CN215198361U - Ceramic substrate fixing jig for partial discharge test - Google Patents
Ceramic substrate fixing jig for partial discharge test Download PDFInfo
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- CN215198361U CN215198361U CN202121295979.1U CN202121295979U CN215198361U CN 215198361 U CN215198361 U CN 215198361U CN 202121295979 U CN202121295979 U CN 202121295979U CN 215198361 U CN215198361 U CN 215198361U
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- metal sheet
- ceramic substrate
- elastic layer
- cover plate
- partial discharge
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Abstract
The utility model relates to a semiconductor manufacturing technology field. The ceramic substrate fixing jig for the partial discharge test comprises a base, wherein the base comprises an electrode base, a lower elastic layer and a lower metal sheet, the electrode base, the lower elastic layer and the lower metal sheet are arranged from bottom to top, the lower metal sheet is provided with a lower extension strip extending downwards, the lower extension strip is in contact connection with the electrode base, and the electrode base is made of a conductive material; the probe cover plate is made of conductive materials, and comprises a probe cover plate, an upper elastic layer and an upper metal sheet which are arranged from top to bottom; the ceramic substrate is clamped between the base and the cover plate. This patent can be to the great copper clad ceramic substrate of angularity carry out the partial discharge test. The island-shaped metal units of the metal ceramic substrate are conducted through the upper metal sheet, the whole motherboard is tested at one time, and the high-efficiency test of partial discharge of the metal ceramic substrate is realized.
Description
Technical Field
The utility model relates to a semiconductor manufacturing field specifically is a fixed tool of work piece when being used for the partial discharge test.
Background
For a high-voltage IGBT module, the internal insulation performance is an important technical indicator, and is usually measured by the amount of partial discharge. With the continuous improvement of the voltage grade and the continuous increase of the integration density of the IGBT module, higher requirements are put forward on the insulation performance of the IGBT module. In the internal structure of the high-voltage IGBT module, there are two main media that affect the insulating performance of the module: the ceramic substrate is a ceramic substrate which has high dielectric strength and is coated with metal layers on two sides, and circuit patterns on the surface of the substrate and electrical insulation between the substrate and devices on the upper surface of the lining board are realized. The method has the advantages that the partial discharge test (hereinafter referred to as partial discharge) is carried out on the metal ceramic substrate, and good products are screened, so that the qualified product rate and the product quality of the IGBT module can be effectively improved.
In the prior art, the research on the partial discharge test of the metal ceramic substrate is less. Complicated and fine island-shaped circuit patterns are etched on the metal layer on the surface of the metal ceramic substrate mother board, dozens or hundreds of island-shaped metal units are arranged on one mother board, hundreds of probes are needed for testing the partial discharge quantity of each island-shaped metal unit of the whole mother board at one time, the cost is huge, the metal layer can be scratched due to the fact that the probes are too thin, nondestructive testing cannot be achieved, the number of the probes of a partial discharge tester is limited, multiple tests are needed, or the mother board is cut into small pieces and then tested for multiple times, and the testing efficiency is low.
SUMMERY OF THE UTILITY MODEL
Problem to prior art existence, the utility model provides a ceramic substrate fixes tool for partial discharge test to solve above at least one technical problem.
In order to achieve the above object, the utility model provides a ceramic substrate fixing jig for partial discharge test, which is characterized in that, the jig comprises a base, the base comprises an electrode base, a lower elastic layer and a lower metal sheet, the electrode base, the lower elastic layer and the lower metal sheet are arranged from bottom to top, the lower metal sheet is provided with a lower extension strip extending downwards, the lower extension strip is in contact connection with the electrode base, and the electrode base is made of a conductive material;
the probe cover plate is characterized by further comprising a cover plate, wherein the cover plate comprises a probe cover plate, an upper elastic layer and an upper metal sheet which are arranged from top to bottom, the upper metal sheet is provided with an upper extending strip extending upwards, the upper extending strip is in contact connection with the probe cover plate, and the probe cover plate is made of a conductive material;
and the ceramic substrate is clamped between the base and the cover plate.
This patent passes through the base and the apron realizes the elasticity centre gripping to the work piece, because the slight warping condition of cermet base plate ubiquitous, the isolated island form metal unit of flexible laminating switches on the mode and just can avoid because of there is the clearance ceramic base plate and test binding face, and causes and discharges, and the interference test normally goes on. The partial discharge test can be carried out on the copper-clad ceramic substrate with larger warping degree.
The island-shaped metal units of the metal ceramic substrate are conducted through the upper metal sheet, the whole motherboard is tested at one time, and the high-efficiency test of partial discharge of the metal ceramic substrate is realized.
During testing, the bottom of the base is electrically connected with a pressurizing negative electrode contact of the partial discharge tester, and a positive electrode probe of the partial discharge tester extends out and falls down to be pressed on the upper cover plate.
Preferably, the upper metal sheet is attached to the lower side of the upper elastic layer, and the upper side of the upper elastic layer is connected with the probe cover plate in an adhesion manner through a back adhesive;
the lower metal sheet is pasted on the upper side of the lower elastic layer, and the lower side of the lower elastic layer is connected with the electrode base in an adhering mode through back glue.
The mutual connection between each part of the base and the cover plate is convenient to realize.
Preferably, the upper metal sheet is an aluminum sheet or a copper sheet, and the thickness of the upper metal sheet is 50um to 800 um;
the lower metal sheet is an aluminum sheet or a copper sheet, and the thickness of the lower metal sheet is 50-800 um.
The metal sheet can seriously deform in the process of being too thin to interfere with the test, and the metal sheet cannot deform enough when being too thick, so that the metal sheet cannot form effective flexible lamination with the copper-clad ceramic substrate to be tested.
Further preferably, the electrode base, the lower elastic layer, the lower metal sheet, the probe cover plate, the upper elastic layer, and the upper metal sheet are all rectangular.
Further preferably, the upper elastic layer is foam or rubber;
the lower elastic layer is made of foam or rubber.
Further preferably, the device also comprises a box body with an opening at the upper end, and the height of the box body is greater than that of the base;
a limiting column for limiting the base is fixed in the box body;
and a metal contact is arranged at the bottom of the box body and is electrically connected with the electrode base in a contact way.
The relative spacing between the base and the box body is convenient to realize. The metal contact is also used to electrically connect with the negative terminal of the partial discharge device.
Further preferably, the top of the limiting column is higher than the top of the lower metal sheet, and the height difference is 5mm-10 mm.
Further preferably, handles are arranged on two sides of the probe cover plate.
Preferably, the thickness of the electrode base is 10mm-30mm, the thickness of the lower elastic layer is 5mm-20mm, the thickness of the probe cover plate is 10mm-30mm, the thickness of the upper elastic layer is 5mm-20mm, and the height of the box body is 80mm-200 mm.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the upper metal sheet of the present invention;
fig. 3 is a partial discharge curve diagram after the test of the present invention.
Wherein, 1 is a box body, 21 is an electrode base, 22 is a lower elastic layer, 23 is a lower metal sheet, 3 is a cover plate, 31 is a probe cover plate, 32 is an upper elastic layer, 33 is an upper metal sheet, 34 is a handle, 4 is a limiting column, and 5 is a copper-clad ceramic substrate.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
Referring to fig. 1 to 3, embodiment 1: the ceramic substrate fixing jig for the partial discharge test comprises a base, wherein the base comprises an electrode base 21, a lower elastic layer 22 and a lower metal sheet which are arranged from bottom to top, the lower metal sheet is provided with a lower extension strip extending downwards, the lower extension strip is in contact connection with the electrode base 21, and the electrode base 21 is made of a conductive material; the probe cover plate structure further comprises a cover plate 3, wherein the cover plate 3 comprises a probe cover plate 31, an upper elastic layer 32 and an upper metal sheet 33 which are arranged from top to bottom, the upper metal sheet 33 is provided with an upper extending strip which extends upwards, the upper extending strip is in contact connection with the probe cover plate 31, and the probe cover plate 31 is made of a conductive material; the ceramic substrate is clamped between the base and the cover plate 3. This patent passes through the base and realizes the elasticity centre gripping to the work piece with apron 3, because the slight warping condition of cermet base plate ubiquitous, the isolated island form metal unit of flexible laminating switches on the mode and just can avoid because of there is the clearance ceramic base plate and test binding face, and causes and discharges, and the interference test normally goes on. The partial discharge test can be carried out on the copper-clad ceramic substrate with larger warping degree. The conduction of the island-shaped metal units of the metal ceramic substrate is realized through the upper metal sheet 33, the one-time test of the whole motherboard is realized, and the partial discharge high-efficiency test of the metal ceramic substrate is realized.
The upper extension strip is bent in an L shape and comprises a longitudinal extension part and a transverse extension part, wherein the longitudinal extension part is longitudinally arranged, and the transverse extension part is transversely arranged. The probe cover plate is convenient to ensure the electrical conduction with the probe cover plate.
The lower extension strip is bent in an L shape and comprises a longitudinal extension part and a transverse extension part, wherein the longitudinal extension part is longitudinally arranged, and the transverse extension part is transversely arranged. The electrical conduction with the electrode base is convenient to ensure.
The upper metal sheet 33 is pasted on the lower side of the upper elastic layer 32, and the upper side of the upper elastic layer 32 is connected with the probe cover plate 31 in an adhesion mode through back glue; the lower metal sheet is pasted on the upper side of the lower elastic layer 22, and the lower side of the lower elastic layer 22 is connected with the electrode base 21 in an adhering mode through back glue. The mutual connection between the base and the cover plate 3 is convenient to realize.
The upper metal sheet 33 is an aluminum sheet or a copper sheet, and the thickness of the upper metal sheet 33 is 50-800 um; the lower metal sheet is an aluminum sheet or a copper sheet, and the thickness of the lower metal sheet is 50-800 um. The metal sheet can seriously deform in the process of being too thin to interfere with the test, and the metal sheet cannot deform enough when being too thick, so that the metal sheet cannot form effective flexible lamination with the copper-clad ceramic substrate to be tested.
The electrode base 21, the lower elastic layer 22, the lower metal piece 23, the probe cover plate 31, the upper elastic layer 32, and the upper metal piece 33 are all rectangular parallelepiped.
The upper elastic layer 32 is foam or rubber; the lower elastic layer 22 is foam or rubber.
The box body 1 with an opening at the upper end is also included, and the height of the box body 1 is greater than that of the base; the box body 1 is internally fixed with a limiting column 4 for limiting the base. The relative spacing between the base and the box body 1 is convenient to realize. The top of the limiting column 4 is higher than the top of the lower metal sheet 23, and the height difference is 5mm-10 mm.
The thickness of the electrode base 21 is 10mm-30mm, the thickness of the lower elastic layer 22 is 5mm-20mm, the thickness of the probe cover plate 31 is 10mm-30mm, the thickness of the upper elastic layer 32 is 5mm-20mm, and the height of the box body 1 is 80mm-200 mm.
Copper-clad ceramic substrate who indicates in this patent also is two-sided copper-clad ceramic substrate, uses this tool to cover the test process of copper-clad ceramic substrate 5: insulating oil is injected into the box body 1, the copper-clad ceramic substrate 5 is placed on the base, one surface of the copper-clad ceramic substrate 5 is contacted with the lower metal sheet, the cover plate 3 is placed on the copper-clad ceramic substrate 5, the lower metal sheet 23 is contacted with the other surface of the copper-clad ceramic substrate 5, the insulating oil is injected again until the insulating oil completely passes through the cover plate 3, a positive probe of a local discharge tester is controlled by a pneumatic valve to stretch out and fall down to be pressed on the cover plate 3, 0.1MPa-1MPa pressure is applied between the cover plate 3 and the base, the upper elastic layer 32, the upper metal sheet 33, the lower metal sheet and the lower elastic layer 22 slowly deform and are completely and flexibly attached on the warped copper-clad ceramic substrate, the unfavorable condition that the local discharge test true value cannot be obtained due to the fact that the upper metal sheet 33, the lower metal sheet and the copper-clad ceramic substrate are not completely attached to cause abnormal discharge between the upper metal sheet 33 and the copper-clad ceramic substrate in the test process is avoided, and applying a voltage of 4-10 Kv between the positive electrode probe and the base, and recording a partial discharge curve Q/t. After the test is finished, the positive electrode probe is controlled to retract through the pneumatic valve, the upper elastic layer 32, the lower elastic layer 22, the upper metal sheet 33 and the lower metal sheet are slowly recovered after 1-3min, the cover plate 3 is taken down, and the copper-clad ceramic substrate is taken out.
The partial discharge results of the copper-clad ceramic substrate tested by the invention are shown as follows: the three curves are a voltage (4.4Kv), a 10PC line and an actual partial discharge value curve from top to bottom, and the value of the test curve is lower than 10PC, which shows that when the jig is used for partial discharge test, no interference discharge (the peak value is greater than 100PC) is caused, and the jig has good effect when applied to the partial discharge test of the ceramic substrate. That is, the test results, which have an average value of less than 10PC within 1min, can be considered as passing the test. Otherwise, the test is regarded as failed. Of course, the criteria for test pass will vary from product to product.
Has the advantages that: 1) the flexible attaching and conducting of the island-shaped metal units of the metal ceramic substrate are realized, and the effective test of partial discharge of the whole metal ceramic substrate can be carried out at one time; 2) the partial discharge test can be carried out on the copper-clad ceramic substrate with larger warping degree; 3) simple and easy, nondestructive test, the mode of the flexible laminating of above sheetmetal 33 has replaced multiunit probe, and the tool can be directed against complicated figure cermet base plate, and the universality is strong.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (9)
1. The ceramic substrate fixing jig for the partial discharge test is characterized by comprising a base, wherein the base comprises an electrode base, a lower elastic layer and a lower metal sheet, the electrode base, the lower elastic layer and the lower metal sheet are arranged from bottom to top, the lower metal sheet is provided with a lower extension strip extending downwards, the lower extension strip is in contact connection with the electrode base, and the electrode base is made of a conductive material;
the probe cover plate is characterized by further comprising a cover plate, wherein the cover plate comprises a probe cover plate, an upper elastic layer and an upper metal sheet which are arranged from top to bottom, the upper metal sheet is provided with an upper extending strip extending upwards, the upper extending strip is in contact connection with the probe cover plate, and the probe cover plate is made of a conductive material;
and the ceramic substrate is clamped between the base and the cover plate.
2. The ceramic substrate fixture for partial discharge testing according to claim 1, wherein: the upper metal sheet is pasted on the lower side of the upper elastic layer, and the upper side of the upper elastic layer is connected with the probe cover plate in an adhering mode through back glue;
the lower metal sheet is pasted on the upper side of the lower elastic layer, and the lower side of the lower elastic layer is connected with the electrode base in an adhering mode through back glue.
3. The ceramic substrate fixture for partial discharge testing according to claim 1, wherein: the upper metal sheet is an aluminum sheet or a copper sheet, and the thickness of the upper metal sheet is 50-800 um;
the lower metal sheet is an aluminum sheet or a copper sheet, and the thickness of the lower metal sheet is 50-800 um.
4. The ceramic substrate fixture for partial discharge testing according to claim 1, wherein: the electrode base, the lower elastic layer, the lower metal sheet, the probe cover plate, the upper elastic layer and the upper metal sheet are all cuboid.
5. The ceramic substrate fixture for partial discharge testing according to claim 1, wherein: the upper elastic layer is made of foam or rubber;
the lower elastic layer is made of foam or rubber.
6. The ceramic substrate fixture for partial discharge testing according to claim 1, wherein: the box body is provided with an opening at the upper end, and the height of the box body is greater than that of the base;
a limiting column for limiting the base is fixed in the box body;
and a metal contact is arranged at the bottom of the box body and is electrically connected with the electrode base in a contact way.
7. The ceramic substrate fixture for partial discharge testing according to claim 6, wherein: the top of the limiting column is higher than the top of the lower metal sheet, and the height difference is 5-10 mm.
8. The ceramic substrate fixture for partial discharge testing according to claim 1, wherein: handles are arranged on two sides of the probe cover plate.
9. The ceramic substrate fixture for partial discharge testing according to claim 6, wherein: the thickness of the electrode base is 10mm-30mm, the thickness of the lower elastic layer is 5mm-20mm, the thickness of the probe cover plate is 10mm-30mm, the thickness of the upper elastic layer is 5mm-20mm, and the height of the box body is 80mm-200 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121295979.1U CN215198361U (en) | 2021-06-10 | 2021-06-10 | Ceramic substrate fixing jig for partial discharge test |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121295979.1U CN215198361U (en) | 2021-06-10 | 2021-06-10 | Ceramic substrate fixing jig for partial discharge test |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215198361U true CN215198361U (en) | 2021-12-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121295979.1U Active CN215198361U (en) | 2021-06-10 | 2021-06-10 | Ceramic substrate fixing jig for partial discharge test |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215198361U (en) |
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2021
- 2021-06-10 CN CN202121295979.1U patent/CN215198361U/en active Active
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