CN214782097U - Evaporation plating equipment - Google Patents
Evaporation plating equipment Download PDFInfo
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- CN214782097U CN214782097U CN202022894143.5U CN202022894143U CN214782097U CN 214782097 U CN214782097 U CN 214782097U CN 202022894143 U CN202022894143 U CN 202022894143U CN 214782097 U CN214782097 U CN 214782097U
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Abstract
The utility model relates to the technical field of evaporation, in particular to evaporation equipment, including evaporation chamber body and reloading chamber body, the reloading chamber body is located one side of evaporation chamber body, evaporation chamber body inner chamber is equipped with robotic arm mechanism and three or more crucible positions, three or more crucible reserve positions surround the setting of crucible evaporation position, three or more crucible reserve positions are located the same virtual circle's bisector respectively, crucible evaporation position is located the centre of a circle position of virtual circle, set up the rotation track at the body inner chamber of evaporation chamber, be equipped with two or more crucible reception positions on the rotation track, can carry out the action of reloading or reinforced simultaneously when the production operation, not only play fine retaining action to the cleanliness factor in the evaporation chamber body like this, avoid the granule in the air to pollute the cavity, have certain guarantee to the product yield; but also can greatly avoid the influence of operations such as shutdown, cavity opening, material changing and the like on the productivity.
Description
Technical Field
The utility model relates to an evaporation plating technical field, in particular to evaporation plating equipment.
Background
An Organic Light Emitting Diode (abbreviated as OLED) is a new display technology, and has advantages of self-luminescence, wide viewing angle, high brightness, low voltage driving, and fast response.
One of the most critical processes in the OLED is to fill the organic light emitting material into the pixel cells of the TFT substrate, and there are many techniques developed at present, but due to the issues of maturity and yield, the current mass production application is the most widely performed vacuum evaporation method, and an apparatus for vacuum evaporation of the organic light emitting material is required by using such a technique: an evaporation plating machine.
Crucible configuration generally is line source crucible or point source crucible among the current coating by vaporization machine cavity, and it all exists and does not have reserve crucible, if the material is used up and need to shut down and open the chamber and carry out reinforced work to the crucible again, and this process not only can influence the cleanliness factor of environment in the cavity, pollutes the cavity environment, and to point source crucible, because of crucible size restriction itself, need frequently open the chamber reinforced, then can cause certain influence to production beat or productivity.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve is: provided is an evaporation apparatus.
In order to solve the technical problem, the utility model discloses a technical scheme be:
an evaporation device comprises an evaporation chamber body and a material changing chamber body, wherein the material changing chamber body is positioned on one side of the evaporation chamber body, an inner cavity of the evaporation chamber body is provided with a mechanical arm mechanism and more than three crucible positions, the more than three crucible positions are respectively positioned on equal division points of the same virtual semicircle, the mechanical arm mechanism is positioned on the circle center position of the virtual semicircle, the crucible positions comprise a crucible evaporation position and more than three crucible standby positions, the more than three crucible standby positions are arranged around the crucible evaporation position, the more than three crucible standby positions are respectively positioned on equal division points of the same virtual circle, and the crucible evaporation position is positioned on the circle center position of the virtual circle;
the inner cavity of the material changing cavity body is provided with a rotating track, and the rotating track is provided with more than two crucible receiving positions;
the inner cavity of the evaporation cavity body is further provided with a crucible material waiting position and a slide rail mechanism, the crucible material waiting position is arranged on one side of the mechanical arm mechanism, one end of the slide rail mechanism faces the crucible material waiting position, the other end opposite to one end of the slide rail mechanism faces the crucible receiving position, and the slide rail mechanism is configured to convey a crucible on the crucible material waiting position to the crucible receiving position;
the mechanical arm mechanism is configured to grab a crucible on the crucible standby position and place the crucible in the crucible evaporation position and grab a crucible which is used up in the crucible evaporation position and place the crucible in the crucible standby position.
The beneficial effects of the utility model reside in that:
by designing the scheme of crucible position standby and material changing cavities, more than three crucible standby positions are arranged around a crucible evaporation position, the more than three crucible standby positions are respectively positioned on equal division points of the same virtual circle, the crucible evaporation position is positioned on the circle center position of the virtual circle, a rotating track is arranged in the inner cavity of the material changing cavity body, more than two crucible receiving positions are arranged on the rotating track, and the material changing or feeding actions can be carried out simultaneously during production operation, so that the cleanliness in the evaporation cavity body is well kept, the cavity body is prevented from being polluted by particles in the air, and the product yield is guaranteed to a certain extent; but also can greatly avoid the influence of operations such as shutdown, cavity opening, material changing and the like on the productivity.
Drawings
Fig. 1 is a schematic structural view of an evaporation apparatus according to the present invention;
fig. 2 is a schematic structural view of an evaporation apparatus according to the present invention;
fig. 3 is a schematic structural view of an evaporation apparatus according to the present invention;
fig. 4 is a schematic structural view of a rotary track and a crucible receiving position of the evaporation equipment according to the present invention;
fig. 5 is a schematic structural view of a rotary track and a crucible receiving position of the evaporation equipment according to the present invention;
fig. 6 is a schematic structural view of a rotary track and a crucible receiving position of an evaporation device according to the present invention;
fig. 7 is a schematic structural view of a rotary track and a crucible receiving position of an evaporation device according to the present invention;
description of reference numerals:
1. an evaporation chamber body; 101. a robotic arm mechanism; 102. a crucible position; 1021. a crucible evaporation station; 1022. a crucible standby position; 103. the crucible is ready for material level; 104. a slide rail mechanism;
2. a refueling cavity body; 201. rotating the track; 202. a crucible reception position; 203. and a PUMP interface.
Detailed Description
In order to explain the technical content, the objects and the effects of the present invention in detail, the following description is made with reference to the accompanying drawings in combination with the embodiments.
Referring to fig. 1, the present invention provides a technical solution:
an evaporation device comprises an evaporation chamber body and a material changing chamber body, wherein the material changing chamber body is positioned on one side of the evaporation chamber body, an inner cavity of the evaporation chamber body is provided with a mechanical arm mechanism and more than three crucible positions, the more than three crucible positions are respectively positioned on equal division points of the same virtual semicircle, the mechanical arm mechanism is positioned on the circle center position of the virtual semicircle, the crucible positions comprise a crucible evaporation position and more than three crucible standby positions, the more than three crucible standby positions are arranged around the crucible evaporation position, the more than three crucible standby positions are respectively positioned on equal division points of the same virtual circle, and the crucible evaporation position is positioned on the circle center position of the virtual circle;
the inner cavity of the material changing cavity body is provided with a rotating track, and the rotating track is provided with more than two crucible receiving positions;
the inner cavity of the evaporation cavity body is further provided with a crucible material waiting position and a slide rail mechanism, the crucible material waiting position is arranged on one side of the mechanical arm mechanism, one end of the slide rail mechanism faces the crucible material waiting position, the other end opposite to one end of the slide rail mechanism faces the crucible receiving position, and the slide rail mechanism is configured to convey a crucible on the crucible material waiting position to the crucible receiving position;
the mechanical arm mechanism is configured to grab a crucible on the crucible standby position and place the crucible in the crucible evaporation position and grab a crucible which is used up in the crucible evaporation position and place the crucible in the crucible standby position.
From the above description, the beneficial effects of the present invention are:
by designing the scheme of crucible position standby and material changing cavities, more than three crucible standby positions are arranged around a crucible evaporation position, the more than three crucible standby positions are respectively positioned on equal division points of the same virtual circle, the crucible evaporation position is positioned on the circle center position of the virtual circle, a rotating track is arranged in the inner cavity of the material changing cavity body, more than two crucible receiving positions are arranged on the rotating track, and the material changing or feeding actions can be carried out simultaneously during production operation, so that the cleanliness in the evaporation cavity body is well kept, the cavity body is prevented from being polluted by particles in the air, and the product yield is guaranteed to a certain extent; but also can greatly avoid the influence of operations such as shutdown, cavity opening, material changing and the like on the productivity.
Further, the distance between the two closest crucible standby positions in the two adjacent crucible positions is 20mm-30 mm.
As can be seen from the above description, setting the distance between the two closest crucible standby positions of the two adjacent crucible positions to be 20mm to 30mm can prevent the crucible standby positions of the two adjacent crucible positions from affecting each other.
Further, a PUMP interface is arranged on the material changing cavity body and communicated with an external vacuum PUMP.
According to the description, the material changing cavity body is provided with the PUMP interface, the PUMP interface is communicated with an external vacuum PUMP, after all stations are fully distributed with empty crucibles, the vacuum PUMP inflates the material changing cavity body, and at the moment, the material changing cavity body can be opened to carry out unified material changing work; after the material changing is finished, the vacuum pump exhausts air to enable the material changing cavity body to reach a vacuum environment, and the working state of the crucible to be emptied is recovered.
Furthermore, the rotating track is a circular rotating track, and more than two crucible receiving positions are arranged on the circular rotating track at equal intervals.
Further, the number of the crucible positions ranges from 3 to 10.
Further, the number of the crucible standby positions in one crucible position ranges from 3 to 6.
Furthermore, the inner cavity of the evaporation chamber body is also provided with an evaporation source baffle plate and a driving mechanism, the driving mechanism is electrically connected with the evaporation source baffle plate, and the driving mechanism is configured to drive the evaporation source baffle plate to rotate to the position above the crucible-free position during evaporation and drive the evaporation source baffle plate to rotate to the position above the crucible position after evaporation.
Referring to fig. 1 to 7, a first embodiment of the present invention is:
referring to fig. 1, an evaporation apparatus includes an evaporation chamber body 1 and a material changing chamber body 2, the material changing chamber body 2 is located at one side of the evaporation chamber body 1, an inner cavity of the evaporation chamber body 1 is provided with a mechanical arm mechanism 101 and three or more crucible positions 102, the three or more crucible positions 102 are respectively located at equal division points of a same virtual semicircle, the mechanical arm mechanism 101 is located at a circle center position of the virtual semicircle, the crucible positions 102 include crucible evaporation positions 1021 and three or more crucible standby positions 1022, the three or more crucible standby positions 1022 are arranged around the crucible evaporation positions 1021, the three or more crucible standby positions 1022 are respectively located at equal division points of the same virtual circle, and the crucible evaporation positions 1021 are located at the circle center position of the virtual circle;
referring to fig. 1, a rotating track 201 is arranged in an inner cavity of the material changing cavity body 2, and more than two crucible receiving positions 202 are arranged on the rotating track 201;
referring to fig. 1, a crucible material waiting position 103 and a slide rail mechanism 104 are further arranged in an inner cavity of the evaporation cavity body 1, the crucible material waiting position 103 is arranged on one side of the mechanical arm mechanism 101, one end of the slide rail mechanism 104 faces the crucible material waiting position 103, the other end opposite to one end of the slide rail mechanism 104 faces the crucible material receiving position 202, and the slide rail mechanism 104 is configured to convey a crucible on the crucible material waiting position 103 to the crucible material receiving position 202;
the slide rail mechanism 104 may be a ball retainer type linear guide rail with a model of THK or a micro SRS type slider type WM, and a bearing disc capable of placing a point source crucible is additionally arranged on the upper surface of the slide rail.
The robot arm mechanism 101 is configured to grasp a crucible on the crucible standby station 1022 and put it into the crucible evaporation station 1021, and grasp a crucible that has run out in the crucible evaporation station 1021 and put it into the crucible standby station 103.
The Robot mechanism 101 may be a Robot of the Sankyo Robot SR9143-XXXX series.
The distance between the two nearest crucible standby positions 1022 in the two adjacent crucible positions 102 is 20mm-30mm, and preferably 20 mm.
Referring to fig. 1, a PUMP interface 203 is further disposed on the material changing cavity body 2, and the PUMP interface 203 is communicated with an external vacuum PUMP.
Referring to fig. 1, the rotating track 201 is a circular rotating track 201, and more than two crucible receiving positions 202 are arranged on the circular rotating track 201 at equal intervals.
The rotating track 201 may be a track of the loop motor module unit series of shanghai reed automation ltd, for example, of the type stak-C180.
The number of the crucible sites 102 ranges from 3 to 10.
The number of crucible spare spaces 1022 in one of the crucible spaces 102 ranges from 3 to 6.
The inner cavity of the evaporation chamber body 1 is further provided with an evaporation source baffle and a driving mechanism, the driving mechanism can be a motor, the opening or closing of the evaporation source baffle is controlled by the forward rotation or the reverse rotation of the motor, the driving mechanism is electrically connected with the evaporation source baffle, and the driving mechanism is configured to drive the evaporation source baffle to turn to the position above the crucible-free position 102 during evaporation and drive the evaporation source baffle to turn to the position above the crucible-free position 102 after evaporation.
The drive mechanism may be a three-phase asynchronous motor of the siemens 1LE0001 series.
In this embodiment, taking an evaporation machine using a point source device as an example, in the existing structure, the evaporation chamber body 1 has a plurality of crucible positions 102, which can be filled with a plurality of materials, and is used for evaporation of a single material, single-layer multi-material doping mixed evaporation or evaporation of a multi-layer material when preparing different device structures. However, since there is only one crucible, when the material in the crucible is used up, a proper time is required to be searched for the operation of stopping the machine and opening the cavity for feeding, and the process will have a certain influence on the productivity.
Referring to fig. 2 and fig. 3, in the scheme, a plurality of crucible standby positions 1022 are designed, and are located around each crucible evaporation position 1021, the crucible standby positions 1022 are arranged in an annular array around the crucible evaporation position 1021, and may be 3 crucible standby positions 1022, 4 crucible standby positions 1022, 5 crucible standby positions 1022, and the like, the number of the crucible standby positions is 3-6, and is an optimal interval, if too many, on one hand, adverse factors such as deterioration may occur when the material is placed for too long time, and on the other hand, the crucible itself needs a certain cost; the crucible standby positions 1022 can be 3, 4 or 5, or 3, 4 or 5 crucible standby positions can be mixed according to the charging condition and the material use condition of each material, namely, 3 crucible standby positions 1022, 4 crucible standby positions 1022 or 5 crucible standby positions 1022 are arranged around each crucible evaporation position 1021 in the same evaporation cavity body 1, or 3 crucible standby positions 1022 are arranged around one crucible evaporation position 1021, another crucible standby position 1022 is 4, and the other crucible standby position 1022 is 5 crucible standby positions 1022.
In the scheme, each crucible evaporation position 1021 and the crucible standby positions 1022 around the crucible evaporation position 1021 are collectively referred to as crucible positions 102, the specific number N of crucible positions 102 in the same evaporation cavity body 1 can be designed according to actual conditions, can be 3-10, and the crucible positions 102 are all located on the same side of a semicircle (as the evaporation source baffle is semicircular, the crucible position 102 is opened when evaporation is started, the crucible position 102 is turned to, the crucible position 102 is closed when evaporation is finished, the crucible position 102 is turned to, a crucible is shielded, materials are prevented from being continuously evaporated on a substrate), and one crucible position 102 is designed at an interval of alpha according to the value of alpha being 180 degrees/N.
The scheme designs a material changing cavity body 2, a plurality of crucibles to be connected are arranged in the material changing cavity body 2 and used for collecting empty crucibles used up by materials in the evaporation cavity body 1; the crucible to-be-positioned can be designed as a motion field (see fig. 4), a circle (see fig. 5), a square (see fig. 6), a regular polygon (see fig. 7), and the like. Each station is provided with a device (not shown in the figure) capable of containing an empty crucible so as to fix the empty crucible and prevent the empty crucible from falling or being damaged; the movement between the stations controls the slide rail mechanism 104 to move in a certain direction (instantaneous or anticlockwise) through the driving mechanism; this reloading chamber body 2 is last still to design has a PUMP interface 203, external vacuum PUMP, treats that all stations are covered with empty crucible after, and the vacuum PUMP is aerifyd to reloading chamber body 2, can open reloading chamber body 2 this moment and carry out unified reloading work, treats that reloading is finished after, and the vacuum PUMP bleeds, makes reloading chamber body 2 reach vacuum environment, resumes to wait to connect empty crucible operating condition.
To sum up, the utility model provides a pair of evaporation equipment, through the scheme of designing reserve and the chamber of reloading in crucible position, the reserve position of crucible more than three surrounds the setting of crucible evaporation position, the reserve position of crucible more than three is located the equipartition point of same virtual circle respectively, crucible evaporation position is located the centre of a circle position of virtual circle, set up the rotation track at the chamber body inner chamber of reloading, be equipped with more than two crucible reception positions on the rotation track, the action of reloading or reinforced can be carried out simultaneously when production operation, not only play fine retaining action to the cleanliness factor in the chamber body of reloading like this, avoid the granule in the air to pollute the cavity, have certain guarantee to the product yield; but also can greatly avoid the influence of operations such as shutdown, cavity opening, material changing and the like on the productivity.
The above mentioned is only the embodiment of the present invention, and not the limitation of the patent scope of the present invention, all the equivalent transformations made by the contents of the specification and the drawings, or the direct or indirect application in the related technical field, are included in the patent protection scope of the present invention.
Claims (7)
1. An evaporation device is characterized by comprising an evaporation cavity body and a material changing cavity body, wherein the material changing cavity body is positioned on one side of the evaporation cavity body, a mechanical arm mechanism and more than three crucible positions are arranged in an inner cavity of the evaporation cavity body, the more than three crucible positions are respectively positioned on equal division points of the same virtual semicircle, the mechanical arm mechanism is positioned on the circle center position of the virtual semicircle, the crucible positions comprise a crucible evaporation position and more than three crucible standby positions, the more than three crucible standby positions are arranged around the crucible evaporation position, the more than three crucible standby positions are respectively positioned on equal division points of the same virtual circle, and the crucible evaporation position is positioned on the circle center position of the virtual circle;
the inner cavity of the material changing cavity body is provided with a rotating track, and the rotating track is provided with more than two crucible receiving positions;
the inner cavity of the evaporation cavity body is further provided with a crucible material waiting position and a slide rail mechanism, the crucible material waiting position is arranged on one side of the mechanical arm mechanism, one end of the slide rail mechanism faces the crucible material waiting position, the other end opposite to one end of the slide rail mechanism faces the crucible receiving position, and the slide rail mechanism is configured to convey a crucible on the crucible material waiting position to the crucible receiving position;
the mechanical arm mechanism is configured to grab a crucible on the crucible standby position and place the crucible in the crucible evaporation position and grab a crucible which is used up in the crucible evaporation position and place the crucible in the crucible standby position.
2. The evaporation apparatus according to claim 1, wherein the distance between two closest crucible standby positions of two adjacent crucible positions is 20mm-30 mm.
3. The evaporation apparatus according to claim 1, wherein a PUMP interface is further provided on the material changing chamber body, and the PUMP interface is communicated with an external vacuum PUMP.
4. The evaporation apparatus according to claim 1, wherein the rotation rail is a circular rotation rail, and two or more crucible receiving positions are arranged on the circular rotation rail at equal intervals.
5. The vapor deposition apparatus according to claim 1, wherein the number of crucible positions ranges from 3 to 10.
6. The evaporation apparatus according to claim 1, wherein the number of crucible spare spaces in one crucible space is in the range of 3-6.
7. The evaporation apparatus according to claim 1, wherein the inner chamber of the evaporation chamber body is further provided with an evaporation source shutter and a driving mechanism, the driving mechanism is electrically connected to the evaporation source shutter, and the driving mechanism is configured to drive the evaporation source shutter to rotate above the crucible-free position at the time of evaporation and to drive the evaporation source shutter to rotate above the crucible-free position at the end of evaporation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022894143.5U CN214782097U (en) | 2020-12-03 | 2020-12-03 | Evaporation plating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022894143.5U CN214782097U (en) | 2020-12-03 | 2020-12-03 | Evaporation plating equipment |
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| Publication Number | Publication Date |
|---|---|
| CN214782097U true CN214782097U (en) | 2021-11-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022894143.5U Active CN214782097U (en) | 2020-12-03 | 2020-12-03 | Evaporation plating equipment |
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| CN (1) | CN214782097U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112538605A (en) * | 2020-12-03 | 2021-03-23 | 福建华佳彩有限公司 | Evaporation plating equipment |
| CN115198235A (en) * | 2022-07-22 | 2022-10-18 | 福建华佳彩有限公司 | Metal cavity feeding method for evaporation |
-
2020
- 2020-12-03 CN CN202022894143.5U patent/CN214782097U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112538605A (en) * | 2020-12-03 | 2021-03-23 | 福建华佳彩有限公司 | Evaporation plating equipment |
| CN112538605B (en) * | 2020-12-03 | 2024-05-14 | 福建华佳彩有限公司 | Evaporation equipment |
| CN115198235A (en) * | 2022-07-22 | 2022-10-18 | 福建华佳彩有限公司 | Metal cavity feeding method for evaporation |
| CN115198235B (en) * | 2022-07-22 | 2023-05-12 | 福建华佳彩有限公司 | Feeding method of metal cavity for evaporation |
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