CN214668644U - Light source device and automatic optical detection system using same - Google Patents
Light source device and automatic optical detection system using same Download PDFInfo
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- CN214668644U CN214668644U CN202022865077.9U CN202022865077U CN214668644U CN 214668644 U CN214668644 U CN 214668644U CN 202022865077 U CN202022865077 U CN 202022865077U CN 214668644 U CN214668644 U CN 214668644U
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- light
- source device
- light emitting
- light source
- arc
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- 230000003287 optical effect Effects 0.000 title claims description 20
- 238000001514 detection method Methods 0.000 title description 11
- 238000007689 inspection Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 4
- 230000001788 irregular Effects 0.000 claims description 3
- 235000009537 plain noodles Nutrition 0.000 abstract 3
- 230000007547 defect Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The application provides a light source device, contains an arc casing, and a light-emitting unit and a light guide structure looks spaced sets up in this arc casing, and this light guide structure has a income plain noodles and is close to this light-emitting unit to and a play plain noodles relative this income plain noodles, and the light that this light-emitting unit emitted can shine to an article surface of awaiting measuring after the multiple reflection in this light guide structure uniformly.
Description
Technical Field
The present application relates to a light source device, and more particularly, to a light source device for use in an Automatic Optical Inspection (AOI) apparatus, and a light source for Inspection using the Optical assembly, which can improve the accuracy of Automatic Optical Inspection.
Background
The automatic optical detection technology plays an important role in the semiconductor manufacturing process, so that the defects of products manufactured subsequently can be avoided, the semiconductor manufacturing process can carry out preliminary inspection by automatic optical detection, the light emitting diode can be used for irradiating an object to be detected and receiving a detection picture by a camera in the detection process, the light intensity of the light emitting diode irradiating the object to be detected can be influenced by the arrangement position of the light emitting diode, the object to be detected is easy to receive light unevenly, and the problem of insufficient precision in detection is caused.
SUMMERY OF THE UTILITY MODEL
The present application is to provide a light source device, and in particular, to a light source device for an Automatic Optical Inspection (AOI) device, which can improve the accuracy of the AOI device.
According to an aspect of the present invention, a light source device includes an arc-shaped housing, a hollow housing having two open ends, a light emitting unit disposed in the arc-shaped housing, the light emitting unit including a printed circuit board and a light emitting diode disposed on a surface of the printed circuit board, and a light guiding structure disposed in the arc-shaped housing and spaced apart from the light emitting unit, the light guiding structure having a light incident surface close to a light emitting surface of the light emitting unit and a light emergent surface opposite to the light incident surface.
Preferably, the light guide structure comprises a reflection surface capable of being coated with a high-reflection material or provided with a light reflection microstructure, so that light emitted by the light emitting unit is reflected for multiple times before entering the light exit surface, and the light can be uniformly irradiated to an object to be measured.
Preferably, the arc-shaped shell is in a regular arc shape or an irregular arc shape and is used for detecting objects to be detected in different shapes and improving the defect detection rate.
In addition, the present application further provides an automatic optical inspection system, which comprises a camera and the light source device, wherein the camera receives the light emitted by the light source device.
This application can set up the article that awaits measuring between two open tip through the arc casing, utilizes the leaded light unit to come the shape to be even light and shine in the article surface that awaits measuring, improves automatic optical detection's general usefulness and accuracy.
Other features and embodiments of the present application will be described in detail below with reference to the drawings.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a cross-sectional view of the structure of the present application;
FIG. 2 is a schematic optical path diagram of the present application;
FIG. 3 is a schematic view of a second embodiment of the present application;
FIG. 4A shows a simulation result of the uniformity of imaging of the DUT;
fig. 4B is an image uniformity simulation result of the second embodiment of the present application.
Description of the symbols
X: x-axis L1: optical axis a: reflected light
100: the light source device 10: the arc-shaped shell 11: light emitting unit
111: printed circuit board 112: the light emitting diode 12: first end part
13: second end portion 20: light guide structure 21: light incident surface
22: light-emitting surface 30: the camera 40: article to be measured
41: surface to be measured
Detailed Description
The positional relationship described in the following embodiments includes: the top, bottom, left and right, unless otherwise indicated, are based on the orientation of the elements in the drawings.
Referring to fig. 1 to 2, an embodiment of a light source device 100 includes a hollow arc-shaped housing 10, and a light emitting unit 11 and a light guiding structure 20 located inside the arc-shaped housing 10.
The arc-shaped housing 10 is arc-shaped and formed by an upper cover body and a lower cover body which are butted, the top surface of the arc-shaped housing is semicircular, and the arc-shaped housing 10 has a first end portion 12 and a second end portion 13 (i.e. two open end portions) which are located on the same plane and are spaced apart from each other.
The light emitting unit 11 is disposed in the arc-shaped housing 10 and close to the top surface thereof, in this embodiment, the light emitting unit 11 is disposed on the upper cover of the arc-shaped housing 10, the light emitting unit 11 includes a printed circuit board 111 and a plurality of light emitting diodes 112, the light emitting diodes 112 are disposed on a surface of the printed circuit board 111, and the light emitting diodes 112 serve as light sources to emit visible light and/or invisible light.
