CN220795065U - Crucible surface defect detection device - Google Patents

Crucible surface defect detection device Download PDF

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Publication number
CN220795065U
CN220795065U CN202322360180.1U CN202322360180U CN220795065U CN 220795065 U CN220795065 U CN 220795065U CN 202322360180 U CN202322360180 U CN 202322360180U CN 220795065 U CN220795065 U CN 220795065U
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CN
China
Prior art keywords
crucible
top surface
supporting table
annular
defect detection
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CN202322360180.1U
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Chinese (zh)
Inventor
何军舫
王军勇
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Boyu Tianjin Semiconductor Material Co ltd
Boyu Zhaoyang Semiconductor Technology Co ltd
Boyu Semiconductor Vessel Craftwork Technology Co ltd
Original Assignee
Boyu Tianjin Semiconductor Material Co ltd
Boyu Zhaoyang Semiconductor Technology Co ltd
Boyu Semiconductor Vessel Craftwork Technology Co ltd
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Application filed by Boyu Tianjin Semiconductor Material Co ltd, Boyu Zhaoyang Semiconductor Technology Co ltd, Boyu Semiconductor Vessel Craftwork Technology Co ltd filed Critical Boyu Tianjin Semiconductor Material Co ltd
Priority to CN202322360180.1U priority Critical patent/CN220795065U/en
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Publication of CN220795065U publication Critical patent/CN220795065U/en
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Abstract

The utility model discloses a crucible surface defect detection device, which comprises a supporting table, wherein the top surface of the supporting table is provided with a rotating mechanism for supporting a crucible and a driving mechanism for driving the rotating mechanism to rotate; an illumination mechanism for illuminating the crucible is arranged on the top surface of the supporting table and positioned on the inner side of the rotating mechanism; and a CCD visual detector is arranged on the top surface of the supporting table corresponding to the illumination mechanism and is used for collecting surface images of the crucible for detection and comparison. The crucible surface defect detection device is simple and convenient in the whole detection process, and the crucible in the rotation process is subjected to image information acquisition of the whole annular wall surface, so that the acquisition information is more accurate, the detection standard is uniform, and the detection efficiency is higher.

Description

Crucible surface defect detection device
Technical Field
The utility model relates to the technical field of crucible defect detection equipment, in particular to a crucible surface defect detection device.
Background
Before the PBN crucible is used, the PBN crucible must be carefully checked to judge whether the quality of the PBN crucible is qualified, so that the PBN crucible with defects such as cracks, impurity points, scratches and the like can be prevented from being applied to actual production.
At present, the quality detection of the PBN crucible generally needs to observe whether the PBN crucible has defects such as cracks, bubbles, scratches, layering, dirt and the like, and if the defects exist and exceed the specified technical standard, the quality of the PBN crucible is unqualified; if the PBN crucible is not present or within the specified technical standard, the PBN crucible is qualified in quality. Because each surface of the PBN crucible needs to be inspected, the detection efficiency is low only by detection means such as manual visual inspection, and different standards exist due to the difference of manual individual judgment, so that the delivery quality of the crucible is different; therefore, the application provides a crucible surface defect detection device which is used for improving the detection efficiency and unifying the detection standard.
Disclosure of Invention
In view of the above-described drawbacks or shortcomings of the prior art, it is desirable to provide a crucible surface defect detection apparatus.
The utility model provides a crucible surface defect detection device, which comprises a supporting table, wherein the top surface of the supporting table is provided with a rotating mechanism for supporting a crucible and a driving mechanism for driving the rotating mechanism to rotate; an illumination mechanism for illuminating the crucible is arranged on the top surface of the supporting table and positioned on the inner side of the rotating mechanism; and a CCD visual detector is arranged on the top surface of the supporting table corresponding to the illumination mechanism and is used for collecting surface images of the crucible for detection and comparison.
Preferably, the rotating mechanism comprises a rotating bearing fixedly arranged on the top surface of the supporting table, an annular connecting piece is fixedly arranged on the inner ring transmission surface of the rotating bearing, and an annular rotating table is fixedly arranged on the top surface of the annular connecting piece; the rotating bearing, the annular connecting piece and the annular rotating platform are coaxially arranged.
Preferably, the illumination mechanism comprises an installation table which is fixedly arranged on the top surface of the supporting table and corresponds to the inner ring of the annular rotary table, a lamp post is fixedly arranged on the top surface of the installation table, and the lamp post penetrates out of the inner ring of the annular rotary table to be arranged; the side surface and the upper surface of the lamp post are respectively and fixedly provided with a side lamp belt and a top lamp belt
Preferably, the driving mechanism comprises a worm wheel fixedly sleeved on the outer side wall surface of the annular rotary table, and a worm is arranged on the top surface of the supporting table and meshed with the worm wheel; one end of the worm is fixedly connected with the transmission end of the driving motor.
Preferably, the CCD visual detector is arranged in the illumination direction of the side lamp strip.
Compared with the prior art, the utility model has the beneficial effects that:
according to the crucible surface defect detection device, the crucible is placed on the rotatable annular rotary table to drive the crucible to rotate, meanwhile, the side lamp strip and the ceiling lamp strip at the inner side of the crucible irradiate the annular wall surface of the crucible, quartz becomes transparent after being irradiated by strong light, and then the crucible surface image characteristics are collected through the CCD visual detector to be matched with matched software, so that the surface of the PBN crucible can be detected.
It should be understood that the description in this summary is not intended to limit the critical or essential features of the embodiments of the utility model, nor is it intended to limit the scope of the utility model.
Other features of the present utility model will become apparent from the description that follows.
Drawings
Other features, objects and advantages of the present utility model will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the accompanying drawings in which:
FIG. 1 is a schematic diagram of a crucible surface defect detecting device according to an embodiment of the present utility model;
FIG. 2 is a schematic top view of an annular rotary table;
reference numerals in the drawings: 1. a support table; 2. a CCD visual detector; 3. a rotating bearing; 4. an annular connecting member; 5. an annular rotary table; 6. a mounting table; 7. a lamp post; 8. a side light belt; 9. a ceiling lamp belt; 10. a worm wheel; 11. a worm; 12. and a crucible.
Detailed Description
The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting of the utility model. It should be noted that, for convenience of description, only the portions related to the utility model are shown in the drawings.
It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other. The utility model will be described in detail below with reference to the drawings in connection with embodiments.
Referring to fig. 1-2, an embodiment of the present utility model provides a crucible surface defect detecting device, including a supporting table 1, wherein a rotating mechanism for supporting a crucible 12 and a driving mechanism for driving the rotating mechanism to rotate are arranged on a top surface of the supporting table 1; an illumination mechanism for illuminating the crucible 12 is arranged on the top surface of the support table 1 and positioned on the inner side of the rotation mechanism; the CCD visual detector 2 is arranged on the top surface of the supporting table 1 corresponding to the illumination mechanism and is used for collecting the surface image of the crucible 12 for detection and comparison.
The CCD visual detector 2 is provided with a matched software system, and can be used for setting defect reference and adjusting rotating speed to match with the CCD;
the CCD visual inspection machine 2, namely a machine visual inspection machine, adopts an industrial camera to photograph and analyze images to obtain expected effects, and comprises the main components of the industrial camera, a lens, a light source, an industrial personal computer and the like; the CCD visual detector mainly adopts the working principle that an industrial camera is adopted to take pictures, obtain image analysis images and find out NG and OK products.
In a preferred embodiment, the illumination mechanism comprises a mounting table 6 fixedly arranged on the top surface of the supporting table 1 corresponding to the inner ring of the annular rotary table 5, a lamp post 7 is fixedly arranged on the top surface of the mounting table 6, and the lamp post 7 penetrates through the inner ring of the annular rotary table 5; the side surface and the upper surface of the lamp post 7 are respectively fixedly provided with a side lamp belt 8 and a top lamp belt 9.
The side lamp strip 8 and the ceiling lamp strip 9 are used as light sources of the CCD visual detector 2, generally an LED light source is selected, the light is stable and is not suddenly and suddenly emitted, the detection precision can be ensured, the heat dissipation of the light source is noted, and the service life can be prolonged.
The CCD visual detector 2 converts a captured target into an image signal by using machine visual hardware (namely an image capturing component), transmits the image signal to a special image processing system, and analyzes whether different defects such as cracks, bubbles, scratches, layering, dirt and the like exist on an image according to the information such as pixel distribution, brightness, color and the like, and converts the defects into a digital signal;
in a preferred embodiment, the rotating mechanism comprises a rotating bearing 3 fixedly arranged on the top surface of the supporting table 1, an annular connecting piece 4 is fixedly arranged on the inner ring transmission surface of the rotating bearing 3, an annular rotating table 5 is fixedly arranged on the top surface of the annular connecting piece 4, a layer of rubber pad is arranged on the top surface of the annular rotating table 5, the crucible 12 placed on the annular rotating table 5 is prevented from being worn, meanwhile, friction between the crucible 12 and the annular rotating table 5 can be increased, and stability of the crucible 12 in the rotating process is improved; the rotating bearing 3, the annular connecting piece 4 and the annular rotating table 5 are coaxially arranged.
Wherein, the bottom surface of the annular connecting piece 4 is higher than the top surface of the supporting table 1, so as to avoid interference with the rotation of the annular connecting piece 4; the diameter of the inner ring of the annular rotary table 5 is smaller than that of the annular connecting piece 4, so that the annular rotary table 5 is convenient to install on the top surface of the annular connecting piece 4.
In a preferred embodiment, the driving mechanism comprises a worm wheel 10 fixedly sleeved on the outer side wall surface of the annular rotary table 5, and a rotatable worm 11 meshed with the worm wheel 10 is arranged on the top surface of the supporting table 1; one end of the worm 11 is fixedly connected with the transmission end of the driving motor; the driving motor drives the worm 11 to rotate, the worm 11 drives the worm wheel 10 to rotate, and then the annular rotary table 5 is driven to rotate, so that the rotation of the crucible 12 is realized.
Wherein, the symmetrical fixed two mounting plates that are provided with on the top surface of brace table 1, worm 11 rotatable setting is in two mounting plates and with worm wheel 10 engaged arrangement.
In a preferred embodiment, the CCD visual detector 2 is arranged in the illumination direction of the side light strips 8.
The working principle of the utility model is as follows: placing the crucible 12 on the top surface of the annular rotary table 5 and sleeving the crucible on the outer side of the lamp post 7, switching on the power supply of the side lamp belt 8 and the ceiling lamp belt 9, and irradiating the wall surface on the inner side of the crucible 12; then the worm 11 is driven to rotate by the driving motor, the worm 11 drives the worm wheel 10 to rotate, the annular rotary table 5 is driven to rotate, the crucible 12 rotates along with the annular rotary table 5, the image acquisition mechanism of the CCD visual inspection machine 2 is used for acquiring images of the whole annular wall surface of the crucible 12 in the rotating process, and the acquired image information is converted, analyzed and compared by the system, so that whether the crucible surface inspection is qualified or not is obtained.
The whole detection process is simple and convenient, the image information of the whole annular wall surface is acquired by the crucible in the rotation process, the acquired information is more accurate, the detection standard is uniform, and the detection efficiency is higher.
In the description of the present specification, the terms "connected," "mounted," "secured," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, a removable connection, or an integral connection; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
In the description of the present specification, the terms "one embodiment," "some embodiments," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is merely a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and variations may be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims (5)

1. The crucible surface defect detection device is characterized by comprising a supporting table, wherein a rotating mechanism for supporting the crucible and a driving mechanism for driving the rotating mechanism to rotate are arranged on the top surface of the supporting table; an illumination mechanism for illuminating the crucible is arranged on the top surface of the supporting table and positioned on the inner side of the rotating mechanism; and a CCD visual detector is arranged on the top surface of the supporting table corresponding to the illumination mechanism and is used for collecting surface images of the crucible for detection and comparison.
2. The crucible surface defect detection apparatus according to claim 1, wherein the rotation mechanism comprises a rotation bearing fixedly arranged on the top surface of the support table, an annular connecting piece is fixedly arranged on the inner ring transmission surface of the rotation bearing, and an annular rotary table is fixedly arranged on the top surface of the annular connecting piece; the rotating bearing, the annular connecting piece and the annular rotating platform are coaxially arranged.
3. The crucible surface defect detection device according to claim 2, wherein the illumination mechanism comprises an installation table fixedly arranged on the top surface of the supporting table corresponding to the inner ring of the annular rotary table, a lamp post is fixedly arranged on the top surface of the installation table, and the lamp post penetrates out of the inner ring of the annular rotary table; the side and upper surface of the lamp post are respectively and fixedly provided with a side lamp belt and a top lamp belt.
4. The crucible surface defect detection device according to claim 2, wherein the driving mechanism comprises a worm wheel fixedly sleeved on the outer side wall surface of the annular rotary table, and a worm is arranged on the top surface of the supporting table and meshed with the worm wheel; one end of the worm is fixedly connected with the transmission end of the driving motor.
5. The crucible surface defect detection apparatus according to claim 3, wherein the CCD vision detector is provided in the illumination direction of the side light belt.
CN202322360180.1U 2023-08-31 2023-08-31 Crucible surface defect detection device Active CN220795065U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202322360180.1U CN220795065U (en) 2023-08-31 2023-08-31 Crucible surface defect detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202322360180.1U CN220795065U (en) 2023-08-31 2023-08-31 Crucible surface defect detection device

Publications (1)

Publication Number Publication Date
CN220795065U true CN220795065U (en) 2024-04-16

Family

ID=90663640

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202322360180.1U Active CN220795065U (en) 2023-08-31 2023-08-31 Crucible surface defect detection device

Country Status (1)

Country Link
CN (1) CN220795065U (en)

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