CN215198813U - Rotating device - Google Patents
Rotating device Download PDFInfo
- Publication number
- CN215198813U CN215198813U CN202120089106.9U CN202120089106U CN215198813U CN 215198813 U CN215198813 U CN 215198813U CN 202120089106 U CN202120089106 U CN 202120089106U CN 215198813 U CN215198813 U CN 215198813U
- Authority
- CN
- China
- Prior art keywords
- frame
- transmission
- rotating shaft
- clamping plate
- driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005540 biological transmission Effects 0.000 claims abstract description 120
- 238000004140 cleaning Methods 0.000 claims description 23
- 238000011084 recovery Methods 0.000 claims description 7
- 239000002033 PVDF binder Substances 0.000 claims description 6
- 239000004743 Polypropylene Substances 0.000 claims description 6
- 229920001155 polypropylene Polymers 0.000 claims description 6
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 6
- 230000001360 synchronised effect Effects 0.000 claims description 6
- -1 polypropylene Polymers 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005034 decoration Methods 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model relates to a rotating device, include: the supporting structure comprises a first supporting frame and a second supporting frame which are oppositely arranged; the rotating frame is arranged between the first support frame and the second support frame and comprises a first frame, a second frame, a third frame and a fourth frame, wherein the first frame and the second frame are arranged oppositely; the clamping assembly comprises a first clamping plate and a second clamping plate which are oppositely arranged; the first rotating structure comprises a first driving rotating shaft, a first driven rotating shaft and a driving part, the first driving rotating shaft is arranged between the first frame and the first supporting frame, and the first driven rotating shaft is arranged between the second frame and the second supporting frame; and the second rotating structure comprises a transmission unit, a second driving rotating shaft and a second driven rotating shaft, the second driving rotating shaft is arranged between the first clamping plate and the third frame, and the second driven rotating shaft is arranged between the second clamping plate and the fourth frame.
Description
Technical Field
The utility model relates to a silicon product preparation technical field especially relates to a rotary device.
Background
With the continuous promotion of chip technology and the development of huge integrated circuits, the quality requirement on the basic material silicon wafer for producing chips is higher and higher, and in order to produce the silicon wafer material meeting the production requirement of chips, the silicon wafer and the silicon wafer storage jig are required to be cleaned and inspected.
A common cleaning mode is to manually rotate a silicon wafer Casset (wafer cassette) to complete cleaning, the wafer cassette is large in volume and heavy in weight, manual rotation cleaning is difficult, errors in different degrees can be brought due to manual operation, the cleaning degree is difficult to guarantee, and the reliability of a final result is low; cleaning fluids for cassette are typically HF and HNO3Mixed liquid, because the long-time use of spool box, the leakproofness has some problems, so cleaning solution also leaks easily when artifical the washing, because HF toxicity is big, probably causes very big harm to the human body.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a rotating device solves artifical rotation and waits to wash the box body structure and carry out clear mode, the problem of inefficiency in order to treat to wash the box body structure.
In order to achieve the above object, the embodiment of the present invention adopts the following technical solutions: a rotary device for cleaning a cartridge structure to be cleaned, comprising:
the supporting structure comprises a first supporting frame and a second supporting frame which are oppositely arranged;
the rotating frame is arranged between the first support frame and the second support frame and comprises a first frame and a second frame which are oppositely arranged, and a third frame and a fourth frame which are oppositely arranged, the first frame is connected with the first support frame, and the second frame is connected with the second support frame;
the clamping assembly comprises a first clamping plate and a second clamping plate which are oppositely arranged, the first clamping plate is arranged on the third frame, the second clamping plate is arranged on the fourth frame, and a clamping surface of the first clamping plate and a clamping surface of the second clamping plate are oppositely arranged;
the first rotating structure comprises a first driving rotating shaft, a first driven rotating shaft and a driving part, the first driving rotating shaft is arranged between the first frame and the first supporting frame, the first driven rotating shaft is arranged between the second frame and the second supporting frame, and the first driving rotating shaft drives the first driven rotating shaft to move under the driving of the driving part so as to control the rotating frame to rotate;
the second rotating structure comprises a transmission unit, a second driving rotating shaft and a second driven rotating shaft, the second driving rotating shaft is arranged between the first clamping plate and the third frame, the second driven rotating shaft is arranged between the second clamping plate and the fourth frame, the transmission unit comprises a first transmission assembly, a right-angle transmission assembly and a second transmission assembly which are sequentially in transmission connection, one end of the first transmission assembly is in transmission connection with the first driven rotating shaft, and one end of the second transmission assembly is in transmission connection with the second driving rotating shaft;
when the box body structure to be cleaned passes through the clamping component clamping, the rotating frame rotates under the driving of the driving part, and meanwhile, the first driven rotating shaft drives the clamping component to rotate under the transmission of the transmission unit so as to drive the box body structure to be cleaned to rotate, so that the box body structure to be cleaned is cleaned.
Optionally, the first transmission assembly is arranged on the second frame and comprises a first transmission wheel and a second transmission wheel which are connected through a synchronous transmission belt, and the first transmission wheel is in transmission connection with the first driven rotating shaft.
Optionally, the first transmission assembly further includes a first guide wheel, and the first guide wheel is disposed between the first transmission wheel and the second transmission wheel.
Optionally, the right angle drive assembly set up in the second frame with the edge between the third frame, the right angle drive assembly includes bevel gear set, bevel gear set's one end with first drive assembly transmission is connected, bevel gear set's the other end with the transmission of second drive assembly is connected.
Optionally, the second transmission assembly is disposed on the third frame, the second transmission assembly includes a third transmission wheel and a fourth transmission wheel connected by a synchronous transmission belt, the third transmission wheel is in transmission connection with the right-angle transmission assembly, and the fourth transmission wheel is in transmission connection with the second driving rotation shaft.
Optionally, the second transmission assembly further includes a second guide wheel, and the second guide wheel is disposed between the third transmission wheel and the fourth transmission wheel.
Optionally, the clamping assembly further comprises a plurality of first fixing pins, fixing holes corresponding to the first fixing pins one to one are formed in the second clamping plate, internal threads are formed in the inner walls of the fixing holes, the first fixing pins are rotated to fix the box body structure to be cleaned between the first clamping plate and the second clamping plate, or the first clamping plate and the second clamping plate are taken down.
Optionally, the frame further comprises a second fixing pin, the second fixing pin is disposed between the first support frame and the first frame, and/or the second fixing pin is disposed between the second support frame and the second frame, and the second fixing pin is rotated, so that the rotating frame can be switched between a freely rotatable state and a fixed state.
Optionally, a cleaning solution recovery tank is arranged between the first support frame and the second support frame, and the rotating frame is suspended above the cleaning solution recovery tank.
Optionally, the drive portion comprises a drive handwheel connected to the first drive rotation shaft.
Optionally, the rotating frame, the supporting structure and the clamping assembly are made of polyvinylidene fluoride or polypropylene.
The utility model has the advantages that: when the rotating frame rotates, the clamping assembly drives the box body structure to be cleaned to rotate, the rotation in two freedom degree directions is realized simultaneously through the single-power driving of the driving portion, and the cleaning efficiency of the box body structure to be cleaned is improved.
Drawings
FIG. 1 is a schematic structural diagram of an optional device according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an optional mounting device according to an embodiment of the present invention;
fig. 3 is a schematic structural view of a part of the first transmission assembly according to the embodiment of the present invention;
FIG. 4 is a schematic structural view of a right angle drive assembly according to an embodiment of the present invention;
fig. 5 shows a schematic structural diagram of a part of the second transmission assembly in the embodiment of the present invention.
Detailed Description
In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined below to clearly and completely describe the technical solution of the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. All other embodiments, which can be derived from the description of the embodiments of the present invention by a person skilled in the art, are within the scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
As shown in fig. 1 to 5, the present embodiment provides a rotating device for cleaning a box structure to be cleaned, including:
the supporting structure comprises a first supporting frame 21 and a second supporting frame 22 which are oppositely arranged;
the rotating frame 1 is arranged between the first support frame 21 and the second support frame 22 and comprises a first frame 11, a second frame 12 and a third frame 13 and a fourth frame 14, wherein the first frame 11 and the second frame 12 are arranged oppositely, the third frame 13 and the fourth frame 14 are arranged oppositely, the first frame 11 is connected with the first support frame 21, and the second frame 12 is connected with the second support frame 22;
the clamping assembly comprises a first clamping plate 31 and a second clamping plate 32 which are oppositely arranged, the first clamping plate 31 is arranged on the third frame 13, the second clamping plate 32 is arranged on the fourth frame 14, and a clamping surface of the first clamping plate 31 and a clamping surface of the second clamping plate 32 are oppositely arranged;
a first rotating structure, including a first driving rotating shaft 51, a first driven rotating shaft 52 and a driving part, where the first driving rotating shaft 51 is disposed between the first frame 11 and the first support frame 21, the first driven rotating shaft 52 is disposed between the second frame 12 and the second support frame 22, and the first driving rotating shaft 51 drives the first driven rotating shaft 52 to move under the driving of the driving part, so as to control the rotating frame 1 to rotate;
the second rotating structure comprises a transmission unit, a second driving rotating shaft 91 and a second driven rotating shaft 92, the second driving rotating shaft 91 is arranged between the first clamping plate 31 and the third frame, the second driven rotating shaft 92 is arranged between the second clamping plate 32 and the fourth frame 14, the transmission unit comprises a first transmission component, a right-angle transmission component 7 and a second transmission component which are sequentially in transmission connection, one end of the first transmission component is in transmission connection with the first driven rotating shaft 52, and one end of the second transmission component is in transmission connection with the second driving rotating shaft 91;
when the box body structure to be cleaned passes through the clamping component clamping, the rotating frame 1 rotates under the driving of the driving part, and meanwhile, the first driven rotating shaft 52 drives the transmission unit to drive the second driving rotating shaft 91 to drive the clamping component to rotate so as to drive the box body structure to be cleaned to rotate and clean the box body structure to be cleaned.
Adopt above-mentioned technical scheme in this embodiment under the drive of drive division, realize simultaneously revolving frame 1's rotation with the rotation of centre gripping subassembly, just revolving frame 1's plane of rotation with the plane of rotation of centre gripping subassembly is different, promptly through under the drive of a power of drive division, realize the rotation of two degrees of freedom directions simultaneously, compare artifical direct rotation and wait to wash the box body structure, easy operation improves clean efficiency. The harm of the cleaning liquid to people can be reduced, and the influence of human factors on the quality is also reduced.
The structure of the box body to be cleaned can be a regular or irregular mechanism, such as a silicon wafer box.
In this embodiment, the axial center line of the first driving rotation shaft 51 and the axial center line of the first driven rotation shaft 52 are located on the same straight line, and the rotating frame 1 rotates around the straight line where the axial center line of the first driving rotation shaft 51 is located.
In this embodiment, the axial center line of the second driving rotating shaft 91 and the axial center line of the second driven rotating shaft 92 are located on the same straight line, and the first clamping plate 31 and the second clamping plate 32 clamping the box structure to be cleaned rotate synchronously around the straight line where the axial center line of the second driving rotating shaft 91 is located.
In this embodiment, the axial center line of the first driving rotation shaft 51 is perpendicular to the axial center line of the second driving rotation shaft 91.
In this embodiment, the first transmission assembly is disposed on the second frame 12, the first transmission assembly includes a first transmission wheel 61 and a second transmission wheel 62 connected by a synchronous transmission belt, and the first transmission wheel 61 is in transmission connection with the first driven rotating shaft 52.
In this embodiment, the first transmission assembly further includes a first guide wheel 63, and the first guide wheel 63 is disposed between the first transmission wheel 61 and the second transmission wheel 62.
The first guide roller 63 is provided to prevent deviation of the driving direction of the timing belt.
In this embodiment, for example, the right-angle transmission assembly 7 is disposed at a corner between the second frame 12 and the third frame 13, the right-angle transmission assembly 7 includes a bevel gear set, one end of the bevel gear set is in transmission connection with the first transmission assembly, and the other end of the bevel gear set is in transmission connection with the second transmission assembly.
In this embodiment, the bevel gear set includes a first bevel gear 71 extending along the extending direction of the third frame 13 and a second bevel gear 72 extending along the extending direction of the second frame 12, and the first bevel gear 71 and the second bevel gear 72 are engaged to realize right-angle direction changing.
In this embodiment, the second transmission assembly is disposed on the third side frame 13, the second transmission assembly includes a third transmission wheel 81 and a fourth transmission wheel 82 connected by a synchronous transmission belt, the third transmission wheel 81 is in transmission connection with the right-angle transmission assembly 7, and the fourth transmission wheel 82 is in transmission connection with the second driving rotation shaft 91.
In this embodiment, the second transmission assembly further includes a second guide wheel 83, and the second guide wheel 83 is disposed between the third transmission wheel 81 and the fourth transmission wheel 82.
The second guide pulley 83 is provided to prevent the deviation of the driving direction of the timing belt.
In this embodiment, the rotating device further includes a protection plate 20, and the first transmission assembly, the right-angle transmission assembly 7 and the second transmission assembly are accommodated in an accommodation space formed by the protection plate 20 and the rotating frame in a surrounding manner, so as to prevent the first transmission assembly, the right-angle transmission assembly 7 and the second transmission assembly from contacting the cleaning solution.
In this embodiment, for example, the clamping assembly further includes a plurality of first fixing pins 33, a plurality of fixing holes corresponding to the first fixing pins 33 are provided on the second clamping plate 32, an internal thread is provided on an inner wall of the fixing hole, and the first fixing pins 33 are rotated to fix the box structure to be cleaned between the first clamping plate 31 and the second clamping plate 32, or to be taken down from between the first clamping plate 31 and the second clamping plate 32.
Through rotating a plurality of the first fixing pins 33, the length of the part of the first fixing pins 33 exposed on one side of the second clamping plate 32 close to the first clamping plate 31 is adjusted, the box body structure to be cleaned between the first clamping plate 31 and the second clamping plate 32 can be effectively and fixedly clamped, the clamping space of the first clamping plate 31 and the second clamping plate 32 can be adjusted, and the clamping assembly can clamp the box body structures to be cleaned in various sizes.
In this embodiment, the rotating device further includes a second fixing pin 10, the second fixing pin 10 is disposed between the first support frame 21 and the first frame 11, and/or the second fixing pin 10 is disposed between the second support frame 22 and the second frame 12, and the second fixing pin 10 is rotated, so that the rotating frame 1 is converted between a freely rotatable state and a stationary state.
In this embodiment, the rotating device further includes a second fixing pin 10, the second fixing pin 10 is disposed between the first supporting frame 21 and the first frame 11, and the rotating frame 1 can be fixed on the supporting structure by rotating the second fixing pin 10, so that the rotating frame 1 is fixed, and the installation and the detachment of the box structure to be cleaned are facilitated. And reversely rotating the second fixing pin 10 to separate the second fixing pin 10 from the fixing hole on the first frame 11, so that the rotating frame 1 can freely rotate, thereby cleaning the box structure to be cleaned clamped on the clamping assembly.
In this embodiment, for example, a cleaning solution recovery groove 23 is disposed between the first support frame 21 and the second support frame 22, and the rotating frame 1 is suspended above the cleaning solution recovery groove 23.
The cleaning liquid recovery tank 23 can recover the cleaning liquid leaked from the box structure to be cleaned, and harm of the cleaning liquid to human bodies is reduced.
In the present embodiment, the driving portion includes a driving handwheel 4 connected to the first driving rotation shaft 51.
In this embodiment, the driving part may include a motor or the like to realize automatic driving, or manual driving, or driving by a robot, but the motor realizes the movement, which not only has higher cost, but also causes the problem of circuit design due to motor interaction movement, has a complicated structural design, generates friction between circuits, causes circuit aging due to long-time operation, causes unsmooth mechanism movement, and even causes the equipment to be incapable of running; the robot is adopted to realize space freedom degree rotation, the cost is high, and the requirements on personnel, environment, power and later-period maintenance cost are high. In this embodiment, the driving portion adopts a driving handwheel 4, and the rotation of the rotating frame 1 and the rotation of the clamping assembly are controlled by manually rotating the driving handwheel 4. The cleaning liquid in the box body structure to be cleaned can be in full contact with the inner wall of the box body structure to be cleaned, and the difficulty coefficient of mechanism movement is reduced; the hand wheel 4 is driven by the manual arm to rotate, so that power input such as electricity is not needed, and the requirement on the working environment is reduced.
In this embodiment, for example, the rotating frame 1, the supporting structure and the clamping assembly are made of polyvinylidene fluoride (PVDF) or polypropylene (PP) or other materials with super-strong corrosion resistance, and the polyvinylidene fluoride (PVDF) or polypropylene (PP) is very smooth and will not cause other pollution, such as particle, metal, etc.
The above is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should be considered as the protection scope of the present invention.
Claims (11)
1. A rotary device for cleaning a box structure to be cleaned, comprising:
the supporting structure comprises a first supporting frame and a second supporting frame which are oppositely arranged;
the rotating frame is arranged between the first support frame and the second support frame and comprises a first frame and a second frame which are oppositely arranged, and a third frame and a fourth frame which are oppositely arranged, the first frame is connected with the first support frame, and the second frame is connected with the second support frame;
the clamping assembly comprises a first clamping plate and a second clamping plate which are oppositely arranged, the first clamping plate is arranged on the third frame, the second clamping plate is arranged on the fourth frame, and a clamping surface of the first clamping plate and a clamping surface of the second clamping plate are oppositely arranged;
the first rotating structure comprises a first driving rotating shaft, a first driven rotating shaft and a driving part, the first driving rotating shaft is arranged between the first frame and the first supporting frame, the first driven rotating shaft is arranged between the second frame and the second supporting frame, and the first driving rotating shaft drives the first driven rotating shaft to move under the driving of the driving part so as to control the rotating frame to rotate;
the second rotating structure comprises a transmission unit, a second driving rotating shaft and a second driven rotating shaft, the second driving rotating shaft is arranged between the first clamping plate and the third frame, the second driven rotating shaft is arranged between the second clamping plate and the fourth frame, the transmission unit comprises a first transmission assembly, a right-angle transmission assembly and a second transmission assembly which are sequentially in transmission connection, one end of the first transmission assembly is in transmission connection with the first driven rotating shaft, and one end of the second transmission assembly is in transmission connection with the second driving rotating shaft;
when the box body structure to be cleaned passes through the clamping component clamping, the rotating frame rotates under the driving of the driving part, and meanwhile, the first driven rotating shaft drives the clamping component to rotate under the transmission of the transmission unit so as to drive the box body structure to be cleaned to rotate, so that the box body structure to be cleaned is cleaned.
2. The rotating device according to claim 1, wherein the first transmission assembly is disposed on the second frame, the first transmission assembly includes a first transmission wheel and a second transmission wheel connected by a synchronous transmission belt, and the first transmission wheel is in transmission connection with the first driven rotating shaft.
3. The rotary device of claim 2, wherein the first drive assembly further comprises a first guide wheel disposed between the first drive wheel and the second drive wheel.
4. The rotating device according to claim 1, wherein the right-angle transmission assembly is disposed at a corner between the second rim and the third rim, the right-angle transmission assembly comprises a bevel gear set, one end of the bevel gear set is in transmission connection with the first transmission assembly, and the other end of the bevel gear set is in transmission connection with the second transmission assembly.
5. The rotating device according to claim 1, wherein the second transmission assembly is disposed on the third frame, the second transmission assembly includes a third transmission wheel and a fourth transmission wheel connected by a synchronous transmission belt, the third transmission wheel is in transmission connection with the right-angle transmission assembly, and the fourth transmission wheel is in transmission connection with the second driving rotating shaft.
6. The rotary device of claim 5, wherein the second drive assembly further comprises a second guide wheel disposed between the third drive wheel and the fourth drive wheel.
7. The rotating device according to claim 1, wherein the clamping assembly further comprises a plurality of first fixing pins, the second clamping plate is provided with fixing holes corresponding to the plurality of first fixing pins in a one-to-one manner, inner walls of the fixing holes are provided with internal threads, and the first fixing pins are rotated to fix or remove the box structure to be cleaned between the first clamping plate and the second clamping plate.
8. The rotating device according to claim 1, further comprising a second fixing pin disposed between the first support frame and the first rim and/or disposed between the second support frame and the second rim, the second fixing pin being rotated such that the rotating frame is switched between a freely rotatable and a stationary state.
9. The rotating apparatus according to claim 1, wherein a cleaning solution recovery tank is provided between the first support frame and the second support frame, and the rotating frame is suspended above the cleaning solution recovery tank.
10. The rotary device of claim 1, wherein the drive portion comprises a drive hand wheel coupled to the first drive rotary shaft.
11. The rotary device of claim 1, wherein the rotary frame, the support structure, and the clamping assembly are made of polyvinylidene fluoride or polypropylene.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120089106.9U CN215198813U (en) | 2021-01-13 | 2021-01-13 | Rotating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120089106.9U CN215198813U (en) | 2021-01-13 | 2021-01-13 | Rotating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215198813U true CN215198813U (en) | 2021-12-17 |
Family
ID=79437401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120089106.9U Active CN215198813U (en) | 2021-01-13 | 2021-01-13 | Rotating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215198813U (en) |
-
2021
- 2021-01-13 CN CN202120089106.9U patent/CN215198813U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210279987U (en) | Wafer double-side cleaning device | |
| JP4683241B2 (en) | Single wafer cleaning system | |
| CN210045482U (en) | Coating dip-coating device | |
| CN109473388B (en) | Edge finding device for wafer | |
| CN108206145B (en) | Etching device and method for realizing contrarotation of adjacent wafers | |
| CN219303635U (en) | Be used for wafer Bernoulli mode clamping structure and wafer cleaning equipment | |
| CN215198813U (en) | Rotating device | |
| CN115338175A (en) | Ultrapure water cleaning equipment of conductive rubber piece for electromagnetic shield | |
| CN101740324A (en) | Silicon wafer cleaner and silicon wafer cleaning method | |
| CN103257068A (en) | Mixing device and method for magnetic ball reagent | |
| TWI744988B (en) | A device for cleaning and etching | |
| CN216174610U (en) | High efficiency machine part belt cleaning device | |
| CN215317807U (en) | Automatic grinding production line for plate-shaped workpieces | |
| CN211160948U (en) | Monocrystalline silicon pretreatment equipment | |
| CN211161088U (en) | High-efficient water conservation tilting turnover case disinfection belt cleaning device | |
| CN209579310U (en) | A kind of strip-shaped product coating clamp of adjustable-angle | |
| CN220520642U (en) | Fastener wire rod pickling device | |
| CN216321518U (en) | Mixing equipment for experimental reagent | |
| CN217255743U (en) | Valve body positioning structure convenient to operation | |
| CN108608313A (en) | Grinding and polishing device and grinding and polishing system | |
| CN212791652U (en) | Large-area uniform coating spin coater | |
| CN219632144U (en) | Chemical barrel cleaning device | |
| CN220259031U (en) | Silicon rod rotating basket | |
| CN219808018U (en) | Rotating device of anodic oxidation cleaning tank | |
| CN117655035A (en) | Batch cleaning device for test tubes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220622 Address after: Room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi 710065 Patentee after: Xi'an yisiwei Material Technology Co.,Ltd. Patentee after: Xi'an yisiwei Equipment Technology Co.,Ltd. Address before: E2-002, science and Technology Park, Xi'an University of technology, No.26, gazelle Road, Zhangba Street office, high tech Zone, Xi'an City, Shaanxi Province, 710000 Patentee before: Xi'an yisiwei Equipment Technology Co.,Ltd. Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi 710065 Patentee after: Xi'an Yisiwei Material Technology Co.,Ltd. Patentee after: Xi'an Xinhui Equipment Technology Co.,Ltd. Address before: Room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi 710065 Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. Patentee before: Xi'an yisiwei Equipment Technology Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |