CN215163069U

CN215163069U - Mounting bracket structure of thermocouple

Info

Publication number: CN215163069U
Application number: CN202121473780.3U
Authority: CN
Inventors: 薛蒙晓
Original assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Current assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Priority date: 2021-06-30
Filing date: 2021-06-30
Publication date: 2021-12-14
Anticipated expiration: 2031-06-30

Abstract

The application provides a mounting bracket structure of thermocouple is applied to vacuum evaporation machine, mounting bracket structure of thermocouple includes the integral type support, and the stereoplasm hollow cylinder of thermocouple passes the hollow portion of integral type support, the integral type support from the top down includes: the thermocouple comprises a groove upper portion, a circular ring portion and a thread lower portion, wherein the thread lower portion penetrates through a through hole of a main cavity body plate of a vacuum evaporation machine, the outer diameter of the circular ring portion is larger than the diameter of the through hole of the main cavity body plate, the lower end of the thread lower portion is provided with threads, a first nut and the threads at the lower end of the thread lower portion are screwed up to enable the integral support to be fixed with the main cavity body plate, the top end of the groove upper portion is externally provided with threads, a groove is formed in the top end of the groove upper portion, a rubber ring is placed in the groove, a pressure circular plate and a second nut are sequentially arranged above the rubber ring, and the second nut and external threads at the top end of the groove upper portion are screwed up to enable a hard hollow cylinder of the thermocouple to be fixed with and sealed with the integral support.

Description

Mounting bracket structure of thermocouple

Technical Field

The utility model relates to a vacuum evaporation machine technical field, more specifically relates to a mounting bracket structure of thermocouple.

Background

The vacuum evaporation plating machine is used for evaporating and gasifying a coating material (or called a coating material) by means of current heating, electron beam bombardment heating, ion source bombardment and the like under a vacuum condition, and then enabling gasified particles to fly to the surface of a substrate to be condensed, and finally forming a thin film. The vacuum evaporation has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance and the like, thereby being widely applied.

In the processing technique of vacuum evaporation, a crucible is adopted to gasify a coating material under the vacuum condition, and the crucible comprises: the evaporation coating device comprises an evaporation coating cavity and an evaporation coating source (source) arranged in the evaporation coating cavity, wherein the evaporation coating source is heated to evaporate evaporation coating materials evaporated in the evaporation coating source, the evaporation coating materials are upwards evaporated in a fan-shaped structure, a coating pot with an umbrella-shaped structure for bearing a coated workpiece is arranged above a crucible, and the coated workpiece is fixed on the coating pot, so that molecules of the evaporation coating materials are deposited on the coated workpiece to form a coating film. In the process of coating a film, the internal state that is vacuum of vacuum coating machine's main cavity, consequently, have higher requirement to the part that passes the main cavity body board, wherein, thermocouple and installing support structure need pass the main cavity body board, partly in the main cavity is external partly in the main cavity of thermocouple, the thermocouple is used for detecting the internal temperature of main cavity of vacuum coating machine, the installing support structure of thermocouple is used for fixed and sealed thermocouple, in prior art, thermocouple installing support structure is complicated, be difficult to install and dismantle, and use many sealing rings, because the sealing ring service life after having long can appear warping, phenomenons such as ageing, consequently the condition of gas leakage appears easily.

In view of this, the utility model provides a mounting bracket structure of thermocouple for vacuum deposition machine, this thermocouple's mounting bracket simple structure, easy installation and dismantlement to the sealing washer that uses has reduced the risk of gas leakage less.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a mounting bracket structure of thermocouple for vacuum evaporation machine, the mounting bracket simple structure of this thermocouple, easy installation and dismantlement, and the sealing washer that uses has reduced the risk of gas leakage less.

The utility model provides a mounting bracket structure of thermocouple, main part support part wherein is the integral type to compare simple more effectively with prior art's structure, easy to assemble and dismantlement, and reduced the risk of gas leakage, it is specific, the support part is no longer the components of a whole that can function independently, and the mounting of fixed bolster and the main cavity body no longer need two sets, the also corresponding reduction of sealing washer. The support is fixed with the main cavity body board, only need a nut fixed with the lower extreme of main part support can, and the thermocouple is fixed with the support, also only need a rubber circle, nut and the upper end of theme support fixed can. The present applicant has completed the present application on this basis.

The utility model provides an installing support structure of thermocouple, is applied to vacuum evaporation plating machine, the thermocouple includes that hose and one section cover establish the stereoplasm hollow cylinder outside the hose, and the stereoplasm hollow cylinder of thermocouple passes installing support structure, installing support structure plays fixed thermocouple and sealed effect, the installing support structure of thermocouple includes integral type support 1, integral type support 1 is hollow, and the stereoplasm hollow cylinder of thermocouple passes the hollow portion of integral type support 1, integral type support 1 from the top down includes: the integrated bracket 1 comprises a groove upper part 11, a circular ring part 12 and a thread lower part 13, wherein the thread lower part 13 of the integrated bracket 1 passes through a through hole of a main cavity plate of a vacuum evaporation machine, the outer diameter of the circular ring part 12 is larger than the diameter of the through hole of the main cavity plate, the lower surface of the circular ring part 12 is contacted with the outer surface of the main cavity plate, the lower end of the thread lower part 13 of the integrated bracket 1 is provided with threads, the integrated bracket 1 and the main cavity plate are fixed by adopting the first nut 2 to be screwed with the threads at the lower end of the thread lower part 13, the top end of the upper portion 11 of the groove of the integrated support 1 is externally provided with threads, the top end of the upper portion of the groove of the integrated support 1 is internally provided with a groove 111, the groove 111 is provided with a rubber ring 3, a pressure wafer 4 and a second nut 5 are sequentially arranged above the rubber ring 3, and the second nut 5 is screwed with the external threads on the top end of the upper portion 11 of the groove to fix and seal the hard hollow cylinder of the thermocouple with the integrated support 1.

In some embodiments, the lower surface of the annular portion 12 of the integrated bracket 1 is provided with a sealing groove 121, the sealing groove 121 is annular, and the sealing groove 121 is used for placing a sealing ring which plays a role of sealing when the integrated bracket 1 is fixed with the main cavity plate.

In some embodiments, the recessed upper portion 11 and the threaded lower portion 13 of the integrated bracket 1 are hollow cylinders, the annular portion 12 is a hollow annular ring, the outer diameter of the recessed upper portion 11 and the threaded lower portion 13 is smaller than that of the annular portion 12, and the outer diameter of the threaded lower portion 13 is smaller than that of the main cavity plate through hole.

Further, the outer diameter of the upper groove portion 11 is smaller than the outer diameter of the lower thread portion 13.

Further, the inner diameter of the threaded lower portion 13 is larger than the inner diameters of the annular portion 12 and the recessed upper portion 11.

Further, the inner diameter of the circular ring part 12 is the same as the inner diameter of the groove upper part 11.

In some embodiments, the groove 111 of the groove upper portion 11 has a circular ring shape, the depth of the groove 111 is less than the height of the groove upper portion 11, the width of the groove 111 is less than the ring width of the groove upper portion 11, the lower surface of the groove 111 is a slope inclined toward the lower end of the groove upper portion 11, and the slope is inclined at an angle of 10 ° to 60 °.

Further, the diameter of the rubber ring 3 is larger than the inner diameter of the groove 111 and smaller than the outer diameter of the groove 111.

In some embodiments, the pressing disk 4 is a circular or hollow circular ring, and the diameter or outer diameter of the pressing disk 4 is smaller than the outer diameter of the groove 111.

Further preferably, the pressing disc 4 is a hollow circular ring, the inner diameter of the pressing disc 4 is the same as that of the groove 111, the lower surface of the pressing disc 4 is an inclined surface inclined towards the upper end of the pressing disc 4, the inclined angle of the inclined surface is 10-60 degrees, when the thermocouple is fixed on the integrated bracket 1, the upper surface of the pressing disc 4 is in contact with the second nut 5, and the lower surface of the pressing disc is in contact with the upper surface of the rubber ring 3.

In some embodiments, the second nut 5 is a hollow circular nut with a circular upper cover, the inner surface of the lower end of the second nut 5 is provided with a thread which can be engaged with the thread on the outer surface of the upper end of the upper part 11 of the groove, the inner diameter of the second nut 5 is larger than the outer diameter of the pressing disc 4, and the second nut 5 rotates along the external thread on the top end of the upper part 11 of the groove to enable the pressing disc 4 to press the rubber ring 3, so that the rubber ring 3 is fixed with the hard hollow cylinder of the thermocouple and plays a role in sealing.

In some embodiments, the mounting bracket structure of the thermocouple further includes a gasket 6, the gasket 6 is disposed above the first nut 2, when the integrated bracket 1 is fixed to the main cavity plate, an upper surface of the gasket 6 contacts an inner surface of the main cavity plate, and a lower surface of the gasket 6 contacts an upper surface of the first nut 2.

Drawings

Fig. 1 is a schematic structural view of a mounting bracket structure of a thermocouple, and a main cavity plate according to the present application.

Fig. 2 is a schematic view of a mounting bracket structure of a thermocouple and a thermocouple according to the present application.

Fig. 3 is an exploded view of a mounting bracket structure of a thermocouple of the present application.

Fig. 4 is a sectional view of a mounting bracket structure of a thermocouple of the present application.

Description of the main element symbols:

the integrated bracket comprises an integrated bracket 1, a first nut 2, a rubber ring 3, a pressing disc 4, a second nut 5, a gasket 6, a groove upper part 11, a groove 111, a ring part 12, a sealing groove 121 and a thread lower part 13.

Detailed Description

The following examples are described to aid in the understanding of the present application and are not, and should not be construed to, limit the scope of the present application in any way.

In the following description, those skilled in the art will recognize that components may be described throughout this discussion as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including being integrated within a single system or component).

Also, connections between components or systems are not intended to be limited to direct connections. Rather, data between these components may be modified, reformatted, or otherwise changed by the intermediate components. Additionally, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" and "fixed" are understood to encompass direct connections, indirect connections, or fixed through one or more intermediaries.

In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "side", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships commonly recognized in the product of the application, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance. Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

Example 1:

a mounting bracket structure of a thermocouple, as shown in fig. 1-4, applied to a vacuum evaporation coater, wherein the thermocouple comprises a hose and a section of hard hollow cylinder sleeved outside the hose, the hard hollow cylinder of the thermocouple passes through the mounting bracket structure, the mounting bracket structure plays a role in fixing the thermocouple and sealing, the mounting bracket structure of the thermocouple comprises an integrated bracket 1, the integrated bracket 1 is hollow, the hard hollow cylinder of the thermocouple passes through the hollow part of the integrated bracket 1, and the integrated bracket 1 comprises from top to bottom: the integrated bracket 1 comprises a groove upper part 11, a circular ring part 12 and a thread lower part 13, wherein the thread lower part 13 of the integrated bracket 1 passes through a through hole of a main cavity plate of a vacuum evaporation machine, the outer diameter of the circular ring part 12 is larger than the diameter of the through hole of the main cavity plate, the lower surface of the circular ring part 12 is contacted with the outer surface of the main cavity plate, the lower end of the thread lower part 13 of the integrated bracket 1 is provided with threads, the integrated bracket 1 and the main cavity plate are fixed by adopting the first nut 2 to be screwed with the threads at the lower end of the thread lower part 13, the top end of the upper portion 11 of the groove of the integrated support 1 is externally provided with threads, the top end of the upper portion of the groove of the integrated support 1 is internally provided with a groove 111, the groove 111 is provided with a rubber ring 3, a pressure wafer 4 and a second nut 5 are sequentially arranged above the rubber ring 3, and the second nut 5 is screwed with the external threads on the top end of the upper portion 11 of the groove to fix and seal the hard hollow cylinder of the thermocouple with the integrated support 1.

The lower surface of the ring part 12 of the integrated support 1 is provided with a sealing groove 121, the sealing groove 121 is circular, the sealing groove 121 is used for placing a sealing ring, and the sealing ring plays a sealing role when the integrated support 1 is fixed with the main cavity body plate. The groove upper part 11 and the thread lower part 13 of the integrated bracket 1 are hollow cylinders, the ring part 12 is a hollow ring, the outer diameters of the groove upper part 11 and the thread lower part 13 are smaller than that of the ring part 12, and the outer diameter of the thread lower part 13 is smaller than that of the main cavity body plate through hole. The outer diameter of the upper groove part 11 is smaller than the outer diameter of the lower thread part 13. The inner diameter of the threaded lower portion 13 is greater than the inner diameter of the annular portion 12 and the recessed upper portion 11. The inner diameter of the circular ring 12 is the same as the inner diameter of the upper groove part 11.

The groove 111 of the upper groove portion 11 is circular, the depth of the groove 111 is smaller than the height of the upper groove portion 11, the width of the groove 111 is smaller than the ring width of the upper groove portion 11, the lower surface of the groove 111 is an inclined surface inclined towards the lower end of the upper groove portion 11, and the inclined angle of the inclined surface is 30 degrees. The diameter of the rubber ring 3 is larger than the inner diameter of the groove 111 and smaller than the outer diameter of the groove 111. The pressing disc 4 is in a hollow circular ring shape, the inner diameter of the pressing disc 4 is the same as that of the groove 111, the lower surface of the pressing disc 4 is an inclined surface inclined towards the upper end of the pressing disc 4, the inclined angle of the inclined surface is 30 degrees, the upper surface of the pressing disc 4 is in contact with the second nut 5 when the thermocouple is fixed on the integrated support 1, and the lower surface of the pressing disc 4 is in contact with the upper surface of the rubber ring 3. The second nut 5 is a hollow circular nut with a circular upper cover, threads are arranged on the inner surface of the lower end of the second nut 5 and can be meshed with the threads on the outer surface of the upper end of the upper portion 11 of the groove, the inner diameter of the second nut 5 is larger than the outer diameter of the pressing wafer 4, the second nut 5 rotates along the external threads on the top end of the upper portion 11 of the groove to enable the pressing wafer 4 to extrude the rubber ring 3, and the rubber ring 3 is fixed with a hard hollow cylinder of the thermocouple and plays a role in sealing. The mounting support structure of thermocouple still includes gasket 6, and gasket 6 sets up in the top of first nut 2, integral type support 1 with when the main cavity body board is fixed, the upper surface contact of gasket 6 the internal surface of main cavity body board, the lower surface contact of gasket 6 the upper surface of first nut 2.

While various aspects and embodiments have been disclosed herein, it will be apparent to those skilled in the art that other aspects and embodiments can be made without departing from the spirit of the disclosure, and that several modifications and improvements can be made without departing from the spirit of the disclosure. The various aspects and embodiments disclosed herein are presented by way of example only and are not intended to limit the present disclosure, which is to be controlled in the spirit and scope of the appended claims.

Claims

1. The utility model provides an installing support structure of thermocouple, is applied to vacuum evaporation machine, the thermocouple includes that hose and one section cover establish the stereoplasm hollow cylinder outside the hose, and the stereoplasm hollow cylinder of thermocouple passes installing support structure, installing support structure plays fixed thermocouple and sealed effect, its characterized in that, the installing support structure of thermocouple includes integral type support (1), integral type support (1) is hollow, and the stereoplasm hollow cylinder of thermocouple passes the hollow portion of integral type support (1), integral type support (1) from the top down includes: the integrated support comprises a groove upper portion (11), a circular ring portion (12) and a thread lower portion (13), wherein the thread lower portion (13) of the integrated support (1) penetrates through a through hole of a main cavity body plate of a vacuum evaporation machine, the outer diameter of the circular ring portion (12) is larger than the diameter of the main cavity body plate through hole, the lower surface of the circular ring portion (12) is in contact with the outer surface of the main cavity body plate, the lower end of the thread lower portion (13) of the integrated support (1) is provided with a thread, the integrated support (1) is fixed with the main cavity body plate by screwing the thread at the lower end of the thread lower portion (13) through a first nut (2), the top end of the groove upper portion (11) of the integrated support (1) is externally provided with a thread, a groove (111) is formed in the top end, a rubber ring (3) is placed in the groove (111), and a pressure wafer (4) and a second nut (5) are sequentially arranged above the rubber ring (3), and a second nut (5) is screwed with the external thread at the top end of the upper part (11) of the groove, so that the hard hollow cylinder of the thermocouple is fixed and sealed with the integrated support (1).

2. A mounting bracket structure of a thermocouple according to claim 1, characterized in that the lower surface of the annular portion (12) of the integrated bracket (1) is provided with a sealing groove (121), the sealing groove (121) is annular, and the sealing groove (121) is used for placing a sealing ring which plays a role of sealing when the integrated bracket (1) is fixed with the main cavity plate.

3. A mounting bracket structure of a thermocouple according to claim 1, wherein the upper recess portion (11) and the lower threaded portion (13) of the integrated bracket (1) are hollow cylinders, the annular portion (12) is a hollow annular ring, the outer diameters of the upper recess portion (11) and the lower threaded portion (13) are smaller than the outer diameter of the annular portion (12), and the outer diameter of the lower threaded portion (13) is smaller than the diameter of the main cavity plate through hole.

4. A mounting bracket structure of a thermocouple according to claim 3, wherein the inner diameter of the threaded lower portion (13) is larger than the inner diameters of the circular ring portion (12) and the recessed upper portion (11), and the inner diameter of the circular ring portion (12) is the same as the inner diameter of the recessed upper portion (11).

5. A mounting bracket structure of a thermocouple according to claim 1, wherein the groove (111) of the upper groove portion (11) is circular, the depth of the groove (111) is smaller than the height of the upper groove portion (11), the width of the groove (111) is smaller than the circumferential width of the upper groove portion (11), the lower surface of the groove (111) is a slope inclined toward the lower end of the upper groove portion (11), and the slope is inclined at an angle of 10 ° to 60 °.

6. A mounting bracket structure of a thermocouple according to claim 5, characterized in that the diameter of the rubber ring (3) is larger than the inner diameter of the recess (111) and smaller than the outer diameter of the recess (111).

7. Thermocouple mounting bracket structure according to claim 1, characterised in that the pressing disc (4) is circular or hollow circular ring shaped, the diameter or outer diameter of the pressing disc (4) being smaller than the outer diameter of the recess (111).

8. Thermocouple mounting bracket structure according to claim 7, characterised in that the pressure disc (4) is in the shape of a hollow circular ring, the inner diameter of the pressure disc (4) is the same as the inner diameter of the recess (111), the lower surface of the pressure disc (4) is an inclined surface inclined towards the upper end of the pressure disc (4) and the angle of inclination of this inclined surface is 10 ° to 60 °, the upper surface of the pressure disc (4) being in contact with the second nut (5) and the lower surface being in contact with the upper surface of the rubber ring (3) when the thermocouple is fixed to the one-piece bracket (1).

9. A mounting bracket structure of a thermocouple according to claim 1, characterized in that the second nut (5) is a hollow ring nut having a circular upper cover, the inner surface of the lower end of the second nut (5) has threads capable of engaging with the threads on the outer surface of the upper end of the upper portion (11) of the groove, the inner diameter of the second nut (5) is larger than the outer diameter of the wafer (4), and the second nut (5) is rotated along the external threads on the top end of the upper portion (11) of the groove so that the wafer (4) presses the rubber ring (3) to fix the rubber ring (3) to the hard hollow cylinder of the thermocouple and simultaneously perform a sealing function.

10. A mounting bracket structure of a thermocouple according to claim 1, further comprising a spacer (6), the spacer (6) being disposed above the first nut (2), wherein when the integrated bracket (1) is fixed to the main cavity plate, an upper surface of the spacer (6) contacts an inner surface of the main cavity plate, and a lower surface of the spacer (6) contacts an upper surface of the first nut (2).