CN216827316U

CN216827316U - Self-propelled end surface monitor

Info

Publication number: CN216827316U
Application number: CN202220232507.XU
Authority: CN
Inventors: 龚渤; 李鑫; 任涛; 张亮; 魏雍
Original assignee: Wuhan Yongding Wuruichuangxin Technology Co ltd
Current assignee: Wuhan Yongding Wuruichuangxin Technology Co ltd
Priority date: 2022-01-27
Filing date: 2022-01-27
Publication date: 2022-06-28
Anticipated expiration: 2032-01-27

Abstract

The utility model provides a self-propelled end face monitor relates to chip end face monitoring technology field, including examining test table, it is equipped with the mobile device to examine test table both sides, the mobile device surface is equipped with elevating gear, the connecting plate is installed to elevating gear's lift end, the connecting plate openly is equipped with the dwang, be equipped with test probe and adsorption head in the recess on bull stick surface respectively, the array is equipped with storage box in the recess of examining test table top surface, it is equipped with the push pedal to examine test table top surface, examine test table top surface and placed the collection box, carry out roughness or roughness monitoring time measuring at the terminal surface to the chip, can draw the unqualified chip of monitoring automatically and retrieve, wait for the collective chip processing that will not be qualified of staff, need not manual operation, equipment is simple, with chip extraction element and test probe integration.

Description

Self-propelled end surface monitor

Technical Field

The utility model relates to a chip end face monitoring technology field especially relates to a self-propelled end face monitoring appearance.

Background

According to patent No. CN201821284110.5, a system for detecting the end surface appearance of a semiconductor laser chip includes a chip carrier, a downward-looking camera, a chip pickup device, an upward-looking camera light source, an optical device, and an upward-looking camera; the chip pickup device sucks the semiconductor laser chip to an appointed working area of the optical device, the light source of the upward-looking camera is arranged in the appointed working area of the optical device and provides a light source for the upward-looking camera, the optical device projects the amplified images of the lower surface and the four sides of the semiconductor laser chip into the upward-looking camera, and the upward-looking camera acquires the amplified imaging images of the lower surface and the four sides of the chip. The utility model realizes the detection of a plurality of end faces of the chip of the semiconductor laser through the light path design of the coaxial microscope objective and a plurality of side observation prisms, and avoids the chip rotation or the arrangement of more microscope processing methods in the traditional chip appearance detection; meanwhile, the matching design of the optical device and the upward-looking camera enables the system to be simple in structure and high in appearance detection efficiency of the semiconductor laser chip.

The above patent introduces the condition that the chip need monitor the chip terminal surface after the preparation, like roughness, terminal surface roughness etc. current equipment is to finding unqualified product need inform the staff to take out unqualified chip when the chip monitoring, and the reprocessing is handled, and the operation is comparatively troublesome.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a self-propelled end surface monitor.

In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides a self-propelled end surface monitor, is including examining the test table, it is equipped with the mobile device to examine test table both sides, the mobile device surface is equipped with elevating gear, the connecting plate is installed to elevating gear's lift end, the connecting plate openly is equipped with the dwang, be equipped with test probe and adsorption head in the recess on dwang surface respectively, it is equipped with the storage box to examine the interior array of recess of test table top surface, it is equipped with the push pedal to examine test table top surface, it has placed the collection box to examine test table top surface.

Preferably, the dwang passes through the bearing frame and openly is connected with the connecting plate, and the link of detecting probe and adsorption head respectively with the recess threaded connection on dwang surface.

Preferably, a motor is arranged on the side face of the connecting plate, and gears are respectively arranged on the surfaces of the rotating end and the rotating rod of the motor.

Preferably, the motor is located in a groove in the side face of the connecting plate, the motor is fixed with the connecting plate through a bolt, and the two gears are meshed with each other.

Preferably, the cylinder is fixed in the bolt in the recess of examining test table top surface, the flexible end of cylinder is installed and is deposited the board, and the storage box places in the top surface of depositing the board.

Preferably, one end of the push plate is connected with a moving block through a bolt, and the moving block is located in a groove in the top surface of the detection table.

Preferably, a screw rod is installed in the groove on the side surface of the detection table, and the moving block is sleeved on the surface of the screw rod and is movably connected with the screw rod.

Advantageous effects

In the utility model, the chip to be monitored is respectively placed in the storage box, the storage box is placed at the position corresponding to the detection platform, the lifting device can be driven by the moving device to translate, the detection probe on the connecting plate can be lifted by utilizing the lifting of the telescopic end of the lifting device, so that the detection probe is attached to the end surface of the chip, the detection probe can monitor the end surface of the chip by moving the end surface of the chip, when the unqualified chip is found to be taken out, the detection probe is lifted, because the gear at the rotating end of the motor is meshed with the gear on the surface of the rotating rod, the rotating end of the motor works to drive the rotating rod to rotate, the through hole on the surface of the rotating rod is respectively connected with the detection probe and the adsorption head by screw threads, the positions of the detection probe and the adsorption head are exchanged after the rotating rod rotates 180 degrees, so that the adsorption end of the adsorption head is positioned above the chip, the absorption head descends to absorb and extract unqualified chips, the unqualified chips are placed in the prepared recycling box, and the waiting staff can collect the chips, so that the purpose that the detected unqualified chips can be automatically extracted and collected when the flatness or roughness of the end face of the chips is monitored is realized, the waiting staff can process the unqualified chips, manual operation is not needed, the equipment is simple, and the chip extraction device and the detection probe are integrated.

The utility model discloses in, through placing a plurality of storage boxes at the storage board top surface, the flexible end of control cylinder goes up and down to make the storage box bottom surface of the top and examine test table top surface parallel and level, the power device who starts lead screw one end after the chip monitoring in the storage box of the top is accomplished rotates the lead screw, the movable block drives the push pedal and removes, the push pedal promotes the storage box, make the storage box of the top take place to remove, reset the push pedal again, the flexible end of cylinder secondary control goes up and down the position of monitoring with second storage box, realized can installing the wait to detect the multiunit chip, and automatically, chip after detecting carries out the unloading and waits to retrieve, make equipment automatic, the labour has been reduced.

Drawings

Fig. 1 is an isometric view of the present invention;

FIG. 2 is an enlarged view of A of FIG. 1;

fig. 3 is a perspective view of the present invention;

fig. 4 is a sectional view of the present invention.

Illustration of the drawings:

1. a detection table; 2. a mobile device; 3. a lifting device; 4. a connecting plate; 5. rotating the rod; 6. detecting a probe; 7. an adsorption head; 8. a motor; 9. a gear; 10. a cylinder; 11. a storage plate; 12. a storage box; 13. a recycling bin; 14. a screw rod; 15. a moving block; 16. a push plate.

Detailed Description

In order to make the technical means, the creation features, the achievement purposes and the functions of the present invention easy to understand, the present invention will be further explained below with reference to the following embodiments and the accompanying drawings, but the following embodiments are only the preferred embodiments of the present invention, and not all embodiments are included. Based on the embodiments in the implementation, other embodiments obtained by those skilled in the art without any creative work belong to the protection scope of the present invention.

Specific embodiments of the present invention will be described below with reference to the accompanying drawings.

The specific embodiment is as follows:

referring to fig. 1-4, a self-propelled end surface monitor, comprising a detection platform 1, moving devices 2 are arranged on two sides of the detection platform 1, a lifting device 3 is arranged on the surface of the moving device 2, a connecting plate 4 is arranged on the lifting end of the lifting device 3, a rotating rod 5 is arranged on the front surface of the connecting plate 4, a detection probe 6 and an adsorption head 7 are respectively arranged in a groove on the surface of the rotating rod 5, the rotating rod 5 is connected with the front surface of the connecting plate 4 through a bearing seat, the connecting ends of the detection probe 6 and the adsorption head 7 are respectively in threaded connection with the groove on the surface of the rotating rod 5, chips to be monitored are respectively placed in a storage box 12, the storage box 12 is placed at a position corresponding to the detection platform 1, the lifting device 3 can be driven by the moving device 2 to translate, the detection probe 6 on the connecting plate 4 can be lifted by utilizing the lifting end of the lifting device 3 to lift, so that the detection probe 6 is attached to the end surface of the chip, the end face of the chip can be monitored for flatness or roughness by the detection probe 6 moving on the end face of the chip, a motor 8 is arranged on the side face of the connecting plate 4, gears 9 are respectively arranged on the rotating end of the motor 8 and the surface of the rotating rod 5, the motor 8 is positioned in a groove on the side face of the connecting plate 4, the motor 8 is fixed with the connecting plate 4 through bolts, the two gears 9 are mutually meshed, a storage box 12 is arranged in the groove on the top face of the detection platform 1 in an array mode, a recycling box 13 is placed on the top face of the detection platform 1, when the unqualified chip is found to be required to be taken out, the detection probe 6 is lifted, as the gear 9 at the rotating end of the motor 8 is mutually meshed with the gear 9 on the surface of the rotating rod 5, the rotating end of the motor 8 works to drive the rotating rod 5 to rotate, the detection probe 6 and the adsorption head 7 are respectively in threaded connection in a through hole on the surface of the rotating rod 5, the positions of the detection probe 6 and the adsorption head 7 are mutually exchanged after the rotating rod 5 rotates 180 degrees, make the absorption end of adsorption head 7 be located the top of chip, adsorption head 7 descends and adsorbs the extraction with unqualified chip, places unqualified chip in the collection box 13 of preparation, waits for the staff collective to retrieve can.

Detect the recess internal bolt of 1 top surface of platform and be fixed with cylinder 10, deposit board 11 is installed to the flexible end of cylinder 10, storage box 12 is placed in the top surface of deposit board 11, through placing a plurality of storage box 12 at storage board 11 top surfaces, the lift of the flexible end of control cylinder 10 makes the storage box 12 bottom surface of the top and detect 1 top surface parallel and level of platform, it is equipped with push pedal 16 to detect 1 top surface of platform, there is movable block 15 to push pedal 16 one end through bolted connection, movable block 15 is located the recess of detecting 1 top surface, install lead screw 14 in the recess of detecting 1 side, movable block 15 cup joints the surface in lead screw 14, movable block 15 and lead screw 14 swing joint, through placing a plurality of storage box 12 at storage board 11 top surfaces, the lift of the flexible end of control cylinder 10 makes storage box 12 bottom surface of the top and detect 1 top surface parallel and level of platform.

The utility model discloses a theory of operation: the chips to be monitored are respectively placed in the object placing boxes 12, the object placing boxes 12 are placed at the corresponding positions of the detection platform 1, the lifting device 3 can be driven by the moving device 2 to translate, the detection probe 6 on the connecting plate 4 can be lifted by utilizing the lifting of the telescopic end of the lifting device 3, the detection probe 6 is attached to the end surface of the chip, the detection probe 6 can move on the end surface of the chip to monitor the flatness or roughness of the end surface of the chip, when the unqualified chip is found to be taken out, the detection probe 6 is lifted, because the gear 9 at the rotating end of the motor 8 is mutually meshed with the gear 9 at the surface of the rotating rod 5, the rotating end of the motor 8 works to drive the rotating rod 5 to rotate, the detection probe 6 and the adsorption head 7 are respectively connected with threads in the through hole at the surface of the rotating rod 5, the positions of the detection probe 6 and the adsorption head 7 are mutually changed after the rotating rod 5 rotates 180 degrees, make the absorption end of adsorption head 7 be located the top of chip, adsorption head 7 descends and adsorbs the extraction with unqualified chip, place unqualified chip in the collection box 13 of preparation, wait for the staff collective recovery can, place 11 top surfaces at the storage plate through placing a plurality of storage box 12, the flexible lift of end of control cylinder 10 makes the storage box 12 bottom surface of the top and detect 1 top surface parallel and level of platform, power device who starts 14 one end of lead screw 14 after the chip monitoring in the storage box 12 of the top is accomplished rotates lead screw 14, movable block 15 drives push pedal 16 and removes, push pedal 16 promotes storage box 12, make the storage box 12 of the top take place to remove, reset push pedal 16 again, flexible end is controlled once more to second storage box 12 goes up and down to the position of monitoring to cylinder 10.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a self-propelled end surface monitor, is including examining test table (1), its characterized in that: detect platform (1) both sides and be equipped with mobile device (2), mobile device (2) surface is equipped with elevating gear (3), connecting plate (4) are installed to the lift end of elevating gear (3), connecting plate (4) openly are equipped with dwang (5), be equipped with respectively in the recess on dwang (5) surface and detect probe (6) and adsorb head (7), the recess inner array that detects platform (1) top surface is equipped with storage box (12), it is equipped with push pedal (16) to detect platform (1) top surface, it has placed collection box (13) to detect platform (1) top surface.

2. The self-propelled end surface monitor of claim 1, wherein: dwang (5) openly is connected with connecting plate (4) through the bearing frame, and the link of detecting probe (6) and adsorption head (7) respectively with the recess threaded connection on dwang (5) surface.

3. The self-propelled end surface monitor of claim 1, wherein: the side of the connecting plate (4) is provided with a motor (8), and the rotating end of the motor (8) and the surface of the rotating rod (5) are respectively provided with a gear (9).

4. The self-propelled end surface monitor of claim 3, wherein: the motor (8) is positioned in a groove in the side face of the connecting plate (4), the motor (8) is fixed with the connecting plate (4) through a bolt, and the two gears (9) are meshed with each other.

5. The self-propelled end surface monitor of claim 1, wherein: an air cylinder (10) is fixed in a groove in the top surface of the detection table (1), a storage plate (11) is installed at the telescopic end of the air cylinder (10), and a storage box (12) is placed on the top surface of the storage plate (11).

6. The self-propelled end surface monitor of claim 1, wherein: one end of the push plate (16) is connected with a moving block (15) through a bolt, and the moving block (15) is located in a groove in the top surface of the detection platform (1).

7. The self-propelled end surface monitor according to claim 6, wherein: the lead screw (14) is installed in the groove in the side face of the detection table (1), the moving block (15) is sleeved on the surface of the lead screw (14), and the moving block (15) is movably connected with the lead screw (14).