CN214878415U - Substrate cleaning and conveying device - Google Patents
Substrate cleaning and conveying device Download PDFInfo
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- CN214878415U CN214878415U CN202121549022.5U CN202121549022U CN214878415U CN 214878415 U CN214878415 U CN 214878415U CN 202121549022 U CN202121549022 U CN 202121549022U CN 214878415 U CN214878415 U CN 214878415U
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Abstract
The utility model discloses a base plate washs conveyor, including frame, substrate hoist and mount frock, truss manipulator, the left and right sides of frame is provided with out material level, feed position respectively, the inside top of frame is provided with two dimension transport mechanism, and is provided with the wiper mechanism below the inside, two dimension transport mechanism includes X axle motion, Z axle motion, be provided with Z axle motion on the X axle motion, be provided with truss manipulator on the Z axle motion, truss manipulator corresponds substrate hoist and mount frock and is provided with clamping jaw mechanism, substrate hoist and mount frock is hollow out construction. The utility model discloses a two dimension transport mechanism drive truss manipulator washs in the leading-in wiper mechanism of substrate hoist and mount frock that will be equipped with the base plate, has realized automatic feeding, washing, the ejection of compact, has effectively improved work efficiency, has guaranteed the security of operation simultaneously, has better practicality.
Description
Technical Field
The utility model belongs to the technical field of substrate cleaning equipment, concretely relates to substrate cleaning conveyor.
Background
A mask is an indispensable component for a photolithography process. The mask carries a design pattern through which light is transmitted to transmit the design pattern through the photoresist. The performance of the mask directly determines the quality of the lithographic process. In industrial production, after a MASK (MASK) is used for a period of time, a metal layer, oil stains, impurities and the like are deposited on the surface of the MASK, so that the subsequent processing procedure is influenced, and the use performance is reduced. Therefore, the reticle substrate needs to be cleaned periodically.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a base plate washs conveyor washs in the leading-in wiper mechanism of substrate hoist and mount frock that will be equipped with the base plate through two dimension transport mechanism drive truss manipulator, realizes automatic transport and washs, effectively improves work efficiency, guarantees the security of operation simultaneously, has better practicality.
The utility model discloses mainly realize through following technical scheme:
the utility model provides a base plate washs conveyor, includes frame, substrate hoist and mount frock, truss manipulator, the left and right sides of frame is provided with material level, feed position respectively, the inside top of frame is provided with two dimension transport mechanism, and is provided with wiper mechanism below the inside, two dimension transport mechanism includes X axle motion, Z axle motion, be provided with Z axle motion on the X axle motion, be provided with truss manipulator on the Z axle motion, truss manipulator corresponds substrate hoist and mount frock and is provided with clamping jaw mechanism, substrate hoist and mount frock is hollow out construction.
The utility model discloses in the use, at first pack the base plate into substrate hoist and mount frock in, then put into the material inlet level, X axle motion drive truss manipulator removes to the top of material inlet level along the X direction, then drops to the settlement position through Z axle motion drive truss manipulator, then the truss manipulator snatchs substrate hoist and mount frock through drive clamping jaw mechanism, and follow-up soaking and washing in putting into the wiper mechanism under two-dimensional transport mechanism's drive, carries substrate hoist and mount frock to ejection of compact position department after the washing is accomplished, the truss manipulator loosens substrate hoist and mount frock through drive clamping jaw mechanism to conveniently carry out subsequent transportation operation. The utility model discloses an automatic feeding, washing, the ejection of compact have effectively improved work efficiency, have guaranteed the security of operation simultaneously, have better practicality.
In order to realize better the utility model discloses, furtherly, substrate hoist and mount frock includes the support body and guide block, the contact guide block of fretwork, the inside draw-in groove that is provided with of support body, and the one end of draw-in groove is provided with into discharge gate, the both ends of into discharge gate are provided with the guide block respectively, the inside of draw-in groove is provided with a plurality of contact guide block along circumference.
