CN100499063C - Base positioning device and machine with base positioner - Google Patents
Base positioning device and machine with base positioner Download PDFInfo
- Publication number
- CN100499063C CN100499063C CNB2007100040901A CN200710004090A CN100499063C CN 100499063 C CN100499063 C CN 100499063C CN B2007100040901 A CNB2007100040901 A CN B2007100040901A CN 200710004090 A CN200710004090 A CN 200710004090A CN 100499063 C CN100499063 C CN 100499063C
- Authority
- CN
- China
- Prior art keywords
- board
- holder
- hole
- guide seat
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
Being installed on machine platform, the positioning device for base plate is in use for fixing the base plate on the machine platform. The positioning device includes following parts: fixed seat including axle hole; locking up component located inside the axle hole is in use for locking up the fixed seat on the machine platform; guiding seat including muff coupling hole is in use for cup jointing the fixed seat; the guiding portion is in use for guiding the base plate to collect position in the machine platform, as well as supporting the base plate; top cap including axial rod inserted to the axle hole; being located at one end of the axial rod, the bunt and support part is in use for bunting and supporting the guiding seat in order to fix the guiding seat on the machine platform. Advantages are: it is not needed for retuning position of the guiding seat replaced so as to shorten replacing time and raise replacing efficiency.
Description
Technical field
The present invention relates to a kind of positioner, particularly a kind of base positioner and have the board of base positioner.
Background technology
Generally when making Thin Film Transistor-LCD (TFT-LCD), must on glass substrate, carry out thin film deposition (Thin film deposition), little shadow (Photolithography) and etching technologies such as (Etching), this and general semi-conductive manufacturing process are similar substantially, and just it is made on the glass substrate rather than on the silicon wafer.Wherein, array processes (Array Process) is utilized technology such as electric conductor coating/little shadow photograph and exposure imaging on glass substrate, produce electrode base board with as transmitting signal/voltage-controlled element (being so-called thin-film transistor), remove technologies such as (Photoresist stripping) so can carry out photoresistance coating (Photoresist coating), exposure (Exposure), development (Development) and photoresistance.
Carry out in the process of photoresistance coating at photoresistance rotary coating machine (Photo Resist Spin Coater), glass substrate is positioned on the bracing frame, transmit glass substrate by mechanical arm (Robot) again, for the delivering position of guaranteeing glass substrate is fixed, and avoid glass substrate when mechanical arm rotates, to be thrown out of, generally can substrate guide block device be set on mechanical arm, in order to the position and the fixing glass substrate of correcting glass substrate.As Fig. 1 and shown in Figure 2, it is a known substrate guide block device A1, and this substrate guide block device A1 comprises holder A11, guide seat A12 and lock member A13, and wherein guide seat A12 is the hollow sleeve with sleeve joint hole A120.The user elder generation position of adjustment holder A11 on mechanical arm A2, again sleeve joint hole A120 is socketed on holder A11, guide seat A12 is placed on the holder A11, and via lock member A13 holder A11 is locked on the mechanical arm A2, so just can utilize the position of the lead-in chamfered correcting glass substrate A3 of guide seat A12 both sides.
Yet, glass substrate A3 rotates the influence of the centrifugal force that is produced because of being subjected to mechanical arm A2, make glass substrate A3 bump guide seat A12 and form indenture, so not only cause the offset of glass substrate A3, also can make glass substrate A3 be stuck in the indenture of guide seat A12 and the situation of fragmentation takes place, thereby must regularly replace guide seat A12 and solve the problems referred to above.Owing to need when changing guide seat A12 to remove lock member A13 and holder A11 earlier, could take out guide seat A12 and change, therefore quite waste time and energy in the replacing guide seat A12 position of adjustment holder A11 on mechanical arm A2 again all at every turn.Therefore, how improveing the structure of substrate guide block device, make the replacing guide seat not need adjustment position again, also improve replacing efficient to shorten the replacing time, and then reach the purpose that reduces cost, is an instant problem to be solved.
