CN214921358U - Welding tool for tungsten-titanium alloy target assembly - Google Patents
Welding tool for tungsten-titanium alloy target assembly Download PDFInfo
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- CN214921358U CN214921358U CN202120399855.1U CN202120399855U CN214921358U CN 214921358 U CN214921358 U CN 214921358U CN 202120399855 U CN202120399855 U CN 202120399855U CN 214921358 U CN214921358 U CN 214921358U
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Abstract
The utility model relates to a welding frock of tungsten titanium alloy target subassembly, include: the back plate, the aluminum intermediate layer, the tungsten-titanium alloy target and the cover plate are sequentially arranged; the surface of the back plate is provided with a first groove; an aluminum intermediate layer is arranged in the first groove; the surface of the cover plate is provided with a convex part matched with the first groove; a second groove is formed in the platform of the convex part, the tungsten-titanium alloy target is arranged in the second groove, and the first groove comprises a gradually-reduced structure and a cylindrical structure which are sequentially arranged; the included angle between the inclined plane of the reducing structure and the normal line of the bottom surface of the first groove is 45-60 degrees; threads are arranged on one surface of the aluminum intermediate layer, which is in contact with the tungsten-titanium alloy target material; the fit clearance of the first groove and the convex part is 0.4-1 mm; the welding surfaces of the back plate and the tungsten-titanium alloy target are both provided with titanium films. The problem that cracks are generated on the surface of the tungsten-titanium alloy target after the target assembly is welded in the prior art is solved, the target assembly is efficiently welded, the welding bonding rate is more than 98%, and the service life is long.
Description
Technical Field
The utility model relates to a target field, concretely relates to welding frock of tungsten titanium alloy target subassembly.
Background
Sputtering coating is a common technique in semiconductor production at present, a target used in sputtering coating is usually fixed by a back plate to realize accurate fixation, heat dissipation and the like of the target, and the currently commonly adopted fixing mode is welding.
For example, CN104259644A discloses a tungsten-titanium alloy target welding method, which belongs to the technical field of semiconductor manufacturing. The method comprises the following steps: firstly, providing a tungsten-titanium alloy target material and a copper alloy back plate; forming an aluminum or aluminum alloy layer on the welding surface of the tungsten-titanium target; and then connecting the tungsten-titanium alloy target to the copper alloy back plate by adopting a diffusion welding method. The low-temperature welding of the tungsten-titanium alloy target is realized by utilizing the aluminum or aluminum alloy layer, the welding strength of the tungsten-titanium target is improved, the target is prevented from being cracked, and the target is suitable for a high-power sputtering process.
CN111660003A discloses a sputtering target welding method, which relates to the technical field of target welding, and is implemented by the following devices, comprising: sputtering target material, back plate and friction stir welding machine; the sputtering target welding method comprises the following steps: firstly, setting the distance between a sputtering target and a welding joint part of a back plate to be less than or equal to 1 mm; then welding through a friction stir welding machine, inserting a rotary cutter on the friction stir welding machine into the welding joint part, wherein the insertion depth of the rotary cutter is 3-20mm, and the sputtering target and the back plate synchronously rotate when the rotary cutter is used for carrying out rotary welding; the back plate is made of aluminum alloy or copper alloy, so that the cost of raw materials for manufacturing the sputtering target material is saved, high welding rate is ensured, the cost is reduced during large-scale production by adopting the welding method, the sputtering target material with low cost can be produced in large scale, and the cost for manufacturing the chip is greatly reduced when the target material is used for manufacturing the chip.
CN108994444A discloses a sputtering target welding method, which comprises the following steps: (1) adjusting the welding gap between the main material and the auxiliary material of the sputtering target material to be less than or equal to 0.3 mm; (2) welding by using a friction stir welding machine: the depth of a rotary cutter on the friction stir welding machine inserted into a welding gap is 10.5-11mm, the rotary cutter rotates to carry out welding, and the auxiliary material rotates along with the main material when the rotary cutter rotates to weld. The method has the advantages that the cost of raw materials for manufacturing the sputtering target material is saved, high welding rate is ensured, and the cost is reduced during large-scale production by adopting the welding method, so that the sputtering target material with low cost can be produced in large scale, and the cost for manufacturing the chip is greatly reduced when the target material is used for manufacturing the chip.
However, the target material assembly still has the problem that the target material surface cracks after welding to generate cracks, and meanwhile, the service life of the target material is also short.
SUMMERY OF THE UTILITY MODEL
In view of the problem that exists among the prior art, the utility model aims to provide a welding frock of tungsten titanium alloy target subassembly through set up the screw thread on aluminium intermediate layer surface, and the problem that tungsten titanium alloy target subassembly welding back target surface fracture produced crackle among the prior art has been solved to the angle and the control fit clearance on the inclined plane of control convergent structure, can realize the high-efficient welding of tungsten titanium alloy target subassembly, and the welding joint rate can reach more than 98%, long service life.
To achieve the purpose, the utility model adopts the following technical proposal:
the utility model provides a welding frock of tungsten titanium alloy target subassembly, the welding frock of tungsten titanium alloy target includes: the back plate, the aluminum intermediate layer, the tungsten-titanium alloy target and the cover plate are sequentially arranged;
a first groove is formed in the surface of the back plate;
a convex part matched with the first groove is arranged on the surface of the cover plate;
a second groove is formed in the platform of the convex part, and the minimum diameter of the convex part is equal to that of the second groove;
a tungsten-titanium alloy target is arranged in the second groove, and the depth of the second groove is equal to the thickness of the tungsten-titanium alloy target;
the first groove comprises a gradually-reduced structure and a cylindrical structure which are arranged in sequence;
the included angle between the inclined plane of the reducing structure and the normal line of the bottom surface of the first groove is 45-60 degrees;
the depth of the tapered structure is greater than the depth of the cylindrical structure;
an aluminum intermediate layer is arranged in the cylindrical structure of the first groove;
the depth of the cylindrical structure is less than or equal to the thickness of the aluminum intermediate layer;
the diameter of the cylindrical structure is equal to that of the second groove;
threads are arranged on one surface of the aluminum intermediate layer, which is in contact with the tungsten-titanium alloy target material;
the fit clearance of the first groove and the convex part is 0.4-1 mm;
the fit clearance between the side surface of the aluminum intermediate layer and the side surface of the cylindrical structure is 0.4-0.8 mm;
the fit clearance between the side surface of the tungsten-titanium alloy target and the side surface of the second groove is 0.5-0.9 mm;
and the welding surfaces of the back plate and the tungsten-titanium alloy target are both provided with titanium films.
The utility model provides a welding frock through set up the screw thread on aluminium intermediate layer surface, and the problem that tungsten titanium alloy target subassembly welding back target surface fracture cracked among the prior art has been solved to the angle and the control fit clearance on the inclined plane of control convergent structure, can realize the high-efficient welding of target subassembly, and the welding bonding rate can reach more than 98%, long service life.
In the present invention, the included angle between the inclined plane of the tapered structure and the normal line of the bottom surface of the first groove is 45-60 °, for example, 45 °, 46 °, 47 °, 48 °, 49 °, 50 °, 51 °, 52 °, 53 °, 54 °, 55 °, 56 °, 57 °, 58 °, 59 °, or 60 °, but not limited to the enumerated values, and other unrecited values in the range are also applicable.
In the present invention, the fitting clearance of the first groove and the convex part is 0.4-1mm, for example, 0.4mm, 0.42mm, 0.44mm, 0.46mm, 0.48mm, 0.5mm, 0.52mm, 0.54mm, 0.56mm, 0.58mm, 0.6mm, 0.62mm, 0.64mm, 0.66mm, 0.68mm, 0.7mm, 0.72mm, 0.74mm, 0.76mm, 0.78mm, 0.8mm, 0.82mm, 0.84mm, 0.86mm, 0.88mm, 0.9mm, 0.92mm, 0.94mm, 0.96mm, 0.98mm, or 1mm, etc., but not limited to the enumerated values, and other unrecited values in the range are also applicable.
The utility model discloses in, the fit clearance of first recess and convex part is the perpendicular distance between the inclined plane of the convergent structure of first recess and the inclined plane of convex part.
In the present invention, the fitting clearance between the side of the aluminum intermediate layer and the side of the cylindrical structure is 0.4-0.8mm, for example, 0.4mm, 0.42mm, 0.44mm, 0.46mm, 0.48mm, 0.5mm, 0.52mm, 0.54mm, 0.56mm, 0.58mm, 0.6mm, 0.62mm, 0.64mm, 0.66mm, 0.68mm, 0.7mm, 0.72mm, 0.74mm, 0.76mm, 0.78mm, or 0.8mm, but not limited to the enumerated values, and other non-enumerated values in the range are also applicable.
In the present invention, the fitting gap between the side of the tungsten-titanium alloy target and the side of the second groove is 0.5-0.9mm, for example, 0.5mm, 0.55mm, 0.6mm, 0.65mm, 0.7mm, 0.75mm, 0.8mm, 0.85mm, or 0.9mm, but not limited to the enumerated values, and other unrecited values in the range are also applicable.
As a preferable embodiment of the present invention, the back plate has a welding surface provided with a titanium film having a thickness of 3 to 6 μm, for example, 3 μm, 3.1 μm, 3.2 μm, 3.3 μm, 3.4 μm, 3.5 μm, 3.6 μm, 3.7 μm, 3.8 μm, 3.9 μm, 4 μm, 4.1 μm, 4.2 μm, 4.3 μm, 4.4 μm, 4.5 μm, 4.6 μm, 4.7 μm, 4.8 μm, 4.9 μm, 5 μm, 5.1 μm, 5.2 μm, 5.3 μm, 5.4 μm, 5.5 μm, 5.6 μm, 5.7 μm, 5.8 μm, 5.9 μm, or 6 μm, but the values are not limited to the same values as those listed.
In a preferred embodiment of the present invention, the bonding surface of the tungsten-titanium alloy target is provided with a titanium film having a thickness of 4 to 5 μm, for example, 4 μm, 4.1 μm, 4.2 μm, 4.3 μm, 4.4 μm, 4.5 μm, 4.6 μm, 4.7 μm, 4.8 μm, 4.9 μm, or 5 μm, but not limited to the above-mentioned values, and other values not listed in this range are also applicable.
In a preferred embodiment of the present invention, the fitting clearance between the first concave groove and the convex portion is 0.5 to 0.6mm, and may be, for example, 0.5mm, 0.51mm, 0.52mm, 0.53mm, 0.54mm, 0.55mm, 0.56mm, 0.57mm, 0.58mm, 0.59mm, or 0.6mm, but not limited to the above-mentioned values, and other values not listed in the range are also applicable.
In a preferred embodiment of the present invention, the thickness of the aluminum intermediate layer is 3 to 5mm, and may be, for example, 3mm, 3.1mm, 3.2mm, 3.3mm, 3.4mm, 3.5mm, 3.6mm, 3.7mm, 3.8mm, 3.9mm, 4mm, 4.1mm, 4.2mm, 4.3mm, 4.4mm, 4.5mm, 4.6mm, 4.7mm, 4.8mm, 4.9mm, or 5mm, but not limited to the values mentioned above, and other values not mentioned above are also applicable within this range.
In a preferred embodiment of the present invention, the thickness of the tungsten-titanium alloy target is 5 to 7mm, for example, 5mm, 5.1mm, 5.2mm, 5.3mm, 5.4mm, 5.5mm, 5.6mm, 5.7mm, 5.8mm, 5.9mm, 6mm, 6.1mm, 6.2mm, 6.3mm, 6.4mm, 6.5mm, 6.6mm, 6.7mm, 6.8mm, 6.9mm, or 7mm, but not limited to the above-mentioned values, and other values not listed in the range are also applicable.
As the preferred technical scheme of the utility model, the inclined plane of convergent structure is 45 with the contained angle of first recess bottom surface normal.
As the preferred technical scheme of the utility model, the degree of depth of cylinder structure equals the thickness in aluminium intermediate level.
In a preferred embodiment of the present invention, the pitch of the thread is 0.7 to 0.8mm, and may be, for example, 0.71mm, 0.72mm, 0.73mm, 0.74mm, 0.75mm, 0.76mm, 0.77mm, 0.78mm, 0.79mm, or 0.8mm, but not limited to the above-mentioned values, and other values not shown in the above-mentioned range are also applicable.
