CN215352584U - Vacuum pump front-end tar collecting device for chemical vapor deposition furnace - Google Patents
Vacuum pump front-end tar collecting device for chemical vapor deposition furnace Download PDFInfo
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- CN215352584U CN215352584U CN202121546617.5U CN202121546617U CN215352584U CN 215352584 U CN215352584 U CN 215352584U CN 202121546617 U CN202121546617 U CN 202121546617U CN 215352584 U CN215352584 U CN 215352584U
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- deposition furnace
- chemical vapor
- vapor deposition
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Abstract
The utility model discloses a device for collecting tar at the front end of a vacuum pump for a chemical vapor deposition furnace, which comprises a cylinder cavity, a gas inlet circular pipe, a chassis and a gas outlet circular pipe, wherein the chassis is hermetically fixed at the lower end of the cylinder cavity, the gas inlet circular pipe is inserted into the cylinder cavity for a certain length from the upper end and then welded and fixed, and the gas outlet circular pipe is inserted into the cylinder cavity for a certain length from the lower end and then welded and fixed with the chassis. The utility model has simple structure, can reduce the replacement frequency of pump oil, reduce the production cost and improve the efficiency of the daily maintenance of the vacuum pump.
Description
Technical Field
The utility model relates to a tar collecting device at the front end of a vacuum pump for a chemical vapor deposition furnace.
Background
In the production process of products in the carbon-carbon composite material by using a chemical vapor deposition furnace, short-chain hydrocarbon gas is used as main carbon source gas used in a deposition process, cracking maximization is realized under certain pressure and temperature, the cracking process is complex, small molecular carbon generated by cracking is continuously deposited to form a carbon-carbon composite material substrate, short-chain hydrocarbon can generate a series of chemical reactions such as bond breaking and reconnection in the process, and a plurality of deposition products are generated, wherein a large amount of macromolecular naphthenic hydrocarbon substances are generated, and are pumped to the rear end of a vacuum pump system of the deposition furnace along with other gas products, and are condensed on a pipeline system and a filter screen at the front end of the vacuum pump along with temperature reduction, namely tar, dust substances such as carbon black particles are also generated in the deposition process, and are combined with the tar to form a mixture which is attached to the filter screen, and the mixture has certain fluidity, can flow downwards along the draft, mix with the pump oil, the inside pump oil of vacuum pump body main function is lubricated, cooling, sealed, if tar is too much, then the unable normal work of vacuum pump, and the pump body card is dead to lead to the motor short circuit even generate heat to catch fire, and then leads to the interior pressure deposition production of furnace out of control unusual. On the premise of ensuring the normal operation of the vacuum pump, the tar is prevented from directly entering the vacuum pump body, and the tar can be simply and conveniently collected and cleaned, so that the production efficiency is improved, and the method has practical significance in the industrial production process.
Patent "tar collection tank" (CN 206122265U) it is limited to be used as tar collection tank body volume, and tar collection ability is limited, only can be used for the not high and simple industrial furnace body vacuum system of vacuum degree requirement, and it can not prevent effectively that tar gas from getting into the pump body, and it is comparatively loaded down with trivial details to dismantle the clearance, and the leakproofness effect is the worsen very probably after the dismantlement, so be not suitable for the chemical vapor deposition stove rear end vacuum filtration system of production carbon-carbon combined material.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems in the prior art, the utility model provides a tar collecting device at the front end of a vacuum pump for a chemical vapor deposition furnace.
The utility model can be realized by the following technical scheme:
a tar collecting device at the front end of a vacuum pump for a chemical vapor deposition furnace comprises a cylinder cavity, a gas inlet circular pipe, a chassis and a gas outlet circular pipe, wherein the chassis is hermetically fixed at the lower end of the cylinder cavity; the circular air inlet pipe is welded with a circular flange, a concave boss and a convex boss which are matched with each other to place the filter screen, and the circular air inlet pipe is fixedly connected with the tail gas main pipeline end of the deposition furnace in a sealing way.
Furthermore, a flange plate is welded on the air outlet circular tube and is fixed with the air inlet end of the vacuum pump body in a sealing mode through the flange plate.
Furthermore, the depth of the air inlet circular tube and the air outlet circular tube in the cylinder cavity is 1/2-2/3 of the height of the cylinder cavity.
Advantageous effects
The utility model has the advantages of simple structure component, simple and convenient use of the device, strong equipment compatibility, low manufacturing cost, good practical effect, reduction of the frequency of oil pump replacement, reduction of the production cost and improvement of the efficiency of the daily maintenance of the vacuum pump.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a cross-sectional view of the present invention.
In the figure:
1, an air inlet circular pipe;
2, a cylindrical cavity;
3, a chassis;
4, air outlet circular pipes;
and 5, filtering the filter screen.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification.
As shown in figures 1 and 2, the utility model relates to a vacuum pump front-end tar collecting device for a chemical vapor deposition furnace, which mainly comprises the following structural components: the device comprises a cylinder cavity 2, an air inlet circular tube 1, a chassis 3, an air outlet circular tube 4 and a rubber sealing ring 5.
The air inlet circular tube 1 is inserted into the cylinder cavity 2 and welded and fixed in a certain length, the other air outlet circular tube 4 is inserted into the cylinder cavity 2 and welded and fixed in a certain length, two ends of the air inlet circular tube 1 and the air outlet circular tube 4 are respectively provided with a flange for fixing and a sealing ring groove, the air inlet circular tube 1 is welded with a circular flange concave boss which is matched with a filter screen 5, the air inlet circular tube 1 and the tail gas main pipeline end of the deposition furnace are fixed through a rubber sealing ring 5 sealing connecting bolt, the air outlet circular tube 4 is fixed with the cylinder cavity 2 through a sealing matching bolt, a flange plate is welded on the air outlet circular tube 4 and is fixed with a vacuum pump body air inlet end sealing connecting bolt, the depth of the air inlet circular tube 1 and the air outlet circular tube 4 in the cylinder cavity 2 is 1/2-2/3 of the height of the cylinder cavity 2, and the sizes of the circular tubes at two ends are matched with the equipment end; the size of the rubber sealing ring is matched with the size of the cylinder cavity 2 and the size of the chassis; the whole size of the device can be changed according to actual requirements, and the device can be matched with a deposition furnace and a vacuum pump in size, and the device can be made of iron castings or other metal materials.
The working principle of tar collection of the utility model is as follows:
firstly, an upper end fixing flange of an air inlet circular tube 1 is fixedly connected with a lower end bolt of a tail gas pipeline electromagnetic valve of a deposition furnace, a lower end fixing flange of an air outlet circular tube 4 is fixedly connected with a front end bolt of an air inlet pipeline of a pump body of a vacuum pump, tail gas is pumped into a circular tube cavity 2 by the vacuum pump in the deposition process, most of tar mixture is blocked by a filter screen, the tar mixture drops onto a base plate 3 under the double action of gravity and pumping force, and the rest waste gas is pumped out of the air outlet circular tube 4 through the circular tube cavity 2 to realize gas-solid separation, so that the tar amount entering the vacuum pump body can be greatly reduced, the cleanness of pump oil is ensured, the oil pumping frequency is reduced, the normal operation of the vacuum pump in the production process is ensured, and after the production is finished, only a bottom flange bolt needs to be removed for cleaning.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (3)
1. The device for collecting the tar at the front end of the vacuum pump for the chemical vapor deposition furnace is characterized by comprising a cylinder cavity, an air inlet circular pipe, a chassis and an air outlet circular pipe, wherein the chassis is hermetically fixed at the lower end of the cylinder cavity; the circular air inlet pipe is welded with a circular flange, a concave boss and a convex boss which are matched with each other to place the filter screen, and the circular air inlet pipe is fixedly connected with the tail gas main pipeline end of the deposition furnace in a sealing way.
2. The apparatus for collecting tar at the front end of a vacuum pump for a chemical vapor deposition furnace as claimed in claim 1, wherein the circular gas outlet pipe is welded with a flange, and is fixed to the gas inlet end of the vacuum pump body in a sealing manner through the flange.
3. The apparatus of claim 1, wherein the depth of the circular inlet pipe and the circular outlet pipe in the cylindrical cavity is 1/2-2/3 of the height of the cylindrical cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121546617.5U CN215352584U (en) | 2021-07-08 | 2021-07-08 | Vacuum pump front-end tar collecting device for chemical vapor deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121546617.5U CN215352584U (en) | 2021-07-08 | 2021-07-08 | Vacuum pump front-end tar collecting device for chemical vapor deposition furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215352584U true CN215352584U (en) | 2021-12-31 |
Family
ID=79607858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121546617.5U Active CN215352584U (en) | 2021-07-08 | 2021-07-08 | Vacuum pump front-end tar collecting device for chemical vapor deposition furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215352584U (en) |
-
2021
- 2021-07-08 CN CN202121546617.5U patent/CN215352584U/en active Active
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