CN215372076U - Special gas cabinet system - Google Patents
Special gas cabinet system Download PDFInfo
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- CN215372076U CN215372076U CN202121876135.6U CN202121876135U CN215372076U CN 215372076 U CN215372076 U CN 215372076U CN 202121876135 U CN202121876135 U CN 202121876135U CN 215372076 U CN215372076 U CN 215372076U
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Abstract
The application provides a special gas holder system, including casing and safe gas supply system, fusing temperature 68 ℃ shower head and smoke sense alarm are installed at special gas holder top, and safe gas supply system concentrates the setting in the casing, and safe gas supply system is including evacuation module, high-purity nitrogen gas inflation module, special gas supply module. The special gas cabinet system has the characteristics of high gas supply purity, high safety degree and the like.
Description
Technical Field
The utility model belongs to the technical field of special gas cabinets, and particularly relates to a special gas cabinet system.
Background
Special gases are often used as production materials in laboratories and production sites for developing semiconductor chips and precision instruments, and are special gases used in processes of epitaxy, chemical vapor deposition, etching, doping and the like in electronic product production, such as spontaneous combustibility, strong toxicity, corrosivity, oxidizability, inertness and the like.
The special gas is required to be ultra-pure and ultra-clean, the purity of most special gases is controlled to be 5-6N, and the concentration of impurity gas is controlled to be ppb (9-10). The special gas contains a lot of flammable and explosive gases with low explosion lower limit, such as silane (the explosion lower limit is only 1%, and spontaneous combustion can be realized when meeting air), so that the safety of lives and properties is guaranteed, and the safety of the special gas supply link has extremely high requirements.
SUMMERY OF THE UTILITY MODEL
The utility model provides a special gas cabinet system which is used for solving the technical problem of safe special gas supply.
The special gas cabinet system comprises a shell and a safe gas supply system, wherein a fusing temperature spray header with a temperature of 68 ℃ and a smoke detector alarm are mounted at the top of the special gas cabinet, the safe gas supply system is intensively arranged in the shell, and the safe gas supply system comprises a vacuumizing module, a high-purity nitrogen gas charging module and a special gas supply module;
the vacuumizing module comprises a vacuumizing pipeline, one port of the vacuumizing pipeline is a common pure nitrogen gas charging hole, the other port of the vacuumizing pipeline is an emptying port, and the vacuumizing pipeline is connected with a vacuum generator in series;
the high-purity nitrogen gas charging module comprises a purging pipeline, one port of the purging pipeline is a high-purity nitrogen gas charging hole, the other end of the purging pipeline is communicated with the vacuum generator, a first vacuum pressure gauge and a second vacuum pressure gauge are connected in series at positions, close to the two ends, of the purging pipeline, a pressure regulating pipeline is connected in parallel between the first vacuum pressure gauge and the second vacuum pressure gauge, and the pressure regulating pipeline is connected in series with a pressure regulating and reducing valve;
the special gas supply module comprises a special gas supply pipe and a special gas outlet pipeline, one end of the special gas supply pipe is communicated with the steel cylinder, the other end of the special gas supply pipe is connected to the purging pipeline, one end of the special gas outlet pipeline is connected to the pressure regulating pipeline, and the other end of the special gas outlet pipeline is a special gas supply port.
In an alternative embodiment, the vacuum line is serially connected with a first manual isolation valve, a first check valve and a vacuum generator in sequence.
In an optional implementation mode, the purging pipeline is sequentially connected with a first vacuum pressure gauge, a second manual isolation valve, a second check valve, a third manual isolation valve and a second vacuum pressure gauge in series.
The utility model provides an optional embodiment, the manual isolating valve of third with parallel connection has first branch road and the second of sweeping to sweep the branch road between the second vacuum pressure table, first branch road of sweeping concatenates third check valve, the manual isolating valve of fourth, the manual isolating valve of fifth in proper order, with the manual isolating valve of fifth has the pressure regulating pipeline in parallel connection, the second sweep the branch road with first branch road constitution of sweeping is the same.
In an optional implementation mode, the pressure regulating pipeline is sequentially connected with a sixth manual isolation valve, a pressure regulating and reducing valve, a seventh manual isolation valve and a fourth check valve in series.
In an optional implementation mode, the special gas supply pipe is sequentially connected in series with a fifth check valve, an eighth manual isolation valve, a third vacuum pressure gauge and a primary filter, and the dust particle filtering efficiency of the primary filter is more than or equal to 90%.
In an optional implementation mode, the special gas outlet pipeline is sequentially connected in series with a high-efficiency filter, a ninth manual isolation valve, a first pneumatic isolation valve, a fourth vacuum pressure gauge and a second pneumatic isolation valve, and the dust particle filtering efficiency of the high-efficiency filter is greater than or equal to 99.995%.
In an optional implementation mode, all connection modes in the safe gas supply system adopt VCR connectors for connection, the VCR connectors are matched with pure nickel gaskets, the connectors are made of EP-grade SUS316L stainless steel, the gaskets can resist 315 ℃ and the connectors can resist 537 ℃ and the vacuum leakage rate is less than or equal to 4 x 10-11std cm3/s。
In an alternative embodiment, the system uses EP grade SUS316L stainless steel for both the conduits and valves, and has an internal surface finish Ra of 0.15 μm or less.
Based on the implementation content, the special gas cabinet system provided by the utility model comprises a shell and a safe gas supply system, and is characterized in that a spray header with the fusing temperature of 68 ℃ and a smoke alarm are mounted at the top of the special gas cabinet, the safe gas supply system is intensively arranged in the shell, and the safe gas supply system comprises a vacuumizing module, a high-purity nitrogen gas charging module and a special gas supply module; the vacuumizing module comprises a vacuumizing pipeline, one port of the vacuumizing pipeline is a common pure nitrogen gas charging hole, the other port of the vacuumizing pipeline is an emptying port, and the vacuumizing pipeline is connected with a vacuum generator in series; the high-purity nitrogen gas charging module comprises a purging pipeline, one port of the purging pipeline is a high-purity nitrogen gas charging hole, the other end of the purging pipeline is communicated with the vacuum generator, a first vacuum pressure gauge and a second vacuum pressure gauge are connected to two ends of the purging pipeline in series, a pressure regulating pipeline is connected between the first vacuum pressure gauge and the second vacuum pressure gauge in parallel, and the pressure regulating pipeline is connected with a pressure regulating and reducing valve in series; the special gas air supply module comprises a special gas air supply pipe and a special gas outlet pipeline, one end of the special gas air supply pipe is communicated with the steel cylinder, the other end of the special gas air supply pipe is connected with the first blowing branch or the second blowing branch, one end of the special gas outlet pipeline is connected with the pressure regulating pipeline, and the other end of the special gas outlet pipeline is a special gas supply port. The vacuumizing module, the high-purity nitrogen gas charging module and the special gas supply module are used for vacuumizing a special gas supply system, removing impurities and supplying special gas; when special gas burns and produces the flue gas, the smoke feels the alarm automatic alarm, and the fusing temperature 68 ℃ shower head of installation at special gas cabinet top when ambient temperature surpasss shower head glass pipe fusing temperature, and automatic water spray puts out a fire, improves the gas supply degree of safety.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
In order to more clearly explain the technical solution of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious to those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic diagram illustrating a special gas cabinet system according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an exemplary vacuum pumping module;
FIG. 3 is a schematic diagram of a high purity nitrogen aeration module according to an embodiment of the present invention;
fig. 4 is a schematic composition diagram of a special gas supply module according to an embodiment of the present invention.
The reference numbers illustrate: 1-vacuum pumping module; 2-high purity nitrogen gas charging module; 3-special gas supply module; 4-a vacuum generator; 5-common pure nitrogen gas charging hole; 6-a vent; 7-a high efficiency filter; 8-special gas outlet pipeline; 9-pressure regulating and reducing valve; 10-primary filter; 11-steel cylinder; 12-a shower head; 13-smoke detector alarm; 14-special gas supply port; 15-high purity nitrogen gas charging hole; 16-a vacuum-pumping pipeline; 17-a purge line; 18-special gas supply pipeline; 19-a pressure regulating pipeline; 20-low pressure evacuation line; 21-high pressure evacuation line; 22-a first vacuum pressure gauge; 23-a second vacuum pressure gauge; 24-a third vacuum pressure gauge; 25-a fourth vacuum pressure gauge; 26-a first manual isolation valve; 27-a second manual isolation valve; 28-a third manual isolation valve; 29-a fourth manual isolation valve; 30-a fifth manual isolation valve; 31-a sixth manual isolation valve; 32-a seventh manual isolation valve; 33-an eighth manual isolation valve; 34-a ninth manual isolation valve; 35-a first check valve; 36-a second check valve; 37-a third check valve; 38-a fourth check valve; 39-fifth check valve; 40-a first pneumatic isolation valve; 41-second pneumatic isolation valve.
Detailed Description
In order to make those skilled in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 1 is a schematic diagram illustrating a special gas cabinet system according to an embodiment of the present invention; FIG. 2 is a schematic diagram of an exemplary vacuum pumping module; FIG. 3 is a schematic diagram of a high purity nitrogen aeration module according to an embodiment of the present invention; fig. 4 is a schematic composition diagram of a special gas supply module according to an embodiment of the present invention. The special gas cabinet system provided by the embodiment of the utility model is explained in detail with reference to fig. 1 to 4.
As shown in fig. 1, the special gas cabinet system mainly comprises a shell and a safe gas supply system, wherein the safe gas supply system is centrally arranged in the shell, and the safe gas supply system comprises a vacuumizing module 1, a high-purity nitrogen gas charging module 2 and a special gas supply module 3.
Specifically, a spray header 12 with the fusing temperature of 68 ℃ and a smoke sensing alarm 13 are installed at the top of the special gas cabinet, when special gas burns to generate smoke, the smoke sensing alarm 13 automatically alarms, and when the environment temperature exceeds the fusing temperature of a glass tube of the spray header 12, water is automatically sprayed to extinguish fire.
As shown in fig. 2, the evacuation module 1 includes an evacuation pipeline 16, one port of the evacuation pipeline 16 is a normal pure nitrogen gas charging hole 5, the other port is a vent 6, and the evacuation pipeline 16 is connected in series with a vacuum generator 4. In some embodiments of the present application, the evacuation line 16 is serially connected to a first manual isolation valve 26, a first check valve 35, and the vacuum generator 4.
As shown in fig. 3, the high-purity nitrogen gas charging module 2 comprises a purging pipeline 17, a port of the purging pipeline 17 is a high-purity nitrogen gas charging hole 15, and the other end of the high-purity nitrogen gas charging hole is communicated with the vacuum generator 4, two ends of the purging pipeline 17 are connected in series with a first vacuum pressure gauge 22 and a second vacuum pressure gauge 23, the first vacuum pressure gauge 22 is connected in parallel with the second vacuum pressure gauge 23, the pressure regulating pipeline 19 is connected in series with a pressure regulating and reducing valve 9, a pipeline behind the pressure regulating and reducing valve 9 is a low-pressure emptying pipeline 20, and a part connected in parallel with the pressure regulating pipeline 19 is a high-pressure emptying pipeline 21. In some embodiments of the present application, the purge line 17 is serially connected with a first vacuum pressure gauge 22, a second manual isolation valve 27, a second check valve 36, a third manual isolation valve 28, and a second vacuum pressure gauge 23. Third manual isolating valve 28 with parallelly connected have the first branch road of sweeping and the second branch road of sweeping between the second vacuum pressure table 23, first branch road of sweeping concatenates third check valve 37, fourth manual isolating valve 29, fifth manual isolating valve 30 in proper order, fourth manual isolating valve 29 with parallelly connected pressure regulating pipeline 19 between the fifth manual isolating valve 30, the second sweep the branch road with first branch road of sweeping is the same. One of the two parallel purging branches is used as a backup, and when one gas cylinder 11 needs to be replaced, the other gas cylinder is replaced, so that the operation of the system is not influenced. The pressure regulating pipeline 19 is connected with a sixth manual isolation valve 31, a pressure regulating and reducing valve 9, a seventh manual isolation valve 32 and a fourth check valve 38 in series in sequence.
As shown in fig. 4, the special gas supply module 3 includes a special gas supply pipe and a special gas outlet pipeline 8, one end of the special gas supply pipe is connected to the steel cylinder 11 and the other end is connected to the first blowing branch or the second blowing branch, one end of the special gas outlet pipeline 8 is connected to the pressure regulating pipeline 19, and the other end is a special gas supply port 14. In some embodiments of the present application, the special gas supply pipe is serially connected with a fifth check valve 39, an eighth manual isolation valve 33, a third vacuum pressure gauge 24, and a primary filter 10 in sequence, and the dust particle filtration efficiency of the primary filter 10 is greater than or equal to 90%. The special gas outlet pipeline 8 is sequentially connected with a high-efficiency filter 7, a ninth manual isolating valve 34, a first pneumatic isolating valve 40, a fourth vacuum pressure gauge 25 and a second pneumatic isolating valve 41 in series, and the dust particle filtering efficiency of the high-efficiency filter 7 is more than or equal to 99.995%.
In some embodiments of the present application, all the connection modes in the safety gas supply system are connected by adopting VCR joints, the VCR joints are matched with pure nickel gaskets, the joint is made of EP-grade SUS316L stainless steel, the gaskets can resist 315 ℃ and the joints can resist 537 ℃ and the vacuum leakage rate of the whole set of joints is less than or equal to 4 x 10-11std cm3And s. The materials of the pipeline and the valve in the system are all made of EP grade SUS316L stainless steel, and the surface finish Ra is less than or equal to 0.15 mu m.
The working principle is as follows:
and (3) vacuumizing an extra-gas cabinet to operate a standard procedure: firstly, high-pressure common pure nitrogen is connected into a common pure nitrogen inflation hole 5, a vacuumizing pipeline 16, a special gas outlet pipeline 8, a special gas supply port 14, a pressure regulating pipeline 19, a low-pressure emptying pipeline 20 and a first manual isolation valve 26, a fifth manual isolation valve 30, a sixth manual isolation valve 31, a seventh manual isolation valve 32, a ninth manual isolation valve 34, a first pneumatic isolation valve 40 and a second pneumatic isolation valve 41 on a high-pressure emptying pipeline 21 are opened, and other valves are all in a closed state.
The high-pressure common pure nitrogen generates high-speed fluid in the vacuum generator 4 to generate a vacuum pumping effect, so that the gas in the system is continuously discharged out of the system through the vent 6, and the vacuum degree is generated in the system.
When the vacuum degree displayed by a second vacuum pressure gauge 23 arranged on the purging pipeline 17 is less than or equal to-11 PSI and the pressure can be continuously maintained for 30-45 min, vacuumizing is stopped, and all valves in the system are closed.
Filling high-purity nitrogen into a special gas cabinet to operate a standard procedure: firstly, high-pressure high-purity nitrogen is connected into a high-purity nitrogen gas filling hole 15, a purging pipeline 17, a pressure regulating pipeline 19, a special gas outlet pipeline 8, a second manual isolation valve 27, a third manual isolation valve 28, a fourth manual isolation valve 29, a sixth manual isolation valve 31, a seventh manual isolation valve 32, a first pneumatic isolation valve 40 and a second pneumatic isolation valve 41 on a special gas supply port 14 are opened, and other valves are in a closed state.
The air pressure in the system is gradually increased in the process of charging the high-pressure high-purity nitrogen, and when the number of the fourth vacuum pressure gauge 25 at the special gas supply port 14 is the same as that of the first vacuum pressure gauge 22 at the high-purity nitrogen charging hole 15, the work of charging the high-purity nitrogen is considered to be finished.
And after the work of filling the high-purity nitrogen is finished, the vacuumizing operation is repeated, the vacuumizing-filling process needs to be repeated for 10-30 times, different cycle times are selected according to different special gas types until air and other impurity gases in the system are completely pumped out, the system is kept in a certain negative pressure vacuum state, and the steel cylinder 11 can be connected into the system for normal air supply operation.
Normal gas supply operation standard procedure of the special gas cabinet: after the steel cylinder 11 is connected into the system, the eighth manual isolation valve 33, the sixth manual isolation valve 31, the ninth manual isolation valve 34, the first pneumatic isolation valve 40 and the second pneumatic isolation valve 41 on the special gas supply pipeline 18, the pressure regulating pipeline 19, the special gas outlet pipeline 8 and the special gas supply port 14 are opened, and meanwhile, other valves are all in a closed state. At this time, the system may be in a normal air supply state.
The safe gas supply measures of the special gas cabinet are as follows: firstly, the system can completely remove the air and other impurity gases remained in the system pipeline through the operations of continuous vacuum pumping and high-purity nitrogen filling, can effectively ensure the purity of the special gas, and prevent the spontaneous combustion or explosion of the chemical reaction between the special gas and the oxygen in the air; meanwhile, when special gas burns to generate smoke, the smoke detector alarm 13 automatically alarms, the spray header 12 with the fusing temperature of 68 ℃ is mounted at the top of the special gas cabinet, and when the environmental temperature exceeds the fusing temperature of the glass tube of the spray header 12, water is automatically sprayed to extinguish fire.
Since the above embodiments are all described by referring to and combining with other embodiments, the same portions are provided between different embodiments, and the same and similar portions between the various embodiments in this specification may be referred to each other. And will not be described in detail herein.
It should be noted that, unless otherwise specified and limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, mechanically or electrically connected, or may be communicated between two elements, directly or indirectly through an intermediate medium, and specific meanings of the terms may be understood by those skilled in the relevant art according to specific situations. The terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a circuit structure, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such article or apparatus. Without further limitation, the presence of an element identified by the phrase "comprising an … …" does not exclude the presence of additional like elements in the article or device comprising the element. Relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. In addition, as used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Other embodiments of the present application will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure of the utility model disclosed herein. This application is intended to cover any variations, uses, or adaptations of the utility model following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the utility model pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the application being indicated by the following claims.
The above-described embodiments of the present application do not limit the scope of the present application.
Claims (9)
1. A special gas cabinet system comprises a shell and a safe gas supply system, and is characterized in that a fusing temperature 68 ℃ spray header (12) and a smoke alarm (13) are mounted at the top of the special gas cabinet, the safe gas supply system is intensively arranged in the shell, and the safe gas supply system comprises a vacuumizing module (1), a high-purity nitrogen gas charging module (2) and a special gas supply module (3);
the vacuumizing module (1) comprises a vacuumizing pipeline (16), one port of the vacuumizing pipeline (16) is a common pure nitrogen gas charging hole (5), the other port of the vacuumizing pipeline (16) is a vent hole (6), and the vacuumizing pipeline (16) is connected with a vacuum generator (4) in series;
the high-purity nitrogen gas charging module (2) comprises a purging pipeline (17), one port of the purging pipeline (17) is a high-purity nitrogen gas charging hole (15), the other end of the purging pipeline is communicated with the vacuum generator (4), a first vacuum pressure gauge (22) and a second vacuum pressure gauge (23) are connected in series at positions, close to the two ends, of the purging pipeline (17), a pressure regulating pipeline (19) is connected in parallel between the first vacuum pressure gauge (22) and the second vacuum pressure gauge (23), and the pressure regulating pipeline (19) is connected in series with a pressure regulating and reducing valve (9);
the special gas supply module (3) comprises a special gas supply pipe (18) and a special gas outlet pipeline (8), one end of the special gas supply pipe (18) is communicated with the steel cylinder (11), the other end of the special gas supply pipe is connected to the purging pipeline (17), one end of the special gas outlet pipeline (8) is connected to the pressure regulating pipeline (19), and the other end of the special gas outlet pipeline is a special gas supply port (14).
