CN214655207U - Angle-adjustable ion source device of evaporator - Google Patents
Angle-adjustable ion source device of evaporator Download PDFInfo
- Publication number
- CN214655207U CN214655207U CN202023296608.3U CN202023296608U CN214655207U CN 214655207 U CN214655207 U CN 214655207U CN 202023296608 U CN202023296608 U CN 202023296608U CN 214655207 U CN214655207 U CN 214655207U
- Authority
- CN
- China
- Prior art keywords
- folding rod
- ion source
- angle
- hole
- connecting disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
In order to solve the problem that makes the ion source can adapt to the base plate of various differences and reach the best effect of ion source auxiliary deposition technique, the utility model provides an adjustable angle's coating by vaporization machine ion source device, the ion source passes through the lift post of chassis or changes the chassis and adjust the upper and lower distance on coating by vaporization machine body bottom plate upper portion, pass through nut or bolt through first folding rod and third folding rod and can dismantle the connection, the second folding rod passes through nut or bolt with the fourth folding rod and can dismantle the connection, adjust the angle of ion source, make the ion source can the multi-angle adjust the base plate that adapts to various differences, the steam generator is simple in structure, and convenient for operation, it is low to make into.
Description
Technical Field
The utility model relates to an evaporation plating machine technical field, it is comparatively concrete, involve an adjustable angle's evaporation plating machine ion source device.
Background
In recent years, the demand of the market for ion sources is getting bigger and bigger, the requirement for effect is getting higher and higher, along with the increase of the demand of electronic consumer products, the related optical lens coating process, especially the application of ion source auxiliary deposition, makes the application of ion source products reach new height, the requirement for coating film is relatively simpler in the past, most of civil products do not even need the assistance of ion sources, the deposited film can also meet the most basic practical requirement, along with the continuous development of photoelectric technology, the fields of optical lenses, sensors, laser processing and the like provide extremely high performance requirements for the physical characteristics of the film, not to mention the industrial field and the military field, the ion source auxiliary deposition technology is the most effective method for enhancing the traditional vacuum coating effect of workers.
The ion source assisted deposition technology has the following functions: (1) before coating, ion bombardment is carried out on the surface of the substrate to roughen the surface and increase the adhesion of the coating; (2) and (3) auxiliary coating, wherein ionized ions collide with material molecules to be formed into a film, so that the kinetic energy of the material molecules is increased, and the motion trail of the material molecules is changed, so that the compactness of the coating is improved.
However, when the ion source bombards the surface of the substrate, the ion source has a certain scattering angle, and when the ion source is fixed, the scattering angle is also fixed, and because the material or the shape of the substrate is different, the required ion bombardment angle is also different, so that how to adapt the ion source to various substrates becomes a problem to be solved at present.
SUMMERY OF THE UTILITY MODEL
In view of this, in order to solve the problem that makes the ion source can adapt to the base plate of various differences and reach the best effect of ion source auxiliary deposition technique, the utility model provides an adjustable angle's coating by vaporization machine ion source device, the ion source passes through the lift post of chassis or changes the chassis and adjusts the upper and lower distance on coating by vaporization machine body bottom plate upper portion, pass through nut or bolt through first folding rod and third folding rod and can dismantle the connection, the second folding rod passes through nut or bolt with the fourth folding rod and can dismantle the connection, adjust the angle of ion source, make the ion source can the multi-angle adjust the base plate that adapts to various differences, the steam generator is simple in structure, and convenient for operation, it is low to make into.
An angle-adjustable ion source device of an evaporator, comprising: the ion source mounting frame is characterized by comprising a first support 2 and a second support 9, wherein the first support 2 comprises a first connecting disc 3, a first folding rod 4 and a second folding rod 5, the first folding rod 4 and the second folding rod 5 are respectively and integrally formed with the two ends of the first connecting disc 3, the second support 9 comprises a second connecting disc 10, a third folding rod 11, a fourth folding rod 12 and a bottom frame 13, the third folding rod 11 and the fourth folding rod 12 are respectively and integrally formed with the two ends of the second connecting disc 10, the first folding rod 4 and the third folding rod 11 are detachably connected through a nut or a bolt, the second folding rod 5 and the fourth folding rod 12 are detachably connected through a nut or a bolt, the second connecting disc 10 is detachably connected with the top end of the bottom frame 13, the bottom end of the bottom frame 13 is connected with the upper part of the bottom plate 1 of the evaporation machine body.
Further, the folding angles of the first folding bar 4, the second folding bar 5, the third folding bar 11 and the fourth folding bar 12 are 90 °.
Further, the bottom frame 13 is composed of a plurality of support columns, and the number of the support columns is 1-6.
Further, the support column is a lifting column or a straight rod.
Furthermore, one end of the first folding rod 4, which is far away from the first connecting disc 3, is provided with a first through hole 6, and one end of the second folding rod 5, which is far away from the first connecting disc 3, is provided with a second through hole 7.
Further, the first through hole 6 and the second through hole 7 are symmetrical to each other about the center line of the first land 3.
Further, the bottom of the ion source 8 is detachably connected to the first connection plate 3 by a nut or a bolt.
Furthermore, one end of the third folding rod 11, which is far away from the second connecting disc 10, is provided with a plurality of third through holes 14, and one end of the fourth folding rod 12, which is far away from the second connecting disc 10, is provided with a plurality of fourth through holes 15.
Furthermore, a third through hole 14 is formed in one end, away from the second connecting disc 10, of the third folding rod 11, a fourth through hole 15 is formed in one end, away from the second connecting disc 10, of the fourth folding rod 12, and the third through hole 14 and the fourth through hole 15 are waist-shaped holes.
Further, the third through hole 14 and the fourth through hole 15 are symmetrical to each other about the center line of the second land 10.
The utility model discloses a theory of operation: the utility model provides an adjustable angle's coating by vaporization machine ion source device, 8 upper and lower distances on 1 upper portion of coating by vaporization machine body bottom plate are adjusted through chassis 13's lift post or change chassis 13 to the ion source, can dismantle through nut or bolt with third folding rod 11 through first folding rod 4, second folding rod 5 can dismantle through nut or bolt with fourth folding rod 12 and be connected, adjust the angle of ion source 8, make the base plate of the various differences of adaptation of carrying out of ion source 8 can the multi-angle, the steam generator is simple in structure, high durability and convenient operation, and low manufacture is made.
Drawings
Fig. 1 is a structural diagram of an angle-adjustable ion source device of an evaporator according to the present invention.
Fig. 2 is a first bracket structure diagram of the angle-adjustable ion source device of the evaporator of the present invention.
Fig. 3 is a second bracket structure diagram of the angle-adjustable ion source device of the evaporator of the present invention.
Description of the main elements
| Bottom plate of evaporation machine body | 1 |
| |
2 |
| |
3 |
| |
4 |
| |
5 |
| First through |
6 |
| Second through |
7 |
| Ion source | 8 |
| Second support | 9 |
| Second connecting |
10 |
| |
11 |
| |
12 |
| |
13 |
| Third through |
14 |
| Fourth through |
15 |
The following detailed description of the invention will be further described in conjunction with the above-identified drawings.
Detailed Description
The following examples are described to aid in the understanding of the present application and are not, and should not be construed to, limit the scope of the present application in any way.
In the following description, those skilled in the art will recognize that components may be described throughout this discussion as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including being integrated within a single system or component).
Also, connections between components or systems within the figures are not intended to be limited to direct connections. Rather, data between these components may be modified, reformatted, or otherwise changed by the intermediate components. Additionally, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" and "fixed" are understood to encompass direct connections, indirect connections, or fixed through one or more intermediaries.
In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "side", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships commonly recognized in the product of the application, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance. Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
Example 1:
as shown in fig. 1, it is a structural diagram of the ion source device of the angle-adjustable evaporator of the present invention; as shown in fig. 2, it is a first bracket structure diagram of the angle-adjustable ion source device of the evaporator of the present invention; fig. 3 is a structural diagram of a second bracket of the ion source device of an angle-adjustable evaporator according to the present invention.
An angle-adjustable ion source device of an evaporator, comprising: the ion source mounting frame is characterized by comprising a first support 2 and a second support 9, wherein the first support 2 comprises a first connecting disc 3, a first folding rod 4 and a second folding rod 5, the first folding rod 4 and the second folding rod 5 are respectively and integrally formed with the two ends of the first connecting disc 3, the second support 9 comprises a second connecting disc 10, a third folding rod 11, a fourth folding rod 12 and a bottom frame 13, the third folding rod 11 and the fourth folding rod 12 are respectively and integrally formed with the two ends of the second connecting disc 10, the first folding rod 4 and the third folding rod 11 are detachably connected through a nut or a bolt, the second folding rod 5 and the fourth folding rod 12 are detachably connected through a nut or a bolt, the second connecting disc 10 is detachably connected with the top end of the bottom frame 13, the bottom end of the bottom frame 13 is connected with the upper part of the bottom plate 1 of the evaporation machine body.
The folding angles of the first folding rod 4, the second folding rod 5, the third folding rod 11 and the fourth folding rod 12 are 90 degrees.
The bottom frame 13 is composed of 3 support columns, and the support columns are straight rods.
The one end of keeping away from first flange 3 of first pole 4 is equipped with first through-hole 6, and the one end that first flange 3 was kept away from to second pole 5 is equipped with second through-hole 7.
The first through hole 6 and the second through hole 7 are symmetrical to each other with the center line of the first connecting disc 3 as the center.
The bottom of the ion source 8 is detachably connected with the first connecting disc 3 through nuts or bolts.
One end of the third folding rod 11, which is far away from the second connecting disc 10, is provided with a plurality of third through holes 14, and one end of the fourth folding rod 12, which is far away from the second connecting disc 10, is provided with a plurality of fourth through holes 15.
The third through hole 14 and the fourth through hole 15 are symmetrical to each other about a center line of the second land 10.
The utility model discloses a theory of operation: the utility model provides an adjustable angle's coating by vaporization machine ion source device, 8 upper and lower distances on 1 upper portion of coating by vaporization machine body bottom plate are adjusted through chassis 13's lift post or change chassis 13 to the ion source, can dismantle through nut or bolt with third folding rod 11 through first folding rod 4, second folding rod 5 can dismantle through nut or bolt with fourth folding rod 12 and be connected, adjust the angle of ion source 8, make the base plate of the various differences of adaptation of carrying out of ion source 8 can the multi-angle, the steam generator is simple in structure, high durability and convenient operation, and low manufacture is made.
Example 2:
as shown in fig. 1, it is a structural diagram of the ion source device of the angle-adjustable evaporator of the present invention; as shown in fig. 2, it is a first bracket structure diagram of the angle-adjustable ion source device of the evaporator of the present invention; fig. 3 is a structural diagram of a second bracket of the ion source device of an angle-adjustable evaporator according to the present invention.
An angle-adjustable ion source device of an evaporator, comprising: the ion source mounting frame is characterized by comprising a first support 2 and a second support 9, wherein the first support 2 comprises a first connecting disc 3, a first folding rod 4 and a second folding rod 5, the first folding rod 4 and the second folding rod 5 are respectively and integrally formed with the two ends of the first connecting disc 3, the second support 9 comprises a second connecting disc 10, a third folding rod 11, a fourth folding rod 12 and a bottom frame 13, the third folding rod 11 and the fourth folding rod 12 are respectively and integrally formed with the two ends of the second connecting disc 10, the first folding rod 4 and the third folding rod 11 are detachably connected through a nut or a bolt, the second folding rod 5 and the fourth folding rod 12 are detachably connected through a nut or a bolt, the second connecting disc 10 is detachably connected with the top end of the bottom frame 13, the bottom end of the bottom frame 13 is connected with the upper part of the bottom plate 1 of the evaporation machine body.
The folding angles of the first folding rod 4, the second folding rod 5, the third folding rod 11 and the fourth folding rod 12 are 90 degrees.
The underframe 13 consists of 1 support column, and the support column is a lifting column.
The one end of keeping away from first flange 3 of first pole 4 is equipped with first through-hole 6, and the one end that first flange 3 was kept away from to second pole 5 is equipped with second through-hole 7.
The first through hole 6 and the second through hole 7 are symmetrical to each other with the center line of the first connecting disc 3 as the center.
The bottom of the ion source 8 is detachably connected with the first connecting disc 3 through nuts or bolts.
And a third through hole 14 is formed in one end, far away from the second connecting disc 10, of the third folding rod 11, a fourth through hole 15 is formed in one end, far away from the second connecting disc 10, of the fourth folding rod 12, and the third through hole 14 and the fourth through hole 15 are waist-shaped holes.
The third through hole 14 and the fourth through hole 15 are symmetrical to each other about a center line of the second land 10.
The utility model discloses a theory of operation: the utility model provides an adjustable angle's coating by vaporization machine ion source device, 8 upper and lower distances on 1 upper portion of coating by vaporization machine body bottom plate are adjusted through chassis 13's lift post or change chassis 13 to the ion source, can dismantle through nut or bolt with third folding rod 11 through first folding rod 4, second folding rod 5 can dismantle through nut or bolt with fourth folding rod 12 and be connected, adjust the angle of ion source 8, make the base plate of the various differences of adaptation of carrying out of ion source 8 can the multi-angle, the steam generator is simple in structure, high durability and convenient operation, and low manufacture is made.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
1. An angle-adjustable ion source device of an evaporator, comprising: the ion source mounting frame is characterized by comprising a first support (2) and a second support (9), the first support (2) comprises a first connecting disc (3), a first folding rod (4) and a second folding rod (5), the first folding rod (4) and the second folding rod (5) are respectively and integrally formed with the two ends of the first connecting disc (3), the second support (9) comprises a second connecting disc (10), a third folding rod (11), a fourth folding rod (12) and a bottom frame (13), the third folding rod (11) and the fourth folding rod (12) are respectively and integrally formed with the two ends of the second connecting disc (10), and the first folding rod (4) and the third folding rod (11) are detachably connected through nuts or bolts, the second folding rod (5) and the fourth folding rod (12) are detachably connected through a nut or a bolt, the second connection (10) is detachably connected with the top end of the bottom frame (13), and the bottom end of the bottom frame (13) is connected with the upper portion of the bottom plate (1) of the evaporation machine body.
2. The ion source apparatus of an angle-adjustable evaporation machine of claim 1, wherein: the folding angles of the first folding rod (4), the second folding rod (5), the third folding rod (11) and the fourth folding rod (12) are 90 degrees.
3. The ion source apparatus of an angle-adjustable evaporation machine of claim 1, wherein: the bottom frame (13) is composed of a plurality of supporting columns, and the number of the supporting columns is 1-6.
4. The adjustable angle ion source apparatus of evaporation machine of claim 3, wherein: the support column is a lifting column or a straight rod.
5. The ion source apparatus of an angle-adjustable evaporation machine of claim 1, wherein: one end of the first folding rod (4) far away from the first connecting disc (3) is provided with a first through hole (6), and one end of the second folding rod (5) far away from the first connecting disc (3) is provided with a second through hole (7).
6. The ion source apparatus of an angle-adjustable evaporation machine of claim 1, wherein: the first through hole (6) and the second through hole (7) are symmetrical to each other with the center line of the first connecting disc (3) as the center.
7. The ion source apparatus of an angle-adjustable evaporation machine of claim 1, wherein: the bottom of the ion source (8) is detachably connected with the first connecting disc (3) through nuts or bolts.
8. The ion source apparatus of an angle-adjustable evaporation machine of claim 1, wherein: one end of the third folding rod (11) far away from the second connection (10) is provided with a plurality of third through holes (14), and one end of the fourth folding rod (12) far away from the second connection (10) is provided with a plurality of fourth through holes (15).
9. The ion source apparatus of an angle-adjustable evaporation machine of claim 1, wherein: one end of the third folding rod (11) far away from the second connection (10) is provided with a third through hole (14), one end of the fourth folding rod (12) far away from the second connection (10) is provided with a fourth through hole (15), and the third through hole (14) and the fourth through hole (15) are waist-shaped holes.
10. The ion source apparatus of an angle-adjustable evaporation machine of claim 1, wherein: the third through hole (14) and the fourth through hole (15) are symmetrical to each other about the center line of the second connection (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023296608.3U CN214655207U (en) | 2020-12-31 | 2020-12-31 | Angle-adjustable ion source device of evaporator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023296608.3U CN214655207U (en) | 2020-12-31 | 2020-12-31 | Angle-adjustable ion source device of evaporator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214655207U true CN214655207U (en) | 2021-11-09 |
Family
ID=78506092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023296608.3U Active CN214655207U (en) | 2020-12-31 | 2020-12-31 | Angle-adjustable ion source device of evaporator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214655207U (en) |
-
2020
- 2020-12-31 CN CN202023296608.3U patent/CN214655207U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104766779B (en) | Method and applicator for coated substrate | |
| CN214655207U (en) | Angle-adjustable ion source device of evaporator | |
| CN206461009U (en) | Battery modules fixture and battery modules | |
| CN214736060U (en) | Supporting device and coating equipment | |
| CN200962499Y (en) | Gold frame cabinet for installing machine frame or case | |
| CN115551133A (en) | Heating pipe movable mechanism | |
| CN215163091U (en) | Pot plating track protection structure of vacuum evaporation machine | |
| CN100504501C (en) | Optical instrument orientation device for regulating and receiving large power light source | |
| CN205856591U (en) | A kind of mask plate for being deposited with OLED display panel | |
| CN111703896A (en) | Handling device based on glass processing | |
| CN113235063A (en) | Observation window structure of vacuum evaporation machine | |
| CN206345914U (en) | Plated film dolly | |
| CN216838166U (en) | Vacuum coating correction structure | |
| CN217787662U (en) | Middle coupling assembling and photovoltaic support | |
| CN205256693U (en) | Special moving -target analog array installation spatial grid structure | |
| CN209859911U (en) | Scanning electron microscope sample stage | |
| CN208949385U (en) | A kind of evaporation electrode structure | |
| CN217690415U (en) | Arc-shaped connecting mechanism and LED display screen | |
| CN216668473U (en) | Stand assembly structure and automobile-used calibrating device | |
| CN219386088U (en) | Connecting mechanism for road nameplate | |
| CN210001917U (en) | apparatus for improving uniformity of optical coating planetary pot | |
| CN211005631U (en) | Plate body blowing device | |
| CN210922675U (en) | Adjustable sensor support | |
| CN212986538U (en) | Fixing device capable of rotating in multiple directions | |
| CN220698572U (en) | Bearing jig and processing equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |