CN215260309U - Clean room purification air conditioning system and clean factory building - Google Patents
Clean room purification air conditioning system and clean factory building Download PDFInfo
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- CN215260309U CN215260309U CN202121268267.0U CN202121268267U CN215260309U CN 215260309 U CN215260309 U CN 215260309U CN 202121268267 U CN202121268267 U CN 202121268267U CN 215260309 U CN215260309 U CN 215260309U
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Abstract
The application discloses clean room purifies air conditioning system and clean factory building. The system comprises a fresh air processing unit, wherein the fresh air processing unit comprises a shell, a primary heater and a secondary heater, the shell is provided with an air inlet and an air outlet, and the primary heater and the secondary heater are sequentially arranged in the shell along an air inlet path of the fresh air processing unit; the dry cooler is used for being arranged in the return air channel of the clean room; the first pipeline assembly is used for communicating the water outlet of the dry cooler with the water inlet of the secondary heater and is used for conveying liquid at the water outlet of the dry cooler to the water inlet of the secondary heater; the second pipeline component is used for communicating a water inlet of the dry cooler with a water outlet of the secondary heater, and the second pipeline component is used for conveying liquid at the water outlet of the secondary heater to the water inlet of the dry cooler; and the fan filter unit is used for being arranged at the top of the clean room. The cold and heat offset phenomenon in the air treatment process of the clean room is reduced.
Description
Technical Field
The application relates to the technical field of integrated circuit plants and flat-panel display plants, in particular to a clean room purifying air conditioning system and a clean plant.
Background
As integrated circuits are developed toward the direction of processing miniaturization, the clean rooms for the integrated circuits are forced to develop toward high precision and high cleanliness of temperature and humidity control. At present, the purification air conditioning system of this kind of toilet usually adopts the combination form of fresh air handling unit, fan filter unit and dry cooler, and its operation characteristics are: in order to ensure the relative humidity and positive pressure value in the clean room, a fresh air processing unit needs to filter, cool or humidify and heat a large amount of outdoor fresh air and then send the fresh air into the clean room; meanwhile, as the clean room is fully provided with the process production equipment which radiates heat all the year around, in order to keep the environmental temperature in the clean room, a large amount of cold water is needed to be supplied to the dry cooler so as to offset the heat generated by the process production equipment, and the clean room of the factory building almost has no external protection structure, the cold load in the clean room is almost irrelevant to the outdoor meteorological conditions and is only relevant to the heat generated by the indoor process production equipment, so that the dry cooler needs to be supplied with the cold water all the year around.
For a fresh air processing system of a clean room of an integrated circuit factory building, cold water needs to be supplied in summer to cool and dehumidify air entering outdoors; hot water is required to be supplied in winter to heat air entering outdoors, and then humidification is carried out; in the transition season, cooling and dehumidification or heating and humidification are carried out according to the dew point temperature of outdoor air so as to ensure that the air dew point temperature at the outlet of the fresh air processing unit is kept at the temperature meeting the process production requirements, such as about 9.5 ℃ all the year round.
Because the air exhaust volume of the clean room is large, in order to ensure the positive pressure of the clean room, the supplementary fresh air volume must be larger than the air exhaust volume. Therefore, a large amount of low-temperature (about 9.5 ℃) fresh air processed by the fresh air processing unit is directly sent into the return air channel of the clean room and then sent into the clean room through the fan filter unit at the top of the clean room. Meanwhile, the clean room of the integrated circuit factory building has high control precision requirement on the temperature, the temperature control precision is usually +/-0.3 ℃ to +/-1 ℃, and the temperature reference requirement is 22 ℃ to 23 ℃.
However, since the air volume of the low-temperature fresh air is relatively large, the fresh air volume generally reaches about 20 times of room ventilation times, and the high-precision temperature control requirement of the clean room is difficult to guarantee since so much low-temperature fresh air is directly sent into the clean room, hot water is usually supplied to a heater of a fresh air processing system of the clean room in the actual engineering operation, air processed to about 9.5 ℃ by a preceding stage functional section is heated to 16-20 ℃, and then the air is sent into the clean room, so as to guarantee the temperature control precision requirement in the clean room. Therefore, the heater of the fresh air treatment system of the clean room needs to supply hot water all the year around, and meanwhile, the dry cooler of the circulating air treatment system of the clean room needs to supply cold water all the year around, so that the unreasonable phenomenon of cold and heat counteraction occurs in the air treatment process of the clean room, and the energy consumption is increased.