In a preferred embodiment of the present invention, the depth of the thread is 0.6 to 0.7mm, and may be, for example, 0.6mm, 0.61mm, 0.62mm, 0.63mm, 0.64mm, 0.65mm, 0.66mm, 0.67mm, 0.68mm, 0.69mm, or 0.7mm, but not limited to the above-mentioned values, and other values not listed in the range are also applicable.
Compared with the prior art, the utility model discloses following beneficial effect has at least:
the utility model provides a welding frock through set up the screw thread on aluminium intermediate layer surface, and the problem that tungsten titanium alloy target subassembly welding back target surface fracture cracked among the prior art has been solved to the angle and the control fit clearance on the inclined plane of control convergent structure, can realize the high-efficient welding of target subassembly, and the welding bonding rate can reach more than 98%, long service life.
Drawings
Fig. 1 is a schematic view of a welding tool for a tungsten-titanium alloy target assembly provided in embodiment 1 of the present invention.
In the figure: 1-back plate, 2-aluminum intermediate layer, 3-tungsten titanium alloy target material and 4-cover plate.
The present invention will be described in further detail below. However, the following examples are only simple examples of the present invention, and do not represent or limit the scope of the present invention, which is defined by the appended claims.
Detailed Description
To better illustrate the present invention, facilitating the understanding of the technical solutions of the present invention, typical but not limiting embodiments of the present invention are as follows:
example 1
The present embodiment provides a welding fixture for a tungsten-titanium alloy target, as shown in fig. 1, the welding fixture for a tungsten-titanium alloy target includes: the back plate 1, the aluminum intermediate layer 2, the tungsten-titanium alloy target 3 and the cover plate 4 are sequentially arranged;
a first groove is formed in the surface of the back plate 1;
an aluminum intermediate layer 2 is arranged in the first groove;
a convex part matched with the first groove is arranged on the surface of the cover plate 4;
a second groove is formed in the platform of the convex part, and the minimum diameter of the convex part is equal to that of the second groove;
a tungsten titanium alloy target 3 is arranged in the second groove, and the depth of the second groove is equal to the thickness of the tungsten titanium alloy target 3;
the first groove comprises a gradually-reduced structure and a cylindrical structure which are arranged in sequence;
the included angle between the inclined plane of the reducing structure and the normal line of the bottom surface of the first groove is 45 degrees;
the depth of the tapered structure is greater than the depth of the cylindrical structure;
the depth of the cylindrical structure is equal to the thickness of the aluminum intermediate layer 2;
the diameter of the cylindrical structure is equal to that of the second groove;
threads are arranged on one surface, in contact with the tungsten-titanium alloy target 3, of the aluminum intermediate layer 2, the distance between the threads is 0.75mm, and the depth of the threads is 0.65 mm;
the fit clearance of the first groove and the convex part is 0.7 mm;
the fit clearance between the side surface of the aluminum intermediate layer and the side surface of the cylindrical structure is 0.4 mm;
the fit clearance between the side surface of the tungsten-titanium alloy target and the side surface of the second groove is 0.9 mm;
the welding surfaces of the back plate 1 and the tungsten-titanium alloy target 3 are both provided with titanium films, the welding surface of the back plate 1 is provided with a titanium film with the thickness of 4 microns, and the welding surface of the tungsten-titanium alloy target 3 is provided with a titanium film with the thickness of 5 microns.
The thickness of the aluminum intermediate layer 2 is 4 mm.
The thickness of the tungsten-titanium alloy target 3 is 6 mm.
Example 2
The embodiment provides a welding frock of tungsten titanium alloy target, welding frock of tungsten titanium alloy target includes: the back plate 1, the aluminum intermediate layer 2, the tungsten-titanium alloy target 3 and the cover plate 4 are sequentially arranged;
a first groove is formed in the surface of the back plate 1;
an aluminum intermediate layer 2 is arranged in the first groove;
a convex part matched with the first groove is arranged on the surface of the cover plate 4;
a second groove is formed in the platform of the convex part, and the minimum diameter of the convex part is equal to that of the second groove;
a tungsten titanium alloy target 3 is arranged in the second groove, and the depth of the second groove is equal to the thickness of the tungsten titanium alloy target 3;
the first groove comprises a gradually-reduced structure and a cylindrical structure which are arranged in sequence;
the included angle between the inclined plane of the gradually-reducing structure and the normal line of the bottom surface of the first groove is 50 degrees;
the depth of the tapered structure is greater than the depth of the cylindrical structure;
the depth of the cylindrical structure is equal to the thickness of the aluminum intermediate layer 2;
the diameter of the cylindrical structure is equal to that of the second groove;
threads are arranged on one surface, in contact with the tungsten-titanium alloy target 3, of the aluminum intermediate layer 2, the distance between the threads is 0.7mm, and the depth of the threads is 0.6 mm;
the fit clearance of the first groove and the convex part is 1 mm;
the fit clearance between the side surface of the aluminum intermediate layer and the side surface of the cylindrical structure is 0.8 mm;
the fit clearance between the side surface of the tungsten-titanium alloy target and the side surface of the second groove is 0.5 mm;
the welding surfaces of the back plate 1 and the tungsten-titanium alloy target 3 are both provided with titanium films, the welding surface of the back plate 1 is provided with the titanium film with the thickness of 6 microns, and the welding surface of the target is provided with the titanium film with the thickness of 4 microns.
The thickness of the aluminum intermediate layer 2 is 5 mm.
The thickness of the tungsten-titanium alloy target 3 is 7 mm.
Example 3
The embodiment provides a welding frock of tungsten titanium alloy target, welding frock of tungsten titanium alloy target includes: the back plate 1, the aluminum intermediate layer 2, the tungsten-titanium alloy target 3 and the cover plate 4 are sequentially arranged;
a first groove is formed in the surface of the back plate 1;
an aluminum intermediate layer 2 is arranged in the first groove;
a convex part matched with the first groove is arranged on the surface of the cover plate 4;
a second groove is formed in the platform of the convex part, and the minimum diameter of the convex part is equal to that of the second groove;
a tungsten titanium alloy target 3 is arranged in the second groove, and the depth of the second groove is equal to the thickness of the tungsten titanium alloy target 3;
the first groove comprises a gradually-reduced structure and a cylindrical structure which are arranged in sequence;
the included angle between the inclined plane of the reducing structure and the normal line of the bottom surface of the first groove is 60 degrees;
the depth of the tapered structure is greater than the depth of the cylindrical structure;
the depth of the cylindrical structure is less than the thickness of the aluminum intermediate layer 2;
the diameter of the cylindrical structure is equal to that of the second groove;
threads are arranged on one surface, in contact with the tungsten-titanium alloy target 3, of the aluminum intermediate layer 2, the distance between the threads is 0.8mm, and the depth of the threads is 0.7 mm;
the fit clearance of the first groove and the convex part is 0.4 mm;
the fit clearance between the side surface of the aluminum intermediate layer and the side surface of the cylindrical structure is 0.6 mm;
the fit clearance between the side face of the tungsten-titanium alloy target and the side face of the second groove is 0.7 mm;
the welding surfaces of the back plate 1 and the tungsten-titanium alloy target 3 are both provided with titanium films, the welding surface of the back plate 1 is provided with a titanium film with the thickness of 3 microns, and the welding surface of the tungsten-titanium alloy target 3 is provided with a titanium film with the thickness of 5 microns.
The thickness of the aluminum intermediate layer 2 is 3mm, and the depth of the cylindrical structure is 1 mm.
The thickness of the tungsten-titanium alloy target 3 is 5 mm.
The welding tool is welded in a hot isostatic pressing mode, the target surface of the welded tungsten-titanium alloy target assembly has no cracks or cracks, efficient welding of the target and the back plate is achieved, the welding bonding rate is high, and the service life of the welded target assembly is remarkably prolonged.
The applicant states that the present invention is described by the above embodiments, but the present invention is not limited to the above detailed structural features, i.e. the present invention can be implemented only by relying on the above detailed structural features. It should be clear to those skilled in the art that any modifications to the present invention, to the equivalent replacement of selected parts and the addition of auxiliary parts, the selection of specific modes, etc., all fall within the scope of protection and disclosure of the present invention.
The above detailed description describes the preferred embodiments of the present invention, but the present invention is not limited to the details of the above embodiments, and the technical idea of the present invention can be within the scope of the present invention, and can be right to the technical solution of the present invention, and these simple modifications all belong to the protection scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and in order to avoid unnecessary repetition, the present invention does not need to describe any combination of the features.
In addition, various embodiments of the present invention can be combined arbitrarily, and the disclosed content should be regarded as the present invention as long as it does not violate the idea of the present invention.
Claims (10)
1. The utility model provides a welding frock of tungsten titanium alloy target subassembly which characterized in that, welding frock of tungsten titanium alloy target includes: the back plate, the aluminum intermediate layer, the tungsten-titanium alloy target and the cover plate are sequentially arranged;
a first groove is formed in the surface of the back plate;
a convex part matched with the first groove is arranged on the surface of the cover plate;
a second groove is formed in the platform of the convex part, and the minimum diameter of the convex part is equal to that of the second groove;
a tungsten-titanium alloy target is arranged in the second groove, and the depth of the second groove is equal to the thickness of the tungsten-titanium alloy target;
the first groove comprises a gradually-reduced structure and a cylindrical structure which are arranged in sequence;
the included angle between the inclined plane of the reducing structure and the normal line of the bottom surface of the first groove is 45-60 degrees;
the depth of the tapered structure is greater than the depth of the cylindrical structure;
an aluminum intermediate layer is arranged in the cylindrical structure of the first groove;
the depth of the cylindrical structure is less than or equal to the thickness of the aluminum intermediate layer;
the diameter of the cylindrical structure is equal to that of the second groove;
threads are arranged on one surface of the aluminum intermediate layer, which is in contact with the tungsten-titanium alloy target material;
the fit clearance of the first groove and the convex part is 0.4-1 mm;
the fit clearance between the side surface of the aluminum intermediate layer and the side surface of the cylindrical structure is 0.4-0.8 mm;
the fit clearance between the side surface of the tungsten-titanium alloy target and the side surface of the second groove is 0.5-0.9 mm;
and the welding surfaces of the back plate and the tungsten-titanium alloy target are both provided with titanium films.
2. The welding fixture of a tungsten-titanium alloy target assembly according to claim 1, wherein a titanium film with a thickness of 3-6 μm is disposed on the welding surface of the backing plate.
3. The welding tool for the tungsten-titanium alloy target assembly according to claim 1 or 2, wherein a titanium film with a thickness of 4-5 μm is provided on the welding surface of the tungsten-titanium alloy target.
4. The welding tool for the tungsten-titanium alloy target assembly according to claim 1, wherein a fit clearance between the first groove and the convex portion is 0.5-0.6 mm.
5. The welding fixture for the tungsten-titanium alloy target assembly according to claim 1 or 4, wherein the thickness of the aluminum intermediate layer is 3-5 mm.
6. The welding fixture of claim 1, wherein the thickness of the tungsten-titanium alloy target is 5-7 mm.
7. The welding fixture of claim 1 or 6, wherein an angle between an inclined surface of the tapered structure and a normal of a bottom surface of the first groove is 45 °.
8. The welding fixture of claim 1, wherein a depth of the cylindrical structure is equal to a thickness of the aluminum intermediate layer.
9. The welding fixture of the tungsten-titanium alloy target assembly of claim 1 or 8, wherein the pitch of the threads is 0.7-0.8 mm.
10. The welding fixture of claim 1, wherein the depth of the thread is 0.6-0.7 mm.
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| CN202120399855.1U CN214921358U (en) | 2021-02-22 | 2021-02-22 | Welding tool for tungsten-titanium alloy target assembly |
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| CN202120399855.1U CN214921358U (en) | 2021-02-22 | 2021-02-22 | Welding tool for tungsten-titanium alloy target assembly |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114603243A (en) * | 2022-04-14 | 2022-06-10 | 宁波江丰电子材料股份有限公司 | Welding method of pot-shaped target |
| TWI825855B (en) * | 2021-12-22 | 2023-12-11 | 大陸商浙江最成半導體科技有限公司 | Sputtering target diffusion welding assembly and method |
-
2021
- 2021-02-22 CN CN202120399855.1U patent/CN214921358U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI825855B (en) * | 2021-12-22 | 2023-12-11 | 大陸商浙江最成半導體科技有限公司 | Sputtering target diffusion welding assembly and method |
| CN114603243A (en) * | 2022-04-14 | 2022-06-10 | 宁波江丰电子材料股份有限公司 | Welding method of pot-shaped target |
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