CN214793587U - Vernier effect based micro-bubble type high-temperature pressure optical fiber sensor - Google Patents
Vernier effect based micro-bubble type high-temperature pressure optical fiber sensor Download PDFInfo
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- CN214793587U CN214793587U CN202121193628.XU CN202121193628U CN214793587U CN 214793587 U CN214793587 U CN 214793587U CN 202121193628 U CN202121193628 U CN 202121193628U CN 214793587 U CN214793587 U CN 214793587U
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 96
- 230000000694 effects Effects 0.000 title claims abstract description 25
- 239000000835 fiber Substances 0.000 claims abstract description 113
- 239000010453 quartz Substances 0.000 claims abstract description 73
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 73
- 230000008929 regeneration Effects 0.000 claims abstract description 13
- 238000011069 regeneration method Methods 0.000 claims abstract description 13
- 238000002310 reflectometry Methods 0.000 claims abstract description 9
- 238000005253 cladding Methods 0.000 claims description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 239000003292 glue Substances 0.000 description 9
- 230000035945 sensitivity Effects 0.000 description 8
- 238000003466 welding Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000012080 ambient air Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000007123 defense Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
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Abstract
A micro-bubble type high-temperature pressure optical fiber sensor based on vernier effect is provided with an optical fiber measuring arm and an optical fiber reference arm on a three-decibel coupler, wherein the optical fiber measuring arm is a first multimode optical fiber arranged at the tail end of a first single-mode optical fiber, the first single-mode optical fiber is connected with the three-decibel coupler, a fiber core of the first single-mode optical fiber is engraved with a thermal regeneration grating, the tail end of the first multimode optical fiber extends into a first quartz capillary tube, one end of the first quartz capillary tube is fixedly arranged on the first single-mode optical fiber, the other end of the first quartz capillary tube is a spherical bubble to form a first Fabry-Perot interference cavity, the thermal regeneration grating is positioned in the first quartz capillary tube, the outer side of the spherical bubble is plated with a high-reflectivity film, the optical fiber reference arm is a second multimode optical fiber arranged at the tail end of a second single-mode optical fiber, the second multimode optical fiber extends into a second quartz capillary tube from one end of the quartz capillary tube, the other end of the second quartz capillary tube is provided with a third single-mode optical fiber, and forming a second Fabry-Perot interference cavity in the second quartz capillary, wherein the end face of the tail end of the third single-mode fiber is an inclined plane.
Description
Technical Field
The utility model belongs to the technical field of the optical fiber sensing, concretely relates to microbubble type high temperature pressure optical fiber sensor based on vernier effect.
Background
In recent years, the optical fiber pressure sensor based on the fabry-perot interferometer receives more and more attention due to the advantages of simple structure, small sensing head volume, electromagnetic interference resistance, convenient signal detection and the like. Meanwhile, temperature sensing is widely applied to the fields of national defense, industry and civilian life, the types of temperature sensing are various, two types of temperature sensing are common, namely contact type and non-contact type, but an optical fiber sensor for simultaneously measuring two parameters of temperature and pressure is still in the research stage, and the known optical fiber high-temperature pressure sensor mainly has the problems of low sensitivity, mutual influence of other parameters of temperature, pressure and the like, high manufacturing cost and the like. The vernier effect has been proposed to significantly improve the sensitivity of fiber temperature, strain, airflow, refractive index and curvature sensors. The vernier effect can be realized in a double-beam Fabry-Perot cavity by adding a Sagnac loop or a reference Fabry-Perot cavity in the sensing system, and can also be generated in a three-beam Fabry-Perot cavity by matching the spacing distance of three reflectors without obviously influencing the size of the sensor. In order to solve the problem that other parameters such as the temperature and the pressure are influenced mutually, the high-temperature pressure optical fiber sensor which is easy to manufacture, low in cost and accurate in measurement result is very necessary.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that a microbubble type high temperature pressure optical fiber sensor based on vernier effect that reasonable in design, simple manufacture, small, sensitivity are high is provided.
The technical scheme for solving the technical problems is as follows: a micro-bubble type high-temperature pressure optical fiber sensor based on vernier effect is characterized in that an optical fiber measuring arm and an optical fiber reference arm are arranged on a three-decibel coupler in parallel, the optical fiber measuring arm is a first multimode optical fiber arranged at the tail end of a first single-mode optical fiber, the first single-mode optical fiber is connected with the three-decibel coupler, a thermal regeneration grating is engraved on the fiber core of the first single-mode optical fiber, the tail end of the first multimode optical fiber extends into a first quartz capillary tube, one end of the first quartz capillary tube is fixedly arranged on the first single-mode optical fiber, the other end of the first quartz capillary tube is a spherical bubble to form a first Fabry-Perot interference cavity, the thermal regeneration grating is positioned in the first quartz capillary tube, a high-reflectivity film is plated on the outer side of the spherical bubble, the central lines of the first single-mode optical fiber, the first multimode optical fiber and the first quartz capillary tube are coincided, a second multimode optical fiber is arranged at the tail end of a second single-mode optical fiber, the second single-mode optical fiber is connected with the three-decibel coupler, the second multimode fiber extends into the second quartz capillary from one end of the second quartz capillary, the second quartz capillary is fixedly arranged on the second single-mode fiber, the other end of the second quartz capillary is provided with a third single-mode fiber, a second Fabry-Perot interference cavity is formed in the second quartz capillary, the central lines of the second single-mode fiber, the second multimode fiber, the second quartz capillary and the third single-mode fiber are superposed, and the tail end face of the third single-mode fiber is an inclined plane.
As a preferable technical scheme, the length of a gate region of the thermogravimetric photogate is 10-15 mm, and the central wavelength is 1553 nm.
As a preferable technical solution, the first to third single mode fibers have the same core diameter and the same cladding outer diameter.
As a preferable technical scheme, the lengths of the first single-mode fiber and the second single-mode fiber are the same and are 20-25 cm, and the length of the third single-mode fiber is 150-200 mu m.
In a preferred embodiment, the first quartz capillary and the second quartz capillary have the same inner diameter and the same outer diameter.
As a preferable technical solution, the first multimode optical fiber and the second multimode optical fiber have the same core diameter, the same cladding outer diameter and the same length.
As a preferable technical scheme, the core diameter of the first multimode optical fiber is 62.5 μm, the cladding outer diameter is 125 μm, and the length is 260 μm.
As a preferable technical scheme, the horizontal distance from the tail end face of the first multimode optical fiber to the spherical bubble wall of the first quartz capillary is 2-5 mu m smaller than the horizontal distance from the tail end face of the second multimode optical fiber to the end face of the third single-mode optical fiber, and the horizontal distance from the tail end face of the first multimode optical fiber to the spherical bubble wall of the first quartz capillary is 350-450 mu m.
As a preferable technical solution, the inclination angle of the slope of the tail end of the third single mode fiber is 40 ° to 60 °.
Preferably, the high-reflectivity film is a gold film, an aluminum film, a copper film or a silver film.
The utility model has the advantages as follows:
the utility model discloses utilize optic fibre fabry-perot to interfere the good pressure response characteristics of structure and the excellent high temperature stability (1000 ℃) of thermal weight fiber grating, adopted reference arm and measuring arm and parallelly connected the form that becomes the vernier effect, when ambient temperature rose, the central wavelength of thermal weight fiber grating can take place obvious drift, can obtain higher temperature sensitivity; when the ambient air pressure rises, the cavity length of the spherical bubble area of the first Fabry-Perot structure in the measuring arm changes along with the ambient air pressure, and meanwhile, the whole sensor has higher pressure sensitivity due to the uniqueness of the vernier effect; the utility model discloses a vernier effect makes sensor performance sensitivity improve, has solved the temperature-pressure's among the high temperature environment differentiation measuring problem, also can be applied to the pressure monitoring among the high temperature environment, especially can be used to the performance test control among steamer engine and the aircraft engine.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, but the present invention is not limited to the following embodiments.
Example 1
In fig. 1, the vernier effect based micro-bubble type high-temperature pressure optical fiber sensor of this embodiment is formed by connecting a three-decibel coupler 1, a first single-mode fiber 2, a first quartz capillary 3, a first multimode fiber 4, a high-reflectivity film 5, a third single-mode fiber 6, a second quartz capillary 7, a second multimode fiber 8, and a second single-mode fiber 9.
An optical fiber measuring arm and an optical fiber reference arm are installed on the three-decibel coupler 1 in parallel, the optical fiber measuring arm is formed by welding a first multimode optical fiber 4 at the tail end of a first single mode optical fiber 2, the first single mode optical fiber 2 is connected with the three-decibel coupler 1, the diameter of a fiber core of the first single mode optical fiber 2 is 8.2 mu m, the outer diameter of a cladding is 125 mu m, the length of the cladding is 22cm, the diameter of the fiber core of the first multimode optical fiber 4 is 62.5 mu m, the outer diameter of the cladding is 125 mu m, the length of the cladding is 260 mu m, a thermal regeneration grating 10 is engraved on the fiber core of the first single mode optical fiber 2, the central wavelength of the thermal regeneration grating 10 is 1553nm, the length of a grating area is 12mm, the tail end of the first multimode optical fiber 4 extends into a first quartz capillary tube 3, the inner diameter of the first quartz capillary tube 3 is 132 mu m, the outer diameter of the first quartz capillary tube 3 is 200 mu m, one end of the first quartz capillary tube 3 is fixed on the first single mode optical fiber 2 by high-temperature glue, and the other end is a spherical bubble to form a first Fabry-Perot interference cavity, the horizontal distance from the tail end face of the first multimode fiber 4 to the wall of the spherical bulb is 398 microns, the hot-weight grating 10 is positioned in the first quartz capillary 3, the outer side of the spherical bulb of the first quartz capillary 3 is plated with a high-reflectivity film, the high-reflectivity film is a gold film, an aluminum film, a copper film or a silver film and is used for improving reflectivity, the central lines of the first single-mode fiber 2, the first multimode fiber 4 and the first quartz capillary 3 are superposed, the fiber reference arm is that the tail end of the second single-mode fiber 9 is welded with the second multimode fiber 8, the second single-mode fiber 9 is connected with the three-decibel coupler 1, the fiber core diameter, the cladding outer diameter and the length of the second single-mode fiber 9 are equal to those of the first single-mode fiber 2, the second multimode fiber 8 extends into the second quartz capillary 7 from one end of the quartz capillary, the second quartz capillary 7 is fixed on the second single-mode fiber 9 by high-temperature glue, the other end of the second quartz capillary 7 is fixedly connected with the third single-mode fiber 6 by high-temperature glue, a second Fabry-Perot interference cavity is formed in a second quartz capillary tube 7, the inner diameter of the second quartz capillary tube 7 is equal to that of the first quartz capillary tube 3 with the outer diameter, the horizontal distance from the tail end face of a second multimode fiber 8 in the second quartz capillary tube 7 to the end face of a third single-mode fiber 6 is 401 mu m, the fiber core diameter and the cladding outer diameter of the third single-mode fiber 6 are equal to those of the first single-mode fiber 2, the length of the third single-mode fiber 6 is 180 mu m, the central lines of the second single-mode fiber 9, the second multimode fiber 8, the second quartz capillary tube 7 and the third single-mode fiber 6 are coincided, the tail end face of the third single-mode fiber 6 is an inclined plane, and the inclined plane inclination angle is 45 degrees.
Incident light from a broadband light source is transmitted into the three decibel coupler 1 and is split into two portions, one passing through the measurement arm and the other passing through the reference arm. Light in the measuring arm can generate two reflected light beams at the right end of the first single-mode fiber 2 and the inner side face of the spherical bubble, so that a first Fabry-Perot cavity is formed by the right end of the first single-mode fiber 2 and the right end of the microbubble; in the reference arm, because the right end face of the third single-mode fiber 6 is obliquely cut, reflected light of the end face cannot be reflected, interference spectrum is not affected, light can be on two end faces of the right end of the second single-mode fiber 9 and the left end of the third single-mode fiber 6 in the second quartz capillary 7, two reflected light beams are generated, a second Fabry-Perot cavity is formed by the right end of the second single-mode fiber 9 and the left end of the third single-mode fiber 6, and a vernier effect is generated when the interference free spectral ranges of the two Fabry-Perot cavities are close to each other. When the pressure of the high-temperature environment is increased, the cavity length of the first fabry-perot cavity is changed due to the thermal expansion effect of the first quartz capillary tube 3, so that the corresponding reflection spectrum is changed. Similarly, when the pressure intensity of the high-temperature environment is increased, the second quartz capillary 7 in the reference arm is thermally expanded, so that the cavity length of the second fabry-perot cavity is changed, the corresponding reflection spectrum is changed accordingly, according to the vernier effect, the ultrahigh pressure sensitivity can be obtained by tracking the drift of the envelope, when the environment temperature is increased, the central wavelength of the thermogravimetric optical grating 10 is shifted accordingly, and the temperature sensitivity can be obtained by observing the spectrogram of the thermogravimetric optical grating 10 fed back by the demodulator.
Example 2
In this embodiment, an optical fiber measuring arm and an optical fiber reference arm are installed in parallel on a three-decibel coupler 1, the optical fiber measuring arm is formed by welding the tail end of a first single-mode fiber 2 with a first multimode fiber 4, a core of the first single-mode fiber 2 is engraved with a thermal regeneration grating 10, the central wavelength of the thermal regeneration grating 10 is 1553nm, the length of a grating region is 10mm, the core diameter of the first single-mode fiber 2 is 8.2 μm, the outer diameter of a cladding is 125 μm, and the length is 20cm, the tail end of the first multimode fiber 4 extends into a first quartz capillary 3, one end of the first quartz capillary 3 is fixed on the first single-mode fiber 2 by high-temperature glue, the other end of the first multimode fiber is a spherical bubble to form a first fabry-perot interference cavity, the horizontal distance from the tail end face of the first multimode fiber 4 to the wall of the spherical bubble is 350 μm, the optical fiber reference arm is formed by welding the tail end of a second single-mode fiber 9 with a second multimode fiber 8, and the second single-decibel coupler 1 is connected, the second multimode fiber 8 extends into the second quartz capillary 7 from one end of the quartz capillary, the second quartz capillary 7 is fixed on the second single-mode fiber 9 through high-temperature glue, the other end of the second quartz capillary 7 is fixedly connected with the third single-mode fiber 6 through the high-temperature glue, the horizontal distance from the tail end face of the second multimode fiber 8 to the end face of the third single-mode fiber 6 in the second quartz capillary 7 is 352 mu m, the fiber core diameter and the cladding outer diameter of the third single-mode fiber 6 are equal to those of the first single-mode fiber 2, the length of the third single-mode fiber 6 is 150 mu m, and the inclined angle of the tail end inclined face of the third single-mode fiber 6 is 40 degrees. The other components and the connection relationship of the components are the same as those in embodiment 1.
Example 3
In this embodiment, an optical fiber measuring arm and an optical fiber reference arm are installed in parallel on a three-decibel coupler 1, the optical fiber measuring arm is formed by welding the tail end of a first single-mode fiber 2 with a first multimode fiber 4, a core of the first single-mode fiber 2 is engraved with a thermal regeneration grating 10, the central wavelength of the thermal regeneration grating 10 is 1553nm, the length of a grating region is 15mm, the core diameter of the first single-mode fiber 2 is 8.2 μm, the outer diameter of a cladding is 125 μm, and the length is 25cm, the tail end of the first multimode fiber 4 extends into a first quartz capillary 3, one end of the first quartz capillary 3 is fixed on the first single-mode fiber 2 by high-temperature glue, the other end of the first multimode fiber is a spherical bubble to form a first fabry-perot interference cavity, the horizontal distance from the tail end face of the first multimode fiber 4 to the wall of the spherical bubble is 450 μm, the optical fiber reference arm is formed by welding the tail end of a second single-mode fiber 9 with a second multimode fiber 8, and the second single-decibel coupler 1 is connected, the second multimode fiber 8 extends into the second quartz capillary 7 from one end of the quartz capillary, the second quartz capillary 7 is fixed on the second single-mode fiber 9 through high-temperature glue, the other end of the second quartz capillary 7 is fixedly connected with the third single-mode fiber 6 through the high-temperature glue, the horizontal distance from the tail end face of the second multimode fiber 8 to the end face of the third single-mode fiber 6 in the second quartz capillary 7 is 455 mu m, the fiber core diameter and the cladding outer diameter of the third single-mode fiber 6 are equal to those of the first single-mode fiber 2, the length of the third single-mode fiber 6 is 200 mu m, and the inclined angle of the tail end inclined plane of the third single-mode fiber 6 is 60 degrees. The other components and the connection relationship of the components are the same as those in embodiment 1.
Claims (10)
1. A micro-bubble type high-temperature pressure optical fiber sensor based on vernier effect is characterized in that: an optical fiber measuring arm and an optical fiber reference arm are arranged on the three-decibel coupler (1) in parallel, the optical fiber measuring arm is a first multimode optical fiber (4) arranged at the tail end of a first single-mode optical fiber (2), the first single-mode optical fiber (2) is connected with the three-decibel coupler (1), a thermal regeneration grating (10) is engraved on the fiber core of the first single-mode optical fiber (2), the tail end of the first multimode optical fiber (4) extends into a first quartz capillary tube (3), one end of the first quartz capillary tube (3) is fixedly arranged on the first single-mode optical fiber (2), the other end of the first quartz capillary tube is a spherical bubble to form a first Fabry-Perot interference cavity, the thermal regeneration grating (10) is positioned in the first quartz capillary tube (3), a high-reflectivity film (5) is plated on the outer side of the spherical bubble, the central lines of the first single-mode optical fiber (2), the first multimode optical fiber (4) and the first quartz capillary tube (3) are overlapped, and a second multimode optical fiber (8) is arranged at the tail end of a second single-mode optical fiber (9) of the optical fiber reference arm, second single mode fiber (9) link to each other with three decibel couplers (1), second multimode fiber (8) stretch into in second quartz capillary (7) from second quartz capillary (7) one end, second quartz capillary (7) set firmly on second single mode fiber (9), the other end of second quartz capillary (7) is provided with third single mode fiber (6), form second Fabry-Perot in second quartz capillary (7) and interfere the chamber, second single mode fiber (9), second multimode fiber (8), second quartz capillary (7), the coincidence of the central line of third single mode fiber (6), the tail end terminal surface of third single mode fiber (6) is the inclined plane.
2. The vernier effect based micro-bubble type high temperature pressure optical fiber sensor according to claim 1, wherein: the length of the gate region of the thermal regeneration grating (10) is 10-15 mm, and the central wavelength is 1553 nm.
3. The vernier effect based micro-bubble type high temperature pressure optical fiber sensor according to claim 1, wherein: the first single-mode fiber (2) to the third single-mode fiber (6) have the same core diameter and the same cladding outer diameter.
4. The vernier effect based micro-bubble type high temperature pressure optical fiber sensor according to claim 1 or 3, wherein: the length of the first single-mode fiber (2) is the same as that of the second single-mode fiber (9) and is 20-25 cm, and the length of the third single-mode fiber (6) is 150-200 mu m.
5. The vernier effect based micro-bubble type high temperature pressure optical fiber sensor according to claim 1, wherein: the first quartz capillary tube (3) and the second quartz capillary tube (7) have the same inner diameter and the same outer diameter.
6. The vernier effect based micro-bubble type high temperature pressure optical fiber sensor according to claim 1, wherein: the first multimode fiber (4) and the second multimode fiber (8) have the same core diameter, the same cladding outer diameter and the same length.
7. The vernier effect based micro-bubble type high temperature pressure optical fiber sensor according to claim 6, wherein: the core diameter of the first multimode optical fiber (4) is 62.5 mu m, the cladding outer diameter is 125 mu m, and the length is 260 mu m.
8. The vernier effect based micro-bubble type high temperature pressure optical fiber sensor according to claim 1, wherein: the horizontal distance from the tail end face of the first multimode optical fiber (4) to the spherical bubble wall of the first quartz capillary tube (3) is 2-5 mu m smaller than the horizontal distance from the tail end face of the second multimode optical fiber (8) to the end face of the third single-mode optical fiber (6), and the horizontal distance from the tail end face of the first multimode optical fiber (4) to the spherical bubble wall of the first quartz capillary tube (3) is 350-450 mu m.
9. The vernier effect based micro-bubble type high temperature pressure optical fiber sensor according to claim 1, wherein: the inclination angle of the tail end inclined plane of the third single-mode optical fiber (6) is 40-60 degrees.
10. The vernier effect based micro-bubble type high temperature pressure optical fiber sensor according to claim 1, wherein: the high-reflectivity film (5) is a gold film or an aluminum film or a copper film or a silver film.
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| CN114705348A (en) * | 2022-03-31 | 2022-07-05 | 黑龙江大学 | Vernier-sensitized parallel capillary structure optical fiber pressure sensor and preparation method thereof |
| CN114705349A (en) * | 2022-03-31 | 2022-07-05 | 黑龙江大学 | Vernier sensitization optical fiber pressure sensor combined with film coating technology and preparation method thereof |
| CN114777990A (en) * | 2022-03-25 | 2022-07-22 | 蚌埠学院 | Optical fiber gas pressure sensor and preparation method thereof |
| CN114777836A (en) * | 2022-03-10 | 2022-07-22 | 吉林大学 | Optical fiber high-temperature stress sensor based on yttrium aluminum garnet crystal derived optical fiber and preparation method thereof |
| CN114935417A (en) * | 2022-04-18 | 2022-08-23 | 深圳大学 | Method for preparing microbubble probe by adopting carbon dioxide laser, microbubble probe and pressure detection system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114777836A (en) * | 2022-03-10 | 2022-07-22 | 吉林大学 | Optical fiber high-temperature stress sensor based on yttrium aluminum garnet crystal derived optical fiber and preparation method thereof |
| CN114777836B (en) * | 2022-03-10 | 2023-12-05 | 吉林大学 | Optical fiber high-temperature stress sensor based on yttrium aluminum garnet crystal derived optical fiber and preparation method thereof |
| CN114777990A (en) * | 2022-03-25 | 2022-07-22 | 蚌埠学院 | Optical fiber gas pressure sensor and preparation method thereof |
| CN114705348A (en) * | 2022-03-31 | 2022-07-05 | 黑龙江大学 | Vernier-sensitized parallel capillary structure optical fiber pressure sensor and preparation method thereof |
| CN114705349A (en) * | 2022-03-31 | 2022-07-05 | 黑龙江大学 | Vernier sensitization optical fiber pressure sensor combined with film coating technology and preparation method thereof |
| CN114935417A (en) * | 2022-04-18 | 2022-08-23 | 深圳大学 | Method for preparing microbubble probe by adopting carbon dioxide laser, microbubble probe and pressure detection system |
| CN114935417B (en) * | 2022-04-18 | 2023-09-05 | 深圳大学 | Method for preparing microbubble probe by carbon dioxide laser, microbubble probe and pressure detection system |
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