CN215374224U - Micro LED or MiniLED micro-spectrum measurement system - Google Patents
Micro LED or MiniLED micro-spectrum measurement system Download PDFInfo
- Publication number
- CN215374224U CN215374224U CN202121906693.2U CN202121906693U CN215374224U CN 215374224 U CN215374224 U CN 215374224U CN 202121906693 U CN202121906693 U CN 202121906693U CN 215374224 U CN215374224 U CN 215374224U
- Authority
- CN
- China
- Prior art keywords
- light
- component
- micro
- imaging unit
- miniled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
The utility model provides a micro LED or MiniLED micro-spectrum measuring system, wherein a preset distance is reserved between an imaging unit and a region to be measured, and a receiving part of the imaging unit is positioned in an irradiation region of a pixel point array luminous beam of the region to be measured; the light path component comprises at least one filtering component and at least one light splitting component, wherein the filtering component is arranged on a plane where an image generated above the imaging unit is located and comprises a through hole with an adjustable diameter; the angle between the normal of the light splitting component and the output light beam of the filtering component is a first preset angle, and the first output part and the second output part of the light splitting component output the light beams to the image acquisition unit and the spectrum measurement unit respectively. The aperture of light is limited by the imaging unit and the light path component, and pixel-level image acquisition is realized on a micrometer scale; and the light beams are respectively sent to the image acquisition unit and the spectrum measurement unit through the beam splitting light path, and simultaneously, the detected area of the MicroLED is observed and the spectrum of the area is measured.
Description
Technical Field
The utility model relates to the field of MicroLEDs, in particular to a micro-LED or MiniLED micro-spectrum measurement system.
Background
With the rapid development of display technology, the display quality and performance requirements of display devices are also higher and higher. Micro led and MiniLED display technologies are receiving more and more attention due to their high brightness, high efficiency, low power consumption, long lifetime, etc. The Micro LED has the characteristics of small chip size, high integration level and self-luminescence; the micro LED display comprises micro LED chips emitting red, green and blue light, and each chip independently emits light and is arranged according to a certain array (such as Bayer array arrangement) to form the micro LED display; the MiniLED display panel consists of a large number of LEDs with a die size above 100 microns.
At present, the conventional spectrum measuring instrument cannot reach the micron-scale size of a MicroLED and a MiniLED, and because each chip emits light independently, the light-emitting characteristics of the chips are different, and the spectrum of each independent pixel point cannot be effectively obtained by the conventional detection means. And cannot output image information of the object to be observed while providing spectral information of the object to be observed.
Therefore, a scheme capable of measuring the spectral information of the measured object at the micron scale and collecting the image information is needed.
SUMMERY OF THE UTILITY MODEL
In order to solve the defects of the prior art, the utility model provides a micro LED or MiniLED micro-spectrum measuring system.
The utility model provides a micro LED or MiniLED micro-spectrum measurement system, which comprises a microscope imaging unit, a light path component, an image acquisition unit and a spectrum measurement unit, wherein the microscope imaging unit is used for imaging a micro object;
the receiving part of the imaging unit is positioned in an irradiation area corresponding to the pixel point array luminous beam of the area to be detected;
the light path component comprises at least one filtering component and at least one light splitting component, the filtering component is arranged on a plane where an image generated above the imaging unit is located, the filtering component comprises at least one through hole, the luminous beam penetrates through the through hole, and the diameter of the through hole is adjustable;
an angle between a normal of the light splitting component and an output light beam of the filtering component is a first preset angle, a first output part of the light splitting component corresponds to one part of the output light beam of the filtering component, and a second output part of the light splitting component corresponds to the other part of the output light beam of the filtering component;
the receiving part of the image acquisition unit corresponds to the output light beam of the first output part, and the receiving part of the spectrum measurement unit corresponds to the output light beam of the second output part.
According to the micro LED or MiniLED micro-spectrum measuring system provided by the utility model, the light filtering component comprises a diaphragm; the light splitting component comprises a beam splitter;
according to the micro LED or MiniLED micro-spectrum measuring system provided by the utility model, the light path component further comprises at least one collimating mirror, the collimating mirror is arranged between the light filtering component and the light splitting component, the collimating mirror corresponds to the output light beam of the light filtering component, and the number of the collimating mirrors is the same as that of the light filtering component.
Further, the diaphragm is an adjustable diaphragm.
Further, the imaging unit and the light path component are coaxially arranged along the pixel point array luminous beam of the region to be detected.
According to the micro LED or MiniLED micro-spectrum measurement system provided by the utility model, the light path component further comprises a turning light path arranged between the light filtering component and the light splitting component, and the pixel point array luminous light beam of the region to be measured enters the turning light path through the light filtering component and enters the light splitting component along a second preset angle.
According to the micro LED or MiniLED micro-spectrum measurement system provided by the utility model, the imaging unit and the light path component are arranged on a displacement platform;
the displacement platform drives the imaging unit to move above the area to be measured; the displacement platform drives the light path component to move above the imaging unit.
According to the micro LED or MiniLED micro-spectrum measuring system provided by the utility model, the displacement platform is provided with scales, the minimum graduation of the scales is the same as the width of a single pixel in the region to be measured, and the moving distance of the imaging unit and the light path component is integral multiple of the minimum graduation.
According to the micro LED or MiniLED micro-spectrum measurement system provided by the utility model, the displacement platform further comprises a calibration device, and the calibration device is used for adjusting the distance between the imaging unit and the light filtering component, so that the light filtering component is positioned on the plane where the image is positioned.
According to the micro LED or MiniLED micro-spectrum measurement system provided by the utility model, the imaging lens in the imaging unit is an adjustable microscope lens.
The micro LED or MiniLED micro-spectrum measuring system provided by the utility model has the following technical effects:
1) the aperture of light is limited through the imaging unit and the light filtering component, and the microstructure of the chip is subjected to pixel-level image acquisition on a micrometer scale;
2) the light beams are respectively sent to the image acquisition unit and the spectrum measurement unit through the light splitting component, so that the measured area of the MicroLED or the MiniLED can be observed simultaneously, the spectrum of the area can be acquired, and the visible image, namely the measured spectrum, can be realized.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed for the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a micro LED or MiniLED micro-spectral measurement system provided by the present invention;
reference numerals:
1. a microscope imaging unit; 2. a filter member; 3. a collimating mirror; 4. a light splitting part; 5. an image acquisition unit; 6. a spectral measurement unit.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The Micro LEDs are both miniaturized and matrixed of LEDs, wherein the Micro LEDs enable the LED units to be smaller than 100 micrometers, can realize a self-luminous mode as the OLED, and can be driven and lightened independently, and each Micro LED can be regarded as a pixel; mini LEDs, i.e., millimeter light emitting diodes, have a grain size of about 100 microns or more; the number of the pixel points on the Micro LED panel and the Mini LED panel is large, the light emitting characteristics of each pixel point are different, the spectral characteristics of each pixel point cannot be measured by conventional detection means, the microstructure on the panel can only be shot and detected in a microscopic imaging mode, pixel-level spectral measurement cannot be realized, and the observed panel microstructure and the detected spectrum cannot be in one-to-one correspondence.
Thus, there is a need for a system that can simultaneously achieve pixel-level image observation and pixel-level spectral measurement.
In one embodiment, as shown in fig. 1, the present invention provides a micro led or MiniLED micro-spectral measurement system, which includes an imaging unit 1, a filtering component 2, a collimating mirror 3, a light splitting component 4, an image collecting unit 5 and a spectral measuring unit 6;
the imaging unit 1 is a preset distance away from a region to be detected, a receiving part of the imaging unit is positioned in an irradiation region corresponding to a pixel point array luminous beam of the region to be detected, and receives the luminous beam emitted by the region to be detected and generates an image of the pixel point array in the region to be detected;
the receiving part of the imaging unit is a lens of the imaging unit, and the lens is aligned to a pixel point array on the MicroLED or MiniLED panel and is used for generating an image of at least one pixel point on the panel to be detected;
the light path component comprises at least one filtering component 2 and at least one light splitting component 4, the filtering component is arranged on a plane where an image generated above the imaging unit is located, the filtering component is provided with a through hole, the luminous beam penetrates through the through hole, and the diameter of the through hole is adjustable;
the aperture of the through hole can be adjusted or the iris diaphragm is optimized by replacing the diaphragm, the number of pixels observed from the image generated by the imaging unit is limited by the size of the aperture, and pixel points in the through hole observation range of the diaphragm are observed;
an angle between a normal line of the spectroscopic unit 4 and the output light beam of the filter unit 2 is a first predetermined angle, a first output unit of the spectroscopic unit corresponds to a part of the output light beam of the filter unit, and a second output unit of the spectroscopic unit corresponds to the other part of the output light beam of the filter unit;
it should be noted that a normal line, i.e., a line perpendicular to the mirror surface at a contact point between the incident light and the mirror surface, where the normal line is a dashed line perpendicular to the reflection surface of the light splitting component, where the normal line is an output light beam of the filtering component and enters the light splitting component;
the output light beams of the light filtering component are emitted along a direction perpendicular to a panel of the MicroLED or MiniLED to be detected and enter the light splitting component, and the incident angle is the first preset angle;
optionally, the range of the first preset angle is 0-75 degrees;
preferably, the first preset angle is 45 °.
The receiving part of the image acquisition unit 5 corresponds to the output light beam of the first output part, and the receiving part of the spectrum measuring unit 6 corresponds to the output light beam of the second output part.
Wherein, the filter component 2 is arranged on the plane of the image and used for limiting the aperture of the light beam;
optionally, the light splitting component is a beam splitter or a double-layer mirror, and after receiving the output light beam of the filtering component, the output light beam is reflected on a mirror surface to generate a first light beam and is refracted inside the beam splitter or the double-layer mirror to generate a second light beam, and the first light beam and the second light beam are respectively transmitted to the image acquisition unit and the spectrum measurement unit;
the front surface of the beam splitter of the light splitting component receives the output light beam of the filter component, and the back surface of the beam splitter is a second output part which outputs refracted light of the incident light beam, namely a second light beam; the normal of the beam splitting mirror is opposite to the other side of the incident output light beam, and the first output part outputs the reflected light of the incident light beam, namely the first light beam;
optionally, the imaging unit 1 comprises a microscope imaging lens or a high magnification lens;
specifically, a single microscope imaging lens or a high power magnifying lens can cover a pixel point array in a larger area on a Micro LED panel, the multiplying power of the lens can be adjusted, and at least one pixel point is arranged in an area to be measured;
optionally, a plurality of imaging lenses are arranged, so that a large-range area on the Micro LED or Mini LED panel is observed simultaneously;
preferably, as shown in fig. 1, the imaging unit 1, the filter component 2, the collimator lens 3 and the light splitting component 4 are coaxially arranged along the path of the light beam emitted from the pixel point on the Micro LED, and the imaging unit 1, the filter component 2, the collimator lens 3 and the light splitting component 4 are all arranged on the path of the light beam; after receiving light emitted by pixel points on the Micro LED, the imaging lens of the imaging unit 1 enables the light beam to enter the light filtering component in a direction perpendicular to a Micro LED panel, the aperture of the light beam is further reduced through the light filtering component 2, the emitting direction of the light beam is calibrated through the collimating mirror 3, the light beam can be emitted vertically along the original direction after the aperture of the light beam is reduced, and the light beam calibrated through the light splitting component 2 and the light splitting component 3 is divided into two light paths;
optionally, the imaging unit 1 and the filtering component 2 are coaxially arranged along the light beam emitted from the pixel point on the Micro LED, and the light beam direction can be controlled by adding an adjusting light path between the filtering component 2 and the light splitting component 4; a turning light path is arranged between the light filtering component and the light splitting component, and light beams emitted by pixel points on the Micro LED enter the turning light path through the light filtering component and enter the light splitting component along a second preset angle;
the second preset angle is the same as the first preset angle and is the incident angle of incident light;
optionally, the range of the second preset angle is 0-75 degrees;
preferably, the second preset angle is 45 °.
