CN214642447U - Polishing device for multi-axis free-form surface optical element - Google Patents
Polishing device for multi-axis free-form surface optical element Download PDFInfo
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- CN214642447U CN214642447U CN202120575855.2U CN202120575855U CN214642447U CN 214642447 U CN214642447 U CN 214642447U CN 202120575855 U CN202120575855 U CN 202120575855U CN 214642447 U CN214642447 U CN 214642447U
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Abstract
A polishing device for a multi-axis free-form surface optical element can realize that a polishing head orthogonally contacts the surface of a workpiece at each position of the workpiece, accurately control a polishing path, residence time and a contact angle, realize deterministic polishing of the free-form surface optical element and ensure processing precision. It includes: the polishing device comprises a first swing mechanism (1), a second swing mechanism (2) and a polishing head (3); the first swing mechanism is arranged on an external gantry structure, the second swing mechanism is arranged on the first swing mechanism, and the polishing head is arranged on the second swing mechanism; the second swing mechanism and the polishing head swing around an A shaft through the first swing mechanism, and the A shaft is in a direction perpendicular to a beam of the gantry structure; the polishing head swings around a B axis through a second swinging mechanism, and the B axis is parallel to a beam of the gantry structure; and the polishing head is contacted with the surface of the element to be processed according to the processing initial position.
Description
Technical Field
The utility model relates to a technical field of optical element ultra-precision machining especially relates to a multiaxis free-form surface optical element's burnishing device.
Background
In recent half a century, human beings have rapidly progressed in the fields of semiconductor manufacturing, space observation and the like, which put more demands on the manufacturing precision and the manufacturing requirements of various optical elements, the aperture of the element is continuously increased, the surface shape is also developed into various free-form surfaces from the initial surface shape such as a spherical surface, a paraboloid and the like, and the processing difficulty is also increased.
Since the introduction of computer-controlled optical forming (CCOS) in the last 70 th century, its processing equipment and processing technology have developed rapidly, and the precision of the upper surface of the optical element after ultra-precision turning and ultra-precision grinding has been further improved.
When a large-caliber optical element is processed, the large-caliber optical element is generally horizontally placed, a polishing device of the multi-axis free-form surface optical element is installed on a gantry structure, and linear motion of the polishing device in multiple directions is realized through equipment such as the gantry structure, so that the large-caliber optical element is subjected to CCOS processing through a polishing head. However, because free-form surface machining is performed, a polishing head cannot be in orthogonal contact with the surface of a workpiece at all times in the movement process, so that the polishing path, the residence time and the contact angle cannot be accurately controlled, the polishing design of a free-form surface optical element is disjointed from actual machining, and finally the machining precision is not up to the standard.
Disclosure of Invention
For overcoming prior art's defect, the to-be-solved technical problem of the utility model is to provide a multiaxis free-form surface optical element's burnishing device, it can realize that the burnishing head contacts in the work piece surface in each department equal quadrature of work piece, accurately controls polishing route, dwell time and contact angle, realizes the polishing of free-form surface optical element certainty, guarantees the machining precision.
The technical scheme of the utility model is that: the polishing device for the multi-axis free-form surface optical element comprises: the polishing device comprises a first swing mechanism (1), a second swing mechanism (2) and a polishing head (3);
the first swing mechanism is arranged on an external gantry structure, the second swing mechanism is arranged on the first swing mechanism, and the polishing head is arranged on the second swing mechanism;
the second swing mechanism and the polishing head swing around an A shaft (5) through the first swing mechanism, and the A shaft is in a direction perpendicular to a beam of the gantry structure; the polishing head swings around the B shaft (6) through a second swing mechanism,
the B axis is parallel to the beam of the gantry structure; and the polishing head is contacted with the surface of the element to be processed according to the processing initial position.
The utility model discloses a first swing mechanism makes the rubbing head swing around the A axle, makes the rubbing head swing around the B axle through second swing mechanism, and the rubbing head is according to processing initial position and waiting to process component surface contact, just so can realize the rubbing head in each department equal quadrature contact in the work piece surface of work piece at the polishing in-process, through accurately controlling polishing route, dwell time and contact angle, realizes the polishing of free-form surface optical element certainty, guarantees the machining precision.
Drawings
Fig. 1 is a schematic view of a polishing apparatus for a multi-axis free-form surface optical element according to the present invention connected to an external device.
Fig. 2 is a front view of a polishing apparatus for a multi-axis free-form surface optical element according to the present invention, in which a polishing head is not ejected.
Fig. 3 is a front view of a polishing apparatus for a multi-axis free-form surface optical element according to the present invention, in which a polishing head is ejected.
Fig. 4 is a right side view of a polishing apparatus for a multi-axis free-form surface optical element according to the present invention, wherein the polishing head is perpendicular to the horizontal plane.
Fig. 5 is a right side view of a polishing apparatus for a multi-axis free-form surface optical element according to the present invention, wherein the polishing head is not perpendicular to the horizontal plane.
Fig. 6 is an enlarged schematic view of a first swing mechanism of a polishing apparatus for a multi-axis free-form surface optical element according to the present invention.
Fig. 7 is a schematic structural view of a second swing mechanism of the polishing apparatus for a multi-axis free-form surface optical element according to the present invention, which shows the first swing mechanism engaged with the second swing mechanism.
Fig. 8 shows a maximum swing angle to one side of the first swing mechanism of the polishing apparatus for a multi-axis free-form surface optical element according to the present invention.
Fig. 9 shows a maximum swing angle of the first swing mechanism of the polishing apparatus for a multi-axis free-form surface optical element according to the present invention to the other side.
Fig. 10 shows a maximum swing angle to one side of the second swing mechanism of the polishing apparatus for a multi-axis free-form surface optical element according to the present invention.
Fig. 11 shows a maximum swing angle of the second swing mechanism of the polishing apparatus for a multi-axis free-form surface optical element according to the present invention to the other side.
Fig. 12 is a right side view of a polishing apparatus for a multi-axis free-form surface optical element according to the present invention, in which a polishing head is ejected.
Detailed Description
As shown in fig. 1 to 5, the polishing apparatus for a multi-axis free-form surface optical element includes: the polishing device comprises a first swing mechanism 1, a second swing mechanism 2 and a polishing head 3;
the first swing mechanism is arranged on an external gantry structure, the second swing mechanism is arranged on the first swing mechanism, and the polishing head is arranged on the second swing mechanism;
the second swing mechanism and the polishing head swing around an A shaft 5 through the first swing mechanism, and the A shaft is perpendicular to a beam of the gantry structure; the polishing head swings around a B shaft 6 through a second swinging mechanism, and the B shaft is parallel to a beam of the gantry structure; and the polishing head is contacted with the surface of the element to be processed according to the processing initial position.
The utility model discloses a first swing mechanism makes the rubbing head swing around the A axle, makes the rubbing head swing around the B axle through second swing mechanism, and the rubbing head is according to processing initial position and waiting to process component surface contact, just so can realize the rubbing head in each department equal quadrature contact in the work piece surface of work piece at the polishing in-process, through accurately controlling polishing route, dwell time and contact angle, realizes the polishing of free-form surface optical element certainty, guarantees the machining precision.
Preferably, as shown in fig. 6, the first swing mechanism is a high-precision zero-backlash turntable, and includes a working table 11, a transmission mechanism 12, and a first motor 13, where the first motor drives the working table to rotate around the axis of the a-axis in both directions through the transmission mechanism. The first swing mechanism is realized by using a high-precision non-back-clearance rotary table, mainly realizes high-precision bidirectional rotation around the axis line of the A shaft, can be used as the first swing mechanism as long as the high-precision rotary table without back clearance can realize high-precision reciprocating repetitive motion, and has high repetitive motion precision.
Preferably, as shown in fig. 7, the second swing mechanism includes: the polishing machine comprises a coupler 21, a precision speed reducer 22, a second motor 23, a polishing workpiece B-axis fixing plate 24 and an A-axis connecting beam 25, wherein the A-axis connecting beam is in centering connection with the A-axis, the second motor is connected with the coupler and the B-axis through the precision speed reducer to realize rotary motion around the B-axis, and a polishing head is fixedly connected with the B-axis through the polishing workpiece B-axis fixing plate. The rotary motion range around the B axis is limited by the size of the mechanism and hard limit, and has a certain working stroke range. The polishing head can realize the rotating motion function of the B axis, and provides a foundation for orthogonal machining.
Preferably, the swing angle range of the first and second swing mechanisms is ± 35 °. Fig. 8 shows a maximum swing angle to one side of the first swing mechanism of the polishing apparatus for a multi-axis free-form surface optical element according to the present invention. Fig. 9 shows a maximum swing angle of the first swing mechanism of the polishing apparatus for a multi-axis free-form surface optical element according to the present invention to the other side. Fig. 10 shows a maximum swing angle to one side of the second swing mechanism of the polishing apparatus for a multi-axis free-form surface optical element according to the present invention. Fig. 11 shows a maximum swing angle of the second swing mechanism of the polishing apparatus for a multi-axis free-form surface optical element according to the present invention to the other side.
