CN214957795U - VCSEL laser - Google Patents

VCSEL laser Download PDF

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Publication number
CN214957795U
CN214957795U CN202121203198.5U CN202121203198U CN214957795U CN 214957795 U CN214957795 U CN 214957795U CN 202121203198 U CN202121203198 U CN 202121203198U CN 214957795 U CN214957795 U CN 214957795U
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China
Prior art keywords
vcsel laser
super
substrate
lens
laser chip
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CN202121203198.5U
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Chinese (zh)
Inventor
邱山峰
王晓锋
邵雷
朱龙
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Huatian Huichuang Technology Xi'an Co ltd
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Huatian Huichuang Technology Xi'an Co ltd
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Abstract

The utility model discloses a VCSEL laser, which comprises a super-structured lens, a base, a VCSEL laser chip, a substrate and a nano-column; the VCSEL laser chip is arranged on the substrate, the VCSEL laser chip is electrically connected with the substrate, the base is arranged on the substrate, and the super-structure lens is arranged on the base; the upper surface of the super-structure lens is provided with a nano-column, and incident light passes through the nano-column on the surface of the super-structure lens and is transmitted to the VCSEL laser chip. The VCSEL laser chip and the substrate are electrically connected through gold wires. A plurality of bases surround and form the rectangle structure, and VCSEL laser chip sets up the center at the rectangle base, and the upper end of rectangle base is provided with the recess, and super lens setting is inside the recess. By adopting the super-structure lens with the nano-columnar structure, the number of optical elements is reduced, the cost is greatly reduced, the collimation and replication effects of light in a VCSEL laser product are realized, a collimating mirror and a DOE (laser emission element) of the traditional VCSEL laser are replaced, and the purpose of product miniaturization is finally realized.

Description

VCSEL laser
Technical Field
The utility model belongs to the technical field of the laser instrument, specifically belong to a VCSEL laser instrument.
Background
The VCSEL is a surface emitting laser, which is one of the light sources used for fiber-optic communication. The array has the advantages of small volume, circular output light spots, single longitudinal mode output, small threshold current, low price, easy integration into a large-area array and the like, and is widely applied to the fields of optical communication, optical interconnection, optical storage and the like.
The VCSEL laser chip emits invisible infrared light, the infrared light is collimated through a collimating mirror, collimated parallel infrared light is scattered through an DOE (optical diffraction element), and then a speckle pattern which is obtained through diffraction replication is obtained.
The VCSEL laser in the prior art has a complex structure, adopts a large number of optical elements, causes high cost, and does not meet the development requirement of miniaturization of electronic products.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem that exists among the prior art, the utility model provides a VCSEL laser replaces traditional optical scheme, has reduced optical element's quantity, and the cost is reduced, and the product of making is more frivolous small and exquisite, accords with the miniaturized development demand of consumer electronics product.
In order to achieve the above object, the utility model provides a following technical scheme:
a VCSEL laser comprises a super-structure lens, a base, a VCSEL laser chip and a substrate;
the VCSEL laser chip is arranged on the substrate, the VCSEL laser chip is electrically connected with the substrate, the base is arranged on the substrate, and the super-structure lens is arranged on the base;
and a nano-column is formed on the upper surface of the super-structure lens, and incident light passes through the nano-column on the surface of the super-structure lens and is transmitted to the VCSEL laser chip.
Preferably, the VCSEL laser chip and the substrate are electrically connected by gold wires.
Preferably, the bases surround to form a rectangular structure, the VCSEL laser chip is arranged at the center of the rectangular base, a groove is formed in the upper end of the rectangular base, and the super-structure lens is arranged inside the groove.
Preferably, the nano-pillars on the super-structure lens are formed by etching through a photoetching technology.
Preferably, the bottom of the substrate is provided with a pad, and the pad is used for connecting an application terminal.
Preferably, the thickness of the super-structured lens is less than 0.8 mm.
Preferably, the super-structure lens is in a circular or polygonal structure.
Preferably, the VCSEL laser chip and the substrate are connected through conductive silver paste or glue.
Preferably, the base and the substrate are connected through glue.
Compared with the prior art, the utility model discloses following profitable technological effect has:
the utility model provides a VCSEL laser, super lens that has nanometer column structure through the adoption, optical element's quantity has been reduced, very big reduction in cost, super lens's surface has nanometer column structure, shape through changing the nanometer post, can reach the phase place to passing the planar wavefront of structurization, the control of range and polarization state, thereby carry out local control to the scattered field, and the optical effect that the molding light stream is incomparable with the creation natural material, realized in VCSEL laser product, collimation and the duplicative effect of light, replace the collimating mirror and the DOE of traditional VCSEL laser, finally realize the purpose of product miniaturization.
Drawings
Fig. 1 is a schematic structural diagram of a VCSEL laser according to the present invention;
FIG. 2 is a schematic diagram of the optical effect of a super-structured lens.
In the drawings: 1 is super lens, 2 is the base, 3 is VCSEL laser chip, 4 is the gold thread, 5 is the base plate, 6 is the pad, 101 is the nano-column.
Detailed Description
The present invention will now be described in further detail with reference to specific examples, which are intended to be illustrative, but not limiting, of the invention.
As shown in fig. 1, a VCSEL laser includes a super lens 1, a base 2, a VCSEL laser chip 3, gold wires 4, a substrate 5, and a bonding pad 6; the VCSEL laser chip 3 is attached to the substrate 5, the VCSEL laser chip 3 is electrically connected with the substrate 5 through a gold wire 4, and the VCSEL laser chip 3 is connected with the substrate 5 through conductive silver paste or glue; the base 2 is attached to the upper surface of the substrate 5, and the base 2 is connected with the substrate 5 through glue; a plurality of bases 2 surround and form the rectangle structure, and VCSEL laser chip 3 sets up in the center of rectangle base 2, and the upper end of rectangle base 2 is provided with the recess, and super lens 1 sets up inside the recess, and super lens 1 is circular or polygonal structure. The light between the super-structure lens 1 and the VCSEL laser chip 3 is coaxial, the upper surface of the super-structure lens 1 is provided with a nano-column 101, and the nano-column 101 is used for condensing incident light. The bottom of the substrate 5 is provided with pads 6, the pads 6 being used for connection of application terminals.
The super-structure lens 1 has a flat surface with a nano structure, incident light can be transmitted to an expected place by utilizing light condensation of the nano structure, compared with a traditional lens, the weight of the super-structure lens 1 with a nano material plane is greatly reduced, complex curvature of refracted light can be simulated when a sub-wavelength nano structure on the surface of the super-structure lens 1 forms a specific repeated mode, the super-structure lens is not heavy than the traditional lens, and the light focusing capacity is improved under the condition of reducing distortion.
The utility model provides a VCSEL laser replaces traditional optics scheme, has reduced optical element's quantity, the cost is reduced, and the product that new scheme was made is more frivolous small and exquisite, accords with the miniaturized development demand of consumer electronics product.
As shown in fig. 2, the surface of the super-structure lens 1 has a nano-pillar structure, the thickness of the super-structure lens 1 is less than 0.8mm, the nano-pillar 101 is etched and formed by adopting a photolithography technique, and the control of the phase, amplitude and polarization state of the wavefront passing through the structured plane is achieved by designing the shape and size of the nano-pillar 101, so that the scattered field is locally controlled, and the optical flow is molded to create an optical effect which cannot be compared with natural materials, thereby realizing the collimation and replication effects of light in a VCSEL laser product, replacing a collimating mirror and a DOE of a conventional VCSEL laser, and finally realizing the purpose of product miniaturization.
To sum up, the utility model provides a VCSEL laser replaces collimating mirror and DOE through making super lens, has reduced optical element's quantity, very big cost reduction, the utility model discloses the product of making is more frivolous small and exquisite, accords with the miniaturized development demand of consumer electronics product.

