CN214893897U

CN214893897U - Pressure sensor leakage testing device

Info

Publication number: CN214893897U
Application number: CN202121257054.8U
Authority: CN
Inventors: 张和毅; 胡晓阁
Original assignee: Shanghai Size Automation Equipment Co ltd
Current assignee: Shanghai Size Automation Equipment Co ltd
Priority date: 2021-06-07
Filing date: 2021-06-07
Publication date: 2021-11-26
Anticipated expiration: 2031-06-07

Abstract

The utility model discloses a pressure sensor leak testing device, including rack assembly, helium pipeline, helium mass spectrometer detector, helium control assembly, helium source, vacuum pipeline and vacuum pump, helium pipeline one end is located on the helium source, the rack assembly locate the helium pipeline other end helium control assembly locates on the helium pipeline, vacuum pipeline one end is located on the rack assembly, the vacuum pipeline other end is located to the vacuum pump, helium mass spectrometer detector locates on the vacuum pipeline. The utility model belongs to the technical field of the sensor test, specifically a helium control assembly's setting has realized that the helium pressure that gets into in the helium pressurization chamber is steady, prevents that pressure variation from too big producing the influence to the test result, and the setting of sealed gasbag has realized carrying out the gasbag to the pressure testing force sensor that awaits measuring and has sealed, has shortened the loading time, has improved a pressure sensor leak testing device of loading efficiency.

Description

Pressure sensor leakage testing device

Technical Field

The utility model belongs to the technical field of the sensor test, especially, relate to a pressure sensor leak test device.

Background

The pressure sensor is the most common sensor in industrial practice and is widely applied to a plurality of industries such as automobiles, transportation, intelligent buildings, mechanical equipment, automatic production control and the like. During the packaging process of the pressure sensor, the sealing performance of the packaging needs to be confirmed so as to prevent the pressure medium to be measured from leaking through the sensor body during the application process. During leakage test, the pressure medium interface of the sensor is mounted on the measurement interface of a standard helium mass spectrometer through a sealing thread or a sealing ring, so that a space sealed to the outside is formed between the pressure medium interface of the sensor and the measurement interface of the helium mass spectrometer. A vacuum pump arranged in the helium mass spectrometer can produce negative pressure through a measuring interface, so that the sealed space to the outside is in a negative pressure state. During the test, helium was "sprayed" around the outside of the sensor. If the sensor itself is not sealed, external helium gas can be drawn into the helium mass spectrometer due to the negative pressure conditions. If the helium mass spectrometer detects the helium element, the sensor is proved to be leaked; on the contrary, the sensor is proved to be well packaged without leakage, and in the current pressure sensor leakage test, a standard helium mass spectrometer is usually utilized, a tested product is manually loaded, the loading time of a single detection product is long, and the test time is also long, so that the efficiency is low, and the leakage test station becomes a bottleneck station in the whole pressure sensor manufacturing process. Therefore, a pressure sensor leak test apparatus that can quickly load a pressure sensor and improve the test efficiency is needed to solve this drawback.

Disclosure of Invention

To the above situation, for overcoming prior art's defect, the utility model provides a pressure sensor leak testing device has fast loading pressure sensor, improves efficiency of software testing beneficial effect.

The utility model adopts the technical scheme as follows: a pressure sensor leakage testing device comprises a rack assembly, a helium pipeline, a helium mass spectrometer, a helium control assembly, a helium source, a vacuum pipeline and a vacuum pump, wherein one end of the helium pipeline is arranged on the helium source, the rack assembly is arranged at the other end of the helium pipeline, the helium control assembly is arranged on the helium pipeline, one end of the vacuum pipeline is arranged on the rack assembly, the vacuum pump is arranged at the other end of the vacuum pipeline, the helium mass spectrometer is arranged on the vacuum pipeline, the rack assembly comprises a helium pressurizing chamber, a vacuum chamber, a partition plate, a sealing air bag, a pressurizing pipeline and a pressurizing pump, the helium pressurizing chamber is arranged on the helium pipeline, the vacuum chamber is arranged on the vacuum pipeline, the partition plate is arranged between the helium pressurizing chamber and the vacuum chamber, an opening is formed between the partition plate, the sealing air bag is arranged in the opening, and one end of the pressurizing pipeline is arranged on the sealing air bag, the pressure pump is arranged at the other end of the pressure pipeline.

Further, the helium control assembly comprises a helium solenoid valve, a flow meter and a buffer tank, the flow meter is arranged on a helium pipeline, the helium solenoid valve is arranged on the helium pipeline, the helium solenoid valve is arranged between the flow meter and a helium source, the buffer tank is arranged on the helium pipeline, and the buffer tank is arranged between a helium pressurization chamber and the flow meter.

Furthermore, a vacuum electromagnetic valve is arranged on the vacuum pipeline and is arranged between the helium mass spectrometer and the vacuum pump.

Furthermore, a pressurizing electromagnetic valve and a pressurizing pressure gauge are arranged on the pressurizing pipeline, and the pressurizing pressure gauge is arranged between the pressurizing electromagnetic valve and the pressurizing air bag.

Furthermore, a safety valve and a helium pressure gauge are arranged on the helium pressurizing chamber.

Furthermore, a vacuum meter is arranged on the vacuum chamber.

Furthermore, the helium pressure gauge is electrically connected with the helium solenoid valve, and the pressurization pressure gauge is electrically connected with the pressurization solenoid valve.

After the structure is adopted, the utility model discloses beneficial effect as follows: the utility model relates to a pressure sensor leak testing device, helium control assembly's setting has realized that the helium pressure that gets into in the helium pressurization chamber is steady, prevents that pressure variation from too big producing the influence to the test result, and sealed gasbag's setting has realized carrying out the gasbag to the pressure testing force sensor that awaits measuring and has sealed, has shortened the loading time, has improved loading efficiency.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention.

Fig. 1 is a schematic view of the overall structure of a pressure sensor leakage testing device according to the present invention;

fig. 2 is the utility model relates to a pressure sensor leak test device's rack subassembly structure sketch map.

In the drawings: 1. the helium mass spectrometer comprises a rack assembly, 2, a helium pipeline, 3, a helium mass spectrometer, 4, a helium control assembly, 5, a helium source, 6, a vacuum pipeline, 7, a vacuum pump, 8, a helium pressurization chamber, 9, a vacuum chamber, 10, a partition plate, 11, a sealing air bag, 12, a pressurization pipeline, 13, a pressurization pump, 14, an opening, 15, a helium electromagnetic valve, 16, a flowmeter, 17, a buffer tank, 18, a vacuum electromagnetic valve, 19, a pressurization electromagnetic valve, 20, a pressurization pressure gauge, 21, a safety valve, 22, a helium pressure gauge, 23 and a vacuum gauge.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments; based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

As shown in fig. 1-2, a pressure sensor leakage testing device includes a stage assembly 1, a helium pipe 2, a helium mass spectrometer 3, a helium control assembly 4, a helium source 5, a vacuum pipe 6, and a vacuum pump 7, wherein one end of the helium pipe 2 is disposed on the helium source 5, the stage assembly 1 is disposed on the other end of the helium pipe 2, the helium control assembly 4 is disposed on the helium pipe 2, one end of the vacuum pipe 6 is disposed on the stage assembly 1, the vacuum pump 7 is disposed on the other end of the vacuum pipe 6, the helium mass spectrometer 3 is disposed on the vacuum pipe 6, the stage assembly 1 includes a helium pressurization chamber 8, a vacuum chamber 9, a partition plate 10, a sealed air bag 11, a pressurization pipe 12, and a pressurization pump 13, the helium pressurization chamber 8 is disposed on the helium pipe 2, the vacuum chamber 9 is disposed on the vacuum pipe 6, the partition plate 10 is disposed between the helium pressurization chamber 8 and the vacuum chamber 9, an opening 14 is arranged between the partition plates 10, the sealed air bag 11 is arranged in the opening 14, one end of the pressurizing pipeline 12 is arranged on the sealed air bag 11, and the pressurizing pump 13 is arranged at the other end of the pressurizing pipeline 12.

The helium control assembly 4 comprises a helium solenoid valve 15, a flow meter 16 and a buffer tank 17, wherein the flow meter 16 is arranged on the helium pipeline 2, the helium solenoid valve 15 is arranged between the flow meter 16 and the helium source 5, the buffer tank 17 is arranged on the helium pipeline 2, and the buffer tank 17 is arranged between the helium pressurization chamber 8 and the flow meter 16.

The vacuum pipeline 6 is provided with a vacuum electromagnetic valve 18, and the vacuum electromagnetic valve 18 is arranged between the helium mass spectrometer 3 and the vacuum pump 7.

The pressurizing pipeline 12 is provided with a pressurizing electromagnetic valve 19 and a pressurizing pressure gauge 20, and the pressurizing pressure gauge 20 is arranged between the pressurizing electromagnetic valve 19 and the pressurizing air bag.

And a safety valve 21 and a helium pressure gauge 22 are arranged on the helium pressurizing chamber 8.

The vacuum chamber 9 is provided with a vacuum gauge 23.

The helium pressure gauge 22 is electrically connected with the helium solenoid valve 15, and the pressurization pressure gauge 20 is electrically connected with the pressurization solenoid valve 19.

During the specific use, the pressure sensor to be tested is placed in the sealed airbag 11, the pressure pump 13 is started, pressurized air is conveyed to the sealed airbag 11 through the pressurization pipeline 12, the pressurization electromagnetic valve 19 controls the air pressure entering the sealed airbag 11 through the pressurization pressure gauge 20, the tightness between the sealed airbag 11 and the pressure sensor to be tested is further ensured, the helium source 5 pressurizes the helium pressurization chamber 8, the safety valve 21 prevents the pressure of the helium pressurization chamber 8 from being too high, the buffer tank 17 performs pressure buffering on helium entering the helium in the helium pressurization chamber 8, the helium electromagnetic valve 15 controls the helium amount through the helium pressure gauge 22, the vacuum pump 7 performs vacuumizing on the vacuum chamber 9, and the helium mass spectrometer 3 performs helium monitoring on the vacuumizing gas.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents. In summary, those skilled in the art should understand that they should not be limited to the embodiments described above, and that they can design the similar structure and embodiments without departing from the spirit of the invention.

Claims

1. A pressure sensor leak testing device is characterized in that: comprises a rack component, a helium pipeline, a helium mass spectrometer, a helium control component, a helium source, a vacuum pipeline and a vacuum pump, one end of the helium pipeline is arranged on a helium source, the bench assembly is arranged at the other end of the helium pipeline, the helium control assembly is arranged on the helium pipeline, one end of the vacuum pipeline is arranged on the rack component, the vacuum pump is arranged at the other end of the vacuum pipeline, the helium mass spectrometer is arranged on a vacuum pipeline, the bench assembly comprises a helium pressurization chamber, a vacuum chamber, a partition plate, a sealing air bag, a pressurization pipeline and a pressurization pump, the helium pressurizing chamber is arranged on the helium pipeline, the vacuum chamber is arranged on the vacuum pipeline, the partition plate is arranged between the helium pressurizing chamber and the vacuum chamber, an opening is formed between the partition plates, the sealing air bag is arranged in the opening, one end of the pressurizing pipeline is arranged on the sealing air bag, and the pressurizing pump is arranged at the other end of the pressurizing pipeline.

2. The pressure sensor leak test apparatus according to claim 1, wherein: the helium control assembly comprises a helium solenoid valve, a flow meter and a buffer tank, the flow meter is arranged on a helium pipeline, the helium solenoid valve is arranged on the helium pipeline, the helium solenoid valve is arranged between the flow meter and a helium source, the buffer tank is arranged on the helium pipeline, and the buffer tank is arranged between a helium pressurization chamber and the flow meter.

3. The pressure sensor leak test apparatus according to claim 2, wherein: and a vacuum electromagnetic valve is arranged on the vacuum pipeline and is arranged between the helium mass spectrometer and the vacuum pump.

4. A pressure sensor leak test apparatus according to claim 3, wherein: the pressurization pipeline is provided with a pressurization electromagnetic valve and a pressurization pressure gauge, and the pressurization pressure gauge is arranged between the pressurization electromagnetic valve and the pressurization air bag.

5. The pressure sensor leak test apparatus according to claim 4, wherein: and a safety valve and a helium pressure gauge are arranged on the helium pressurizing chamber.

6. The pressure sensor leak test apparatus according to claim 5, wherein: and a vacuum meter is arranged on the vacuum chamber.

7. The pressure sensor leak test apparatus of claim 6, wherein: the helium pressure gauge is electrically connected with the helium solenoid valve, and the pressurization pressure gauge is electrically connected with the pressurization solenoid valve.