CN214588778U - Silicon wafer rotary conveying device - Google Patents
Silicon wafer rotary conveying device Download PDFInfo
- Publication number
- CN214588778U CN214588778U CN202023334972.4U CN202023334972U CN214588778U CN 214588778 U CN214588778 U CN 214588778U CN 202023334972 U CN202023334972 U CN 202023334972U CN 214588778 U CN214588778 U CN 214588778U
- Authority
- CN
- China
- Prior art keywords
- wheel
- rotary
- synchronous
- piece
- synchronizing wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses a silicon wafer rotary conveying device, which comprises a rotary mechanism with transmission assembly lines arranged on two sides, wherein the rotary mechanism comprises a driving component, a rotary disc component and a sun wheel component, and the driving component comprises a driving source; the rotary disc assembly comprises a pair of rotary discs and an adsorption part which are connected, one of the rotary discs is connected with the driving source directly, the adsorption part is arranged on the rotary disc and comprises a synchronous wheel set, and a plurality of synchronous wheel sets are connected with each other through a synchronous belt; the sun wheel component comprises a sun wheel and a fixed shaft, the sun wheel is arranged on the fixed shaft, and the sun wheel is connected with the synchronous wheel set of one adsorption piece through a synchronous belt. The utility model discloses at the rotatory in-process of swivel disk subassembly, adsorb the piece and keep the horizontality always, can realize the stable accurate transmission of product on two assembly lines, be favorable to improving work efficiency greatly.
Description
Technical Field
The utility model relates to an assembly line carries technical field, especially relates to silicon chip rotary conveying device.
Background
In-line processing of silicon wafers, the wafers are required to be circulated through multiple stations, which involves transferring the wafers from one line to another. At present, the manual transfer mode is adopted, namely, an operator transfers the silicon wafers on one assembly line to another assembly line, the working efficiency is low, and the batch processing requirement is difficult to meet.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a rotatory conveyor of silicon chip, be provided with the rotary mechanism of transmission assembly line including both sides, rotary mechanism includes:
a drive assembly including a drive source;
the rotary disc assembly comprises a pair of rotary discs and adsorption pieces which are connected, one rotary disc is in shaft connection with the other rotary disc, one rotary disc is directly connected with the driving source, the driving source drives the pair of rotary discs to synchronously rotate, a plurality of adsorption pieces for adsorbing products are arranged on a single rotary disc, each adsorption piece comprises a synchronous wheel set, and the plurality of synchronous wheel sets are connected in pairs through synchronous belts;
and the sun wheel assembly comprises a sun wheel and a fixed shaft, the sun wheel is arranged on the fixed shaft, the sun wheel is connected with a synchronous wheel set of one adsorption piece through a synchronous belt, and the adsorption piece is rotated by the same angle in the opposite direction relative to the driving source through synchronous transmission between the sun wheel and the synchronous wheel set, so that the adsorption piece is kept in a horizontal state, and the synchronous wheel sets are connected in pairs, so that a plurality of adsorption pieces are kept in a horizontal state.
Technical scheme more than adopting, the rotary disk subassembly includes the transmission shaft, and one of them carousel directly links the driving source, and this carousel is connected through the transmission shaft to another carousel.
According to the technical scheme, the driving assembly comprises a rack and a hollow shaft, the hollow shaft is connected to the side face of the center of each rotary table, the hollow shaft penetrates through the sun gear to be connected with the rack, and the fixing shaft is arranged on the rack.
By adopting the technical scheme, the hollow shaft is provided with the notch.
By adopting the technical scheme, the driving source is a DD direct drive motor.
Technical scheme more than adopting, it is single adsorption element includes rotation axis and sucker portion, the rotation axis passes the carousel, and the one end of rotation axis is provided with the sucker portion, be provided with synchronous wheelset on the rotation axis.
By adopting the technical scheme, the suction nozzle part comprises a suction nozzle seat and a suction nozzle, and the suction nozzle seat is provided with the suction nozzle.
