CN215264097U - Omnidirectional reflecting mirror film system structure - Google Patents
Omnidirectional reflecting mirror film system structure Download PDFInfo
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- CN215264097U CN215264097U CN202120763695.4U CN202120763695U CN215264097U CN 215264097 U CN215264097 U CN 215264097U CN 202120763695 U CN202120763695 U CN 202120763695U CN 215264097 U CN215264097 U CN 215264097U
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Abstract
An omnidirectional reflector film system structure is used for solving the technical problem that the reflectivity of the film system structure in the existing reflector is obviously reduced under the high-temperature condition, so that the reflector cannot be normally used. Comprises a substrate and a film layer arranged on the substrate; the film layer is a composite film layer, the film layer comprises at least twenty single-layer films, the single-layer films comprise a first refraction film and a second refraction film which have different refractive indexes, the first refraction film with high reflectivity and the second refraction film with low reflectivity are alternately distributed, and the first refraction film is plated on the substrate; the single-layer films with different refractive indexes are alternately distributed and reach twenty layers, so that the high reflectivity can be effectively ensured under the high-temperature condition; the utility model discloses mainly used speculum preparation field.
Description
Technical Field
The utility model relates to a technical field of speculum processing, concretely relates to full angle reflection mirror membrane system structure.
Background
For a high reflector used in a visible light band, such as a Light Emitting Diode (LED) lamp cup or a reflector of a specific optical band, a metal film is plated on a surface of optical glass in a vacuum environment to reflect incident light, the metal film is usually a metal silver film or a metal aluminum film, but the metal silver film cannot be used as a general product due to high material price, while the metal aluminum film, although the metal aluminum film is low in price, is easily peeled from the surface of a substrate at a high temperature, and the reflectivity is significantly reduced, so that the product cannot be normally used.
It is therefore critical to improve the utility of such high mirrors that the high reflectivity of the high mirrors remain high at high temperatures, while reducing the cost of the thin film.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the purpose is to prior art not enough, releases an all-round corner mirror membrane system structure for solve the technical problem that the prior speculum that mentions in the background art refracting index descends under the high temperature condition.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
an omnidirectional reflector film system structure comprises a substrate and a film layer arranged on the substrate; the film layer comprises at least twenty single-layer films, the single-layer films comprise a first refraction film and a second refraction film, the refractive indexes of the first refraction film and the second refraction film are different, and the first refraction film and the second refraction film in the film layer structure are distributed alternately.
Furthermore, the first reflection film is of a high-refractive-index material structure, the second refraction film is of a low-refractive-index material structure, and the first refraction film is plated on the substrate.
Furthermore, the number of the film layers is any one of 20-30 layers.
Furthermore, the first reflective film is made of PbTe.
Further, the second reflective film is made of MgF 2.
Furthermore, the thickness of the film layer is any one size of 840-1260 nm.
Further, the thicknesses of the first refraction film and the second refraction film are any thickness value of 42-60 nm.
The utility model has the advantages that:
the utility model relates to an omnidirectional corner reflector membrane system structure, the membrane layer attached on the base is a composite membrane layer, the composite membrane layer is composed of at least twenty single-layer membranes, according to the multiple interference of electromagnetic wave in the optical film, the reflectivity of the reflector can approach 100% when the single-layer film layer is about 12 layers, however, the red, green, blue (RGB) bands and the high reflectivity can be achieved within an angle of 0-85 degrees, and at least 20 layers are required, but the thicker the thickness of the film layer is, the higher the production cost is, the single-layer film is a first refraction film and a second refraction film with different refraction indexes, the first refraction film and the second refraction film are alternately distributed, the film system can be used in the range of 0-85 DEG of incident angle for three primary colors red, green and blue (RGB) wave bands under high temperature, the reflectivity can reach 99%, and the reflectivity can not be influenced, so that the product can be normally used.
Drawings
Fig. 1 is a sectional view of the present invention;
FIG. 2 is a graph showing the reflectance at a wavelength of 390 to 487nm according to the present invention;
FIG. 3 is a graph showing the reflectance at a wavelength of 465-580 nm according to the present invention;
FIG. 4 is a graph of the reflectivity at a wavelength of 558-696 nm.
Description of reference numerals: 100. a substrate; 200. a high refractive index film; 201. a first high refractive index single layer film; 202. a second high refractive index single layer film; 203. a third layer of single-layer film with refractive index; 204. a fourth high refractive index single layer film; 205. a fifth high refractive index single layer film; 206. a sixth high refractive index single layer film; 207. a seventh high refractive index single layer film; 208. an eighth high refractive index single layer film; 209. a ninth high refractive index single layer film; 210. a tenth high refractive index single layer film; 300. a low refractive index film; 301. a first low refractive index monolayer film; 302. a second low refractive index monolayer film; 303. a third low refractive index monolayer film; 304. a fourth low refractive index monolayer film; 305. a fifth low-refractive-index single-layer film; 306. a sixth low refractive index single layer film; 307. a seventh low refractive index monolayer film; 308. an eighth low refractive index monolayer film; 309. a ninth low refractive index monolayer film; 310. a tenth low index monolayer film.
Detailed Description
The technical solution of the present invention will be further explained with reference to fig. 1-4 and the embodiments.
The utility model provides an all-round corner mirror membrane system structure, includes the basement 100 of glass material and sets up the rete on basement 100, and the rete is compound rete, and the rete includes twenty layers at least single layer membrane, and single layer membrane includes two kinds of single layer membrane that the refracting index is different, and two kinds of single layer membrane alternate distribution that the refracting index is different, and this kind of compound rete makes the speculum low in cost when guaranteeing the reflectivity, and the practicality is better.
Specifically, a physical vapor deposition method is adopted to plate a composite film layer on the substrate 100, and the thickness of the composite film layer is 840-1260 nm.
The thickness of each single layer film is 42-60 nm.
The composite film layer comprises 20-30 single-layer films, and the single-layer films comprise a first refraction film and a second refraction film, wherein the first refraction film and the second refraction film are different in refractive index, the first refraction film is a high-refractive-index film 200, and the second refraction film is a low-refractive-index film 300.
The material of the high refractive index film 200 is PbTe, and the material of the low refractive index film 300 is MgF 2.
Specifically, by adopting an ion plating mode in a physical vapor deposition method, a plasma ionization technology is adopted under a vacuum condition, a material with a high refractive index is ionized into ions, and simultaneously, a plurality of neutral atoms with high energy are generated, negative bias is added on a substrate 100 made of a glass material, under the action of deep negative bias, the ions ionized from the material with the high refractive index are deposited on the substrate 100 to form a first layer of single-layer film 201 with the high refractive index, then by adopting the same method, a material with a low refractive index is plated on the first layer of single-layer film 201 with the high refractive index to form a first layer of single-layer film 301 with the low refractive index, then a film layer of the material with the high refractive index is plated to form a second layer of single-layer film 202 with the high refractive index, and the high refractive index film 200 and the low refractive index film 300 are alternately and uniformly distributed until the number of layers meeting a certain reflectivity is reached.
Example one
When the number of the composite film layers is 20:
the high refractive index films 200 and the low refractive index films 300 are alternately plated on the glass substrate 100 by means of ion plating until the number of composite film layers reaches 20.
As shown in fig. 1, specifically, from the glass substrate 100 to the top in sequence: a first high refractive index single film 201, a first low refractive index single film 301, a second high refractive index single film 202, a second low refractive index single film 302, a third high refractive index single film 203, a third low refractive index single film 303, a fourth high refractive index single film 204, a fourth low refractive index single film 304, a fifth high refractive index single film 205, a fifth low refractive index single film 305, a sixth high refractive index single film 206, a sixth low refractive index single film 306, a seventh high refractive index single film 207, a seventh low refractive index single film 307, an eighth high refractive index single film 208, an eighth low refractive index single film 308, a ninth high refractive index single film 209, a ninth low refractive index single film 309, a tenth high refractive index single film 210, and a tenth low refractive index single film 310.
Wherein the film layer thicknesses of the first layer high refractive index single layer film 201, the second layer high refractive index single layer film 202, the third layer high refractive index single layer film 203, the fourth layer high refractive index single layer film 204, the fifth layer high refractive index single layer film 205, the sixth layer high refractive index single layer film 206, the seventh layer high refractive index single layer film 207, the eighth layer high refractive index single layer film 208, the ninth layer high refractive index single layer film 209 and the tenth layer high refractive index single layer film 210 are: 42 nm.
The film thicknesses of the first low-refractive-index single film 301, the second low-refractive-index single film 302, the third low-refractive-index single film 303, the fourth low-refractive-index single film 304, the fifth low-refractive-index single film 305, the sixth low-refractive-index single film 306, the seventh low-refractive-index single film 307, the eighth low-refractive-index single film 308, the ninth low-refractive-index single film 309 and the tenth low-refractive-index single film 310 are all 42 nm.
The total thickness of the composite film layer is as follows: 840 nm.
Example two
When the number of the composite film layers is 26:
the high refractive index films 200 and the low refractive index films 300 are alternately plated on the glass substrate 100 by means of ion plating until the number of composite film layers reaches 26.
The structure of the composite film layer is the same as that of the first embodiment, i.e., the single-layer high refractive index film formed by the high refractive index material and the single-layer low refractive index film formed by the low refractive index material are alternately distributed, and among the 26 single-layer films, 13 single-layer films formed by the high refractive index material and 13 single-layer films formed by the low refractive index material are arranged.
The thickness of the single-layer film formed by each layer of high-refractive-index material is 50nm, and the thickness of the single-layer film formed by each layer of low-refractive-index material is 48 nm.
The total thickness of the composite film layer is as follows: 1248 nm.
EXAMPLE III
When the number of the composite film layers is 30:
the high refractive index films 200 and the low refractive index films 300 are alternately plated on the glass substrate 100 by means of ion plating until the number of composite film layers reaches 30.
The structure of the composite film layer is the same as that of the first embodiment, i.e., the single-layer high refractive index film formed by the high refractive index material and the single-layer low refractive index film formed by the low refractive index material are alternately distributed, and the single-layer film formed by 15 layers of the high refractive index material and the single-layer film formed by 15 layers of the low refractive index material are arranged in the 30 single-layer films.
The thickness of the single-layer film formed by each layer of high-refractive-index material is 50nm, and the thickness of the single-layer film formed by each layer of low-refractive-index material is 42 nm.
The total thickness of the composite film layer is as follows: 1260 nm.
The film system structure can ensure that the wavelength of visible light is between 400 and 700nm, the reflectivity can reach 99 percent within the incident angle range of 0 to 85 degrees of the three primary colors of red, green and blue, and the manufacturing cost of the whole reflector is reduced and the practicability is better because the film is coated by adopting a material with lower price.
Specifically, as shown in FIG. 2, the reflectance at a wavelength of 390 to 487nm is greater than or equal to 99% at an incident angle of 0 to 85 °.
As shown in FIG. 3, the reflection rate of the incident light with a wavelength of 465-580 nm and an angle of 0-85 DEG is more than 99%.
As shown in FIG. 4, the reflection rate of the incident light with the angle of 0-85 degrees is more than 99% at the wavelength of 558-696 nm.
Finally, although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the present invention can be modified or replaced by other means without departing from the spirit and scope of the present invention, which should be construed as limited only by the appended claims.
Claims (7)
1. An omnidirectional reflector film system structure comprises a substrate and a film layer arranged on the substrate; the film layer comprises at least twenty single-layer films, the single-layer films comprise a first refraction film and a second refraction film, the refraction indexes of the first refraction film and the second refraction film are different, and the first refraction film and the second refraction film in the film layer are distributed alternately.
2. The structure of claim 1, wherein the first refractive film is a high refractive index material structure, the second refractive film is a low refractive index material structure, and the first refractive film is deposited on the substrate.
3. The structure of claim 2, wherein the number of the film layers is any one of 20 to 30.
4. The structure of claim 3, wherein the first refraction film is PbTe.
5. The structure of claim 4, wherein the second refractive film is MgF 2.
6. An omnidirectional reflector film structure as defined in any one of claims 1-5, wherein the thickness of said film layer is any one of 840-1260 nm.
7. An omnidirectional reflector film structure according to any one of claims 2 to 5, wherein the thicknesses of the first refractive film and the second refractive film are each any thickness value of 42 to 60 nm.
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