CN214694360U

CN214694360U - Spraying device and thin film deposition reaction device

Info

Publication number: CN214694360U
Application number: CN202023096562.0U
Authority: CN
Inventors: 金佐良; 孙贤; 尹恒民
Original assignee: CSI Cells Co Ltd; CSI Solar Power Group Co Ltd
Current assignee: Canadian Solar Inc; CSI Cells Co Ltd
Priority date: 2020-12-21
Filing date: 2020-12-21
Publication date: 2021-11-12
Anticipated expiration: 2030-12-21

Abstract

The utility model discloses a spray set and film deposition reaction unit relates to solar cell coating film technical field. The spraying device comprises a first spraying assembly and a second spraying assembly, wherein the first spraying assembly is provided with a plurality of first spraying holes which are arranged at intervals along a first direction; the second spraying assembly is provided with a plurality of second spraying holes which are arranged at intervals along a first direction; the first spraying assembly and the second spraying assembly are arranged in a plurality of alternating rows, and in the adjacent first spraying assembly and the second spraying assembly, a plurality of first spraying holes and a plurality of second spraying holes are arranged in a staggered mode along a first direction. The spraying device and the film deposition reaction device can fully mix and separate water and trimethylaluminum, the reaction is relatively thorough, and the residual original reactants are reduced.

Description

Spraying device and thin film deposition reaction device

Technical Field

The utility model relates to a solar cell coating film technical field especially relates to a spray set and thin film deposition reaction unit.

Background

Solar energy is increasingly paid more attention to people as a renewable, safe and environment-friendly new energy source. On the other hand, solar energy, if directly used, can only be used as a heat source. And the solar cell panel can convert solar energy into electric energy, thereby being applied to various fields and being convenient for transmission. The thin film solar cell is a novel photovoltaic device for relieving the energy crisis, and the manufacturing of the thin film solar cell needs to enable two or more chemical vapor precursors to generate chemical reaction on the surface of a base layer so as to generate a solid thin film, so that a spraying device is needed.

Taking the technique of depositing the film by using the alumina as an example, water and trimethylaluminum are taken as reaction sources, a vacuum pump is utilized to pump the interior of a reaction container to be in a negative pressure state, and the reaction is carried out in the protective atmosphere of nitrogen to generate the alumina film. The existing spraying device adopts a single-layer structure, as shown in fig. 1, water enters a first flow guide pipe 4 through a first inlet 41, is sprayed out from a first spraying hole 21 after passing through a first spraying pipe 2, trimethylaluminum enters a second flow guide pipe 5 through a second inlet 51, is sprayed out from a second spraying hole 31 after passing through a second spraying pipe 3, and the first spraying pipe 2 and the second spraying pipe 3 are alternately arranged in a stacked manner. The water sprayed from each first spray hole 21 can only react with the trimethyl aluminum sprayed from the second spray holes 31 at the upper and lower sides, and similarly, the trimethyl aluminum sprayed from each second spray hole 31 can only react with the water sprayed from the first spray holes 21 at the upper and lower sides, and the mixing is insufficient, so that the reaction is incomplete, and the coating is not uniform. Simultaneously, the excessive unreacted trimethylaluminum is discharged to the vacuum pump and is combined with air to generate alumina, so that the vacuum pump is blocked, and the service life of the vacuum pump is shortened.

In view of the above problems, it is necessary to develop a spraying apparatus and a thin film deposition reaction apparatus to solve the problem of incomplete reaction caused by insufficient mixing of water and trimethylaluminum.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a spray set and film deposition reaction unit can make water and trimethylaluminium fully mix the branch, and the reaction is comparatively thorough, reduces remaining original reactant.

To achieve the purpose, the utility model adopts the following technical proposal:

a spray device, comprising:

the first spraying assembly is provided with a plurality of first spraying holes which are arranged at intervals along a first direction;

the second spraying assembly is provided with a plurality of second spraying holes which are arranged at intervals along a first direction;

the first spraying assembly and the second spraying assembly are arranged in a plurality of alternating rows, and in the adjacent first spraying assembly and the second spraying assembly, a plurality of first spraying holes and a plurality of second spraying holes are arranged in a staggered mode along a first direction.

Preferably, the first spray assembly comprises a first spray pipe extending along a first direction, and the first spray holes are arranged on the first spray pipe; the second spraying assembly comprises a second spraying pipe extending along the first direction, and the second spraying holes are formed in the second spraying pipe.

Preferably, the method further comprises the following steps:

the first flow guide pipe is communicated with the first spraying pipe in each first spraying assembly, and a first inlet is formed in the first flow guide pipe;

and the second guide pipe is communicated with the second spraying pipes in the second spraying assemblies, and a second inlet is formed in the second guide pipe.

Preferably, first honeycomb duct with the second honeycomb duct is the right angle pipe, the right angle pipe includes two branch pipes of perpendicular connection, the branch pipe with first direction is 45 contained angles.

Preferably, the first inlet is arranged at the joint of the two branch pipes of the first draft tube; the second inlet is arranged at the joint of the two branch pipes of the second flow guide pipe.

Preferably, the spraying device further comprises a substrate, and the first spraying assembly and the second spraying assembly are arranged on the substrate or embedded in the substrate.

The film deposition reaction device comprises a box body and the spraying device, wherein the spraying device is arranged in the box body.

Preferably, the spraying device is vertically arranged in the box body.

Preferably, a plurality of spraying devices are arranged in the box body, and the plurality of spraying devices are arranged around the inner wall of the box body at intervals.

Preferably, the shower head further comprises a temperature sensor capable of measuring the temperature of the liquid sprayed from the first spraying hole and the second spraying hole.

The utility model has the advantages that:

the utility model provides a spray set and film deposition reaction unit. In this spray set, a plurality of first spray assembly and a plurality of second spray assembly alternate arrangement, and in adjacent first spray assembly and the second spray assembly, a plurality of first spray holes and a plurality of second spray the hole and stagger the setting along first direction, detach the most marginal condition, every first spray all has four second around the hole to spray the hole, every second sprays the hole all around has four first spray holes on the same principle, make and spray two kinds of reactants that the hole sprayed out through first spray hole and second and can the intensive mixing, the reaction is comparatively thorough, remaining original reactant is less, the aluminium oxide that produces in the emission process has been reduced, the utilization ratio has been promoted, the life-span of vacuum pump has been promoted simultaneously.

Drawings

FIG. 1 is a schematic diagram of a prior art spray assembly;

fig. 2 is a schematic structural diagram of the spraying device provided by the present invention.

In the figure:

x, a first direction;

1. a substrate; 11. a first corner portion; 12. a second corner portion; 2. a first shower pipe; 21. a first spray hole; 3. a second shower pipe; 31. a second spray hole; 4. a first draft tube; 41. a first inlet; 5. a second draft tube; 51. a second inlet.

Detailed Description

Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.

Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "secured" are to be construed broadly and encompass, for example, both fixed and removable connections; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may include the first feature being in direct contact with the second feature, or may include the first feature being in direct contact with the second feature but being in contact with the second feature by another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.

The present invention is described by taking water and trimethylaluminum as reactants to react to form an alumina film as an example.

The embodiment provides a spraying device. The film deposition reaction needs to utilize a spraying device to spray the reactant through the spraying holes to form small droplets, so that the surface area of the reactant is increased, the reaction speed is accelerated, and the reaction is more complete. As shown in fig. 2, the spraying device includes a first spraying component and a second spraying component. The first spray assembly is provided with a plurality of first spray holes 21 which are arranged at intervals along a first direction, and the second spray assembly is provided with a plurality of second spray holes 31 which are arranged at intervals along the first direction. The first spraying assembly and the second spraying assembly are arranged in a plurality of alternating arrangements, and in the adjacent first spraying assembly and the second spraying assembly, a plurality of first spraying holes 21 and a plurality of second spraying holes 31 are staggered along a first direction.

In the present embodiment, water is sprayed from the first spray holes 21, and trimethylaluminum is sprayed from the second spray holes 31. After water is sprayed out from the first spraying holes 21, the water can be rapidly mixed with trimethyl aluminum sprayed out from the second spraying holes 31 around the water, compared with the background art, the quantity of the second spraying holes 31 adjacent to the first spraying holes 21 is increased, the mixing is more sufficient, the reaction of the two is more complete, the utilization rate of raw materials is improved, and the cost is reduced. Meanwhile, because the residual trimethylaluminum caused by insufficient reaction is reduced, the discharged trimethylaluminum is combined with oxygen at the vacuum pump to generate less aluminum oxide, and the service life of the vacuum pump is prolonged. In other embodiments, water may be sprayed from the second spray holes 31, and trimethylaluminum may be sprayed from the first spray holes 21.

Preferably, the first spray assembly includes a first spray pipe 2 extending in a first direction, the first spray holes 21 are provided on the first spray pipe 2, the second spray assembly includes a second spray pipe 3 extending in the first direction, and the second spray holes 31 are provided on the second spray pipe 3.

In order to improve the production efficiency, the more the first spraying holes 21 and the second spraying holes 31 are arranged on the spraying device, the better, but the excessive first spraying holes 21 and the second spraying holes 31 can cause the pipeline to be too complex, thereby improving the production cost and being inconvenient to maintain. The first spraying holes 21 are formed in the first spraying pipe 2, the second spraying holes 31 are formed in the second spraying pipe 3, and only liquid to be sprayed is injected into the first spraying pipe 2 and the second spraying pipe 3, so that the arrangement of pipelines is greatly simplified.

Preferably, the spraying device further comprises a first guide pipe 4 and a second guide pipe 5, the first guide pipe 4 is communicated with the first spraying pipe 2 in each first spraying assembly, the first guide pipe 4 is provided with a first inlet 41, the second guide pipe 5 is communicated with the second spraying pipes 3 in the plurality of second spraying assemblies, and the second guide pipe 5 is provided with a second inlet 51.

Through setting up first honeycomb duct 4 and second honeycomb duct 5, can further optimize the pipeline structure, only need let in first honeycomb duct 4 and second honeycomb duct 5 respectively with water and trimethylaluminium and can realize spraying, the control of being convenient for, the later maintenance of also being convenient for simultaneously.

Preferably, first honeycomb duct 4 and second honeycomb duct 5 are right angle pipe, and right angle pipe includes two branch pipes of perpendicular connection, and the branch pipe is 45 contained angles with first direction. The first draft tube 4 and the second draft tube 5 of right angle type can surround the edge setting of first hole 21 and the occupation space of second hole 31 of spraying, and simple structure, and occupation space is less, can arrange first hole 21 and the second hole 31 of spraying as much as possible.

Preferably, the first inlet 41 is provided at the junction of the two branches of the first draft tube 4 and the second inlet 51 is provided at the junction of the two branches of the second draft tube 5. The first inlet 41 and the second inlet 51 are formed at the joint of the branch pipes, so that the pressure intensity at two ends of the first guide pipe 4 and the second guide pipe 5 is in a balanced state, and water and trimethyl aluminum are distributed more uniformly in the spraying process.

Preferably, the spraying device further comprises a substrate 1, and the first spraying assembly and the second spraying assembly are arranged on the substrate 1 or embedded in the substrate 1. The substrate 1 can play a certain supporting role for the structure of the spraying device, so that the spraying device becomes a whole, the spraying device is more convenient to install and detach, and the first spraying assembly and the second spraying assembly are more stable in the spraying process. It can be understood that the first spraying holes 21 and the second spraying holes 31 can be directly formed on the substrate 1 and then communicated with each other by forming holes inside the substrate 1, without the first spraying pipes 2, the second spraying pipes 3, the first flow guide pipes 4 and the second flow guide pipes 5.

The substrate 1 is rectangular, and an included angle between the first direction and the side of the rectangle is 45 degrees. As shown in fig. 1, the regions where the first shower holes 21 and the second shower holes 31 are located are also rectangular, and the first shower holes 21 and the second shower holes 31 are arranged as many as possible without changing the area of the substrate 1. Besides the first spray holes 21 and the second spray holes 31 at the extreme edges, the four second spray holes 31 are arranged around the rest first spray holes 21 and have equal distances, and the four first spray holes 21 are arranged around the second spray holes 31 and have equal distances, so that water and trimethylaluminum are uniformly mixed, and the uniformity of reaction and the uniformity of film thickness can be improved.

It will be appreciated that, in order to provide a protective atmosphere for the reaction of water and trimethylaluminum, the protective gas is selected to be nitrogen, and that a mixture of nitrogen and water is passed into the first flow duct 4 via the first inlet 41 and a mixture of nitrogen and trimethylaluminum is passed into the second flow duct 5 via the second inlet 51.

Preferably, each of the first spraying holes 21 and each of the second spraying holes 31 are provided with an electromagnetic valve for controlling the opening and closing of the first spraying holes 21 and the second spraying holes 31. The solenoid valve simple structure, the operation of being convenient for, to its coil circular telegram can open the solenoid valve, the solenoid valve can be closed in the outage, and operating personnel can be according to the water and the volume of trimethylaluminium and the solenoid valve quantity that proportion adjustment needs opened of reaction needs to obtain the good and suitable film of thickness of homogeneity.

The embodiment also provides a film deposition reaction device, which comprises a box body and the spraying device, wherein the spraying device is arranged in the box body.