SUMMERY OF THE UTILITY MODEL
The embodiment of the application provides a clean room purifies air conditioning system and clean factory building to there is cold and hot unreasonable problem of offsetting in the air treatment process of solving the clean room.
In one aspect, an embodiment of the present application provides a clean room purifies air conditioning system, includes: the fresh air processing unit comprises a shell, a primary heater and a secondary heater, wherein the shell is provided with an air inlet and an air outlet, and the primary heater and the secondary heater are sequentially arranged in the shell along an air inlet path of the fresh air processing unit; the dry cooler is used for being arranged in the return air channel of the clean room; the first pipeline assembly is used for communicating a water outlet of the dry cooler with a water inlet of the secondary heater, and the first pipeline assembly is used for conveying liquid at the water outlet of the dry cooler to the water inlet of the secondary heater; the second pipeline component is used for communicating a water inlet of the dry cooler with a water outlet of the secondary heater, and the second pipeline component is used for conveying liquid at the water outlet of the secondary heater to the water inlet of the dry cooler; and the fan filter unit is used for being arranged at the top of the clean room.
According to one aspect of an embodiment of the present application, a first piping component comprises: a hot water supply line; and the circulating water pump is arranged on the hot water supply pipeline and used for pumping liquid in the hot water supply pipeline.
According to one aspect of an embodiment of the present application, the hot water supply line includes a heating assembly for regulating a temperature of a liquid in the hot water supply line.
According to an aspect of the embodiments of the present application, the heating assembly is disposed at a portion between the circulation water pump and the secondary heater, and the heating assembly includes a first branch pipe and a second branch pipe disposed in parallel, wherein: one end of the first branch pipe is communicated with a water outlet of the circulating water pump, the other end of the first branch pipe is communicated with a water inlet of the secondary heater, and a first valve used for controlling the flow of liquid in the first branch pipe is arranged on the first branch pipe; one end of the second branch pipe is communicated with a water outlet of the circulating water pump, the other end of the second branch pipe is communicated with a water inlet of the secondary heater, and the second branch pipe is provided with a heater for heating liquid in the second branch pipe and a second valve for controlling the flow of the liquid in the second branch pipe.
According to one aspect of an embodiment of the present application, the heater includes a liquid heat exchanger.
According to an aspect of an embodiment of the present application, the second pipe assembly includes: a cold water supply line; and the cold water pump is arranged on the cold water supply pipeline and used for pumping liquid in the cold water supply pipeline.
According to one aspect of an embodiment of the present application, the cold water supply line includes a refrigeration assembly for reducing the temperature of the liquid in the cold water supply line.
According to an aspect of the embodiments of the present application, the refrigeration assembly is disposed in a portion of the cold water supply line between the cold water pump and the water inlet of the dry cooler, and the refrigeration assembly includes a third branch pipe and a fourth branch pipe disposed in parallel, wherein: one end of the third branch pipe is communicated with the water outlet of the cold water pump, the other end of the third branch pipe is communicated with the water inlet of the dry cooler, and a third valve used for controlling the flow of liquid in the first branch pipe is arranged on the third branch pipe; one end of the fourth branch pipe is communicated with a water outlet of the cold water pump, the other end of the fourth branch pipe is communicated with a water inlet of the dry cooler, and a refrigerating unit for cooling liquid in the fourth branch pipe and a fourth valve for controlling the flow of the liquid in the fourth branch pipe are arranged on the fourth branch pipe.
According to an aspect of the embodiment of the application, the fresh air processing device further comprises a primary cooler, a secondary cooler and a humidifier which are arranged between the primary heater and the secondary heater, wherein the primary cooler, the humidifier and the secondary cooler are sequentially arranged along the air inlet path direction of the fresh air processing unit.
On the other hand, the embodiment of the application also provides a clean workshop which comprises a clean room and the clean room purifying and air conditioning system.
The utility model provides a clean room purifies air conditioning system, the cold water that obtains clean room circulated air heating of dry cooler water side passes through the water inlet that the pipeline got into the secondary heater, hot water supply as the secondary heater, the water inlet that obtains new trend refrigerated hot water and passes through the pipeline entering dry cooler of secondary heater water side, cold water supply as the dry cooler, therefore, the water side of dry cooler and the water side of secondary heater form the hydrologic cycle, the secondary heater is the cold load that new trend heating produced as the required cold source of dry cooler cooling return air, the phenomenon of cold and hot offset in the clean room air treatment process has been alleviateed, the energy consumption of clean room air treatment process has been reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a clean room clean air conditioning system according to an embodiment of the present application;
fig. 2 is another schematic structural diagram of the clean room clean air conditioning system according to the embodiment of the present application.
Reference numerals:
1-fresh air processing unit, 2-clean room, 3-secondary heater, 4-dry cooler, 5-fan filter unit, 6-circulating water pump, 7-refrigerating unit, 8-fourth valve, 9-cold water pump, 10-third valve, 11-primary heater, 12-primary cooler, 13-secondary cooler, 14-humidifier, 15-liquid heat exchanger, 16-second valve, 17-first valve, 18-return air channel.
Detailed Description
Embodiments of the present application will be described in further detail below with reference to the drawings and examples. The following detailed description of the embodiments and the accompanying drawings are provided to illustrate the principles of the application and are not intended to limit the scope of the application, i.e., the application is not limited to the described embodiments.
In the description of the present application, it is noted that, unless otherwise indicated, the terms "first" and "second," etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; "plurality" means two or more; the terms "inner," "outer," "top," "bottom," and the like, as used herein, refer to an orientation or positional relationship shown in the drawings for ease of description and simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present application.
Referring to fig. 1, the present disclosure provides a clean room cleaning and air conditioning system, which can be a clean room of an integrated circuit clean room or a clean room of a flat panel display factory. The clean room purification air conditioning system may include a fresh air handling unit 1, a dry cooler 4, and a fan filter unit 5.
Wherein, fresh air handling unit 1 sets up in the outside of toilet 2, and fresh air handling unit 1 includes casing, primary heater 11 and secondary heater 3, and the casing has air intake and air outlet, and primary heater 11 and secondary heater 3 set gradually in the casing along fresh air handling unit 1's air inlet route.
The dry cooler 4 is provided in the return air duct 18 of the clean room 2, and the dry cooler 4 cools the return air of the clean room 2 received in the return air duct 18. In a specific implementation, the return air temperature (usually 22-23 ℃) on the air side of the dry cooler 4 is higher than the cold water temperature on the water side, and after heat exchange, the return air on the air side is cooled and the temperature is reduced, while the cold water on the water side is heated and the cold water temperature is increased (usually about 18 ℃).
And, the air-out end and the return air passageway 18 intercommunication of fresh air handling unit 1 to provide the new trend for toilet 2. The secondary heater 3 heats the fresh air, and the heated fresh air enters the return air channel 18. In a specific implementation, the temperature of the hot water at the water side of the secondary heater 3 (usually about 24 ℃) is higher than the temperature of the fresh air at the air side (usually about 9.5 ℃), after heat exchange, the fresh air at the air side is heated, the temperature of the fresh air is increased (usually about 16 ℃ -20 ℃), the hot water at the water side is cooled (usually about 14 ℃), and the temperature of the hot water is decreased.
The water outlet of the secondary heater 3 is communicated with the water inlet of the dry cooler 4, and the water outlet of the dry cooler 4 is communicated with the water inlet of the secondary heater 3. The cold water heated at the water side of the dry cooler 4 enters the water inlet of the secondary heater 3 through a pipeline to be used as hot water for supplying the secondary heater 3, the hot water cooled at the water side of the secondary heater 3 enters the water inlet of the dry cooler 4 through a pipeline to be used as cold water for supplying the dry cooler 4, therefore, the water side of the dry cooler 4 and the water side of the secondary heater 3 form water circulation, the cold load generated by the heating of fresh air by the secondary heater 3 is used as a cold source required by the cooling return air of the dry cooler 4, and the phenomenon of cold and heat offset in the air treatment process of the clean room 2 is reduced.
As an alternative embodiment, the water outlet of the secondary heater 3 is communicated with the water inlet of the dry cooler 4 through the refrigerating unit 7. The refrigerating unit 7 is communicated with the water outlet of the secondary heater 3, the refrigerating unit 7 cools the effluent of the secondary heater 3, so that the effluent of the secondary heater 3 is cooled to reach a set temperature (usually 12-13 ℃), and then the effluent enters the dry cooler 4 from the water inlet of the dry cooler 4 to cool the return air at the air side of the dry cooler 4, so that the temperature meets the process production requirements. In specific implementation, an automatic regulating valve can be arranged on the water inlet of the dry cooler 4, so that the cold water flow is regulated.
As an alternative embodiment, the water outlet of the secondary heater 3 is communicated with the water inlet of the dry cooler 4 through a second pipe assembly. In particular, the second piping component may include a fourth branch pipe and a third branch pipe arranged in parallel, and the refrigeration unit 7 may be arranged on the fourth branch pipe. The outlet water of the secondary heater 3 can flow through the fourth branch pipe and the refrigerating unit 7 and then enter the dry cooler 4, can also flow through the third branch pipe and directly enter the dry cooler 4, and can also flow through the fourth branch pipe, the refrigerating unit 7 and the third branch pipe simultaneously and then converge and enter the dry cooler 4, and the flow path has diversity, so that the inlet water temperature of the dry cooler 4 can be adjusted conveniently.
In specific implementation, the fourth branch pipe may be provided with a fourth valve 8 for controlling whether the outlet water of the secondary heater 3 flows through the fourth branch pipe and the refrigerating unit 7. The third branch pipe may be provided with a third valve 10 for controlling whether the outlet water of the secondary heater 3 flows through the third branch pipe. When only the fourth valve 8 is opened, the outlet water of the secondary heater 3 flows through the fourth branch pipe and the refrigerating unit 7; when only the third valve 10 is opened, the outlet water of the secondary heater 3 flows through the third branch pipe; when the fourth valve 8 and the third valve 10 are simultaneously opened, the outlet water of the secondary heater 3 simultaneously flows through the fourth branch pipe, the refrigerating unit 7 and the third branch pipe, and then is merged into the dry cooler 4.
In specific implementation, a cold water pump 9 can be arranged on a water outlet of the secondary heater 3, and the cold water pump 9 pressurizes the outlet water of the secondary heater 3, so that the outlet water of the secondary heater 3 enters the dry cooler 4.
With continued reference to fig. 2, as an alternative embodiment, the water outlet of the dry cooler 4 is in communication with the water inlet of the secondary heater 3 through a liquid heat exchanger 15. The liquid heat exchanger 15 is communicated with a water outlet of the dry cooler 4, the liquid heat exchanger 15 heats the water outlet of the dry cooler 4, and then the water enters the secondary heater 3 from a water inlet of the secondary heater 3 to heat the fresh air at the air side of the secondary heater 3. The liquid heat exchanger 15 can be specifically a water-water heat exchanger, hot water (usually 26-36 ℃) is supplied from a heat supply side of the water-water heat exchanger, the temperature of the outlet water of the dry cooler 4 on the other side is raised (usually about 24 ℃), and then the outlet water of the dry cooler 4 is supplied as the hot water of the secondary heater 3, so that the process production requirements are met.
As an alternative embodiment, the water outlet of the dry cooler 4 is communicated with the water inlet of the secondary heater 3 through a first pipe assembly. In particular, the first pipe assembly may include a second branch pipe and a first branch pipe arranged in parallel, and the liquid heat exchanger 15 is arranged on the second branch pipe. The outlet water of the dry cooler 4 can flow through the second branch pipe and the liquid heat exchanger 15 and then enter the secondary heater 3, can also flow through the first branch pipe and directly enter the secondary heater 3, and can also flow through the second branch pipe, the liquid heat exchanger 15 and the first branch pipe simultaneously and then converge and enter the secondary heater 3, and the dry cooler 4 has various water supply flow paths to the secondary heater 3, so that the inlet water temperature of the secondary heater 3 can be conveniently adjusted.
In a specific implementation, a second valve 16 may be disposed on the second branch pipe to control whether the water from the dry cooler 4 flows through the second branch pipe and the liquid heat exchanger 15. The first branch pipe may be provided with a first valve 17 for controlling whether the water from the dry cooler 4 flows through the first branch pipe. When only the second valve 16 is opened, the effluent of the dry cooler 4 flows through the second branch pipe and the liquid heat exchanger 15; when only the first valve 17 is opened, the effluent of the dry cooler 4 flows through the first branch pipe; when the second valve 16 and the first valve 17 are simultaneously opened, the effluent of the dry cooler 4 simultaneously flows through the second branch pipe and the liquid heat exchanger 15, the first branch pipe, and then joins into the secondary heater 3.
In specific implementation, a water outlet of the dry cooler 4 is provided with a circulating water pump 6, and the circulating water pump 6 pressurizes the outlet water of the dry cooler 4, so that the outlet water of the dry cooler 4 enters the secondary heater 3.
As an alternative embodiment, the fresh air handling unit 1 may further include a primary heater 11, a primary cooler 12, and a secondary cooler 13. During the concrete implementation, primary heater 11, primary cooler 12, secondary cooler 13 and secondary heater 3 all set up in the casing of fresh air handling unit 1 to primary heater 11, primary cooler 12, secondary cooler 13 and secondary heater 3 arrange in proper order to the fresh air-out direction by the fresh air inlet, arrange in proper order along the air inlet route direction of fresh air handling unit 1 promptly. Moreover, the fresh air handling unit 1 may further include a fresh air humidifier 14, and the fresh air humidifier 14 may be disposed between the primary cooler 12 and the secondary cooler 13.
A fan filter unit 5(FFU) may be arranged on the ceiling of the clean room 2. The fresh air sent out by the fresh air processing unit 1 and the return air of the clean room 2 are mixed in the return air channel 18, and the mixed air is sent into the clean room 2 after being filtered by the fan filter unit 5.
In combination with the above, the working process of the clean room purifying and air conditioning system according to the embodiment of the present application can refer to the following:
after the outdoor fresh air enters the fresh air processing unit 1, necessary filtering treatment can be performed firstly;
when the dew point temperature of the outdoor fresh air is higher than the dew point temperature (usually about 9.5 ℃) in the clean room 2, cold water is supplied to the secondary cooler 13, and the primary cooler 12 is supplied with cold water as required, so that the fresh air entering the fresh air processing unit 1 from the outdoor space is dehumidified, and the dew point temperature of the fresh air after the secondary cooler 13 reaches the requirement (usually about 9.5 ℃);
when the dew point temperature of the outdoor fresh air is lower than the dew point temperature in the clean room 2, the fresh air humidifier 14 is put into operation, hot water is supplied to the primary heater 11 or cold water is supplied to the secondary cooler 13 as required, and the fresh air entering the fresh air processing unit 1 from the outdoor is humidified. It should be noted that, because the fresh air humidifier 14 usually adopts a water spraying humidification form, and the processing process is isenthalpic humidification, the dew point temperature and the dry bulb temperature (usually about 9.5 ℃) of the fresh air flowing through the secondary cooler 13 are not affected no matter the fresh air is dehumidified or humidified;
because the hot water temperature (usually about 24 ℃) at the water side of the secondary heater 3 is higher than the fresh air temperature (usually about 9.5 ℃) at the air side, the fresh air temperature at the air side is increased (usually 16-20 ℃) through heat exchange, and the hot water temperature at the water side is reduced, the hot water at the water side enters the water inlet of the dry cooler 4 after passing through a pipeline and being pressurized by the cold water pump 9, or enters the water inlet of the dry cooler 4 after being further cooled by the refrigerating unit 7 to become cold water (usually 12-13 ℃);
because the return air temperature (usually 22-23 ℃) at the air side of the dry cooler 4 is higher than the cold water temperature at the water side, the return air temperature at the air side of the dry cooler 4 is reduced to meet the process production requirements through heat exchange and the cold water flow is adjusted through an automatic adjusting valve on the water inlet of the dry cooler 4, the cold water temperature at the water side is increased (usually about 18 ℃), the cold water at the water side enters the water inlet of the secondary heater 3 after being pressurized by the circulating water pump 6 through a pipeline or is further heated by the liquid heat exchanger 15 to become hot water (usually about 24 ℃), and then enters the water inlet of the secondary heater 3, so that the water forms circulation.
For the clean room 2, the cold load generated by the secondary heater 3 of the fresh air processing unit 1 for heating the fresh air is an extra cold load, the temperature of the water side of the secondary heater 3 is reduced, and the water side enters the dry cooler 4 arranged in the return air channel 18 through a pipeline to cool the return air, the cold quantity provided for the return air in the cooling process is smaller than the extra cold load, and the difference is the heating quantity provided by the liquid heat exchanger 15, so that the phenomenon of cold and heat offset in the air processing process of the clean room 2 is partially eliminated.
It should be understood by those skilled in the art that the foregoing is only an embodiment of the present application, and the scope of the present application is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.
Claims (10)
1. A clean room clean air conditioning system, comprising:
the fresh air processing unit comprises a shell, a primary heater and a secondary heater, wherein the shell is provided with an air inlet and an air outlet, and the primary heater and the secondary heater are sequentially arranged in the shell along an air inlet path of the fresh air processing unit;
the dry cooler is used for being arranged in the return air channel of the clean room;
the first pipeline assembly is used for communicating a water outlet of the dry cooler with a water inlet of the secondary heater, and the first pipeline assembly is used for conveying liquid at the water outlet of the dry cooler to the water inlet of the secondary heater;
the second pipeline assembly is used for communicating the water inlet of the dry cooler with the water outlet of the secondary heater and is used for conveying the liquid at the water outlet of the secondary heater to the water inlet of the dry cooler;
and the fan filter unit is used for being arranged at the top of the clean room.
2. The clean room clean air conditioning system of claim 1, wherein the first pipe assembly comprises:
a hot water supply line;
and the circulating water pump is arranged on the hot water supply pipeline and is used for pumping liquid in the hot water supply pipeline.
3. A clean room cleaning air conditioning system according to claim 2, characterized in that said hot water supply line comprises a heating assembly for adjusting the temperature of the liquid in said hot water supply line.
4. The clean room clean air conditioning system of claim 3, wherein the heating assembly is disposed in a portion between the circulating water pump and the secondary heater, and the heating assembly comprises a first branch pipe and a second branch pipe disposed in parallel, wherein:
one end of the first branch pipe is communicated with a water outlet of the circulating water pump, the other end of the first branch pipe is communicated with a water inlet of the secondary heater, and a first valve used for controlling the flow of liquid in the first branch pipe is arranged on the first branch pipe;
one end of the second branch pipe is communicated with a water outlet of the circulating water pump, the other end of the second branch pipe is communicated with a water inlet of the secondary heater, and the second branch pipe is provided with a heater for heating liquid in the second branch pipe and a second valve for controlling the flow of the liquid in the second branch pipe.
5. The clean room clean air conditioning system of claim 4, wherein said heater comprises a liquid heat exchanger.
6. The clean room clean air conditioning system of claim 1, wherein the second pipe assembly comprises:
a cold water supply line;
and the cold water pump is arranged on the cold water supply pipeline and used for pumping liquid in the cold water supply pipeline.
7. The clean room cleaning air conditioning system of claim 6, wherein said cold water supply line comprises a refrigeration assembly for reducing the temperature of liquid in said cold water supply line.
8. The clean room purifying air conditioning system of claim 7, wherein said refrigeration assembly is disposed in a portion of said cold water supply line between said cold water pump and said dry cooler water inlet, and said refrigeration assembly comprises a third branch and a fourth branch disposed in parallel, wherein:
one end of the third branch pipe is communicated with a water outlet of the cold water pump, the other end of the third branch pipe is communicated with a water inlet of the dry cooler, and a third valve used for controlling the flow of liquid in the first branch pipe is arranged on the third branch pipe;
one end of the fourth branch pipe is communicated with a water outlet of the cold water pump, the other end of the fourth branch pipe is communicated with a water inlet of the dry cooler, and a refrigerating unit for cooling liquid in the fourth branch pipe and a fourth valve for controlling the flow of the liquid in the fourth branch pipe are arranged on the fourth branch pipe.
9. The clean room purifying and air conditioning system of any one of claims 1 to 8, wherein the fresh air handling unit further comprises a primary cooler, a secondary cooler and a humidifier between the primary heater and the secondary heater, wherein the primary cooler, the humidifier and the secondary cooler are arranged in sequence along an air inlet path of the fresh air handling unit.
10. A clean room facility comprising a clean room, characterized in that it further comprises a clean room clean air conditioning system according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121268267.0U CN215260309U (en) | 2021-06-08 | 2021-06-08 | Clean room purification air conditioning system and clean factory building |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121268267.0U CN215260309U (en) | 2021-06-08 | 2021-06-08 | Clean room purification air conditioning system and clean factory building |
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| CN215260309U true CN215260309U (en) | 2021-12-21 |
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| CN202121268267.0U Active CN215260309U (en) | 2021-06-08 | 2021-06-08 | Clean room purification air conditioning system and clean factory building |
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