Claims (9)

1. A VCSEL laser is characterized by comprising a super-structure lens (1), a base (2), a VCSEL laser chip (3) and a substrate (5);
the VCSEL laser chip (3) is arranged on the substrate (5), the VCSEL laser chip (3) is electrically connected with the substrate (5), the base (2) is arranged on the substrate (5), and the super-structure lens (1) is arranged on the base (2);
a nano-column (101) is formed on the upper surface of the super-structure lens (1), and incident light passes through the nano-column (101) on the upper surface of the super-structure lens (1) and is transmitted to the VCSEL laser chip (3).
2. A VCSEL laser according to claim 1, characterized in that the electrical connection between the VCSEL laser chip (3) and the substrate (5) is made by means of gold wires (4).
3. A VCSEL laser according to claim 1, wherein the plurality of pedestals (2) surround to form a rectangular structure, the VCSEL laser chip (3) is disposed in the center of the rectangular pedestal (2), the rectangular pedestal (2) is provided with a groove at the upper end, and the super lens (1) is disposed inside the groove.
4. A VCSEL laser according to claim 1, wherein the nano-pillars (101) on the superstructured lens (1) are etched using photolithography.
5. A VCSEL laser according to claim 1, characterized in that the bottom of the substrate (5) is provided with bonding pads (6), the bonding pads (6) being used for connection to application terminals.
6. A VCSEL laser according to claim 1, characterized in that the thickness of the superstructured lens (1) is less than 0.8 mm.
7. A VCSEL laser according to claim 1, characterized in that said superstructured lens (1) has a circular or polygonal structure.
8. A VCSEL laser according to claim 1, wherein the VCSEL laser chip (3) and the substrate (5) are connected by means of a conductive silver paste or glue.
9. A VCSEL laser according to claim 1, characterized in that the connection between the submount (2) and the substrate (5) is made by means of glue.
CN202121203198.5U 2021-05-31 2021-05-31 VCSEL laser Active CN214957795U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121203198.5U CN214957795U (en) 2021-05-31 2021-05-31 VCSEL laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121203198.5U CN214957795U (en) 2021-05-31 2021-05-31 VCSEL laser

Publications (1)

Publication Number Publication Date
CN214957795U true CN214957795U (en) 2021-11-30

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114188815A (en) * 2021-12-09 2022-03-15 北京工业大学 Lens-free focusing device and method of coherent array laser

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114188815A (en) * 2021-12-09 2022-03-15 北京工业大学 Lens-free focusing device and method of coherent array laser
CN114188815B (en) * 2021-12-09 2022-08-05 北京工业大学 Lens-free focusing device and method of coherent array laser

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