Optionally, after the light beam is split into two light paths by the light splitting component 4, the light beam direction can be adjusted according to the arrangement positions of the image acquisition unit 5 and the spectrum measurement unit 6, including that a reflector group is arranged between the image acquisition unit 5 and the light splitting component 4 to adjust the light path direction, and a reflector is also arranged between the spectrum measurement unit 6 and the light splitting light path to adjust the light path direction; the position arrangement of the image acquisition unit and the spectral measurement unit is more flexible, and the space is saved;
optionally, after the light splitting component 4 splits a light beam emitted by a pixel point on the Micro LED into two light paths, the two light paths are respectively connected with the image acquisition unit 5 and the spectrum measurement unit 6 through optical fibers, the two light paths are guided into the optical fibers, and the light beam is transmitted to the image acquisition unit and the spectrum measurement unit through the optical fibers;
specifically, a light beam formed by imaging a pixel point on a Micro LED by a microscope imaging acquisition unit is received through a diaphragm, and the aperture of the light beam is limited through the diaphragm;
preferably, the diaphragm 2 is arranged on a plane where an image generated by the imaging unit 1 is located, so that the magnification of the region to be detected on the micro led to be detected observed by the image acquisition unit 5 through the diaphragm 2 is consistent with the magnification of the actual imaging unit, and the region to be detected observed by the image acquisition unit 5 is consistent with the region to be detected actually detected by the spectrum measurement unit 6;
it should be noted that the pixel points on the to-be-tested micro led panel are regularly arranged in a matrix form, the size of the pixel points is a reference value, each pixel point is self-luminous, and the size range of the pixel points is generally 5 μm to 50 μm;
it should be noted that, the arrangement form of the optical path components of the present invention is different according to the different number of the pixels to be measured;
in one embodiment, the lens of the imaging unit 1 is aligned with a smaller detection area, and the number of pixel points in the detection area is not more than 100; optionally, the filtering component includes a diaphragm, and the beam splitting component includes a beam splitter; the single diaphragm in the single light filtering component can be used for scanning the pixel points in the smaller detection area one by one; the aperture of the diaphragm is adjusted, so that 1-100 pixel points can be observed;
in one embodiment, the lens of the imaging unit 1 is aligned to a larger detection area, the number of pixel points in the detection area is greater than 100, and the amount of light allowed to pass through one diaphragm is limited, so that all the pixel points in the detection area cannot be completely covered; further, in one embodiment, the optical path assembly includes a plurality of filtering components; each filtering component comprises a diaphragm, and a plurality of filtering components form a diaphragm array; therefore, the pixel points are divided from the pixel point array observed by the imaging unit through the diaphragm array, the pixel array in a large-range detection area is scanned, and the spectrums of a plurality of pixel points can be measured at one time;
preferably, the device also comprises a plurality of collimating mirrors, and each collimating mirror is arranged above the diaphragm and between the diaphragm and the beam splitter;
the number of the diaphragms is the same as that of the collimating mirrors, and one diaphragm in the diaphragm array corresponds to one collimating mirror in the collimating mirror array;
optionally, the aperture array may be a row, and the number of apertures is different according to different selected lens magnifications; when the lens multiplying power is lower, the number of pixel points in the detection area is larger, and the number of required diaphragms is larger;
optionally, the diaphragm array may be a matrix, the size of the diaphragm matrix is matched with the magnification of the lens, and as the magnification of the lens is reduced, the number of elements in the diaphragm matrix is larger;
the collimating mirror matrix can be a column or a matrix, and the collimating mirrors correspond to the diaphragms one by one so as to ensure the precision of the light beam direction;
optionally, one collimator lens may be used, and the large-sized collimator lens is selected and used to calibrate the emergent light beams of the plurality of diaphragms;
preferably, the diaphragm is an adjustable diaphragm; the aperture center is provided with a through hole, the diameter of the through hole is adjusted to adjust the limited beam aperture, and the beam aperture is smaller than the receiving apertures of the image acquisition unit and the spectrum receiving unit, so that direct observation and spectrum measurement of at least one pixel point are realized;
optionally, the aperture of the adjustable diaphragm is adjusted within a range of
Optionally, the diaphragm is circular, and the edge disc surface of the diaphragm is used for fixing the diaphragm;
optionally, the diaphragm is detachably fixed by a buckle;
optionally, the image acquisition unit is a lens, and the position of a pixel point in the light beam with the aperture limited by the diaphragm is observed through the lens and the image processing unit; or observing the diaphragm and the central hole of the diaphragm by naked eyes;
specifically, the pixel point or the pixel array to be detected is kept at the center of the diaphragm through hole through the image acquisition unit, so that the pixel point or the pixel array to be detected is aligned with the diaphragm through hole, the alignment precision among all elements is improved through the image acquisition unit, and the position precision of a pixel level is realized;
if the pixel point or the pixel array to be detected is not located at the center of the range of the diaphragm through hole, the positions of the imaging unit 1, the filtering component 2, the collimating mirror 3 and the light splitting component need to be adjusted, so that the alignment degree of each element is ensured;
furthermore, the position precision of the light path component is improved through the image acquisition unit, and the pixel-level measurement of the spectrum of the light-emitting element on the micro LED to be measured by the spectrum measurement unit is realized;
preferably, the light splitting component 4 selects a large-sized single spectroscope to split all incident light into two beams;
optionally, the light splitting component can be a prism or a reflector group, and the form of the light splitting component is not limited in the utility model;
optionally, the image acquisition unit may be a camera or an image processing device;
optionally, the spectral measurement unit is a spectrometer.
In one embodiment, a micro led or MiniLED micro-spectroscopy measurement system is mounted on a displacement platform for performing array scanning measurement of pixels;
the displacement platform drives the imaging unit 1 to move above the area to be detected, the movement in six directions including front, back, left, right, up and down is controlled, the position and the range of the area to be detected are controlled by controlling the movement in the front, back, left and right directions, and all pixel arrays on a panel to be detected are collected through a single lens; the displacement platform drives the light filtering component 2, the collimating mirror 3 and the light splitting component 4 to move above the imaging unit, the moving direction and the distance of the light path component are adjusted according to the position of the imaging unit 1, and the single-point scanning of each pixel point of the pixel array in the imaging of the imaging unit is realized through the diaphragm in the light filtering component; the area array scanning of all pixel points on the MicroLED panel is realized by moving the imaging unit 1 and the light path component;
specifically, the method also comprises the step of observing an image in the diaphragm through hole through an image acquisition unit;
if it is observed that a pixel point or a pixel array in imaging of the imaging unit does not appear at the center of the aperture through hole, the imaging unit 1 and the light path component 2-4 are further driven to move through a displacement platform for pre-adjustment, so that the aperture is aligned with the pixel point or the pixel array, the position precision of measurement is improved, point-by-point measurement and array measurement are realized, and the spectrum measurement system can accurately acquire the spectrum of the pixel point to realize pixel-level measurement;
optionally, the displacement platform is used for adjusting a first preset angle of the light splitting component, and adjusting the directions of the incident light beam and the emergent light beam;
optionally, the light path is controlled and adjusted through the displacement platform, and a second preset angle is set according to the position arrangement of the light splitting component, the image acquisition unit and the spectrum measurement unit, so that the space is saved;
optionally, the displacement platform is used for adjusting an imaging lens of the imaging unit 1 to move up and down, and adjusting the magnification of a pixel point on the micro led panel by adjusting the distance between the imaging unit and the micro led panel to be detected;
optionally, the displacement platform is provided with a scale for marking a moving distance of the imaging lens of the imaging unit 1, and an observation area of the imaging lens can be adjusted through the scale, so that accurate scanning of all pixel points on the micro led panel is realized, and the position accuracy is improved; the minimum graduation of the scale is the same as the width of a single pixel in the region to be measured, and the moving distance of the imaging unit and the light path component is integral multiple of the minimum graduation;
it should be noted that the size range of the pixel point is generally 5 μm to 50 μm, the utility model does not limit the size of the pixel point,
specifically, the positions of the imaging unit and the light path component are adjusted by taking the size of a pixel unit as a minimum moving unit, so that point-by-point scanning of a plurality of adjacent pixel points is realized;
specifically, when the vertical distance between the micro LED to be detected and the micro LED to be detected is increased, the amplification factor of the pixel points on the micro LED to be detected is reduced, and the number of the pixel points entering the imaging unit is increased;
on the contrary, when the vertical distance between the micro LED to be detected and the micro LED to be detected is reduced, the amplification factor of the pixel points on the micro LED to be detected is increased, and the number of the pixel points entering the imaging unit is reduced;
preferably, the displacement platform is further provided with a driving motor, the imaging unit and the light path component are calibrated with the area to be measured through the image acquisition unit, the position precision is improved, and the imaging unit and the light path component are further driven to move on the micro LED panel to be measured according to a set sequence through the driving motor, so that area array measurement is realized.
Preferably, the imaging lens in the imaging unit is an adjustable microscope lens; the magnification of the lens can be adjusted according to the size of the area to be measured;
it should be noted that the farther from the micro led to be measured, the larger the range of the observation target, under the condition that the aperture of the diaphragm 2 is determined; the focal length and the magnification of the imaging are optional parameters and can be determined according to the range of the target to be detected;
as an example of the present invention, when the size range of the detected target is 50 micrometers, the magnification of the micro-lens is set to be 5 times, and the aperture of the diaphragm is set to be 250 micrometers; when the size of the measurement target changes, matching is realized by changing the magnification of the micro lens or changing the size of the diaphragm; the present invention is illustrated by way of example only and is not to be construed as limited by the present invention;
optionally, the matching of the system can be realized by adjusting the adjustable diaphragm, adjusting the distance between the micro led and the system to be tested or adjusting the magnification of the micro lens;
optionally, the system further comprises a filter for avoiding influence of ambient light and reflected polarized light on the measurement accuracy of the system.
Optionally, the displacement platform further includes a calibration device, configured to adjust a distance between the imaging unit and the filtering component, so that the filtering component is located on a plane where the image is located;
optionally, the spectrum measuring unit is connected to the image collecting unit, and stores spectrum information of pixel points and pixel points on the image in the same memory, so as to realize that the visible image is the measured spectrum.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A micro LED or MiniLED micro-spectrum measurement system is characterized by comprising an imaging unit, a light path component, an image acquisition unit and a spectrum measurement unit;
a preset distance is reserved between the imaging unit and the area to be detected, and the receiving part of the imaging unit is positioned in an irradiation area corresponding to the pixel array luminous beam of the area to be detected;
the light path component comprises at least one filtering component and at least one light splitting component, the filtering component is arranged on a plane where an image generated above the imaging unit is located, the filtering component comprises at least one through hole, the luminous beam penetrates through the through hole, and the diameter of the through hole is adjustable;
an angle between a normal of the light splitting component and an output light beam of the filtering component is a first preset angle, a first output part of the light splitting component corresponds to one part of the output light beam of the filtering component, and a second output part of the light splitting component corresponds to the other part of the output light beam of the filtering component;
the receiving part of the image acquisition unit corresponds to the output light beam of the first output part, and the receiving part of the spectrum measurement unit corresponds to the output light beam of the second output part.
2. A micro led or MiniLED micro-spectroscopic measurement system as set forth in claim 1 wherein the filter component includes a diaphragm; the light splitting part comprises a beam splitter.
3. The system of claim 2, wherein the optical path assembly further comprises at least one collimator disposed between the filter and the light splitting assembly, the collimator corresponding to the output beam of the filter, and the number of the collimators is the same as the number of the filter.
4. A micro led or MiniLED micro-spectroscopy measurement system according to claim 2, wherein the diaphragm is an adjustable diaphragm.
5. The micro LED or MiniLED micro-spectroscopy measurement system of claim 2, wherein the imaging unit and the optical path assembly are coaxially arranged along the pixel array emitting beam of the region to be measured.
6. The micro LED or MiniLED micro-spectroscopy measurement system of claim 2, wherein the light path assembly further comprises a turning light path disposed between the light filtering component and the light splitting component, and the pixel array light beam of the region to be measured enters the turning light path through the light filtering component and enters the light splitting component along a second predetermined angle.