Summary of the invention
In view of this, the purpose of this invention is to provide a kind of base positioner and have the board of base positioner, it can not need adjustment position again when changing guide seat, shortened the replacing time and improved replacing efficient, thereby can reduce cost.
In order to achieve the above object, the present invention proposes a kind of base positioner, and it is installed on the board so that substrate is fixed on the board, and base positioner comprises: holder comprises axis hole; Lock member is positioned at axis hole, in order to holder is locked on the board; Guide seat comprises sleeve joint hole, in order to the cover connection fixed seat; And guide portion, in order to the position of correcting substrate on board, and supporting substrate; And the top cap, comprise axostylus axostyle, be intercalated in the axis hole; And support division, be positioned at an end of axostylus axostyle, in order to support guide seat, so that guide seat is fixed on the board.
Preferably, this holder also comprises a perforation, and this perforation is positioned at an end of this axis hole, thereby use to wear for this lock member this holder is locked on this board.
Preferably, this holder also comprises a base portion, and this guide seat also comprises sets the hole, and this base portion is embedded in this and sets in the hole and be positioned.
Preferably, this axis hole comprises an internal thread, and this internal thread is positioned at the epimere inwall of this axis hole.
Preferably, this axostylus axostyle comprises an external screw thread, so that this axostylus axostyle is bolted in this axis hole.
Preferably, this guide seat is made by polyether-ether-ketone.
Preferably, this guide seat also comprises a location hole, and this location hole is positioned at a side of this sleeve joint hole, in order to ccontaining this support division.
Preferably, the internal diameter of this location hole is greater than the internal diameter of this sleeve joint hole.
The present invention also proposes a kind of board with base positioner, comprises: board; And a plurality of base positioners, each base positioner all comprises: holder, be positioned on the board, and this holder comprises axis hole; Lock member is positioned at axis hole, in order to holder is locked on the board; Guide seat comprises: sleeve joint hole, in order to the cover connection fixed seat; And guide portion, in order to the position of correcting substrate on board, and supporting substrate; And the top cap, comprise: axostylus axostyle is intercalated in the axis hole; And support division, be positioned at an end of axostylus axostyle, in order to support guide seat, so that guide seat is fixed on the board.
Preferably, this board is a mechanical arm.
Compare with conventional art, the invention has the advantages that: can when changing guide seat, not need adjustment position again, shortened the replacing time and improved replacing efficient, thereby can reduce cost.
Following conjunction with figs. illustrates preferred embodiment of the present invention and functional effect thereof.
Description of drawings
Fig. 1 is the schematic appearance of known substrate guide block device.
Fig. 2 is the cross-sectional schematic of known substrate guide block device.
Fig. 3 is the schematic appearance of first embodiment of the invention.
Fig. 4 is the cross-sectional schematic of first embodiment of the invention.
Fig. 5 is the schematic diagram of first embodiment of the invention when supporting substrate.
Fig. 6 is the schematic appearance of second embodiment of the invention.
Fig. 7 is the cross-sectional schematic of second embodiment of the invention.
Wherein, description of reference numerals is as follows:
21 perforation of 1 base positioner, 2 holders, 20 axis holes
22 base portions, 3 lock members, 4 guide seat, 41 sleeve joint holes
42 location holes, 43 guide portion 44 are set hole 5 top caps
51 axostylus axostyles, 52 support divisions, 6 substrates, 8 boards
A1 substrate guide block device A11 holder A12 guide seat A120 sleeve joint hole
A13 lock member A2 mechanical arm A3 glass substrate
Embodiment
As shown in Figure 3 and Figure 4, it is the first embodiment of the present invention.
Board with base positioner comprises: a plurality of base positioners 1, board 8.
Base positioner 1 comprises: holder 2, lock member 3, guide seat 4, top cap 5.