Preferably, as shown in fig. 2, 3 and 12, the polishing apparatus for a multi-axis free-form optical element further includes an ejection mechanism 4 disposed between the second swing mechanism and the polishing head, and configured to control the polishing head to eject in a direction perpendicular to the horizontal plane. This design is adopted in order to protect the polishing head, protect the polishing head from damage when the polishing work is not performed, and enable the polishing head to be quickly put into operation without mounting when the polishing work is performed.
Still further, the ejection mechanism includes: the air cylinder, the steel ball roller, the guide shaft and the connecting rod, when the air cylinder works, the air rod of the air cylinder works and extends out, and acting force is transmitted to the polishing head which rotates through the steel ball roller, the guide shaft and the connecting rod. In the polishing head mechanism, a built-in cylinder is arranged, when the cylinder works, an air rod of the cylinder works and extends out, acting force is transmitted to a polishing disk which rotates through a steel ball roller, a guide shaft and a connecting rod, and finally the acting force is transmitted to the polishing disk, so that the polishing disk can generate rotation motion with certain pressure, and a preset polishing function is realized.
The above is only the preferred embodiment of the present invention, and is not intended to limit the present invention in any form, and all the technical matters of the present invention are to make any simple modification, equivalent change and modification to the above embodiments, and still belong to the protection scope of the present invention.
Claims (6)
1. The polishing device of the multi-axis free-form surface optical element is characterized in that: it includes: the polishing device comprises a first swing mechanism (1), a second swing mechanism (2) and a polishing head (3);
the first swing mechanism is arranged on an external gantry structure, the second swing mechanism is arranged on the first swing mechanism, and the polishing head is arranged on the second swing mechanism;
the second swing mechanism and the polishing head swing around an A shaft (5) through the first swing mechanism, and the A shaft is in a direction perpendicular to a beam of the gantry structure; the polishing head swings around a B shaft (6) through a second swinging mechanism, and the B shaft is parallel to a beam of the gantry structure; and the polishing head is contacted with the surface of the element to be processed according to the processing initial position.
2. The polishing apparatus for a multi-axis free-form surface optical element according to claim 1, wherein: the first swing mechanism is a high-precision back clearance-free rotary table and comprises a working table top (11), a transmission mechanism (12) and a first motor (13), and the first motor drives the working table top to rotate around the axis line of the shaft A in two directions through the transmission mechanism in a servo mode.
3. The polishing apparatus for a multi-axis free-form surface optical element according to claim 2, wherein: the second swing mechanism includes: the polishing machine comprises a coupler (21), a precision speed reducer (22), a second motor (23), a polishing workpiece B shaft fixing plate (24) and an A shaft connecting beam (25), wherein the A shaft connecting beam is connected with the A shaft in a centering mode, the second motor is connected with the coupler and the B shaft through the precision speed reducer to achieve rotary motion around the B shaft, and the polishing head is fixedly connected with the B shaft through the polishing workpiece B shaft fixing plate.
4. The polishing apparatus for a multi-axis free-form surface optical element according to claim 3, wherein: the swing angle range of the first swing mechanism and the second swing mechanism is +/-35 degrees.
5. The polishing apparatus for a multi-axis free-form surface optical element according to claim 1, wherein: the polishing device for the multi-axis free-form surface optical element further comprises an ejection mechanism (4) which is arranged between the second swing mechanism and the polishing head and controls the polishing head to eject in a direction perpendicular to the horizontal plane.
6. The polishing apparatus for a multi-axis free-form surface optical element according to claim 5, wherein: the ejection mechanism includes: the air cylinder, the steel ball roller, the guide shaft and the connecting rod, when the air cylinder works, the air rod of the air cylinder works and extends out, and acting force is transmitted to the polishing head which rotates through the steel ball roller, the guide shaft and the connecting rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120575855.2U CN214642447U (en) | 2021-03-22 | 2021-03-22 | Polishing device for multi-axis free-form surface optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120575855.2U CN214642447U (en) | 2021-03-22 | 2021-03-22 | Polishing device for multi-axis free-form surface optical element |
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| CN214642447U true CN214642447U (en) | 2021-11-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202120575855.2U Active CN214642447U (en) | 2021-03-22 | 2021-03-22 | Polishing device for multi-axis free-form surface optical element |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115139205A (en) * | 2022-07-07 | 2022-10-04 | 深圳西可实业有限公司 | Finishing impression polishing all-in-one |
-
2021
- 2021-03-22 CN CN202120575855.2U patent/CN214642447U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115139205A (en) * | 2022-07-07 | 2022-10-04 | 深圳西可实业有限公司 | Finishing impression polishing all-in-one |
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