2. A special gas cabinet system according to claim 1, characterized in that the evacuation line (16) is connected in series with a first manual isolation valve (26), a first check valve (35) and a vacuum generator (4) in sequence.
3. The special gas cabinet system according to claim 1, wherein the purging pipeline (17) is connected in series with a first vacuum pressure gauge (22), a second manual isolation valve (27), a second check valve (36), a third manual isolation valve (28) and a second vacuum pressure gauge (23) in sequence.
4. A special gas cabinet system according to claim 3, wherein a first purging branch and a second purging branch are connected in parallel between the third manual isolation valve (28) and the second vacuum pressure gauge (23), the first purging branch is sequentially connected with a third check valve (37), a fourth manual isolation valve (29) and a fifth manual isolation valve (30) in series, a pressure regulating pipeline (19) is connected in parallel with the fifth manual isolation valve (30), and the second purging branch is the same as the first purging branch in composition.
5. The special gas cabinet system according to claim 1, wherein the pressure regulating pipeline (19) is connected in series with a sixth manual isolation valve (31), a pressure regulating and reducing valve (9), a seventh manual isolation valve (32) and a fourth check valve (38) in sequence.
6. The special gas cabinet system according to claim 1, wherein the special gas supply pipe (18) is connected in series with a fifth check valve (39), an eighth manual isolation valve (33), a third vacuum pressure gauge (24) and a primary filter (10), and the primary filter (10) has dust particle filtering efficiency of 90% or more.
7. The special gas cabinet system according to claim 1, wherein the special gas outlet pipeline (8) is connected in series with a high efficiency filter (7), a ninth manual isolation valve (34), a first pneumatic isolation valve (40), a fourth vacuum pressure gauge (25) and a second pneumatic isolation valve (41), and the dust particle filtering efficiency of the high efficiency filter (7) is greater than or equal to 99.995%.
8. A special gas cabinet system according to any one of claims 1 to 7, wherein all connection modes in the safety gas supply system adopt VCR connectors, the VCR connectors are matched with pure nickel gaskets, the connector is made of EP grade SUS316L stainless steel, the gaskets can resist 315 ℃, the connectors can resist 537 ℃, and the vacuum leakage rate is less than or equal to 4 x 10-11 std-cm3/s。
9. The special gas cabinet system according to any one of claims 1-7, wherein the material of the pipelines and valves in the system is EP grade SUS316L stainless steel, and the inner surface finish Ra is less than or equal to 0.15 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121876135.6U CN215372076U (en) | 2021-08-11 | 2021-08-11 | Special gas cabinet system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121876135.6U CN215372076U (en) | 2021-08-11 | 2021-08-11 | Special gas cabinet system |
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| Publication Number | Publication Date |
|---|---|
| CN215372076U true CN215372076U (en) | 2021-12-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121876135.6U Active CN215372076U (en) | 2021-08-11 | 2021-08-11 | Special gas cabinet system |
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| CN (1) | CN215372076U (en) |
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2021
- 2021-08-11 CN CN202121876135.6U patent/CN215372076U/en active Active
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