CN214734233U - Cathode mounting system in continuous PVD coating equipment - Google Patents

Abstract

The utility model relates to a negative pole's mounting system includes that fork truck formula moves and carries device, and guide structure in continuous PVD coating equipment, and fork truck formula moves and carries the device and include: a base having first and second ends opposite to each other in a first direction, the first end having a guide portion; the vertical lifting mechanism is arranged at the second end of the base, and the left and right adjusting assembly is connected to the vertical lifting mechanism; the bearing pallet fork is connected with the left-right adjusting assembly so as to be capable of reciprocating along a second direction, the second direction is perpendicular to the first direction and perpendicular to the vertical direction, the bearing pallet fork comprises a fork arm extending along the first direction, and one side, facing the base, of the fork arm is provided with a hook; and the direction structure is arranged below the coating process chamber and is used for being matched with the guide part of the base so as to guide the vehicle type transfer device to move towards the coating process chamber and limit the moving position of the forklift type transfer device, and compared with the traditional crown block, the direction structure has lower requirements on the structural strength and the height of a factory building.

Description

Cathode mounting system in continuous PVD coating equipment

Technical Field

The utility model relates to a coating equipment technical field especially relates to an installation system of negative pole in installation continuous coating film PVD equipment.

Background

The continuous coating PVD (Physical vapor Deposition) equipment designed for hoisting the cathode in the current market implements maintenance by hoisting the overhead travelling crane. The continuous film coating PVD equipment is vacuum film coating equipment for realizing continuous film feeding, and generally has a 7-chamber structure, wherein the 7 chambers are respectively named as C1-C7, and the functions of the equipment are respectively an inlet end locking chamber, an inlet end buffer chamber, an inlet end transition chamber, a process chamber, an outlet end transition chamber, an outlet end buffer chamber and an outlet end locking chamber. In the conventional technology, maintenance is performed by using a crane for hoisting, specifically, the maintenance is performed on C4, i.e., a cathode of a coating process chamber. The cathode here refers to a cathode mechanism of the PVD device that can be disassembled by using a hoisting method, and the cathode mechanism has a hoisting part for hoisting, and the hoisting part is generally a hoisting ring.

The maintenance is implemented by adopting a hoisting mode of a crown block 1, and the cathode 2 is hoisted into the coating process chamber 3 by adopting the crown block. As shown in fig. 1, the working state of the cathode during the process of hanging in or out is shown. The hook 11 of the crown block 1 is connected with the hanging ring 21 on the top of the cathode 2 through the hanging rope 4. The hook 11 of the crown block 1 is lifted along the vertical direction, and the cathode 2 can be hung above the coating process chamber 3, so that the next action is carried out.

The inventor finds that the hoisting mode has at least the following disadvantages in the process of practicing the prior art. Firstly, the requirement on the factory building is high: the crown block 1 is arranged on the roof of a factory building, the height X1m of the coating process chamber 3, the height X2m of the cathode 2, the height (with a hook) X3m of the crown block 1, the height of a reserved hoisting space (a stretching space of a hoisting rope 4) X4m and the total height of the factory building is more than or equal to (X1+ X2+ X3+ X4) m. In this height relationship, the height to the plant in the prior art is at least 5 m. Secondly, the equipment volume and weight of the existing industry are large, the allocated crown block needs to reach 5 tons or more, and the crown block is arranged on the roof of the factory building, so that the requirement on the strength of the factory building is high.

Based on the two defects, the installation of the crown block cannot be carried out due to insufficient height or insufficient strength of the factory buildings of a plurality of manufacturers, and the hoisting mode of the crown block cannot adapt to the hoisting requirement of the cathode.

SUMMERY OF THE UTILITY MODEL

On the basis, it is necessary to provide a cathode installation system in continuous PVD coating equipment for solving the problems that the installation of a crown block cannot be performed due to insufficient height of a factory building or insufficient strength of the factory building, and the hoisting requirement of the cathode cannot be met by the hoisting mode of the crown block.

The utility model provides an installation system of negative pole in continuous PVD coating equipment includes fork truck formula and moves and carry device, and guide structure, wherein fork truck formula moves and carries the device and include: a base having first and second opposite ends in a first direction, the first end having a guide; the left-right adjusting assembly is connected to the vertical lifting mechanism and driven by the vertical lifting mechanism to lift along the vertical direction; the bearing pallet fork is connected to the left-right adjusting assembly so as to be capable of moving in a reciprocating mode along a second direction, the second direction is perpendicular to the first direction and perpendicular to the vertical direction, the bearing pallet fork comprises at least one fork arm extending along the first direction, and one side, facing the base, of the fork arm is provided with a hanging hook; and the guide structure is arranged below the coating process chamber and is used for being matched with the guide part of the base so as to guide the forklift type transfer device to move towards the coating process chamber and limit the moving position of the forklift type transfer device.

According to the cathode installation system in the continuous PVD coating equipment, the base of the forklift type transfer device is arranged on the ground, and compared with a traditional crown block, the requirement on the structural strength of a workshop is lower; the base of fork truck formula moves and carries device can insert the clearance between the bottom of coating film process chamber and the ground, can practice thrift the height dimension of vertical direction to the height dimension that fork truck formula moved and carries device's base self also is far less than the height of overhead traveling crane, consequently under the condition that the height dimension of coating film process chamber, the height dimension of negative pole are unchangeable, and the safe distance of negative pole in the coating film process chamber top is also unchangeable, the utility model discloses the mounting system of negative pole in the continuous PVD coating equipment, fork truck formula moves and carries the required height minimum of device.

In one embodiment, the base comprises a pair of support legs arranged in parallel, and the end of each support leg far away from the vertical lifting mechanism is provided with the guide part.

In one embodiment, the guide structure comprises a first guide part and a second guide part which are arranged at intervals, the first guide part comprises a first guide wall and a first blocking wall which are perpendicular to each other, the second guide part comprises a second guide wall and a second blocking wall which are perpendicular to each other, the first guide wall is parallel to the second guide wall and extends along the length direction of the supporting leg, and the first blocking wall and the second blocking wall extend oppositely.

In one embodiment, one end of the first guide wall is connected with the first blocking wall, and the other end of the first guide wall is provided with a first guide surface which is far away from the second guide wall and extends obliquely; one end of the second guide wall is connected with the second blocking wall, a second guide surface is arranged at the other end of the second guide wall, and the second guide surface is far away from the first guide wall and extends obliquely.

In one embodiment, the outer surface of the guide portion is a cylindrical surface.

In one embodiment, the first guide member and the second guide member are both integrally formed sheet metal members.

In one embodiment, the left-right adjustment assembly has an upper limit position in the vertical direction that is vertically spaced from a top end of the vertical lift mechanism.

In one embodiment, the vertical lift mechanism is a hydraulic lift mechanism.

In one embodiment, the forklift-type transfer device further comprises a first traveling wheel and a second traveling wheel, wherein the first traveling wheel is arranged at the bottom side of the vertical lifting mechanism, and the second traveling wheel is arranged at the bottom of the base.

In one embodiment, the number of the fork arms is two, the two fork arms are arranged in parallel, and the hooks on the two fork arms correspond to each other one by one.

Drawings

Fig. 1 is a diagram illustrating a working state of a conventional cathode moving apparatus using a crown block.

Fig. 2 is a schematic perspective view of the forklift type transfer device aligned with the guiding structure at the bottom of the coating process chamber in the installation system according to an embodiment of the present invention.

Fig. 3 is a front view of the installation system of an embodiment of the present invention, in which the forklift type transfer device is aligned with the guiding structure at the bottom of the coating process chamber.

Fig. 4 is a bottom view of the installation system of an embodiment of the present invention, in which the forklift type transfer device is aligned with the guiding structure at the bottom of the coating process chamber.

Fig. 5 is a schematic view of a three-dimensional structure of a forklift-type transfer device in an installation system according to an embodiment of the present invention, when aligning the cathode with an opening of a coating process chamber.

Fig. 6 is a front view of the forklift-type transfer device aligned with the opening of the coating process chamber when the cathode is placed in the mounting system according to an embodiment of the present invention.

Fig. 7 is a front view of the forklift-type transfer device aligned with the opening of the coating process chamber when the cathode is placed in the mounting system according to an embodiment of the present invention.

The relevant elements in the figures are numbered correspondingly as follows:

1. a crown block; 11. hanging hooks; 2. a cathode; 21. a hoisting ring; 3. a film coating process chamber; 4. a lifting rope;

100. a forklift type transfer device; 110. a base; 101. a first end; 102. a second end; 111. a guide portion; 112. supporting legs; 120. a vertical lifting mechanism; 121. a gantry; 122. a power system; 123. a lifting member; 130. a left-right adjustment assembly; 140. a load bearing pallet fork; 141. a yoke; 142. hanging hooks; 150. a first running wheel; 160. a second road wheel; 200. a guide structure; 210. a first guide member; 211. a first guide wall; 212. a first retaining wall; 213. a first guide surface; 220. a second guide member; 221. a second guide wall; 222. a second retaining wall; 223. a second guide surface;

300. a cathode; 310. a hoisting ring; 400. a film coating process chamber; 410. and (3) a support leg.

Detailed Description

In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will be able to make similar modifications without departing from the spirit and scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

As described in the background art, the conventional method for hoisting the cathode by using the overhead travelling crane has many defects, is limited by the height and strength of the plant, and cannot meet the installation requirement of the large cathode. In order to solve the above problem, an embodiment of the utility model provides an installation system of negative pole among continuous PVD coating equipment, its hoist and mount demand that can satisfy large-scale negative pole can overcome prior art's not enough again simultaneously, and is all lower to the requirement of factory building height and intensity.

The following describes preferred embodiments of the present invention with reference to the accompanying drawings.

Referring to fig. 2 to 7, the operation of the cathode mounting system in the continuous PVD coating apparatus according to an embodiment of the present invention is illustrated, wherein fig. 2 to 4 illustrate the operation of the cathode 300 facing the coating process chamber 400 (i.e., C4 chamber) by using the cathode mounting system, and fig. 5 to 7 illustrate the operation of the cathode 300 aligned facing the coating process chamber 400 by using the cathode mounting system.

As shown in the drawings, the installation system of the cathode 300 in the continuous PVD coating apparatus of an embodiment of the present invention includes a forklift-type transfer device 100 and a guiding structure 200, wherein the forklift-type transfer device 100 is used for transporting the cathode 300, and can lift the cathode 300 into the coating process chamber 400 or lift the cathode 300 out of the coating process chamber 400, and the guiding structure 200 is used for guiding the forklift-type transfer device 100 to move forward and limiting the moving position of the forklift-type transfer device 100 when the forklift-type transfer device 100 moves the cathode 300, so as to perform the positioning function.

As shown in fig. 2, the forklift-type transfer device 100 includes a base 110, a vertical lifting mechanism 120, a left-right adjusting assembly 130, and a load-bearing pallet fork 140, wherein the vertical lifting mechanism 120 is mounted on the base 110, the left-right adjusting assembly 130 is connected to the vertical lifting mechanism 120, and the load-bearing pallet fork 140 is connected to the left-right adjusting assembly 130.

As shown in fig. 2 and 3, in the first direction X, the base 110 has a first end 101 and a second end 102 opposite to each other, wherein the first end 101 is provided with a guide portion 111, and the vertical lifting mechanism 120 is mounted at the second end 102 of the base 110. The left and right adjustment assemblies 130 can drive the load bearing forks 140 to move in the vertical direction Z as driven by the vertical lift mechanism 120. The left-right adjustment assembly 130 itself may drive the load bearing forks 140 to reciprocate in a second direction Y that is perpendicular to the first direction X and perpendicular to the vertical direction.

In the present embodiment, as shown in fig. 3, the vertical lifting mechanism 120 can drive the left-right adjustment assembly 130 to move in the vertical direction Y (up-down direction in the drawing); the first direction X is a horizontal direction, and the second direction Y is a direction perpendicular to the drawing plane. The side-to-side adjustment assembly 130 is used to drive the load bearing forks 140 side-to-side in a second direction.

The specific type of the vertical lift mechanism 120 is not limited, and specifically, it is a hydraulic lift mechanism. As shown in fig. 2, the vertical lifting mechanism 120 includes a gantry 121, a power system 122, and a lifting member 123, wherein the gantry 121 is fixed to the second end 102 of the base 110, the power system 122 is mounted at the bottom of the gantry 121, and the lifting member 123 is movably disposed on the gantry 121. The left and right adjusting assembly 130 is slidably coupled to the elevating member 123 of the vertical elevating mechanism 120. Left right regulating assembly 130 can drive bearing fork 140 and reciprocate along vertical direction under vertical elevating system's 120 drive, during the specific implementation, left right regulating assembly 130 can share driving system with vertical elevating system 120, also can various independent setting driving system. Power systems include, but are not limited to, hydraulic systems, pneumatic systems, motors, and the like.

In addition, in practice, the left-right adjustment assembly 130 has an upper limit position in the vertical direction, which is spaced apart from the top end of the vertical lift mechanism 120 in the vertical direction. This ensures safety when the vertical elevating mechanism 120 drives the left-right adjusting assembly 130 to ascend.

The load-bearing pallet fork 140 includes at least one fork arm 141 extending along a first direction, a plurality of hooks 142 are provided on a side of the fork arm 141 facing the base 110, and the plurality of hooks 142 are spaced along the first direction (i.e., a length direction of the fork arm 141). The hook 142 is adapted to mate with a lifting eye 310 on top of the cathode 300 so that the load bearing forks 140 can lift the cathode 300. In a specific setting, the number of the fork arms 141 is two, the two fork arms 141 are arranged in parallel, and the hooks 142 on the two fork arms 141 are in one-to-one correspondence. The two fork arms 141 are used for lifting the cathode 300 together, so that the cathode 300 is stressed stably, is not easy to shake and has high safety.

The guide structure 200 is disposed below the coating process chamber 400. As shown in fig. 2, the bottom of the coating process chamber 400 is provided with a plurality of legs 410 for being placed on the foundation. The legs 410 form a gap therebetween, and the legs 410 also allow a gap to be formed between the bottom of the coating process chamber 400 and the foundation in the vertical direction when the coating process chamber 400 is placed on the foundation. Specifically, the guide structure 200 is disposed on the foundation below the coating process chamber 400 and in the gap. In other embodiments, the guiding structure 200 may be disposed at the bottom of the coating process chamber 400, which protrudes from the bottom of the coating process chamber 400 to a height smaller than the height of the legs 410.

The operation of the cathode mounting system in the continuous PVD coating apparatus will be briefly described by taking the cathode 300 suspended in the coating chamber 400 as an example with reference to the drawings.

Referring to fig. 2 to 4, when the cathode 300 needs to be hung into the coating process chamber 400, the hanging hook 142 of the load-bearing fork 140 hooks the hanging ring 310 on the cathode 300 by controlling the vertical lifting mechanism 120 and the left-right adjusting assembly 130. The vertical elevating mechanism 120 drives the load-bearing fork 140 to ascend, and the load-bearing fork 140 lifts the cathode 300 to a position higher than the top of the coating process chamber 400 and reserves a safety distance.

Before the forklift type transfer device 100 moves to the coating process chamber 400, the base 110 is inserted into the gap between the bottom of the coating process chamber 400 and the foundation, and the guide part 111 of the base 110 is aligned with the guide structure 200 until the forklift type transfer device 100 moves to the proper position, so that the cathode 300 is approximately positioned above the opening of the coating process chamber 400.

As shown in fig. 5 to 7, the cathode 300 is driven to move left and right by the left-right adjustment assembly 130, so that the cathode 300 is aligned with the opening of the coating process chamber 400. Then, the vertical elevating mechanism 120 is operated to control the cathode 300 to descend, and the cathode 300 is placed in the coating process chamber 400. Thereafter, the forklift type transfer apparatus 100 is moved to perform the next lifting operation, or the forklift type transfer apparatus 100 is placed at a predetermined position, and the operation is ended.

The operation of the cathode mounting system in the PVD coating apparatus when the cathode 300 is lifted out of the coating process chamber 400 is as follows. Before the forklift type transfer device 100 moves to the plating process chamber 400, the base 110 is inserted into the gap between the bottom of the plating process chamber 400 and the foundation, and the guide portion 111 of the base 110 is aligned with the guide structure 200 until the forklift type transfer device 100 moves in place.

The vertical lift mechanism 120 is operated such that the load bearing forks 140 are lowered. Simultaneously, the left-right adjusting assembly 130 is operated to make the hook 142 of the load-bearing pallet fork 140 hook the hanging ring 310 on the cathode 300. The vertical elevating mechanism 120 is operated to raise the load-bearing forks 140 to lift the cathodes 300 out of the coating process chamber 400 with a safety distance in the vertical direction. The forklift-type transfer apparatus 100 is moved, and the cathode 300 is placed at a designated position, such as on a dedicated maintenance cart.

In the cathode installation system in the continuous PVD coating equipment, the base 110 of the forklift type transfer device 100 is arranged on the ground, so that compared with a traditional crown block, the requirement on the structural strength of a factory building is lower; the base 110 of the forklift type transfer device 100 can be inserted into the gap between the bottom of the coating process chamber 400 and the foundation, the height dimension of the vertical direction can be saved, and the height dimension of the base 110 of the forklift type transfer device 100 is far smaller than the height of the crown block, so that the height dimension of the coating process chamber 400 and the height dimension of the cathode 300 are unchanged, and the safety distance of the cathode 300 above the coating process chamber 400 is also unchanged, in the installation system of the cathode in the continuous PVD coating equipment, the height required by the forklift type transfer device 100 is extremely small. In a specific comparative example, the inventor ensures that under the condition that the height dimension and the safety distance are the same, compared with the plant height of at least 5m required by the day, the height required by the forklift-type transfer device 100 is as low as 4.067m, and the saving is at least 1 m.

In addition, when the cathode 300 is lifted into or out of the coating process chamber 400, the guide structure 200 is aligned and matched with the guide part 111 on the forklift-type transfer device 100, so that the operation is easy, and the maintenance time is favorably shortened.

In addition, the system for mounting the cathode 300 in the continuous PVD coating apparatus can be adapted to PVD apparatuses having different sizes by increasing or decreasing the size of the forklift-type transfer device 100.

As shown in fig. 2 and 3, the base 110 includes a pair of support legs 112 arranged in parallel, and an end of each support leg 112 remote from the vertical lift mechanism 120 is provided with a guide 111. The two support legs 112 are more supportable, and the two guide portions 111 are simultaneously engaged with the guide structure 200, so that the forklift-type transfer device 100 can stably move forward.

As shown in fig. 2 to 4, in an embodiment, the guiding structure 200 includes a first guiding element 210 and a second guiding element 220 which are spaced apart from each other. The two support legs 112 of the base 110 can be inserted between the first guide 210 and the second guide 220 and are in guiding engagement with the first guide 210 and the second guide 220, respectively.

Specifically, the first guide 210 includes a first guide wall 211 and a first blocking wall 212 perpendicular to each other, and the second guide 220 includes a second guide wall 221 and a second blocking wall 222 perpendicular to each other, wherein the first guide wall 211 is parallel to the second guide wall 221 and extends in a length direction of the support leg 112, and the first blocking wall 212 and the second blocking wall 222 extend in opposite directions. Preferably, the first guide member 210 and the second guide member 220 are both integrally formed sheet metal parts, which facilitates manufacturing.

With the above arrangement, the first guide wall 211 and the second guide wall 221 are arranged along the advancing direction of the forklift-type transfer device 100 so as to be able to fit with the side walls of the support legs 112; the first blocking wall 212 and the second blocking wall 222 are located in front of the support leg 112. When the guide part 111 abuts against the first blocking wall 212 and the second blocking wall 222, the forklift type transfer device 100 moves in place, and at this time, the position of the cathode 300 does not need to be adjusted in the front-back direction (the direction of the front end and the rear end of the forklift type transfer device 100), and the cathode 300 can be ensured to be aligned with the opening of the coating process chamber 400 only by controlling the bearing pallet fork 140 to move left and right through the left-and-right moving component, so that the operation is difficult to meet the hand. In addition, the forklift transfer apparatus 100 is also simplified in structural design, that is, the forklift transfer apparatus 100 does not need to be provided with a mechanism capable of controlling the forward and backward movement of the forks relative to the base 110.

Further, as shown in fig. 4, one end of the first guiding wall 211 is connected to the first blocking wall 212, the other end of the first guiding wall 211 is provided with a first guiding surface 213, and the first guiding surface 213 is far away from the second guiding wall 221 and extends obliquely; one end of the second guide wall 221 is connected to the second blocking wall 222, the other end of the second guide wall 221 is provided with a second guide surface 223, and the second guide surface 223 is away from the first guide wall 211 and extends obliquely. The first guide surface 213 and the second guide surface 223 form therebetween a relatively large-sized entrance for facilitating insertion of the two support legs 112.

Further, as shown in fig. 1, the outer surface of the guide portion 111 is a cylindrical surface. When the forklift-type transfer device 100 moves forward toward the plating process chamber 400, the guide portion 111 moves forward under the guide of the first guide surface 213 or the second guide surface 223, so that the two support legs 112 are more easily inserted between the first guide wall 211 and the second guide wall 221.

It should be noted that the arrangement of the guide structure 200 is not limited to the above example. Such as only the first guide 210 or the second guide 220 may be provided. As another example, the first guide 210 and the second guide 220 may be provided with insertion channels for receiving the support legs 112 to guide the forward movement of the forklift type transfer device 100.

As shown in fig. 3, in order to facilitate the movement of the forklift type transfer device 100, the forklift type transfer device 100 further includes a first traveling wheel 150 and a second traveling wheel 160, wherein the first traveling wheel 150 is disposed at the bottom side of the vertical lift mechanism 120, and the second traveling wheel 160 is disposed at the bottom of the base 110.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims (10)

1. The system for installing the cathode in the continuous PVD coating equipment is characterized by comprising a forklift type transfer device and a guide structure, wherein the forklift type transfer device is used for transferring the cathode in the continuous PVD coating equipment

The forklift type transfer device includes:

a base having first and second opposite ends in a first direction, the first end having a guide;

a vertical lifting mechanism arranged at the second end of the base,

the left-right adjusting assembly is connected to the vertical lifting mechanism and driven by the vertical lifting mechanism to lift along the vertical direction;

the bearing pallet fork is connected to the left-right adjusting assembly so as to be capable of moving in a reciprocating mode along a second direction, the second direction is perpendicular to the first direction and perpendicular to the vertical direction, the bearing pallet fork comprises at least one fork arm extending along the first direction, and one side, facing the base, of the fork arm is provided with a hanging hook; and

the guide structure is arranged below the coating process chamber and is used for being matched with the guide part of the base so as to guide the forklift type transfer device to move towards the coating process chamber and limit the moving position of the forklift type transfer device.

2. The cathode mounting system of continuous PVD coating equipment of claim 1, wherein the base comprises a pair of support legs arranged in parallel, and the end of each support leg far away from the vertical lifting mechanism is provided with the guide part.

3. The cathode mounting system of continuous PVD coating equipment as recited in claim 2, wherein the guiding structure comprises a first guiding member and a second guiding member spaced apart, the first guiding member comprises a first guiding wall and a first blocking wall perpendicular to each other, the second guiding member comprises a second guiding wall and a second blocking wall perpendicular to each other, the first guiding wall is parallel to the second guiding wall and extends along the length direction of the supporting leg, and the first blocking wall and the second blocking wall extend oppositely.

4. The cathode mounting system of claim 3, wherein one end of the first guiding wall is connected to the first blocking wall, and the other end of the first guiding wall is provided with a first guiding surface which extends away from the second guiding wall and is inclined; one end of the second guide wall is connected with the second blocking wall, a second guide surface is arranged at the other end of the second guide wall, and the second guide surface is far away from the first guide wall and extends obliquely.

5. The system for installing a cathode in a continuous PVD coating apparatus as recited in claim 4, wherein the outer surface of the guide portion is a cylindrical surface.

6. The cathode mounting system of claim 3, wherein the first guide member and the second guide member are integrally formed sheet metal members.

7. The cathode mounting system of claim 1, wherein the left-right adjustment assembly has an upper limit position in the vertical direction, the upper limit position being vertically spaced from a top end of the vertical lift mechanism.

8. The cathode mounting system of claim 1, wherein the vertical lifting mechanism is a hydraulic lifting mechanism.

9. The cathode mounting system of claim 1, wherein the forklift-type transfer device further comprises a first traveling wheel and a second traveling wheel, wherein the first traveling wheel is disposed at the bottom side of the vertical lifting mechanism, and the second traveling wheel is disposed at the bottom of the base.

10. The system for installing the cathode in the continuous PVD coating equipment as recited in claim 1, wherein the number of the fork arms is two, two fork arms are arranged in parallel, and the hooks on the two fork arms are in one-to-one correspondence.

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