Technical scheme more than adopting, the synchronizing wheel group includes first synchronizing wheel and second synchronizing wheel, the sun gear passes through the hold-in range and connects the first synchronizing wheel that one of them adsorbs the piece, and the second synchronizing wheel that should adsorb the piece passes through the hold-in range and connects the second synchronizing wheel that adjacent adsorbs the piece, and the first synchronizing wheel that should adsorb the piece passes through the hold-in range and connects the first synchronizing wheel that adjacent adsorbs the piece, and the second synchronizing wheel that should adsorb the piece passes through the hold-in range and connects the second synchronizing wheel that adjacent adsorbs the piece.
Technical scheme more than adopting, the rotary disk subassembly includes the tensioning piece, the tensioning piece includes take-up pulley and take-up pulley seat, and the take-up pulley is connected to the hold-in range between the synchronizing wheel of adjacent absorption piece, the take-up pulley passes through the take-up pulley seat and installs on the carousel.
The utility model has the advantages that: the utility model discloses rotary mechanism includes by the rotatory rotary disk assembly of drive assembly drive, rotary disk assembly includes the adsorption part, still keep the sun gear subassembly of horizontality including realizing the adsorption part, adopt the adsorption part to tak away the product on a transmission assembly line to place the silicon chip on another transmission assembly line by the rotation of rotary disk assembly, simultaneously at the rotatory in-process of rotary disk assembly, the adsorption part keeps the horizontality always, can realize the stable accurate transmission of product on two assembly lines, be favorable to improving work efficiency greatly.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a partially enlarged schematic view of a portion a in fig. 1.
Fig. 3 is another schematic structural diagram of the present invention.
The reference numbers in the figures illustrate: 1. a rotation mechanism; 111. a drive source; 112. a frame; 113. a hollow shaft; 121. a turntable; 122. an adsorbing member; 1221. a first synchronizing wheel; 1222. a second synchronizing wheel; 1223. a rotating shaft; 1224. a nozzle base; 1225. a suction nozzle; 123. a drive shaft; 1241. a tension wheel; 1242. a tensioner shoe; 131. a sun gear; 132. a fixed shaft; 133. a synchronizing wheel; 2. a transmission pipeline.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.
Referring to fig. 1 to 3, an embodiment of the present invention provides a silicon wafer rotary conveying device, including rotary mechanism 1 whose two sides are provided with transmission assembly lines 2, rotary mechanism 1 carries a product on one transmission assembly line 2 to another transmission assembly line 2 through rotation for realizing stable transmission of the product on two transmission assembly lines 2.
The rotary mechanism 1 includes a drive assembly, a rotary disk 121 assembly and a sun gear 131 assembly. Specifically, the driving assembly includes a driving source 111; the rotating disc 121 assembly comprises a pair of rotating discs 121, an absorbing member 122 and a transmission shaft 123 which are connected with each other, wherein one of the rotating discs 121 is directly connected with the driving source 111, the other rotating disc 121 is connected with the rotating disc 121 through the transmission shaft 123, and the pair of rotating discs 121 are driven to synchronously rotate by the driving source 111. Preferably, the driving source 111 is a DD direct drive motor, and the DD direct drive motor drives a pair of rotating discs 121 to rotate synchronously.
Further, a plurality of adsorbing members 122 for adsorbing products are arranged on the rotating disc 121, each adsorbing member 122 includes a rotating shaft 1223 and a synchronizing wheel 133 group, the rotating shaft 1223 penetrates through the rotating disc 121, and the synchronizing wheels 133 group are arranged on the rotating shaft 1223. The sun gear 131 assembly further includes a sun gear 131 and a fixed shaft 132, the sun gear 131 is disposed on the fixed shaft 132, the sun gear 131 is connected to a synchronizing wheel 133 group of one of the adsorbing members 122 through a timing belt, and the adsorbing members 122 are rotated by the same angle in opposite directions relative to the driving source 111 through synchronous transmission between the sun gear 131 and the synchronizing wheel 133 group, so that the adsorbing members 122 are maintained in a horizontal state, and the synchronizing wheel 133 groups are connected in pairs, so that the plurality of adsorbing members 122 are maintained in a horizontal state.
Preferably, the number of the plurality of suction members 122 is 4, the 4 suction members 122 are uniformly disposed at the edge of the rotating disc 121, the 4 suction members 122 are respectively a first suction member 122, a second suction member 122, a third suction member 122 and a fourth suction member 122 in sequence, and the synchronizing wheel 133 group of each suction member 122 includes a first synchronizing wheel 1331221 and a second synchronizing wheel 1331222. The sun gear 131 is connected to the first synchronizing wheel 1331221 of the first suction member 122 through a timing belt, the second synchronizing wheel 1331222 of the first suction member 122 is connected to the second synchronizing wheel 1331222 of the adjacent second suction member 122 through a timing belt, the first synchronizing wheel 1331221 of the second suction member 122 is connected to the first synchronizing wheel 1331221 of the adjacent third suction member 122 through a timing belt, and the second synchronizing wheel 1331222 of the third suction member 122 is connected to the second synchronizing wheel 1331222 of the adjacent fourth suction member 122 through a timing belt. This achieves the effect that the 4 adsorbing members 122 are always kept in a horizontal state.
Further, the rotating disc 121 assembly includes a tension member, the tension member includes a tension wheel 1241 and a tension wheel seat 1242, a synchronous belt between the synchronous wheels 133 of adjacent suction members 122 is connected to the tension wheel 1241, and the tension wheel 1241 is mounted on the turntable 121 through the tension wheel seat 1242.
The suction member 122 further includes a suction nozzle 1225 portion, one end of the rotation shaft 1223 is provided with the suction nozzle 1225 portion, the suction nozzle 1225 portion includes a suction nozzle holder 1224 and a suction nozzle 1225, and the suction nozzle holder 1224 is provided with the suction nozzle 1225. Preferably, the suction nozzle 1225 is a suction cup through which the product is sucked.
The driving assembly comprises a frame 112 and a hollow shaft 113, the central side of each rotating disc 121 is connected with the hollow shaft 113, the hollow shaft 113 penetrates through a sun gear 131 to be connected with the frame 112, and a fixed shaft 132 is arranged on the frame 112. Furthermore, a notch is arranged on the hollow shaft 113, and an air pipe can be arranged inside the hollow shaft 113 for providing vacuum for the suction cup.
The utility model discloses rotary mechanism 1 includes by the rotatory rotary disk 121 subassembly of drive assembly drive, rotary disk 121 subassembly includes adsorbs piece 122, still including realizing adsorbing piece 122 and keeping the sun gear 131 subassembly of horizontality, adopt and adsorb the product of piece 122 on with a transmission assembly line 2 and take away, and place the silicon chip on another transmission assembly line 2 by rotary disk 121 subassembly is rotatory, simultaneously in the rotatory in-process of rotary disk 121 subassembly, adsorb piece 122 and keep the horizontality always, can realize the stable accurate transmission of product on two assembly lines, be favorable to improving work efficiency greatly.
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutes or changes made by the technical personnel in the technical field on the basis of the utility model are all within the protection scope of the utility model. The protection scope of the present invention is subject to the claims.
Claims (9)
1. The utility model provides a silicon chip rotary conveying device which characterized in that: be provided with the rotary mechanism of transmission assembly line including both sides, rotary mechanism includes:
a drive assembly including a drive source;
the rotary disc assembly comprises a pair of rotary discs and adsorption pieces which are connected, one rotary disc is in shaft connection with the other rotary disc, one rotary disc is directly connected with the driving source, the driving source drives the pair of rotary discs to synchronously rotate, a plurality of adsorption pieces for adsorbing products are arranged on a single rotary disc, each adsorption piece comprises a synchronous wheel set, and the plurality of synchronous wheel sets are connected in pairs through synchronous belts;
and the sun wheel assembly comprises a sun wheel and a fixed shaft, the sun wheel is arranged on the fixed shaft, the sun wheel is connected with a synchronous wheel set of one adsorption piece through a synchronous belt, and the adsorption piece is rotated by the same angle in the opposite direction relative to the driving source through synchronous transmission between the sun wheel and the synchronous wheel set, so that the adsorption piece is kept in a horizontal state, and the synchronous wheel sets are connected in pairs, so that a plurality of adsorption pieces are kept in a horizontal state.
2. The silicon wafer rotary transport device according to claim 1, wherein: the rotating disc assembly comprises transmission shafts, one of the rotating discs is directly connected with the driving source, and the other rotating disc is connected with the rotating disc through the transmission shafts.
3. The silicon wafer rotary transport device according to claim 2, wherein: the driving assembly comprises a rack and a hollow shaft, the hollow shaft is connected to the side face of the center of each turntable, the hollow shaft penetrates through the sun gear to be connected with the rack, and the fixed shaft is arranged on the rack.
4. The silicon wafer rotary transport device according to claim 3, wherein: the hollow shaft is provided with a notch.
5. The silicon wafer rotary transport device according to claim 1, wherein: the driving source is a DD direct drive motor.
6. The silicon wafer rotary transport device according to claim 1, wherein: singly the adsorption element includes rotation axis and suction nozzle portion, the rotation axis passes the carousel, and the one end of rotation axis is provided with the suction nozzle portion, be provided with synchronous wheelset on the rotation axis.
7. The silicon wafer rotary transport device according to claim 6, wherein: the suction nozzle part comprises a suction nozzle seat and a suction nozzle, and the suction nozzle seat is provided with the suction nozzle.
8. The silicon wafer rotary transport device according to claim 6, wherein: the synchronizing wheel group includes first synchronizing wheel and second synchronizing wheel, the sun gear passes through the hold-in range and connects the first synchronizing wheel that one of them adsorbs the piece, and the second synchronizing wheel that should adsorb the piece passes through the hold-in range and connects the second synchronizing wheel that adjacent absorption piece, and the first synchronizing wheel that should adsorb the piece passes through the hold-in range and connects the first synchronizing wheel that adjacent absorption piece, and the second synchronizing wheel that should adsorb the piece passes through the hold-in range and connects the second synchronizing wheel that adjacent absorption piece.
9. The silicon wafer rotary transport device according to claim 1, wherein: the rotary disc assembly comprises a tensioning piece, the tensioning piece comprises a tensioning wheel and a tensioning wheel seat, the tensioning wheel is connected with a synchronous belt between synchronous wheels of adjacent adsorption pieces, and the tensioning wheel is installed on the rotary disc through the tensioning wheel seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023334972.4U CN214588778U (en) | 2020-12-30 | 2020-12-30 | Silicon wafer rotary conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023334972.4U CN214588778U (en) | 2020-12-30 | 2020-12-30 | Silicon wafer rotary conveying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214588778U true CN214588778U (en) | 2021-11-02 |
Family
ID=78344705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023334972.4U Active CN214588778U (en) | 2020-12-30 | 2020-12-30 | Silicon wafer rotary conveying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214588778U (en) |
-
2020
- 2020-12-30 CN CN202023334972.4U patent/CN214588778U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107662057B (en) | A kind of manipulator and laser process equipment | |
| JPH11254308A (en) | Both face grinding device | |
| CN110253473B (en) | Dynamic belt type gear manipulator clamp | |
| CN104985503A (en) | Novel magnet ring chamfering device | |
| CN214588778U (en) | Silicon wafer rotary conveying device | |
| CN105292917A (en) | Synchronizing wheel conveying mechanism | |
| CN214588777U (en) | Silicon wafer rotation testing device | |
| CN105312262B (en) | Automatic powder cleaning device | |
| CN212399578U (en) | Manipulator structure for moving multiple wafers | |
| CN211870658U (en) | Large-scale rotary conveying device | |
| CN217801004U (en) | Rock plate chamfering and positioning synchronous mechanism | |
| KR100288085B1 (en) | Scalar Type Robot for Substrate Transfer | |
| CN214980116U (en) | Polishing equipment for sapphire wafer | |
| KR101127884B1 (en) | Flipping apparatus for semiconductor chip | |
| CN109545728A (en) | A kind of automation wafer transfer method | |
| CN211465948U (en) | Positioning device | |
| TW200919620A (en) | Pick and place system for a semiconductor mounting apparatus | |
| CN106803492A (en) | Pretreatment unit before silicon chip printing in solar battery sheet preparation technology | |
| CN111015502A (en) | Positioning device | |
| CN213828514U (en) | L-shaped automatic transfer table with conveying function | |
| CN210640208U (en) | Flower basket carrying device | |
| JPH11254302A (en) | Both side polishing device | |
| JP3797504B2 (en) | Double-side polishing machine | |
| CN218908968U (en) | Rotating arm manipulator and material conveying device | |
| CN214979778U (en) | Silicon wafer double-side polishing equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |