CN214701764U - Graphite support for high-purity quartz furnace - Google Patents
Graphite support for high-purity quartz furnace Download PDFInfo
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- CN214701764U CN214701764U CN202022595954.5U CN202022595954U CN214701764U CN 214701764 U CN214701764 U CN 214701764U CN 202022595954 U CN202022595954 U CN 202022595954U CN 214701764 U CN214701764 U CN 214701764U
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Abstract
The utility model relates to a high-purity quartz capsule graphite support for stove, including two sets of parallel placement's built-up blocks, every group built-up blocks includes graphite base, graphite bottom plate and a plurality of graphite support frame, graphite bottom plate block in on the graphite base, a plurality of graphite support frames are piled up from top to bottom and are placed, and the graphite support frame of lower floor is arranged in on the graphite bottom plate, form a plurality of confession quartz capsule between two adjacent two-layer graphite support frames and between lower floor's graphite support frame and the graphite base and insert the slot of establishing, during the equipment, quartz capsule one end is inserted in the slot of a set of built-up blocks, and the other end is inserted in the slot of another built-up block, and a plurality of quartz capsules are level and arrange in parallel on the support. The utility model has the advantages of being simple in structure and convenient in operation, long service life and the quartz capsule purity that obtains is high.
Description
Technical Field
The utility model relates to a graphite support, concretely relates to graphite support for high-purity quartz furnace.
Background
The modern science and technology is developed day by day, and the higher purity requirement is put forward to quartz, the basic raw material in the industries such as semiconductor, photovoltaic, glass manufacturing and the like, and a high-purity quartz furnace is necessary equipment for refining the purity of quartz, and a graphite support is used as a carrier of a quartz tube in the quartz furnace to obtain the quartz tube with higher purity. But the graphite support applied to the purification of the quartz tube has the problem of easy damage.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects, the utility model provides a graphite support for high-purity quartz furnace, which has simple structure, high efficiency, long service life and high purity of quartz tube.
The utility model discloses a solve the technical scheme that its technical problem adopted and be:
the utility model provides a high-purity quartz furnace uses graphite support, includes two sets of parallel arrangement's built-up jig, and every group built-up jig includes graphite base, graphite bottom plate and a plurality of graphite support frame, graphite bottom plate block in on the graphite base, a plurality of graphite support frames are piled up from top to bottom and are placed, and the graphite support frame of lower floor is arranged in on the graphite bottom plate, form a plurality of confession quartz capsule between two adjacent two-layer graphite support frames and between lower floor's graphite support frame and the graphite base and insert the slot of establishing, during the equipment, quartz capsule one end is inserted in the slot of a set of built-up jig, and the other end is inserted in the slot of another built-up jig, and a plurality of quartz capsules are level and arrange in parallel on the support.
Preferably, the graphite base is of a long strip-shaped structure and is provided with a base surface and a base bottom surface which are arranged in parallel, two ends of the base surface are respectively provided with a clamping groove, and the clamping grooves are inverted 'convex' shapes.
Preferably, the graphite bottom plate is of a long strip-shaped structure and is provided with a bottom plate surface and a bottom plate bottom surface, the bottom plate surface is of a wave-shaped structure, the bottom plate bottom surface is provided with a mounting groove, and the mounting groove penetrates through the whole length direction of the bottom plate bottom surface.
Preferably, the graphite support frame is integrally of a long strip-shaped wavy structure, and the shape of the graphite support frame is the same as that of the surface of the bottom plate.
Preferably, the wave structure on graphite support frame and bottom plate surface comprises a plurality of V type grooves, and is equipped with the platform between two adjacent V type grooves, the both ends of bottom plate surface and graphite support frame also all are equipped with the platform, and during the equipment, the platform of the graphite support frame of lower floor is arranged in on the corresponding platform of bottom plate surface, and the platform of upper graphite support frame is arranged in on the corresponding platform of lower floor's graphite support frame, and the V type groove on the graphite support frame of lower floor and the corresponding V type groove of bottom plate on the surface constitute the slot, and the slot is constituteed to the corresponding V type groove on two upper and lower adjacent graphite support frames, and upper and lower adjacent two-layer slot staggers each other.
Preferably, the included angle of the V-shaped groove is 90 degrees, the included angle of the V-shaped groove is of a circular arc structure, and the inner wall of the V-shaped groove is a smooth inner wall.
Preferably, the graphite base is a graphite base prepared from isostatic pressing graphite, the graphite bottom plate is a graphite bottom plate prepared from isostatic pressing graphite, and the graphite support frame is a graphite support frame prepared from isostatic pressing graphite.
The utility model has the advantages that: the utility model discloses a two sets of structure is the same and parallel arrangement's rack, each group rack comprises graphite base, graphite bottom plate and a plurality of graphite support frame, graphite bottom plate is fixed in on the graphite base, a plurality of graphite support frames are piled up from top to bottom, and the bottom layer graphite support frame is arranged in the bottom plate surface of graphite bottom plate, form a plurality of slots between the graphite support frame, and between graphite bottom plate and the graphite support frame and be used for supporting the quartz capsule, wherein graphite base, graphite bottom plate and graphite support frame all adopt isostatic pressing graphite to prepare and form, because isostatic pressing graphite has the purity height, impurity is few, high temperature resistant, heat conduction is even etc. characteristic, can prolong the life-span of graphite support effectively, prevented the purity of quartz capsule from taking place secondary pollution better; the inner walls of the V-shaped grooves on the graphite support frame and the graphite bottom plate are subjected to mirror polishing treatment to achieve surface smoothness meeting requirements, so that the contact part of the quartz tube and the graphite bottom plate can be prevented from leaving marks even under a high-temperature environment, and the quality of the quartz tube is ensured; quartz tubes with different diameters can be placed in the 90-degree V-shaped grooves, so that the application range of the graphite support is expanded to a certain extent; the utility model discloses a graphite support simple structure, efficient, not fragile long service life and quartz capsule purity are high.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view taken at A in FIG. 1;
FIG. 3 is a schematic structural view of a graphite base according to the present invention;
FIG. 4 is a diagram illustrating the usage of the present invention;
in the figure: 10-graphite base, 11-base surface, 12-base bottom surface, 13-clamping groove, 20-graphite bottom plate, 21-bottom plate surface, 22-bottom plate bottom surface, 23-mounting groove, 30-graphite support frame, 31-slot, 32-V-shaped groove and 40-quartz tube.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
Example (b): as shown in fig. 1 to 4, a graphite support for a high purity quartz furnace is characterized in that: including two sets of parallel placement's built-up blocks, every group built-up block includes graphite base 10, graphite bottom plate 20 and a plurality of graphite support frame 30, graphite bottom plate 20 block in on the graphite base 10, pile up from top to bottom and place a plurality of graphite support frames 30, the graphite support frame 30 of lower floor is arranged in on the graphite bottom plate 20, form a plurality of confession quartz capsule 40 between two adjacent two-layer graphite support frames 30 and between lower floor graphite support frame and the graphite base 20 and insert the slot 31 of establishing, during the equipment, quartz capsule 40 one end is inserted in the slot 31 of a built-up block, and the other end is inserted in the slot 31 of another built-up block, and a plurality of quartz capsule 40 are level and parallelly arranged on the support. The utility model discloses a two sets of block that the structure is the same, every block comprises graphite base 10, graphite bottom plate 20 and a plurality of graphite support frame 30, and on graphite bottom plate 20 was fixed in graphite base 10, a plurality of graphite support frame 30 piled up from top to bottom, and bottom layer graphite support frame 30 placed graphite bottom plate 20's bottom plate surface 21 in, between the graphite support frame and between graphite bottom plate and the graphite support frame form a plurality of slot 31 and be used for supporting quartz capsule 40, the utility model is used for support quartz capsule, its simple structure, convenient operation, long service life and the quartz capsule purity that obtains are high.
The graphite base 10 is a graphite base prepared from isostatic graphite, the graphite bottom plate 20 is a graphite bottom plate prepared from isostatic graphite, and the graphite support frame 30 is a graphite support frame prepared from isostatic graphite. The graphite base, the graphite bottom plate and the graphite support frame are all prepared from isostatic pressing graphite, and the isostatic pressing graphite has the characteristics of high purity, less impurities, high temperature resistance, uniform heat conduction and the like, so that the service life of the graphite support frame can be effectively prolonged, and the purity of the quartz tube is better prevented from generating secondary pollution.
As shown in fig. 3, the graphite base 10 is a strip-shaped structure, and the graphite base 10 has a base surface 11 and a base bottom surface 12 which are arranged in parallel, two ends of the base surface 11 are respectively provided with a clamping groove 13, and the clamping grooves 13 are inverted "convex" shapes. Further, graphite base is the cuboid structure, is equipped with two draw-in grooves 13 on graphite base and can removes graphite support according to the length of quartz capsule, consequently operates more conveniently.
The graphite bottom plate 20 is of a long strip-shaped structure, the graphite bottom plate 20 is provided with a bottom plate surface 21 and a bottom plate bottom surface 22, the bottom plate surface 21 is of a wave-shaped structure, a mounting groove 23 is formed in the bottom plate bottom surface 22, and the mounting groove 23 penetrates through the whole length direction of the bottom plate bottom surface 22. During assembly, the mounting groove 23 is just clamped on the base surface 11 between the two clamping grooves 13 of the graphite base, so that the graphite bottom plate 20 is mounted on the graphite base 10.
As shown in fig. 4, the graphite support frame 30 has an overall elongated wave-shaped structure, and the shape of the graphite support frame is the same as that of the bottom plate surface 21. Graphite support frame 30 and bottom plate surface 21's wave structure comprises a plurality of V type grooves 32, and is equipped with the platform between two adjacent V type grooves 32, bottom plate surface 21 and graphite support frame 30's both ends also all are equipped with the platform, during the equipment, bottom plate surface 21 corresponding platform is arranged in to the platform of bottom plate surface 30's of lower floor, and on lower floor's graphite support frame corresponding platform was arranged in to the platform of upper graphite support frame 30's platform, and corresponding V type groove constitution slot 31 on the V type groove on the graphite support frame of lower floor and bottom plate surface 21, and corresponding V type groove constitution slot 31 on upper and lower two adjacent graphite support frame 30, and upper and lower adjacent two-layer slot 31 staggers each other. Thus, the stability of the quartz tube in placement can be ensured.
Furthermore, the included angle of the V-shaped groove 32 is 90 degrees, the included angle of the V-shaped groove 32 is of a circular arc structure, and the inner wall of the V-shaped groove 32 is a smooth inner wall. The inner wall of the V-shaped groove is subjected to mirror polishing treatment to achieve surface smoothness meeting requirements, so that a contact part of the quartz tube and the V-shaped groove can be prevented from leaving marks even under a high-temperature environment, and the quality of the quartz tube is ensured; the quartz tubes with different diameters can be placed in the 90-degree V-shaped groove, so that the application range of the graphite support is expanded to a certain extent.
The utility model discloses an operation process: during the equipment, place two graphite bases 10 in the quartz capsule according to quartz capsule length parallely in the stove, then place two graphite bottom plates 20 respectively in on the graphite base 10, make the mounting groove 23 card of graphite bottom plate go into the base surface 11 of graphite base, place a plurality of quartz capsule 40 in the V type groove 32 on bottom plate surface in proper order again, the quartz capsule both ends are placed respectively on two graphite bottom plates 20, place two graphite support frames 30 respectively again on graphite bottom plate 20, then place a plurality of quartz capsule 40 in the V type groove 32 of graphite support frame in proper order, put one deck graphite support frame 30 again, analogize one deck quartz capsule in proper order, one deck graphite support frame piles up, until placing the graphite support frame of the superiors well.
It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several changes and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (7)
1. A graphite support for a high-purity quartz furnace is characterized in that: including two sets of parallel arrangement's built-up blocks, every group built-up block includes graphite base (10), graphite bottom plate (20) and a plurality of graphite support frame (30), graphite bottom plate (20) block in on graphite base (10), a plurality of graphite support frames (30) are piled up from top to bottom and are placed, and graphite support frame (30) of lower floor are arranged in on graphite bottom plate (20), between two adjacent two-layer graphite support frames (30) and between lower floor graphite support frame and graphite bottom plate (20) form a plurality of confession quartz capsule (40) and insert slot (31) of establishing, during the equipment, in slot (31) of a set of built-up are inserted to quartz capsule (40) one end, and the other end is inserted in slot (31) of another built-up block, and a plurality of quartz capsule (40) are level and arrange on the support in parallel.
2. The graphite support for the high-purity quartz furnace according to claim 1, characterized in that: the graphite base (10) is of a long strip-shaped structure, the graphite base (10) is provided with a base surface (11) and a base bottom surface (12) which are arranged in parallel, two ends of the base surface (11) are respectively provided with a clamping groove (13), and the clamping grooves (13) are inverted convex.
3. The graphite support for the high-purity quartz furnace according to claim 1, characterized in that: graphite bottom plate (20) are rectangular shape structure, and this graphite bottom plate (20) have bottom plate surface (21) and bottom plate bottom surface (22), bottom plate surface (21) are the wave structure, be equipped with mounting groove (23) on bottom plate bottom surface (22), the whole length direction of bottom plate bottom surface (22) is worn to locate in this mounting groove (23).
4. The graphite support for the high-purity quartz furnace according to claim 3, characterized in that: the graphite support frame (30) is integrally of a long strip-shaped wave-shaped structure, and the shape of the graphite support frame is the same as that of the bottom plate surface (21).
5. The graphite support for the high-purity quartz furnace according to claim 4, wherein: the wave structure of graphite support frame (30) and bottom plate surface (21) comprises a plurality of V type groove (32), and is equipped with the platform between two adjacent V type groove (32), the both ends of bottom plate surface (21) and graphite support frame (30) also all are equipped with the platform, during the equipment, the platform of graphite support frame (30) of lower floor is arranged in on the corresponding platform of bottom plate surface (21), the platform of upper graphite support frame (30) is arranged in on the corresponding platform of lower floor's graphite support frame, corresponding V type groove constitutes slot (31) on V type groove and bottom plate surface (21) on the graphite support frame of lower floor, corresponding V type groove constitution slot (31) on upper and lower two adjacent graphite support frames (30), and upper and lower adjacent two-layer slot (31) stagger each other.
6. The graphite support for the high-purity quartz furnace according to claim 5, characterized in that: the included angle of the V-shaped groove (32) is 90 degrees, the included angle of the V-shaped groove (32) is of a circular arc structure, and the inner wall of the V-shaped groove (32) is a smooth inner wall.
7. The graphite support for the high-purity quartz furnace according to claim 1, characterized in that: the graphite base (10) is a graphite base prepared from isostatic pressing graphite, the graphite bottom plate (20) is a graphite bottom plate prepared from isostatic pressing graphite, and the graphite support frame (30) is a graphite support frame prepared from isostatic pressing graphite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022595954.5U CN214701764U (en) | 2020-11-11 | 2020-11-11 | Graphite support for high-purity quartz furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022595954.5U CN214701764U (en) | 2020-11-11 | 2020-11-11 | Graphite support for high-purity quartz furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214701764U true CN214701764U (en) | 2021-11-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022595954.5U Active CN214701764U (en) | 2020-11-11 | 2020-11-11 | Graphite support for high-purity quartz furnace |
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| Country | Link |
|---|---|
| CN (1) | CN214701764U (en) |
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- 2020-11-11 CN CN202022595954.5U patent/CN214701764U/en active Active
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