If the spraying device is horizontally placed in the box body, water and trimethylaluminum are mixed through transverse diffusion, so that the mixing efficiency is extremely low, and the effect is poor. In order to improve the mixing effect and uniformity of the first spray hole 21 and the second spray hole 31, the spray device is vertically arranged in the box body, namely the first spray hole 21 and the second spray hole 31 are horizontally oriented, and water and trimethylaluminum sprayed out from the first spray hole 21 and the second spray hole 31 fall under the action of gravity, so that the mixing of the first spray hole and the second spray hole can be accelerated.

In order to fully utilize the space in the box body, a plurality of spraying devices are arranged in the box body and are arranged around the inner wall of the box body at intervals. A plurality of spray set encircle the setting, spout water and trimethylaluminium jointly to the center, can make the two mix more abundant, and a plurality of spray set also can improve spun water and trimethylaluminium in the unit interval simultaneously, improve production efficiency.

Since the rate and degree of the chemical reaction are in a large relationship with the temperature, in order to control the reaction between water and trimethylaluminum at a suitable rate and degree, the reaction temperature of the water and trimethylaluminum needs to be monitored, and when the deviation between the reaction temperature and the actually required temperature is large, the temperature needs to be controlled. To achieve this object, the thin film deposition reaction apparatus further includes a temperature sensor capable of measuring the temperature of the water and the trimethylaluminum sprayed from the first spray holes 21 and the second spray holes 31.

In order to control the temperature of the water and the trimethylaluminum, the thin film deposition reaction device also comprises a temperature control component. The temperature control assembly comprises a heating wire and a cooling pipe, the heating wire and the cooling pipe are both in contact with the first flow guide pipe 4 and the second flow guide pipe 5, when water and trimethylaluminum are required to be heated, the heating wire is electrified, and when the water and trimethylaluminum are required to be cooled, cooling liquid is introduced into the cooling pipe.

The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are variations on the detailed description and the application scope according to the idea of the present invention, and the content of the description should not be construed as a limitation to the present invention.

Claims

1. A spray device, comprising:

the first spraying assembly is provided with a plurality of first spraying holes (21) which are arranged at intervals along a first direction;

the second spraying assembly is provided with a plurality of second spraying holes (31) which are arranged at intervals along the first direction;

the first spraying assembly and the second spraying assembly are arranged in a plurality of alternating rows, and in the adjacent first spraying assembly and the second spraying assembly, a plurality of first spraying holes (21) and a plurality of second spraying holes (31) are arranged in a staggered manner along a first direction.

2. The spray arrangement according to claim 1, characterized in that the first spray assembly comprises a first spray pipe (2) extending in a first direction, the first spray holes (21) being provided on the first spray pipe (2); the second spraying assembly comprises a second spraying pipe (3) extending along the first direction, and the second spraying holes (31) are formed in the second spraying pipe (3).

3. The spray device of claim 2, further comprising:

the first flow guide pipe (4), the first flow guide pipe (4) is communicated with the first spray pipe (2) in each first spray assembly, and a first inlet (41) is arranged on the first flow guide pipe (4);

the second honeycomb duct (5), the second honeycomb duct (5) with a plurality of in the second spray assembly second shower (3) intercommunication, be provided with second entry (51) on the second honeycomb duct (5).

4. The spraying device according to claim 3, characterized in that the first (4) and second (5) flow ducts are right-angled ducts, which comprise two perpendicularly connected branch ducts, which form an angle of 45 ° with the first direction.

5. The spraying device according to claim 4, characterized in that said first inlet (41) is provided at the junction of the two branches of said first flow duct (4); the second inlet (51) is arranged at the joint of the two branch pipes of the second flow guiding pipe (5).

6. The spray device according to any one of claims 1 to 5, further comprising a base plate (1), wherein the first and second spray assemblies are disposed on the base plate (1) or embedded within the base plate (1).

7. A thin film deposition reaction device, comprising a box body, and further comprising a spraying device according to any one of claims 1 to 6, wherein the spraying device is arranged in the box body.

8. The thin film deposition reaction device as claimed in claim 7, wherein the spraying device is vertically disposed in the tank.

9. The thin film deposition reaction apparatus as claimed in claim 8, wherein a plurality of the spray devices are disposed in the chamber body, and the plurality of the spray devices are spaced around an inner wall of the chamber body.

10. The thin film deposition reaction apparatus according to claim 7, further comprising a temperature sensor capable of measuring a temperature of the liquid ejected from the first and second shower holes (21, 31).