In order to better realize the utility model, furthermore, two sides and the bottom side of the inside of the clamping groove are respectively provided with a plurality of contact guide blocks along the length direction; and supporting cushion blocks are respectively arranged at two ends of the bottom of the frame body.
The utility model discloses in the use, earlier insert the draw-in groove through business turn over material mouth with the base plate in, the guide block is used for leading and fixing a position business turn over base plate, is provided with a plurality of contact guide block along circumference between the both sides of base plate and the support body, reserve 1 mm's clearance between contact guide block and the base plate, avoid removing the in-process and appear great rocking. The guide block, the contact guide block and the support cushion block are respectively made of corrosion-resistant materials, such as polytetrafluoroethylene materials.
In order to realize better the utility model discloses, furtherly, clamping jaw mechanism includes clamping jaw cylinder and clamping jaw finger, the both sides of clamping jaw cylinder are provided with the clamping jaw finger respectively, the work end that the clamping jaw pointed is provided with the constant head tank, substrate hoist and mount frock correspondence is provided with the centre gripping location end.
When the clamping jaw mechanism reaches the set position of the material inlet position, the clamping jaw fingers are located on two sides of the substrate hoisting tool at the moment, the clamping jaw air cylinders are driven to enable the clamping jaw fingers on the two sides to be close to each other, the substrate hoisting tool is finally stable and clamped by the clamping jaw fingers on the two sides, the clamping jaw air cylinders are stopped at the moment, and the clamping jaw mechanism is driven to move to the designated cleaning position through the two-dimensional transport mechanism. The clamping jaw finger is a working end with one end contacted with the clamping and positioning end of the substrate hoisting tool, the working end of the clamping jaw finger is improved in grabbing stability with the clamping and positioning end of the substrate hoisting tool through the arrangement of the positioning groove, and tool shaking in the moving process is avoided. And the part for allowing the fingers of the clamping jaw to enter the cleaning solution is made of polytetrafluoroethylene.
In order to realize better the utility model discloses, furtherly, X axle motion includes sliding rail, hold-in range, servo motor, the both sides of the inside top of frame are provided with the sliding rail along the X direction respectively, Z axle motion's both ends respectively with sliding rail sliding connection, servo motor passes through hold-in range drive Z axle motion and moves along the X axle.
In order to realize better the utility model discloses, furtherly, Z axle motion includes crane, sharp module, guide rail, the both ends of crane respectively with sliding rail sliding connection, be provided with sharp module along the Z direction on the crane, and be provided with the guide rail on the crane of sharp module both sides respectively, truss manipulator is connected with sharp module, and truss manipulator's both ends respectively with guide rail sliding connection.
In order to better realize the utility model, the truss manipulator further comprises a mounting frame, one side of the mounting frame is connected with the linear module, and two ends of the mounting frame are respectively connected with the guide rail in a sliding manner; and clamping jaw mechanisms are respectively arranged at two ends of the bottom of the mounting rack.
The utility model discloses a servo motor drives the hold-in range and rotates, and then drives the crane along the sliding rail linear motion of X direction. The linear module drives the mounting rack of the truss manipulator to do linear motion along the guide rail in the Z direction, namely, the mounting rack is driven to lift. When the clamping jaw mechanism reaches the set position of the material inlet position, the clamping jaw fingers are located on two sides of the substrate hoisting tool at the moment, the clamping jaw air cylinders are driven to enable the clamping jaw fingers on the two sides to be close to each other, and finally the substrate hoisting tool is stably clamped by the clamping jaw fingers on the two sides. The drive structure of sharp module and servo motor and hold-in range is prior art, and is not the utility model discloses a main improvement point, the event is no longer repeated.
The utility model has the advantages that:
(1) the utility model discloses a two dimension transport mechanism drive truss manipulator washs in the leading-in wiper mechanism of substrate hoist and mount frock that will be equipped with the base plate, realizes automatic transport and washs, effectively improves work efficiency, guarantees the security of operation simultaneously, has better practicality.
(2) The utility model guides and positions the inlet and outlet substrates through the guide block, avoids the substrates from shaking greatly in the moving process through the contact guide block, improves the stability of substrate transportation and the soaking and cleaning area of the substrates, and has better practicability;
(3) the utility model discloses a clamping jaw cylinder drives the clamping jaw finger of both sides in a flexible way and snatchs, simultaneously through the setting of the constant head tank of clamping jaw finger work end, has improved the stability of snatching, avoids the frock in the removal process to rock, has improved the stability of base plate transportation, has better practicality;
(4) the utility model discloses a two dimension transport mechanism has realized automatic feeding, washing, the ejection of compact with the truss manipulator, has effectively improved work efficiency, has guaranteed the security of operation simultaneously, has better practicality.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a front view of FIG. 1;
FIG. 3 is a schematic structural view of a frame;
FIG. 4 is a schematic structural view of a cleaning mechanism;
FIG. 5 is a schematic structural view of a piping system;
FIG. 6 is a schematic view of the exhaust system;
FIG. 7 is a schematic structural diagram of an X-axis motion mechanism;
FIG. 8 is a schematic structural view of a Z-axis movement mechanism;
FIG. 9 is a schematic view of the automatic sealing cover;
FIG. 10 is a schematic illustration of the uncapping of the automated sealing lid;
FIG. 11 is a schematic structural view of the wind-cutting mechanism;
fig. 12 is a schematic structural diagram of a substrate hoisting tool.
Wherein: 10-shell, 11-frame, 12-exhaust system, 13-observation window, 14-material-feeding position and 15-material-discharging position,
20-a first ultrasonic cleaning tank, 21-a metal removing tank, 22-a surface chemical treatment tank, 23-a second ultrasonic cleaning tank, 24-an automatic sealing cover, 26-a water storage tank, 27-a water purification machine, 28-a cover opening and closing cylinder, 29-a pressing cylinder, 01-an overflow pipeline mechanism, 02-a water injection pipeline mechanism and 03-a discharge pipeline mechanism,
30-substrate hoisting tool, 301-frame body, 302-guide block, 303-contact guide block, 31-truss manipulator, 32-clamping jaw mechanism, 33-X axis movement mechanism, 34-Z axis movement mechanism, 341-lifting frame and 342-linear module.
Detailed Description
Example 1:
the utility model provides a base plate washs conveyor, as shown in fig. 3, 7, 8, including frame 11, substrate hoist and mount frock 30, truss manipulator 31, the left and right sides of frame 11 is provided with out material level 15, feed position 14 respectively, the inside top of frame 11 is provided with two-dimentional transport mechanism, and is provided with wiper mechanism below the inside, two-dimentional transport mechanism includes X axle motion 33, Z axle motion 34, be provided with Z axle motion 34 on the X axle motion 33, be provided with truss manipulator 31 on the Z axle motion 34, truss manipulator 31 corresponds substrate hoist and mount frock 30 and is provided with clamping jaw mechanism 32, substrate hoist and mount frock 30 is hollow out construction.
The utility model discloses in the use, at first pack the base plate into in substrate hoist and mount frock 30, then put into feed level 14, X axle motion 33 drive truss manipulator 31 removes to feed level 14's top along the X direction, then descend to setting up the position through Z axle motion 34 drive truss manipulator 31, then truss manipulator 31 snatchs substrate hoist and mount frock 30 through drive clamping jaw mechanism 32, and follow-up soaking washing is put into in the wiper mechanism under two-dimensional transport mechanism's drive, carries substrate hoist and mount frock 30 to ejection of compact position 15 department after the washing is accomplished, truss manipulator 31 loosens substrate hoist and mount frock 30 through drive clamping jaw mechanism 32 to conveniently carry out subsequent transportation operation. The utility model discloses an automatic feeding, washing, the ejection of compact have effectively improved work efficiency, have guaranteed the security of operation simultaneously, have better practicality.
Example 2:
this embodiment is optimized on embodiment 1's basis, as shown in fig. 12, substrate hoist and mount frock 30 includes support body 301 and guide block, the contact guide block 303 of fretwork, support body 301 is inside to be provided with the draw-in groove, and the one end of draw-in groove is provided with into discharge gate, the both ends of into discharge gate are provided with the guide block respectively, the inside of draw-in groove is provided with a plurality of contact guide block 303 along circumference.
Furthermore, two sides and the bottom side of the inside of the card slot are respectively provided with a plurality of contact guide blocks 303 along the length direction; and supporting cushion blocks are respectively arranged at two ends of the bottom of the frame body 301.
The utility model discloses in the use, earlier insert the draw-in groove through business turn over material mouth with the base plate in, the guide block is used for leading and fixing a position business turn over base plate, is provided with a plurality of contact guide 303 along circumference between the both sides of base plate and the support body 301, reserve 1 mm's clearance between contact guide 303 and the base plate, avoid removing the in-process great rocking of appearing. The guide block, the contact guide block 303 and the support cushion block are respectively made of corrosion-resistant materials, such as polytetrafluoroethylene materials.
Other parts of this embodiment are the same as embodiment 1, and thus are not described again.
Example 3:
this embodiment is optimized on the basis of embodiment 1 or 2, as shown in fig. 8, the clamping jaw mechanism 32 includes clamping jaw cylinder and clamping jaw finger, the both sides of clamping jaw cylinder are provided with the clamping jaw finger respectively, the working end that the clamping jaw indicates is provided with the constant head tank, substrate hoist and mount frock 30 corresponds and is provided with the centre gripping location end.
When the clamping jaw mechanism 32 reaches the set position of the feeding position 14, the clamping jaw fingers are located on two sides of the substrate hoisting tool 30 at the moment, the clamping jaw air cylinders are driven to enable the clamping jaw fingers on the two sides to be close to each other, the substrate hoisting tool 30 is finally clamped by the clamping jaw fingers on the two sides stably, the clamping jaw air cylinders are stopped at the moment, and the clamping jaw mechanism 32 is driven to move to the designated cleaning position through the two-dimensional transport mechanism. The one end of clamping jaw finger and the contact of the centre gripping location end of substrate hoist and mount frock 30 is the work end, the work end of clamping jaw finger improves through setting up of constant head tank and the stability of snatching of the 30 centre gripping location ends of substrate hoist and mount frock, avoids the frock of removal in-process to rock. And the part for allowing the fingers of the clamping jaw to enter the cleaning solution is made of polytetrafluoroethylene.
The rest of this embodiment is the same as embodiment 1 or 2, and therefore, the description thereof is omitted.
Example 4:
the present embodiment is optimized on the basis of any one of embodiments 1 to 3, as shown in fig. 7, the X-axis moving mechanism 33 includes a sliding rail, a synchronous belt, and a servo motor, the sliding rail is respectively disposed on two sides above the inside of the rack 11 along the X direction, two ends of the Z-axis moving mechanism 34 are respectively connected to the sliding rail in a sliding manner, and the servo motor drives the Z-axis moving mechanism 34 to move along the X axis through the synchronous belt.
Further, as shown in fig. 7 and 8, the Z-axis moving mechanism 34 includes a lifting frame 341, a linear module 342, and a guide rail, two ends of the lifting frame 341 are respectively connected with the sliding rail in a sliding manner, the lifting frame 341 is provided with the linear module 342 along the Z direction, the lifting frame 341 on two sides of the linear module 342 is provided with the guide rail, the truss manipulator 31 is connected with the linear module 342, and two ends of the truss manipulator 31 are respectively connected with the guide rail in a sliding manner.
Further, as shown in fig. 8, the truss manipulator 31 includes a mounting bracket, one side of the mounting bracket is connected with the linear module 342, and two ends of the mounting bracket are respectively connected with the guide rail in a sliding manner; and clamping jaw mechanisms 32 are respectively arranged at two ends of the bottom of the mounting rack.
The utility model discloses a servo motor drives the hold-in range and rotates, and then drives crane 341 along the sliding rail linear motion of X direction. The linear module 342 drives the mounting rack of the truss manipulator 31 to move linearly along the guide rail in the Z direction, i.e., drives the mounting rack to lift and lower. When the clamping jaw mechanism 32 reaches the set position of the material inlet position 14, the clamping jaw fingers are located on two sides of the substrate hoisting tool 30 at the moment, the clamping jaw air cylinders are driven to enable the clamping jaw fingers on the two sides to be close to each other, and finally the substrate hoisting tool 30 is stably clamped by the clamping jaw fingers on the two sides.
The utility model discloses a two dimension transport mechanism drive truss manipulator 31 washs in the leading-in wiper mechanism of substrate hoist and mount frock 30 that will be equipped with the base plate, the utility model discloses a two dimension transport mechanism has realized automatic feeding, washing, the ejection of compact with truss manipulator 31, has effectively improved work efficiency, has guaranteed the security of operation simultaneously, has better practicality.
Other parts of this embodiment are the same as any of embodiments 1 to 3, and thus are not described again.
Example 5:
a substrate cleaning and conveying device is applied to a cleaning system, as shown in figures 1, 2 and 6, the cleaning system comprises a frame 11, and a shell 10 is arranged on the outer side of the frame 11 to form a relatively closed operation space. The front side of the housing 10 is provided with an observation window 13. The left side and the right side of the frame 11 are respectively provided with a discharging position 15 and a feeding position 14. The top of the system is provided with an exhaust system 12, and the side wall is provided with an air inlet. The inside first ultrasonic cleaning tank 20, go metal tank 21, surface chemical treatment groove 22, second ultrasonic cleaning tank 23 of having set gradually from the direction of feed position 14 to ejection of compact position 15 of frame 11 for get rid of metal level, organic pollutant and greasy dirt, the impurity on mask base plate surface, the outside of casing 10 corresponds and is provided with water supply installation.
The frame 11 and the housing 10 may be configured as an integral sealing structure, and each fitting installation part is provided with a fluororubber pad. The top is provided with an exhaust system 12 which exhausts the harmful gas in the system through a flue; and an air filter device is arranged at the air inlet. Automatic doors are adopted at the discharging position 15 and the feeding position 14, and the automatic doors are opened automatically after sensing the incoming material.
Further, as shown in fig. 3 to 5, automatic sealing covers 24 are respectively provided on the tops of the demetallization tank 21 and the surface chemical treatment tank 22; ultrasonic vibrators are arranged on one sides of the first ultrasonic cleaning tank 20 and the second ultrasonic cleaning tank 23 respectively, and an air cutting mechanism is arranged at the top of the second ultrasonic cleaning tank 23. The automatic sealing covers 24 are arranged on the tops of the metal removing tank 21 and the surface chemical treatment tank 22, can be automatically opened and closed by one key, have an interlocking function, and cannot be operated when the equipment runs. The whole process is automatically completed by the truss manipulator 31, the sequence of all steps can be set, and the soaking and cleaning time can be set.
Further, the first ultrasonic cleaning tank 20 is provided as follows:
the cleaning mode is as follows: ultrasonic cleaning;
cleaning solution: IPA, acetone, ultrapure water;
overflow water: the single side overflows to the auxiliary tank and is filtered back to the main tank;
a filtering system: configuring a stainless steel explosion-proof filter pump, a filter and a stainless steel pressure gauge;
the protection device comprises: a water level protection switch is arranged to protect the ultrasonic wave and the filtering system;
and a pure water detection device is configured to detect the cleaning state of the workpiece according to the change of the water quality.
Further, the second ultrasonic cleaning tank 23 is provided as follows:
the cleaning mode is as follows: ultrasonic cleaning;
cleaning solution: ultrapure water;
overflow water: the single side overflows to the auxiliary tank and is filtered back to the main tank;
a filtering system: configuring a stainless steel explosion-proof filter pump, a filter and a stainless steel pressure gauge;
the protection device comprises: a water level protection switch is arranged to protect the ultrasonic wave and the filtering system;
wind cutting mechanism: carrying out high-pressure water cutting on the cleaned workpiece, arranging an air pipe inside the workpiece, and mounting a plurality of air nozzles on the air pipe;
and a pure water detection device is configured to detect the cleaning state of the workpiece according to the change of the water quality.
Further, the demetallization bath 21 is provided as follows:
the cleaning mode is as follows: soaking;
cleaning solution: perchloric acid, nitrates;
inner groove material: polytetrafluoroethylene;
overflow water: the single side overflows to the auxiliary tank and is filtered back to the main tank;
a filtering system: a polytetrafluoroethylene pump and a filter are configured;
the protection device comprises: a water level protection switch is arranged to protect the ultrasonic wave and the filtering system.
Further, the surface chemical treatment bath 22 is provided as follows:
the cleaning mode is as follows: soaking;
cleaning solution: concentrated sulfuric acid;
inner groove material: 904L;
overflow water: the single side overflows to the auxiliary tank and is filtered back to the main tank;
a filtering system: a polytetrafluoroethylene pump and a filter are configured;
the protection device comprises: a water level protection switch is arranged to protect the ultrasonic wave and the filtering system.
The temperature control device has a constant temperature function, and the temperature is adjustable at normal temperature to 100 ℃. Temperature control and overtemperature double safety protection.
An insulating layer is arranged outside the tank body.
Further, as shown in fig. 11, the air cutting mechanism includes an air pipe and air nozzles, the air pipes are respectively arranged on two sides of the top of the tank body of the second ultrasonic cleaning tank 23 along the length direction, and the air pipes are provided with a plurality of air nozzles.
Further, as shown in fig. 5, the system further comprises a water supply device, wherein the water supply device comprises a water storage tank 26, a water purification machine 27 and a pipeline system, and the pipeline system comprises an overflow pipeline mechanism 01, a water injection pipeline mechanism 02 and a discharge pipeline mechanism 03; the water storage tank 26 is connected with a water purification machine 27, and the water purification machine 27 supplies water to the first ultrasonic cleaning tank 20, the metal removing tank 21, the surface chemical treatment tank 22 and the second ultrasonic cleaning tank 23 through a water injection pipeline mechanism 02; the top parts of the first ultrasonic cleaning tank 20, the metal removing tank 21, the surface chemical treatment tank 22 and the second ultrasonic cleaning tank 23 are respectively connected with the overflow pipeline mechanism 01 and the water injection pipeline mechanism 02, and the bottom parts of the first ultrasonic cleaning tank, the metal removing tank, the surface chemical treatment tank 22 and the second ultrasonic cleaning tank are respectively connected with the discharge pipeline mechanism 03. When the tank body of each cleaning tank needs cleaning, a valve of the water injection pipeline mechanism 02 is opened, so that pure water can enter the tank body.
Further, the discharge pipeline mechanism 03 includes a first water discharge pipe and a second water discharge pipe, the water outlets of the first ultrasonic cleaning tank 20 and the second ultrasonic cleaning tank 23 are respectively connected to the first water discharge pipe, and the water outlets of the surface chemical treatment tank 22 and the metal removing tank 21 are respectively connected to the second water discharge pipe. The metal removing tank 21 and the surface chemical treatment tank 22 are resistant to corrosion, liquid in the tanks can be filtered and refluxed, and waste water in the tanks uniformly enters a second drain pipe. Circulating filtration and feeding can be realized by adopting a circulating pump.
Further, the ultrapure water in the first ultrasonic cleaning tank 20 and the ultrapure water in the second ultrasonic cleaning tank 23 adopt a single-side overflow design, the overflow amount can be set, and the wastewater enters the first water discharge pipe uniformly. Circulating filtration and feeding can be realized by adopting a circulating pump.
Further, as shown in fig. 9 and 10, the automatic sealing cover 24 includes a switch cover cylinder 28, a pressing cylinder 29 and a slot cover, the top of the slot body of the metal removing slot 21 and the surface chemical treatment slot 22 are respectively provided with the slot cover, the side edge of the slot body is provided with the pressing cylinder 29, the driving end of the pressing cylinder 29 is provided with a limit pressing block located above the slot cover, one side of the slot cover is provided with the switch cover cylinder 28, and the driving end of the switch cover cylinder 28 is connected with the slot cover.
In the use process, the two cover opening and closing air cylinders 28 drive the slot covers to move in a translation mode to open and close. When the cover is closed in place, the two pressing cylinders 29 act to press the cover and the groove body. The hold-down cylinder 29 has a self-locking function and cannot be opened when the device is in operation.
Further, as shown in fig. 12, the substrate hoisting tool 30 includes a hollowed-out frame body 301, a guide block and a contact guide block 303, a clamping groove is formed inside the frame body 301, a feeding and discharging port is formed in one end of the clamping groove, the guide blocks are respectively arranged at two ends of the feeding and discharging port, and a plurality of contact guide blocks 303 are arranged inside the clamping groove along the circumferential direction.
The substrate hoisting tool 30 is assembled by adopting a titanium alloy frame body 301 and a polytetrafluoroethylene cushion block. The guide block realizes the guiding and positioning functions of the substrate entering and exiting; and finally, the contact guide block 303 is matched with the substrate, a clearance is reserved for 1mm, and great shaking is avoided in the moving process. When the substrate clamping device is used, the substrate is manually placed into the corresponding clamping groove.
Further, as shown in fig. 8, the clamping jaw mechanism 32 includes a clamping jaw cylinder and clamping jaw fingers, the clamping jaw fingers are respectively disposed on two sides of the clamping jaw cylinder, the working ends of the clamping jaw fingers are provided with positioning grooves, and the substrate hoisting tool 30 is correspondingly provided with clamping and positioning ends.
Further, all the processes of putting the basket into the cleaning tank, carrying out the basket, and moving the basket between the tanks are automatically performed by the truss robot 31. The vertical lifting of the truss manipulator 31 adopts a linear module 342 matched with a guide rail to move stably; the horizontal transmission adopts a mode that a servo motor is matched with a synchronous belt to move stably.
Further, as shown in fig. 7, the X-axis moving mechanism 33 includes a sliding rail, a synchronous belt, and a servo motor, the sliding rail is respectively disposed on two sides of the inside upper portion of the rack 11 along the X direction, two ends of the Z-axis moving mechanism 34 are respectively connected with the sliding rail in a sliding manner, and the servo motor drives the Z-axis moving mechanism 34 to move along the X axis through the synchronous belt.
Further, as shown in fig. 7 and 8, the Z-axis moving mechanism 34 includes a lifting frame 341, a linear module 342, and a guide rail, two ends of the lifting frame 341 are respectively connected with the sliding rail in a sliding manner, the lifting frame 341 is provided with the linear module 342 along the Z direction, the lifting frame 341 on two sides of the linear module 342 is provided with the guide rail, the truss manipulator 31 is connected with the linear module 342, and two ends of the truss manipulator 31 are respectively connected with the guide rail in a sliding manner.
Furthermore, a feeding trolley and a discharging trolley can be respectively arranged at the discharging position 15 and the feeding position 14, so that the transportation is convenient.
The utility model discloses a casing 10 realizes whole cleaning system's relative airtight, realizes automatic feeding, washing, the ejection of compact through two dimension transport mechanism and truss manipulator 31, the utility model discloses effectively improved work efficiency, guaranteed the environmental protection degree of safety of washing operation simultaneously, had better practicality.
The above is only the preferred embodiment of the present invention, not to the limitation of the present invention in any form, all the technical matters of the present invention all fall into the protection scope of the present invention to any simple modification and equivalent change of the above embodiments.
Claims (7)
1. The utility model provides a base plate washs conveyor, its characterized in that, includes frame (11), substrate hoist and mount frock (30), truss manipulator (31), the left and right sides of frame (11) is provided with out material level (15), feeding position (14) respectively, the inside top of frame (11) is provided with two-dimentional transport mechanism, and the inside below is provided with wiper mechanism, two-dimentional transport mechanism includes X axle motion (33), Z axle motion (34), be provided with Z axle motion (34) on X axle motion (33), be provided with truss manipulator (31) on Z axle motion (34), truss manipulator (31) correspond substrate hoist and mount frock (30) and are provided with clamping jaw mechanism (32), substrate hoist and mount frock (30) are hollow out construction.
2. The substrate cleaning and conveying device according to claim 1, wherein the substrate hoisting tool (30) comprises a hollow frame body (301), a guide block (302) and a contact guide block (303), a clamping groove is formed in the frame body (301), a material inlet and a material outlet are formed in one end of the clamping groove, the guide block (302) is respectively arranged at two ends of the material inlet and the material outlet, and a plurality of contact guide blocks (303) are circumferentially arranged in the clamping groove.
3. The substrate cleaning and conveying apparatus according to claim 2, wherein a plurality of contact guide blocks (303) are respectively disposed on two sides and a bottom side of the inside of the slot along a length direction; and supporting cushion blocks are respectively arranged at two ends of the bottom of the frame body (301).
4. The substrate cleaning and conveying device according to claim 1, wherein the clamping jaw mechanism (32) comprises a clamping jaw cylinder and clamping jaw fingers, clamping jaw fingers are respectively arranged on two sides of the clamping jaw cylinder, positioning grooves are formed in working ends of the clamping jaw fingers, and clamping and positioning ends are correspondingly arranged on the substrate hoisting tool (30).
5. The substrate cleaning and conveying apparatus according to any one of claims 1 to 4, wherein the X-axis moving mechanism (33) comprises a sliding rail, a timing belt, and a servo motor, the sliding rail is disposed on each of two sides above the inside of the frame (11) along the X direction, the two ends of the Z-axis moving mechanism (34) are slidably connected to the sliding rail, and the servo motor drives the Z-axis moving mechanism (34) to move along the X axis through the timing belt.
6. The substrate cleaning and conveying device according to claim 5, wherein the Z-axis moving mechanism (34) comprises a lifting frame (341), a linear module (342) and a guide rail, two ends of the lifting frame (341) are respectively connected with the sliding rail in a sliding manner, the linear module (342) is arranged on the lifting frame (341) along the Z direction, the guide rails are respectively arranged on the lifting frame (341) at two sides of the linear module (342), the truss manipulator (31) is connected with the linear module (342), and two ends of the truss manipulator (31) are respectively connected with the guide rails in a sliding manner.
7. The substrate cleaning and conveying device according to claim 6, wherein the truss robot (31) comprises a mounting frame, one side of the mounting frame is connected with the linear module (342), and two ends of the mounting frame are respectively connected with the guide rails in a sliding manner; and clamping jaw mechanisms (32) are respectively arranged at two ends of the bottom of the mounting rack.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121549022.5U CN214878415U (en) | 2021-07-08 | 2021-07-08 | Substrate cleaning and conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121549022.5U CN214878415U (en) | 2021-07-08 | 2021-07-08 | Substrate cleaning and conveying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214878415U true CN214878415U (en) | 2021-11-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121549022.5U Active CN214878415U (en) | 2021-07-08 | 2021-07-08 | Substrate cleaning and conveying device |
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| Country | Link |
|---|---|
| CN (1) | CN214878415U (en) |
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2021
- 2021-07-08 CN CN202121549022.5U patent/CN214878415U/en active Active
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Address after: 215615 ground floor, building C, Dongcheng science and Technology Pioneer Park, Miaoqiao Kechuang Road, Tangqiao town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee after: Zhongkezhuoxin semiconductor technology (Suzhou) Co.,Ltd. Address before: 215627 ground floor, building C, Dongcheng science and technology entrepreneurship Park, Miaoqiao Kechuang Road, Tangqiao town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee before: Zhuneng optical instrument technology (Suzhou) Co.,Ltd. |