7. A MicroLED or MiniLED micro-spectroscopy measurement system according to any one of claims 1 to 6, wherein the imaging unit and the optical path assembly are mounted on a displacement platform;
the displacement platform drives the imaging unit to move above the area to be measured;
the displacement platform drives the light path component to move above the imaging unit.
8. A MicroLED or MiniLED micro-spectroscopy measurement system according to claim 7, wherein the displacement stage has a scale with a minimum division equal to the width of a single pixel in the area to be measured, and the distance of movement of the imaging unit and the optical path assembly is an integer multiple of the minimum division.
9. A MicroLED or MiniLED micro-spectroscopy measurement system according to claim 7, wherein the displacement stage further comprises a calibration device for adjusting the distance between the imaging unit and the filtering component, such that the filtering component is located in the plane of the image.
10. A micro led or MiniLED micro-spectroscopy measurement system according to claim 1, wherein the imaging lens in the imaging unit is an adjustable microscope lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121906693.2U CN215374224U (en) | 2021-08-13 | 2021-08-13 | Micro LED or MiniLED micro-spectrum measurement system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121906693.2U CN215374224U (en) | 2021-08-13 | 2021-08-13 | Micro LED or MiniLED micro-spectrum measurement system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215374224U true CN215374224U (en) | 2021-12-31 |
Family
ID=79619596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121906693.2U Active CN215374224U (en) | 2021-08-13 | 2021-08-13 | Micro LED or MiniLED micro-spectrum measurement system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215374224U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024032154A1 (en) * | 2022-08-10 | 2024-02-15 | 武汉精测电子集团股份有限公司 | Apparatus for visual aiming spectrum measurement, and optical detection device |
-
2021
- 2021-08-13 CN CN202121906693.2U patent/CN215374224U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024032154A1 (en) * | 2022-08-10 | 2024-02-15 | 武汉精测电子集团股份有限公司 | Apparatus for visual aiming spectrum measurement, and optical detection device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11463675B2 (en) | Light-source characterizer and associated methods | |
| US6958470B2 (en) | Scanning microscope with a detector and light source for exciting an energy state in a specimen and module for a scanning microscope | |
| US11531193B2 (en) | Optical arrangement, multi-spot scanning microscope and method for operating a microscope | |
| US20050205757A1 (en) | Equalization for a multi-axis imaging system | |
| US8692995B2 (en) | Optical system for projecting an IR or UV test signal with optical alignment of the projection axis in the visible spectral region | |
| TWI396824B (en) | Method and device for optically measuring the surface of a product | |
| CN113589506B (en) | Biological microscopic vision pre-focusing device and method based on spectrum confocal principle | |
| US7817271B2 (en) | Confocal microscope and method for detecting by means of a confocal microscope | |
| US11614611B2 (en) | Segmented optical system for a lighting module for angle-resolved illumination | |
| CN215374224U (en) | Micro LED or MiniLED micro-spectrum measurement system | |
| US11906664B2 (en) | Emission module and mounting and adjustment method of the same, LiDAR and smart sensing device | |
| US8675194B2 (en) | Apparatus for measuring the retroreflectance of materials | |
| CN116710828B (en) | Method and optical microscope having multiple photon counting detector element arrays | |
| US6618154B2 (en) | Optical measurement arrangement, in particular for layer thickness measurement | |
| CN110109262B (en) | Coaxiality debugging system and method for light source switching multiplexing unit | |
| CN209895098U (en) | Light source switching multiplexing unit coaxiality debugging system | |
| CN116047707A (en) | Non-vertical autofocus system and corresponding optical instrument | |
| US20240264454A1 (en) | Imager and spot sampler with translatable stage | |
| CN112629680B (en) | Aviation camera focus detection device and method based on shack-Hartmann wavefront sensing | |
| KR102428402B1 (en) | Inspecting system for micro led | |
| CN115031841A (en) | Optical measurement equipment, installation method and application method | |
| CN216309796U (en) | Fluorescent imaging device capable of rapidly switching optical module | |
| CN115468742B (en) | Optical waveguide test system | |
| KR102619436B1 (en) | Chromaticity measuring device that adjusts the position using the reference light | |
| US20240159875A1 (en) | Systems, methods, and devices for combining multiple optical component arrays |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |