CN214724734U

CN214724734U - Polishing pad tailing collection device

Info

Publication number: CN214724734U
Application number: CN202120830683.9U
Authority: CN
Inventors: 李加海; 谭鸿
Original assignee: Anhui Hechen New Material Co ltd
Current assignee: Anhui Hechen New Material Co ltd
Priority date: 2021-04-20
Filing date: 2021-04-20
Publication date: 2021-11-16
Anticipated expiration: 2031-04-20

Abstract

The utility model discloses a burnishing pad tails collection device, including the base, the processing platform is installed at the top of base, and processing bench installs first supporting riser and second supporting riser, installs burnishing pad tails on first supporting riser and the second supporting riser and collects the mechanism, and burnishing pad tails collection mechanism includes driving motor, drive screw, bar guide post, lateral shifting slider and tails push pedal, and drive screw threaded connection has the lateral shifting slider, the lateral shifting slider is still installed on the bar guide post, the both ends of bar guide post are all connected on second supporting riser, the tails push pedal is installed through the bolt to the lateral shifting slider. The utility model discloses a polishing pad tails collection device, the tails push pedal through lateral shifting can push away the polishing pad tails of piling up at the processing bench to the one end of processing platform and fall to in collecting the storehouse, does not need the manual work of operating personnel to collect, has alleviateed operating personnel's work burden and has made polishing pad tails collection efficiency high.

Description

Polishing pad tailing collection device

Technical Field

The utility model relates to a polishing pad technical field specifically is a polishing pad tails collection device.

Background

The polishing pad is also called polishing leather, polishing cloth, polishing sheet and important auxiliary materials for determining the surface quality in chemical mechanical polishing, and can be divided into an abrasive polishing pad and an abrasive-free polishing pad according to whether the polishing pad contains abrasives or not; according to different materials, the polishing pad can be divided into a polyurethane polishing pad, a non-woven fabric polishing pad and a composite polishing pad; the surface structure can be roughly classified into a planar type, a mesh type, and a spiral type.

The polishing pad has the following effects: 1. delivering the polishing solution to different regions of the polishing pad efficiently and uniformly; 2. smoothly discharging reactants, scraps and the like which are subjected to full chemical reaction after polishing to achieve a removal effect; 3. maintaining the thin film of polishing solution on the surface of the polishing pad so that the chemical reaction is sufficiently performed; 4. the polishing process is kept smooth and the surface is not deformed, so that better wafer surface appearance is obtained.

At present the in-process of polishing pad in making, when carrying out last shaping to the polishing pad, need cut in proper order single polishing pad appearance, the polishing pad tails after the polishing pad cutting is piled up on the processing bench, and to the collection mode of polishing pad tails, mostly be the manual work of operating personnel and collect at present, the mode that this kind of polishing pad tails was collected has increased operating personnel's work burden and has made the polishing pad tails collection inefficiency.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a polishing pad tails collection device, the tails push pedal through lateral shifting can push away the polishing pad tails of piling up on the processing platform to the one end of processing platform and fall to the collecting bin in, does not need the manual work of operating personnel to collect, has alleviateed operating personnel's work burden and has made polishing pad tails collection efficiency high, can solve the problem among the prior art.

In order to achieve the above object, the utility model provides a following technical scheme:

a polishing pad tailing collecting device comprises a base, wherein a processing table is installed at the top of the base, a first supporting vertical plate and a second supporting vertical plate are installed on the upper surface of the processing table and are arranged at the front end and the rear end of the upper surface of the processing table in parallel, polishing pad tailing collecting mechanisms are installed on the first supporting vertical plate and the second supporting vertical plate and are located above the processing table, a collecting bin is arranged on the side surface of the processing table, and the collecting bin is installed on the base;

polishing pad tails collection mechanism includes driving motor, transmission lead screw, bar guide post, lateral shifting slider and tails push pedal, the both ends of transmission lead screw are all installed on first support riser through the bearing and the one end of transmission lead screw runs through first support riser and passes through shaft coupling and driving motor's output shaft, driving motor installs the side at first support riser, transmission lead screw threaded connection has the lateral shifting slider, the lateral shifting slider still installs on the bar guide post, the both ends of bar guide post are all connected on second support riser, the lateral shifting slider passes through the bolt and installs the tails push pedal.

Preferably, two ends of the tailing push plate are respectively clung to the first supporting vertical plate and the second supporting vertical plate, and the bottom of the tailing push plate is clung to the processing table.

Preferably, the end part of the collecting bin is provided with positioning columns which are arranged in parallel, and the collecting bin is inserted into the fixing seat through the positioning columns and is fixed on the fixing seat.

Preferably, the fixing base is installed on the side of base, set up on the fixing base and supply reference column male constant head tank, reference column and constant head tank adaptation.

Preferably, the tailing push plate drives the transmission screw rod to rotate through the driving motor and transversely moves.

Compared with the prior art, the beneficial effects of the utility model are as follows:

the utility model discloses a polishing pad tails collection device, the polishing pad tails after the polishing pad cutting is piled up at the processing bench, driving motor drives the transmission lead screw rotation, the transmission lead screw can make lateral shifting slider lateral shifting under the guide effect of bar guide post at rotatory in-process, the lateral shifting slider can make the tails push pedal also lateral shifting thereupon at lateral shifting's in-process, the tails push pedal through lateral shifting can push away the polishing pad tails of piling up at the processing bench to the one end of processing bench and fall to the collection storehouse in, do not need the manual work of operating personnel to collect, the work burden that has alleviateed operating personnel and make the polishing pad tails collection efficiency high.

Drawings

FIG. 1 is a schematic view of a polishing pad tailing collection device of the present invention;

FIG. 2 is a schematic view of the polishing pad tailing collection mechanism of the present invention;

FIG. 3 is a schematic view of the present invention showing the installation of a tailing pushing plate on the lateral moving slide block;

FIG. 4 is an exploded view of the lateral shifting block of the present invention with a tailing pushing plate;

FIG. 5 is a schematic view of the collecting bin of the present invention mounted on the fixing base;

fig. 6 is an exploded view of the collecting bin of the present invention mounted on the fixing base.

In the figure: 1. a base; 2. a processing table; 21. a first supporting vertical plate; 22. a second supporting vertical plate; 3. a polishing pad tailing collection mechanism; 31. a drive motor; 32. a transmission screw rod; 33. a strip-shaped guide post; 34. transversely moving the slide block; 35. a tailing push plate; 4. a collection bin; 41. a positioning column; 5. a fixed seat; 51. and (6) positioning a groove.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, 5 and 6, a polishing pad tailing collecting device comprises a base 1, a processing table 2 is mounted on the top of the base 1, a first supporting vertical plate 21 and a second supporting vertical plate 22 are mounted on the upper surface of the processing table 2, the first supporting vertical plate 21 and the second supporting vertical plate 22 are arranged at the front end and the rear end of the upper surface of the processing table 2 in parallel, a polishing pad tailing collecting mechanism 3 is mounted on the first supporting vertical plate 21 and the second supporting vertical plate 22, the polishing pad tailing collecting mechanism 3 is located above the processing table 2, a collecting bin 4 is arranged on the side surface of the processing table 2, the collecting bin 4 is mounted on the base 1, positioning columns 41 arranged in parallel are arranged at the end part of the collecting bin 4, the collecting bin 4 is inserted into the fixing seat 5 through the positioning columns 41 and fixed on the fixing seat 5, the fixing seat 5 is mounted on the side surface of the base 1, positioning grooves 51 for the positioning columns 41 to insert are formed on the fixing seat 5, reference column 41 and constant head tank 51 adaptation, collect storehouse 4 and collect polishing pad tails after, can take off collecting storehouse 4 from fixing base 5, pour polishing pad tails and carry out subsequent processing, make collecting storehouse 4 install and remove the facility, convenient to use.

Referring to fig. 2-4, the polishing pad tailing collecting mechanism 3 includes a driving motor 31, a transmission screw 32, a bar-shaped guide post 33, a transverse moving slider 34 and a tailing push plate 35, the polishing pad tailing after the polishing pad is cut is accumulated on the processing table 2, the driving motor 31 drives the transmission screw 32 to rotate, the transmission screw 32 can enable the transverse moving slider 34 to transversely move under the guiding action of the bar-shaped guide post 33 in the rotating process, the transverse moving slider 34 can enable the tailing push plate 35 to transversely move along with the transverse moving slider in the transverse moving process, the polishing pad tailing accumulated on the processing table 2 can be pushed to one end of the processing table 2 through the transverse moving tailing push plate 35 and falls into the collecting bin 4, manual collection of operators is not needed, the work burden of the operators is reduced, the efficiency of collecting the polishing pad tailing of the operators is high, both ends of the transmission screw 32 are mounted on the first supporting vertical plate 21 through bearings, and one end of the transmission screw 32 penetrates through the first supporting vertical plate 21 Cross the output shaft of shaft coupling and driving motor 31, driving motor 31 installs the side at first support riser 21, transmission lead screw 32 threaded connection has lateral shifting slider 34, lateral shifting slider 34 still installs on bar guide post 33, the both ends of bar guide post 33 are all connected on second support riser 22, lateral shifting slider 34 installs tails push pedal 35 through the bolt, tails push pedal 35 drives transmission lead screw 32 through driving motor 31 and rotates and lateral shifting, the bottom of first support riser 21 and second support riser 22 and tails push pedal 35 is hugged closely respectively to the both ends of tails push pedal 35 and processing platform 2, the tails of polishing pad that can pile up on processing platform 2 through lateral shifting's tails push pedal 35 pushes away to the one end of processing platform 2 and falls to in collecting bin 4.

To sum up, the utility model discloses a polishing pad tails collection device, the polishing pad tails after the polishing pad cutting is piled up on processing platform 2, driving motor 31 drives transmission lead screw 32 rotatory, transmission lead screw 32 can make lateral shifting slider 34 lateral shifting under the guide effect of bar guide post 33 at rotatory in-process, lateral shifting slider 34 can make tails push pedal 35 also lateral shifting thereupon at lateral shifting's in-process, the polishing pad tails that can pile up on processing platform 2 through lateral shifting's tails push pedal 35 pushes away to processing platform 2 one end and falls to collecting bin 4 in, do not need the manual work of operating personnel to collect, the work burden that has alleviateed operating personnel and make polishing pad tails collection efficiency high.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A polishing pad tailing collection device, includes base (1), its characterized in that: the polishing pad tailing collecting device is characterized in that a processing table (2) is mounted at the top of the base (1), a first supporting vertical plate (21) and a second supporting vertical plate (22) are mounted on the upper surface of the processing table (2), the first supporting vertical plate (21) and the second supporting vertical plate (22) are arranged at the front end and the rear end of the upper surface of the processing table (2) in parallel, a polishing pad tailing collecting mechanism (3) is mounted on the first supporting vertical plate (21) and the second supporting vertical plate (22), the polishing pad tailing collecting mechanism (3) is located above the processing table (2), a collecting bin (4) is arranged on the side surface of the processing table (2), and the collecting bin (4) is mounted on the base (1);

the polishing pad tailing collecting mechanism (3) comprises a driving motor (31), a transmission screw rod (32), a strip-shaped guide column (33), a transverse moving slide block (34) and a tailing push plate (35), both ends of the transmission screw rod (32) are arranged on the first supporting vertical plate (21) through bearings, one end of the transmission screw rod (32) penetrates through the first supporting vertical plate (21) and is connected with an output shaft of the driving motor (31) through a coupler, the driving motor (31) is arranged on the side surface of the first supporting vertical plate (21), the transmission screw rod (32) is in threaded connection with a transverse moving sliding block (34), the transverse moving sliding block (34) is also arranged on a strip-shaped guide post (33), both ends of the strip-shaped guide post (33) are connected on the second supporting vertical plate (22), and a tailing push plate (35) is arranged on the transverse moving sliding block (34) through a bolt.

2. The polishing pad tailing collection device of claim 1, wherein: two ends of the tailing push plate (35) are respectively tightly attached to the first supporting vertical plate (21) and the second supporting vertical plate (22), and the bottom of the tailing push plate (35) is tightly attached to the processing table (2).

3. The polishing pad tailing collection device of claim 1, wherein: the end part of the collecting bin (4) is provided with positioning columns (41) which are arranged in parallel, and the collecting bin (4) is inserted into the fixing seat (5) through the positioning columns (41) and fixed on the fixing seat (5).

4. The polishing pad tailing collection device of claim 3, wherein: the side at base (1) is installed in fixing base (5), offer on fixing base (5) and supply reference column (41) male constant head tank (51), reference column (41) and constant head tank (51) adaptation.

5. The polishing pad tailing collection device of claim 1, wherein: the tailing push plate (35) drives the transmission screw rod (32) to rotate through the driving motor (31) and move transversely.