The light guide structure 20 is a lower cover mounted to the arc-shaped housing 10 in this embodiment. In the present embodiment, the cross section of the light guiding structure 20 is substantially a right triangle, and the short side of the right triangle is close to the led, and the hypotenuse of the right triangle is far away from the led 112, so that the light source device 100 forms a trapezoidal cross-sectional profile. Therefore, the light guiding structure 20 has a light incident surface 21 close to the light emitting unit 11 for receiving the light emitted from the light emitting diode 112, and a light emitting surface 22 opposite to the light incident surface 21, wherein the light emitting direction of the light emitting unit 11 defines an X-axis, the light guiding structure 20 defines an optical axis L1 as the light emitting direction, the optical axis L1 and the X-axis form an included angle θ, and the included angle θ is an acute angle and is between 10 degrees and 60 degrees.
In addition, the light guide structure 20 includes a high reflective material coated between the light incident surface 21 and the light emitting surface 22 to form a reflective surface. In the present embodiment, the reflective surface is attached to the inner wall of the arc-shaped housing 10 and is parallel to the X-axis. Therefore, the light emitted by the light emitting diode 112 enters the light guiding structure 20 through the light incident surface 21, is reflected multiple times inside the light guiding structure 20 for homogenization, and then exits from the light exiting surface 22 along the optical axis L1 to be uniformly irradiated onto the surface of the object 40 to be tested, so as to highlight the defect image and improve the accuracy of the identification and analysis. The reflective surface may instead be provided with light-reflecting microstructures to provide the reflective effect without the need for coating with a light-reflecting material.
In other embodiments, a lens may be added between the light emitting unit 11 and the light incident surface of the light guiding structure 20 for focusing and/or mixing light, so as to enhance the reflection effect of the light, so that the light can be uniformly irradiated onto the surface of the object 40 to be detected, thereby improving the detection accuracy.
Referring to fig. 3 for a second embodiment of the present application, the arc-shaped housing 10 has different shape designs according to the shape of the object to be detected, the arc-shaped housing 10 is in a square arc shape, the embodiment is suitable for detecting a square object to be detected, the square arc shape design enables the light source to be uniformly reflected to the square object to be detected, referring to fig. 4A for an imaging uniformity simulation result of detecting the square object to be detected by using the arc-shaped housing, the imaging uniformity of the square surface to be detected is only 50%, referring to fig. 4B for an imaging uniformity simulation result of the second embodiment, the square object to be detected is detected by using the square arc-shaped housing, the uniformity of the light reflected to the surface to be detected 41 in the second embodiment is at least 90%, the uneven illumination of the surface to be detected at the edge of the object to be detected is reduced, and the uniformity of image capture and the defect detection rate are improved. It is added that the shape of the arc-shaped shell can be, but not limited to, arc-shaped, square arc-shaped, wavy or any other regular arc-shaped or irregular arc-shaped shape, so as to be suitable for detecting objects to be detected in any shape.
In addition, the present application further provides an automatic optical inspection system, which includes a camera 30 and the light source device 100, wherein the light is reflected by the light guiding structure 20 and then uniformly irradiated to the surface of the object 40 to be inspected through the optical axis L1, and the camera 30 receives the reflected light a to identify whether the surface of the object 40 to be inspected has defects.
The above-described embodiments and/or implementations are only for illustrating the preferred embodiments and/or implementations of the technology of the present application, and are not intended to limit the implementations of the technology of the present application in any way, and those skilled in the art can make modifications or changes to other equivalent embodiments without departing from the scope of the technology disclosed in the present application, but should be construed as technology or implementations substantially the same as the present application.
Claims (9)
1. A light source device, comprising:
an arc-shaped shell which is in an arc shape and is provided with two open end parts;
a light emitting unit disposed in the arc-shaped housing; and
the light guide structure is arranged in the arc-shaped shell and is spaced from the light emitting unit, and the light guide structure is provided with a light incoming surface close to the light emitting unit and a light outgoing surface relatively far away from the light emitting unit.
2. The light source device of claim 1, wherein the light emitting unit comprises a printed circuit board and a plurality of light emitting diodes disposed on a surface of the printed circuit board.
3. The light source device of claim 1, wherein the light guide structure is triangular in cross-section.
4. The light source device of claim 3, wherein the light guide structure has a reflection surface between the light incident surface and the light emitting surface.
5. A light source device according to claim 4, wherein the reflective surface is coated with a highly reflective material.
6. A light source device according to claim 4, wherein the reflecting surface is provided with light reflecting microstructures.
7. The light source device according to any one of claims 1 to 6, wherein the light emitting unit has a plurality of light emitting diodes and defines an X-axis with a light emitting direction thereof, the light emitting surface of the light guiding structure defines an optical axis, and the optical axis and the X-axis form an included angle between 10 degrees and 60 degrees.
8. The light source device of claim 1, wherein the arc-shaped housing has a regular arc shape or an irregular arc shape.
9. An automatic optical inspection system comprising a camera and a light source device according to claim 1, wherein the camera receives light emitted from the light source device.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW109208728 | 2020-07-09 | ||
| TW109208728U TWM604061U (en) | 2020-07-09 | 2020-07-09 | Light source device and automatic optical inspection system using the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214668644U true CN214668644U (en) | 2021-11-09 |
Family
ID=74203603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022865077.9U Active CN214668644U (en) | 2020-07-09 | 2020-12-03 | Light source device and automatic optical detection system using same |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN214668644U (en) |
| TW (1) | TWM604061U (en) |
-
2020
- 2020-07-09 TW TW109208728U patent/TWM604061U/en unknown
- 2020-12-03 CN CN202022865077.9U patent/CN214668644U/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| TWM604061U (en) | 2020-11-11 |
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