required to be performed first, so as to perform exposure alignment accurately and subsequently.
In the prior art, stepless adjustment is usually adopted when the position of a silicon wafer is rotationally adjusted, and fixed angle adjustment cannot be realized, so that the consistency of rotation cannot be ensured, and the change is urgently needed.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to solving the above problems, and provides a pre-alignment apparatus for photolithography.
In order to achieve the purpose, the utility model adopts the following technical scheme:
a pre-alignment apparatus for a photolithography process includes a susceptor;
the bottom end of the base is fixedly connected with a bottom plate;
the bottom end of the bottom plate is vertically provided with a rotating shaft;
the rotating shaft is connected with the motor through a transmission mechanism;
the rotating shaft is connected with an elastic fixing component which can fix every 5-10 degrees of rotation.
Optionally, the transmission mechanism is a belt transmission mechanism.
Optionally, the resilient securing assembly comprises a base and a resilient retaining member;
the base is rotatably connected with the rotating shaft;
the elastic locking part is arranged on the base, a clamping groove matched with the elastic locking part for use is formed in the rotating shaft, and the clamping groove is matched and locked with the elastic locking part when the rotating shaft rotates by 5-10 degrees.
Optionally, the elastic locking piece is composed of a locking block, a fixing block, a compression spring and a T-shaped rod;
the locking block is fixedly connected with the T-shaped rod, and the head of the T-shaped rod is far away from one side of the locking block;
the T-shaped rod is connected with the fixed block in a sliding manner;
the fixed block is fixedly connected to the base;
the spring is sleeved on the T-shaped rod, and the spring is located between the head of the T-shaped rod and the fixing block.
Optionally, the elastic fixing component further comprises a housing, the housing is sleeved on the outer surface of the base in a clearance mode, and the housing is fixedly connected with the base through a fixing frame.
Compared with the prior art, the utility model has the following advantages:
according to the utility model, by arranging the elastic fixing component, the base is fixedly connected with the rotating shaft through the bottom plate, when the rotating shaft is driven by the motor to rotate, after the rotating shaft stops, the rotating shaft can be driven to further rotate slightly under the elastic force of the spring of the locking block due to the existence of the locking block until the locking block is clamped into the clamping groove, so that the rotating shaft can rotate at an angle which is an integral multiple of 5 degrees and 10 degrees, and the rotation consistency can be ensured.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic overall view of another aspect of the present invention;
FIG. 3 is a top view of the elastic fixing member of the present invention;
fig. 4 is a schematic view of the resilient locking member of the present invention.
In the figure: the device comprises a base 1, a bottom plate 2, a rotating shaft 3, a shell 4, a transmission mechanism 5, a motor 6, a fixing frame 7, a base 8, a clamping groove 9, a locking block 10, a fixing block 11, a spring 12 and a T-shaped rod 13.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1 and 2, a pre-alignment apparatus for a photolithography process includes a base 1, and in this embodiment, the base 1 has a cylindrical structure.
The bottom fixedly connected with bottom plate 2 of base 1, the vertical pivot 3 of installing in bottom of bottom plate 2, bottom plate 2 adopt the disc type structure, and the effect of bottom plate 2 is used for supporting base 1, the installation of the pivot 3 of being convenient for simultaneously.
The rotating shaft 3 is connected with a motor 6 through a transmission mechanism 5, and in the embodiment, the transmission mechanism 5 adopts a belt transmission mechanism. The motor 6 may be a reduction motor.
Referring to fig. 3, the rotating shaft 3 is connected with an elastic fixing component which is fixed every time the rotating shaft rotates 5 degrees to 10 degrees, and the elastic fixing component comprises a base 8 and an elastic locking piece, and the elastic fixing component comprises the following specific components:
the base 8 is rotatably connected with the rotating shaft 3, and the base 8 and the rotating shaft 3 can be rotatably connected through a bearing.
The elastic locking part is arranged on the base 8, the rotating shaft 3 is provided with a clamping groove 9 matched with the elastic locking part for use, and the rotating shaft 3 is matched and locked with the elastic locking part every time the clamping groove 9 rotates by 5-10 degrees.
In the present embodiment, the number of the locking grooves 9 is 36 to 72, so that locking is performed for every 5 to 10 degrees of rotation.
Referring to fig. 3, the elastic fixing component further includes a housing 4, the housing 4 is sleeved on the outer surface of the base 8 in a clearance manner, and the housing 4 is fixedly connected with the base 8 through a fixing frame 7. The provision of the housing 4 serves as a protective resilient locking member.
Referring to fig. 4, the elastic locking member is composed of a locking block 10, a fixing block 11, a compression spring 12 and a T-shaped rod 13, as follows:
the latch segment 10 and T type pole 13 fixed connection, and the latch segment 10 one side is kept away from to T type pole 13 head, and in this embodiment, the latch segment 10 can adopt spherical structure, and draw-in groove 9 can adopt hemispherical structure to can realize the cooperation of latch segment 10 and draw-in groove 9 and use.
The T-shaped rod 13 is connected with the fixing block 11 in a sliding mode, a linear bearing can be arranged on the fixing block 11, and the linear bearing and the fixing block are connected in a sliding mode.
Fixed block 11 fixed connection is on base 8, and fixed block 11's effect lies in, carries on spacingly to T type pole 13.
The spring 12 is sleeved on the T-shaped rod 13, and the spring 12 is located between the head of the T-shaped rod 13 and the fixing block 11, as shown in fig. 4.
When the rotating shaft 3 is driven by the motor 6 to rotate, after the rotating shaft stops, due to the existence of the locking block 10, the rotating shaft 3 can be driven to further rotate slightly under the elastic force of the spring 12 of the locking block 10 until the locking block 10 is clamped into the clamping groove 9, so that the rotating shaft 3 can rotate at an angle which is an integral multiple of 5 degrees and 10 degrees.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and equivalent alternatives or modifications according to the technical solution of the present invention and the inventive concept thereof should be covered by the scope of the present invention.
Claims (5)
1. A pre-alignment apparatus for a lithographic process, comprising a susceptor (1), characterized in that:
the bottom end of the base (1) is fixedly connected with a bottom plate (2);
the bottom end of the bottom plate (2) is vertically provided with a rotating shaft (3);
the rotating shaft (3) is connected with a motor (6) through a transmission mechanism (5);
the rotating shaft (3) is connected with an elastic fixing component which can fix every 5-10 degrees of rotation.
2. A pre-alignment apparatus for lithography process according to claim 1, wherein the transmission mechanism (5) is a belt transmission mechanism.
3. A prealignment device for a lithographic process according to claim 1, characterized in that the elastic fixation assembly comprises a base (8) and an elastic locking;
the base (8) is rotatably connected with the rotating shaft (3);
the elastic locking piece is arranged on the base (8), a clamping groove (9) matched with the elastic locking piece for use is formed in the rotating shaft (3), and the rotating shaft (3) is locked with the elastic locking piece in a matching mode when rotating by 5-10 degrees.
4. A pre-alignment apparatus for lithography process according to claim 3, characterized in that the elastic locking member is composed of a locking block (10), a fixing block (11), a compression spring (12) and a T-shaped rod (13);
the locking block (10) is fixedly connected with the T-shaped rod (13), and the head of the T-shaped rod (13) is far away from one side of the locking block (10);
the T-shaped rod (13) is connected with the fixed block (11) in a sliding manner;
the fixed block (11) is fixedly connected to the base (8);
the spring (12) is sleeved on the T-shaped rod (13), and the spring (12) is located between the head of the T-shaped rod (13) and the fixing block (11).
5. The pre-alignment apparatus for lithography process according to claim 3, wherein the elastic fixing component further comprises a housing (4), the housing (4) is gap-fitted on the outer surface of the base (8), and the housing (4) is fixedly connected with the base (8) through a fixing frame (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122138221.3U CN215449889U (en) | 2021-09-06 | 2021-09-06 | Pre-alignment device for photoetching process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122138221.3U CN215449889U (en) | 2021-09-06 | 2021-09-06 | Pre-alignment device for photoetching process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215449889U true CN215449889U (en) | 2022-01-07 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122138221.3U Active CN215449889U (en) | 2021-09-06 | 2021-09-06 | Pre-alignment device for photoetching process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215449889U (en) |
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2021
- 2021-09-06 CN CN202122138221.3U patent/CN215449889U/en active Active
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