According to structure disclosed in this invention, wherein guide seat 4 also comprises location hole 42, and it is positioned at a side of sleeve joint hole 41, and the internal diameter of location hole 42 is greater than the internal diameter of sleeve joint hole 41.
The guide seat 4 of above-mentioned explanation can be made by polyether-ether-ketone (PEEK), can increase the useful life of guide seat 4 by its remarkable abrasion performance.
User elder generation is according to the position of size adjustment holder 2 on board 8 of substrate 6, after treating that adjustment is correctly put the position, lock member 3 is penetrated perforation 21 and holder 2 is locked on the board 8, sleeve joint hole 41 with guide seat 4 is socketed on holder 2 again, make guide seat 4 seat 2 and locate that is coated and fixed, then top cap 5 is placed on the holder 2, the axostylus axostyle 51 of top cap 5 is penetrated in the axis hole 20 of holder 2 and be spirally connected fixing, and make support division 52 be placed in the location hole 42 of guide seat 4 and support guide seat 4, thus guide seat 4 is fixed on the board 8.
As shown in Figure 5, when substrate 6 is positioned on the board 8, the position of the guide portion 43 correcting substrates 6 by guide seat 4, and behind the location, utilize guide portion 43 supporting substrates 6, can transmit substrates 6 or drive substrate 6 by board 8 and carry out every work flow.
Behind guide seat 4 long-term supporting substrates 6, for checking whether guide portion 43 produces indenture, or, guide portion 43 need change because of producing indentures, user's dismounting earlier is bolted in the top cap 5 of holder 2, can be by taking out guide seat 4 on the board 8, will not produce indenture then or new guide seat 4 is socketed on holder 2, and top cap 5 will be locked in holder 2, promptly finish the operation of changing guide seat 4, avoid substrate 6 to be stuck in the indenture that guide portion 43 produces thus and the fragmentation situation takes place.
By structure disclosed in this invention, make the operation of changing guide seat 4 not need the position of adjustment holder 2 on board 8 again, so not only make replacing guide seat 4 convenient, simple and easy, also can shorten the time of changing operation, make the efficient of changing guide seat 4 significantly improve, and then reach the purpose that reduces cost.
As Fig. 6 and shown in Figure 7, it is the second embodiment of the present invention.
In this embodiment, holder 2 is provided with base portion 22, and the perforation 21 that is connected with axis hole 20 is set on base portion 22, so that lock member 3 penetrates perforation 21 and holder 2 is locked on the board 8, the sleeve joint hole 41 of guide seat 4 is provided with in the side away from location hole 42 and sets hole 44.When the sleeve joint hole 41 of guide seat 4 is socketed on holder 2, be embedded in base portion 22 and locate by setting hole 44, make guide seat 4 seat that is coated and fixed can not cause offset at 2 o'clock because of rocking.
Though technology contents of the present invention with preferred embodiment openly as above; but it is not in order to limit the present invention; those skilled in the art can carry out various changes and modification under the situation that does not break away from design of the present invention; these changes all should be covered by in the scope of the present invention with modification, so protection scope of the present invention should be as the criterion with the scope that appending claims was defined.
Claims (10)
1. base positioner, it is installed on the board so that a substrate is fixed on this board, and this device comprises:
One holder comprises an axis hole;
One lock member is positioned at this axis hole, so that this holder is locked on this board;
One guide seat comprises:
One sleeve joint hole is in order to this holder of socket; With
One guide portion in order to the position of this substrate of correcting on this board, and supports this substrate; And
One top cap comprises:
One axostylus axostyle is intercalated in this axis hole; With
One support division is positioned at an end of this axostylus axostyle, in order to support this guide seat, so that this guide seat is fixed on this board.
2. base positioner as claimed in claim 1, wherein, this holder also comprises a perforation, and this perforation is positioned at an end of this axis hole, thereby use to wear for this lock member this holder is locked on this board.
3. base positioner as claimed in claim 1, wherein, this holder also comprises a base portion, and this guide seat also comprises sets the hole, and this base portion is embedded in this and sets in the hole and be positioned.
4. base positioner as claimed in claim 1, wherein, this axis hole comprises an internal thread, and this internal thread is positioned at the epimere inwall of this axis hole.
5. base positioner as claimed in claim 4, wherein, this axostylus axostyle comprises an external screw thread, so that this axostylus axostyle is bolted in this axis hole.
6. base positioner as claimed in claim 1, wherein, this guide seat is made by polyether-ether-ketone.
7. base positioner as claimed in claim 1, wherein, this guide seat also comprises a location hole, and this location hole is positioned at a side of this sleeve joint hole, in order to ccontaining this support division.
8. base positioner as claimed in claim 7, wherein, the internal diameter of this location hole is greater than the internal diameter of this sleeve joint hole.
9. board with base positioner, it comprises base positioner as claimed in claim 1.
10. the board with base positioner as claimed in claim 9, wherein, this board is a mechanical arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100040901A CN100499063C (en) | 2007-01-23 | 2007-01-23 | Base positioning device and machine with base positioner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100040901A CN100499063C (en) | 2007-01-23 | 2007-01-23 | Base positioning device and machine with base positioner |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101005041A CN101005041A (en) | 2007-07-25 |
| CN100499063C true CN100499063C (en) | 2009-06-10 |
Family
ID=38704077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100040901A Expired - Fee Related CN100499063C (en) | 2007-01-23 | 2007-01-23 | Base positioning device and machine with base positioner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100499063C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101916737A (en) * | 2010-07-21 | 2010-12-15 | 友达光电股份有限公司 | Substrate supporting device |
-
2007
- 2007-01-23 CN CNB2007100040901A patent/CN100499063C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101916737A (en) * | 2010-07-21 | 2010-12-15 | 友达光电股份有限公司 | Substrate supporting device |
| CN101916737B (en) * | 2010-07-21 | 2012-11-07 | 友达光电股份有限公司 | Substrate supporting device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101005041A (en) | 2007-07-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6335777B2 (en) | Substrate holder, method for holding substrate with substrate holder, and plating apparatus | |
| CN210866134U (en) | Wafer carrying disc bearing device | |
| CN100499063C (en) | Base positioning device and machine with base positioner | |
| US20150040387A1 (en) | Semiconductor Wafer Carrier and Method of Manufacturing | |
| CN116053189B (en) | Wafer washs with rotatory positioning equipment | |
| CN108091583B (en) | Substrate supporting assembly and probe station comprising same | |
| JP2000150596A (en) | Prober | |
| CN204918749U (en) | Coating by vaporization machine wafer fixing device | |
| CN107611069B (en) | Robot and semiconductor processing apparatus | |
| KR20140044721A (en) | An apparatus for mounting a device | |
| WO2008097662A1 (en) | Methods of and apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer | |
| CN217468379U (en) | ESC mounting structure for semiconductor vacuum equipment | |
| JP2000299962A (en) | Device and method for adjusting installed position of rotating electric machine | |
| JPS63134917A (en) | Fitting method for motor built-in type pulse encoder | |
| CN209920247U (en) | Drilling processing equipment for precise ceramics | |
| CN101713927B (en) | Adaptor and method for mounting mask | |
| US20230241730A1 (en) | Fastening method of fastening component | |
| CN114355729A (en) | Photoresist coating equipment and gluing developing system | |
| KR100957525B1 (en) | Power device | |
| CN217521980U (en) | Wafer jig | |
| CN215449889U (en) | Pre-alignment device for photoetching process | |
| CN112670231B (en) | Wafer bearing device and control method and device thereof | |
| CN214845638U (en) | Test machine with AMP integrated circuit board | |
| JP2003282406A (en) | Device and method of manufacturing semiconductor device | |
| KR200352235Y1 (en) | Manual alignment tool of spin coater |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090610 Termination date: 20210123 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |