CN215005054U

CN215005054U - Wafer visual inspection motion platform

Info

Publication number: CN215005054U
Application number: CN202121653010.7U
Authority: CN
Inventors: 黄显林; 黄彩颖
Original assignee: Shenzhen Siborui Intelligent Equipment Co ltd
Current assignee: Shenzhen Siborui Intelligent Equipment Co ltd
Priority date: 2021-07-20
Filing date: 2021-07-20
Publication date: 2021-12-03
Anticipated expiration: 2031-07-20

Abstract

The utility model relates to a wafer visual inspection motion platform, which comprises a bracket and a lifting sliding table fixedly connected with the bracket; one end of the bracket is also fixedly connected with a second shell, the second shell is provided with a first shell, the top ends of the first shell and the second shell are both provided with a chute, one end of the first shell and one end of the second shell are respectively and fixedly connected with a first motor and a second motor, and threaded rods are rotatably arranged in the first shell and the second shell; adsorb the wafer through the sucking disc, the nut piece in the first casing passes through the slide and drives the adsorption plate slip, and slide on the second casing drives first casing and slides, so alright carry out position control to the adsorption plate, then gather picture information to the wafer through the camera, so this equipment reduces operation personnel working strength, uses vision intellectual detection system to replace the operation personnel to detect, and has improved production efficiency.

Description

Wafer visual inspection motion platform

Technical Field

The utility model relates to a wafer inspection equipment technical field specifically is a wafer visual detection motion platform.

Background

The wafer is one of the main raw materials of the LED, and is the light emitting component of the LED, and the quality of the wafer directly determines the performance of the LED. The wafer is composed of group III and group V compound semiconductor materials. When the LED is packaged, the wafer materials are arranged on the wafer film in order;

the appearance detection of the wafer is to select products which do not meet the operation standard after an operator places the wafer on a workbench and directly observes the wafer through a high power microscope; therefore, the operating personnel can differentiate the appearance defects from the poor selection judgment standards, and the rationality of the final operation standard is greatly uncertain due to the fatigue of the eyes;

in summary, the present application provides a wafer vision inspection motion platform to solve the above-mentioned problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a wafer visual inspection motion platform is in order to solve the problem that proposes in the above-mentioned background art, the utility model discloses convenient to use, easy operation, systematic height, the practicality is strong.

In order to achieve the above object, the utility model provides a following technical scheme: a wafer visual inspection motion platform comprises a support and a lifting sliding table fixedly connected to the support; one end of the bracket is fixedly connected with a second shell, the second shell is provided with a first shell, the top ends of the first shell and the second shell are respectively provided with a sliding chute, one end of the first shell and one end of the second shell are respectively and fixedly connected with a first motor and a second motor, threaded rods are rotatably arranged in the first shell and the second shell, and the threaded rods are in threaded connection with nut blocks; output shafts of the first motor and the second motor are fixedly connected with the threaded rod; sliding plates are connected to the sliding grooves of the first shell and the second shell in a sliding mode, the sliding plates are fixedly connected with the nut blocks, the sliding plate on the first shell is fixedly connected with the adsorption plate, and the sliding plate on the second shell is fixedly connected with the first shell; fixedly connected with camera on the lift slip table, the bottom of camera has the acquisition lens through camera lens connecting plate fixed mounting, the bottom of acquisition lens has the aureole through light source connecting plate fixed mounting.

Preferably, a plurality of suckers are uniformly and fixedly connected to the adsorption plate.

Preferably, the first motor and the second motor are fixedly connected to the first housing and the second housing respectively through bolts.

Preferably, the first shell and the second shell are both cuboid cavity structures.

Preferably, the second housing is fixedly connected to the bracket by bolts.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses a set up support, lift slip table, camera, collecting lens, mutually supporting of first casing and second casing, adsorb the wafer through the sucking disc, nut piece in the first casing passes through the slide and drives the adsorption plate and slide, slide on the second casing drives first casing and slides, so alright carry out position control to the adsorption plate, then gather picture information through the camera to the wafer, so this equipment reduces operation personnel working strength, use vision intellectual detection system to replace the operation personnel to detect, and improved production efficiency.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

fig. 2 is a schematic front view of the first motor of the present invention;

fig. 3 is a schematic view of the structure of the present invention;

fig. 4 is a schematic side view of the present invention.

Reference numerals: 1. a support; 2. lifting the sliding table; 3. a camera; 4. a lens connecting plate; 5. acquiring a lens; 6. a light source connecting plate; 7. a ring of light; 8. a first housing; 9. a chute; 10. a first motor; 11. a nut block; 12. a slide plate; 13. an adsorption plate; 14. a suction cup; 15. a second housing; 16. a second motor; 17. a threaded rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: a wafer visual inspection motion platform comprises a support 1 and a lifting sliding table 2 fixedly connected to the support 1; a second shell 15 is fixedly connected to one end of the support 1, a first shell 8 is arranged on the second shell 15, sliding grooves 9 are formed in the top ends of the first shell 8 and the second shell 15, a first motor 10 and a second motor 16 are fixedly connected to one ends of the first shell 8 and the second shell 15 respectively, threaded rods 17 are rotatably mounted in the first shell 8 and the second shell 15, and nut blocks 11 are in threaded connection with the threaded rods 17; the output shafts of the first motor 10 and the second motor 16 are fixedly connected with a threaded rod 17; the sliding grooves 9 of the first shell 8 and the second shell 15 are both connected with sliding plates 12 in a sliding manner, the sliding plates 12 are fixedly connected with nut blocks 11, the sliding plates 12 on the first shell 8 are fixedly connected with an adsorption plate 13, and the sliding plates 12 on the second shell 15 are fixedly connected with the first shell 8; a camera 3 is fixedly connected to the lifting sliding table 2, an acquisition lens 5 is fixedly installed at the bottom end of the camera 3 through a lens connecting plate 4, and a light ring 7 is fixedly installed at the bottom end of the acquisition lens 5 through a light source connecting plate 6;

the first motor 10 and the second motor 16 drive the threaded rod 17 to rotate, the threaded rod 17 drives the nut block 11 to work, and the nut block 11 drives the sliding plate 12 to slide through the matching of the sliding groove 9 and the sliding plate 12;

wherein, the adsorption plate 13 is used for bearing the wafer, and the suction cup 14 is used for adsorbing and fixing the wafer;

wherein, the collecting lens 5 is used for observing the collecting wafer;

the light ring 7 is of an annular structure, and the bottom end of the light ring 7 is uniformly and fixedly connected with a plurality of LED lamp beads;

the camera 3 is also electrically connected with the control module; the control module may be a circuit including at least one processor, a circuit including at least one single chip, or a combination of multiple circuits or chips, as long as the corresponding functions can be realized. It is understood that, for those skilled in the art, the control module may also implement corresponding functions in a pure hardware manner for a common circuit composed of an amplifier, a comparator, a triode, a MOS transistor, and the like;

a plurality of suckers 14 are uniformly and fixedly connected on the adsorption plate 13;

the first motor 10 and the second motor 16 are respectively and fixedly connected to the first shell 8 and the second shell 15 through bolts;

the first shell 8 and the second shell 15 are both of cuboid cavity structures;

the second shell 15 is fixedly connected to the bracket 1 through bolts;

the working principle is as follows: during the use, adsorb the wafer through sucking disc 14, then start first motor 10, second motor 16 and camera 3 work, first motor 10 and second motor 16 drive threaded rod 17 and rotate, threaded rod 17 drives screw piece 11 work, screw piece 11 in the first casing 8 drives adsorption plate 13 through slide 12 and slides, the same thing, slide 12 on the second casing 15 drives first casing 8 and slides, so alright carry out position control to adsorption plate 13, until adsorption plate 13 is located the top of acquisition lens 5, then gather picture information to the wafer through camera 3, the picture information conveying that camera 3 gathered sends to control module, control module carries out picture analysis and shows whether there is the flaw in the wafer, so this equipment reduces operation personnel working strength, use vision intellectual detection to replace the operation personnel to detect, and improved production efficiency.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above, it will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, but that the invention may be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A wafer visual inspection motion platform comprises a support (1) and a lifting sliding table (2) fixedly connected to the support (1); the method is characterized in that: one end of the support (1) is fixedly connected with a second shell (15), a first shell (8) is arranged on the second shell (15), sliding grooves (9) are formed in the top ends of the first shell (8) and the second shell (15), one ends of the first shell (8) and the second shell (15) are respectively and fixedly connected with a first motor (10) and a second motor (16), threaded rods (17) are rotatably arranged in the first shell (8) and the second shell (15), and nut blocks (11) are in threaded connection with the threaded rods (17); the output shafts of the first motor (10) and the second motor (16) are fixedly connected with a threaded rod (17); sliding plates (12) are connected to the sliding grooves (9) of the first shell (8) and the second shell (15) in a sliding mode, the sliding plates (12) are fixedly connected with the nut block (11), the sliding plates (12) on the first shell (8) are fixedly connected with the adsorption plate (13), and the sliding plates (12) on the second shell (15) are fixedly connected with the first shell (8); fixedly connected with camera (3) on lift slip table (2), there is acquisition lens (5) bottom of camera (3) through camera lens connecting plate (4) fixed mounting, there is ring of light (7) bottom of acquisition lens (5) through light source connecting plate (6) fixed mounting.

2. The wafer vision inspection motion platform of claim 1, wherein: the adsorption plate (13) is uniformly and fixedly connected with a plurality of suckers (14).

3. The wafer vision inspection motion platform of claim 1, wherein: the first motor (10) and the second motor (16) are fixedly connected to the first shell (8) and the second shell (15) through bolts respectively.

4. The wafer vision inspection motion platform of claim 1, wherein: the first shell (8) and the second shell (15) are both of cuboid cavity structures.

5. The wafer vision inspection motion platform of claim 1, wherein: the second shell (15) is fixedly connected to the bracket (1) through bolts.