CN215067724U

CN215067724U - DMD inclination angle adjusting device of direct-writing photoetching lens

Info

Publication number: CN215067724U
Application number: CN202121643279.7U
Authority: CN
Inventors: 洪小苗
Original assignee: Suzhou Aixian Photoelectric Technology Co ltd
Current assignee: Suzhou Aixian Photoelectric Technology Co ltd
Priority date: 2021-07-19
Filing date: 2021-07-19
Publication date: 2021-12-07
Anticipated expiration: 2031-07-19

Abstract

The utility model discloses a DMD inclination angle adjusting device of a direct writing photoetching lens, which has the key points of the technical scheme that the device comprises a mounting flange, a mounting plate and an adjusting component; a lens provided with a DMD element is fixed on the mounting flange, a through hole is formed in the mounting flange, a threaded hole is formed in the mounting plate, the threaded hole and the through hole are correspondingly formed, the through hole is larger than the threaded hole, a locking member is screwed in the threaded hole, and the locking member penetrates through the through hole and pre-fastens or locks the mounting flange on the mounting plate; the mounting plate is also provided with a jack for the lens to pass through, and the aperture of the jack is matched with the outer diameter of the lens; the adjusting assembly is used for pushing the mounting flange to rotate around the central axis of the jack when the mounting flange is pre-tightened by the locking member. The adjusting device can not damage the lens when carrying out angle adjustment on the DMD element on the lens, and is convenient for finely adjusting the angle.

Description

DMD inclination angle adjusting device of direct-writing photoetching lens

Technical Field

The utility model relates to a direct-write lithography technology field, more specifically the utility model relates to a direct-write lithography lens DMD inclination adjusting device that says so.

Background

Direct-write lithography equipment such as a laser direct-write lithography machine is provided with a plurality of direct-write lithography lenses, and each lens is provided with a Digital Micromirror Device (DMD). The DMD element needs to be adjusted to a specified angle before using the direct-write lithographic apparatus, and since the DMD is mounted on a lens, the angle of the DMD element is usually adjusted by adjusting the angle of the lens.

The existing adjusting mode is usually to adjust the lens directly by hand or to adjust the angle of the lens by knocking the lens, and the lens is easily damaged if the force is too strong during adjustment. And because the angular accuracy of DMD component requires highly, often need finely tune, and often can exert too hard and violent and lead to the angle of adjustment too big during manual adjustment, be difficult to accomplish finely tune.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art exists, the utility model aims to provide a direct-write lithography lens DMD inclination adjusting device, this adjusting device can not harm the camera lens when carrying out angle modulation to the DMD component on the camera lens, and is convenient for finely tune the angle.

In order to achieve the above purpose, the utility model provides a following technical scheme: the utility model provides a direct-write lithography lens DMD inclination adjusting device which characterized in that: comprises a mounting flange, a mounting plate and an adjusting component;

a lens provided with a DMD element is fixed on the mounting flange, a through hole is formed in the mounting flange, a threaded hole is formed in the mounting plate, the threaded hole and the through hole are correspondingly arranged, the through hole is larger than the threaded hole, a locking member is screwed in the threaded hole and penetrates through the through hole, and the mounting flange is pre-tightened or locked on the mounting plate;

the mounting plate is also provided with a jack for the lens to pass through, and the aperture of the jack is matched with the outer diameter of the lens;

adjusting part can dismantle connect in on the mounting panel retaining member pretension behind mounting flange, adjusting part is used for promoting mounting flange winds the central axis of jack rotates.

As a further improvement, the adjusting part is including regulating plate and two regulation posts, the regulating plate is fixed in on the mounting panel, the regulation post all with the regulating plate spiro union, the one end of adjusting the post be used for with mounting flange contradicts, adjust the post to when the mounting flange direction was in turn, adjust the post with mounting flange contradicts and is used for driving mounting flange winds the central axis of jack rotates, two it drives to adjust the post mounting flange's direction of rotation is opposite.

As a further improvement, the mounting flange is provided with two incisions, form on the incision by the face of contradicting, two the conflict platform is used for supplying two regulation posts to contradict respectively.

As a further improvement, the adjusting plate faces one side of the mounting plate is provided with a positioning guide groove, and the mounting plate is provided with a terminal surface used for being matched with the positioning guide groove.

As a further improvement of the present invention, the adjusting plate is connected to the mounting plate by bolts.

As a further improvement of the utility model, the bolt is provided with at least two, the length direction of bolt with the length direction of adjusting the post is perpendicular.

As a further improvement of the utility model, the bolt is provided with at least two, the length direction of bolt with the length direction of adjusting the post is parallel.

As a further improvement, the retaining member is provided with a plurality of, a plurality of the retaining member winds the cyclic annular evenly distributed of the central axis of camera lens.

The utility model has the advantages that: be greater than the setting of screw hole through the through-hole for the retaining member can promote mounting flange through adjusting part after pretension mounting flange, and the aperture of jack and the external diameter looks adaptation of camera lens, thereby drive the camera lens and rotate around the central axis of jack when making mounting flange promoted, thereby adjust the angle of the DMD component on the camera lens, adjust the rethread retaining member after accomplishing and lock mounting flange on the mounting panel. The lens is driven to rotate by the mounting flange during adjustment, so that the adjusting assembly cannot be directly contacted with the lens and cannot damage the lens. And because the mounting flange is preloaded by the fastening piece, the rotation angle of the mounting flange is difficult to adjust too large at one time, and fine adjustment is convenient to realize.

Drawings

Fig. 1 is a schematic perspective view of embodiment 1 of the present invention;

FIG. 2 is a schematic perspective view of an adjustment assembly according to embodiment 1;

FIG. 3 is a perspective view of the mounting flange of embodiment 1;

fig. 4 is a schematic perspective view of the mounting plate of embodiment 1;

FIG. 5 is a schematic perspective view of embodiment 2 of the present invention;

fig. 6 is a schematic perspective view of an adjustment assembly according to embodiment 2.

Reference numerals: 1. installing a flange; 11. a lens; 12. a through hole; 13. cutting; 2. mounting a plate; 21. a threaded hole; 22. a locking member; 23. a jack; 3. an adjustment assembly; 31. an adjusting plate; 311. a positioning guide groove; 32. an adjustment column; 33. and (4) bolts.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.

Example 1:

referring to fig. 1 and fig. 3, the DMD inclination angle adjusting device of the direct writing lithography lens 11 of the present embodiment includes a mounting flange 1, a mounting plate 2, and an adjusting assembly 3; the mounting flange 1 is fixed with a lens 11 provided with a DMD element, and the fixing mode of the lens 11 is as follows: the mounting flange 1 is provided with a hole for the lens 11 to pass through, the lens 11 passes through the hole and is fixedly connected with the hole, and the lens 11 is perpendicular to the mounting flange 1.

Referring to fig. 1, 3 and 4, the mounting flange 1 is provided with four through holes 12, and the four through holes 12 are uniformly distributed around the central axis of the lens 11 in an annular manner. Be provided with screw hole 21 on the mounting panel 2, screw hole 21 and the setting of through-hole 12 one-to-one and through-hole 12 are greater than screw hole 21, and threaded connection has retaining member 22 in the screw hole 21, and retaining member 22 is the screw in this embodiment. The four locking pieces 22, the four through holes 12 and the four threaded holes 21 are arranged to enable the mounting flange 1 to be fastened when being locked to the mounting plate 2.

Referring to fig. 4, the mounting plate 2 is further provided with a jack 23, the jack 23 is used for the lens 11 to pass through, the aperture of the jack 23 is matched with the outer diameter of the lens 11, that is, the jack 23 is in transition fit with the lens 11, the lens 11 can rotate around the central axis of the jack 23, and the inner wall of the jack 23 can limit the movement of the lens 11 in the direction perpendicular to the axial direction of the jack 23.

Referring to fig. 1, 2 and 3, the adjusting assembly 3 is detachably connected to the mounting plate 2, so that one can detach the adjusting assembly 3 to be mounted on another mounting plate 2 to adjust the angle of the DMD element on another lens 11, and is particularly suitable for a direct-write lithography apparatus with multiple lens 11 arrays. Adjusting part 3 is including regulating plate 31 and two regulation posts 32, and on regulating plate 31 was fixed in mounting panel 2, the regulation post 32 all with the regulating plate 31 spiro union, the one end of regulating post 32 was used for contradicting with mounting flange 1, is provided with two incisions 13 on mounting flange 1, forms on the incision 13 by the face of contradicting, and two conflict platforms are used for supplying two regulation posts 32 to contradict respectively. The provision of the cut-outs 13 increases the contact area between the adjustment posts 32 and the mounting flange 1, so that the adjustment posts 32 do not slip easily when pushing the mounting flange 1.

Referring to fig. 1, fig. 2 and fig. 3, when the mounting flange 1 is pre-tightened on the mounting plate 2 by the locking member 22, when the adjusting column 32 is screwed in to the mounting flange 1, the adjusting column 32 is abutted to the mounting flange 1 and used for driving the mounting flange 1 to rotate around the central axis of the insertion hole 23, the rotating directions of the mounting flange 1 driven by the two adjusting columns 32 are opposite, therefore, when one adjusting column 32 is screwed in to the mounting flange 1, the other adjusting column 32 needs to be screwed out in advance or simultaneously in the direction away from the mounting flange 1, so that the mounting flange 1 can be smoothly pushed.

Referring to fig. 2, a positioning guide slot 311 is disposed on one side of the adjusting plate 31 facing the mounting plate 2, an end surface for matching with the positioning guide slot 311 is disposed on the mounting plate 2, and the positioning guide slot 311 is disposed to facilitate people to recognize the mounting direction of the adjusting plate 31 relative to the mounting plate 2, thereby facilitating installation. The adjusting plate 31 is connected to the mounting plate 2 by a bolt 33. At least two bolts 33 are arranged, the length direction of the bolts 33 is perpendicular to the length direction of the adjusting column 32, and the bolts 33 penetrate through the adjusting plate 31 from top to bottom and are screwed on the upper end face of the mounting plate 2.

Example 2:

referring to fig. 5 and 6, this embodiment is different from embodiment 1 in that the length direction of the bolt 33 is parallel to the length direction of the adjusting column 32, and the side surface of the adjusting plate 31 of the bolt 33 penetrates the adjusting plate 31 and is screwed to the side wall of the mounting plate 2. The side of the mounting plate 2 usually leaves more space, so this arrangement facilitates a sufficiently large working space when rotating the bolt 33, facilitating a person to rotate the bolt 33 with a tool.

The working principle is as follows:

the mounting flange 1 provided with the lens 11 is pre-tightened on the mounting plate 2 through the locking piece 22, and the lens 11 is inserted into the jack 23 in the pre-tightening process. The positioning guide groove 311 of the adjusting plate 31 is attached to the mounting plate 2, the adjusting plate 31 is fixed to the mounting plate 2 through the bolt 33, then the adjusting column 32 screwed on the adjusting plate 31 is rotated, and as the through hole 12 in the mounting flange 1 is larger than the threaded hole 21, the adjusting column screwed in the direction of the mounting flange 1 can push the mounting flange 1 to rotate around the central axis of the jack 23, at the moment, the lens 11 rotates along with the mounting flange 1, so that the DMD element on the lens 11 synchronously rotates to adjust the angle of the DMD element. The adjusting columns 32 are two, the rotating directions of the mounting flanges 1 pushed by the two adjusting columns 32 are opposite, and an operator drives the mounting flanges 1 to rotate through the corresponding adjusting columns 32 according to the direction requirement of the adjusting angle. When the adjusting column 32 is screwed in the direction of the mounting flange 1 to push the mounting flange 1, the other adjusting column 32 needs to be screwed out in advance or synchronously in the direction away from the mounting flange 1, so that the other adjusting column 32 is prevented from blocking the rotation of the mounting flange 1. After the angle of the DMD element is adjusted, the mounting flange 1 is locked by the locking piece 22.

Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims

1. The utility model provides a direct-write lithography lens DMD inclination adjusting device which characterized in that: comprises a mounting flange (1), a mounting plate (2) and an adjusting component (3);

a lens (11) provided with a DMD element is fixed on the mounting flange (1), a through hole (12) is formed in the mounting flange (1), a threaded hole (21) is formed in the mounting plate (2), the threaded hole (21) and the through hole (12) are correspondingly arranged, the through hole (12) is larger than the threaded hole (21), a locking piece (22) is screwed in the threaded hole (21), and the locking piece (22) penetrates through the through hole (12) and pre-fastens or locks the mounting flange (1) on the mounting plate (2);

the mounting plate (2) is further provided with a jack (23), the jack (23) is used for the lens (11) to penetrate through, and the aperture of the jack (23) is matched with the outer diameter of the lens (11);

adjusting part (3) can dismantle connect in on mounting panel (2) retaining member (22) pretension behind mounting flange (1), adjusting part (3) are used for promoting mounting flange (1) is wound the central axis of jack (23) rotates.

2. The DMD tilt angle adjusting device of claim 1, wherein: adjusting part (3) is including regulating plate (31) and two regulation post (32), regulating plate (31) are fixed in on mounting panel (2), adjust post (32) all with regulating plate (31) spiro union, the one end of adjusting post (32) be used for with mounting flange (1) are contradicted, adjust post (32) to when mounting flange (1) direction was in the turn, adjust post (32) with mounting flange (1) are contradicted and are used for driving mounting flange (1) winds the central axis of jack (23) rotates, two it drives to adjust post (32) the direction of rotation of mounting flange (1) is opposite.

3. The DMD tilt angle adjusting device of claim 2, wherein: be provided with two incisions (13) on mounting flange (1), form on incision (13) by the face of contradicting, two the face of contradicting is used for supplying two regulation post (32) to contradict respectively.

4. The DMD tilt angle adjusting device of claim 2, wherein: the adjusting plate (31) is provided with a positioning guide groove (311) on one side of the mounting plate (2), and the mounting plate (2) is provided with a terminal surface used for being matched with the positioning guide groove (311).

5. The device for adjusting the DMD inclination angle of a direct-write lithography lens according to claim 4, wherein: the adjusting plate (31) is connected with the mounting plate (2) through a bolt (33).

6. The device for adjusting the DMD inclination angle of a direct-write lithography lens according to claim 5, wherein: the number of the bolts (33) is at least two, and the length direction of the bolts (33) is perpendicular to the length direction of the adjusting column (32).

7. The device for adjusting the DMD inclination angle of a direct-write lithography lens according to claim 5, wherein: the number of the bolts (33) is at least two, and the length direction of the bolts (33) is parallel to the length direction of the adjusting column (32).

8. The DMD tilt angle adjusting device of claim 1, wherein: retaining member (22) are provided with a plurality ofly, and are a plurality of retaining member (22) wind the cyclic annular evenly distributed of the central axis of camera lens (11).