CN214519717U - Production fixing device for wafers - Google Patents
Production fixing device for wafers Download PDFInfo
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- CN214519717U CN214519717U CN202023311439.6U CN202023311439U CN214519717U CN 214519717 U CN214519717 U CN 214519717U CN 202023311439 U CN202023311439 U CN 202023311439U CN 214519717 U CN214519717 U CN 214519717U
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- telescopic driving
- supporting plate
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Abstract
The utility model provides a production fixing device for wafer, include: the utility model discloses a wafer, including the fixed stay pole, fixed stay pole one end is equipped with the left side and presss from both sides tight fixing device, the other end is equipped with the right side and presss from both sides tight fixing device, the left side presss from both sides tight fixing device, the right side and presss from both sides the symmetry setting between the tight fixing device, the right side, fixed stay pole middle part is equipped with rotatory fixing base, rotatory fixing base passes through fixing bolt and installs on rotatory supporting seat, rotatory supporting seat fixed mounting is on rotatory driving motor's output, rotatory driving motor's casing passes through the motor fixing base and installs on equipment support, the utility model discloses can realize the quick fixed of wafer, moreover, can realize the accurate positioning of wafer, simultaneously, can adapt to different processing equipment, improved the machining efficiency of wafer greatly.
Description
Technical Field
The utility model relates to a wafer production facility technical field specifically is a production fixing device for wafer.
Background
The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit device structures can be fabricated on a silicon wafer to form an IC product with specific electrical functions. The starting material for the wafer is silicon, while the crust surface has an inexhaustible amount of silicon dioxide. Silicon dioxide ore is refined by an electric arc furnace, chloridized by hydrochloric acid and distilled to prepare high-purity polycrystalline silicon, and a silicon crystal rod is ground, polished and sliced to form a silicon wafer, namely a wafer, which is widely applied to various electronic devices. The wafer material has undergone the technical evolution and industrial development for over 60 years, and forms the industrial situation which is mainly silicon and is supplemented by novel semiconductor materials.
SUMMERY OF THE UTILITY MODEL
The technical problem solved by the present invention is to provide a production fixing device for wafers to solve the problems in the background art.
The utility model provides a technical problem adopt following technical scheme to realize: a production fixture for wafers, comprising: a fixed support bar, wherein one end of the fixed support bar is provided with a left clamping fixing device, the other end of the fixed support bar is provided with a right clamping fixing device, the left clamping fixing device and the right clamping fixing device are symmetrically arranged, the middle part of the fixed support bar is provided with a rotary fixing seat, the rotary fixing seat is arranged on a rotary supporting seat through a fixing bolt, the rotary supporting seat is fixedly arranged on the output end of a rotary driving motor, a shell of the rotary driving motor is arranged on an equipment bracket through a motor fixing seat, the left clamping fixing device and the right clamping fixing device comprise wafer positioning bulges, the wafer positioning bulges are arranged on the bulge fixing seats, the bulge fixing seats are fixed on a clamping plate, the clamping plate is arranged on a clamping driving device, the clamping driving device comprises a telescopic driving device supporting plate, and the telescopic driving device supporting plate is arranged on the fixed support bar through a fixing bolt, the telescopic driving device comprises a telescopic driving device supporting plate and is characterized in that a telescopic driving cylinder is arranged on one side of the telescopic driving device supporting plate, a telescopic driving head is installed at the output end of the telescopic driving cylinder and is connected to an equipment mounting plate through a transmission structure, a telescopic guide device is arranged between the equipment mounting plate and the telescopic driving device supporting plate, and a clamping plate is installed on the equipment mounting plate through a fixing bolt.
The cylinder body of the telescopic driving cylinder is installed on the cylinder installation seat through a rotary supporting pin, the cylinder installation seat is installed on the cylinder installation plate through a fixing bolt, and the cylinder installation plate is installed on the telescopic driving device supporting plate through a fixing bolt.
The transmission structure comprises a telescopic driving rod and a telescopic supporting plate, the telescopic driving head is installed at one end of the telescopic driving rod and the telescopic supporting plate through a rotary supporting pin, the other end of the telescopic supporting plate is installed on a supporting plate installing seat through the rotary supporting pin, the supporting plate installing seat is installed on a telescopic driving device supporting plate through a fixing bolt, the other end of the telescopic driving rod is installed on a telescopic driving block through the rotary supporting pin, and an equipment installing plate is arranged on the telescopic driving block.
The telescopic driving device is characterized in that a limiting stand column is arranged on the telescopic driving device supporting plate on the upper side of the telescopic driving head and is installed on the telescopic driving device supporting plate through a fixing nut, and a rubber protective sleeve is arranged on the outer side of the limiting stand column.
The telescopic guide device comprises a telescopic guide slide rail and a telescopic guide slide block, the telescopic guide slide block is slidably mounted on the telescopic guide slide rail, the telescopic guide slide rail is mounted on the telescopic driving device support plate through a fixing bolt, and the telescopic guide slide block is mounted on the equipment mounting plate through a fixing bolt.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses can realize the quick fixed of wafer, moreover, can realize the accurate positioning of wafer, simultaneously, can adapt to different processing equipment, improve the machining efficiency of wafer greatly.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural view of the clamping and fixing device of the present invention.
Fig. 3 is a schematic structural view of the telescopic guiding device of the present invention.
Detailed Description
In order to make the technical means, the creative features, the purpose and the efficacy of the present invention easily understood and appreciated, the present invention will be further explained with reference to the specific drawings, and in the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "mounted", "connected" and "connected" should be understood broadly, for example, they may be fixed connection, detachable connection, or integrally connected, mechanically connected or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements.
Example 1
As shown in fig. 1 to 3, a production fixing device for a wafer includes: a fixed support rod 1, wherein one end of the fixed support rod 1 is provided with a left clamping fixing device 3, the other end is provided with a right clamping fixing device 2, the left clamping fixing device 3 and the right clamping fixing device 2 are symmetrically arranged, the middle part of the fixed support rod 1 is provided with a rotary fixing seat 4, the rotary fixing seat 4 is arranged on a rotary supporting seat 5 through a fixing bolt, the rotary supporting seat 5 is fixedly arranged on the output end of a rotary driving motor 6, the shell of the rotary driving motor 6 is arranged on an equipment bracket through a motor fixing seat 7, the left clamping fixing device 3 and the right clamping fixing device 2 comprise wafer positioning bulges 31, the wafer positioning bulges 31 are arranged on a bulge fixing seat 32, the bulge fixing seat 32 is fixed on a clamping plate 314, the clamping plate 314 is arranged on a clamping driving device, the clamping driving device comprises a telescopic driving device supporting plate 33, telescopic driving device supporting plate 33 passes through fixing bolt and installs on fixed support rod 1, telescopic driving device supporting plate 33 one side is equipped with the flexible actuating cylinder 34 that drives, flexible driving head 37 of installing on the output of actuating cylinder 34 that drives, flexible driving head 37 passes through transmission structure and connects in equipment mounting panel 313, be equipped with flexible guider 312 between equipment mounting panel 313 and the flexible actuating device supporting plate 33, clamp plate 314 passes through fixing bolt and installs on equipment mounting panel 13. The cylinder body of the telescopic driving cylinder 34 is mounted on a cylinder mounting seat 35 through a rotary support pin, the cylinder mounting seat 35 is mounted on a cylinder mounting plate 36 through a fixing bolt, and the cylinder mounting plate 36 is mounted on the telescopic driving device support plate 33 through a fixing bolt.
Example 2
As shown in fig. 1 to 3, a production fixing device for a wafer includes: a fixed support rod 1, wherein one end of the fixed support rod 1 is provided with a left clamping fixing device 3, the other end is provided with a right clamping fixing device 2, the left clamping fixing device 3 and the right clamping fixing device 2 are symmetrically arranged, the middle part of the fixed support rod 1 is provided with a rotary fixing seat 4, the rotary fixing seat 4 is arranged on a rotary supporting seat 5 through a fixing bolt, the rotary supporting seat 5 is fixedly arranged on the output end of a rotary driving motor 6, the shell of the rotary driving motor 6 is arranged on an equipment bracket through a motor fixing seat 7, the left clamping fixing device 3 and the right clamping fixing device 2 comprise wafer positioning bulges 31, the wafer positioning bulges 31 are arranged on a bulge fixing seat 32, the bulge fixing seat 32 is fixed on a clamping plate 314, the clamping plate 314 is arranged on a clamping driving device, the clamping driving device comprises a telescopic driving device supporting plate 33, telescopic driving device supporting plate 33 passes through fixing bolt and installs on fixed support rod 1, telescopic driving device supporting plate 33 one side is equipped with the flexible actuating cylinder 34 that drives, flexible driving head 37 of installing on the output of actuating cylinder 34 that drives, flexible driving head 37 passes through transmission structure and connects in equipment mounting panel 313, be equipped with flexible guider 312 between equipment mounting panel 313 and the flexible actuating device supporting plate 33, clamp plate 314 passes through fixing bolt and installs on equipment mounting panel 13. The transmission structure includes flexible actuating lever 310, flexible backup pad 38, flexible driving head 37 is installed in one of flexible actuating lever 310, flexible backup pad 38 through rotatory support pin and is served, the other end of flexible backup pad 38 is installed on backup pad mount pad 39 through rotatory support pin, backup pad mount pad 39 passes through fixing bolt and installs on flexible drive arrangement backup pad 33, the flexible actuating lever 310 other end is installed on flexible drive block 311 through rotatory support pin, be equipped with equipment mounting panel 313 on the flexible drive block 311. The telescopic driving device is characterized in that a limiting upright post is arranged on the telescopic driving device supporting plate 33 on the upper side of the telescopic driving head 37, the limiting upright post is installed on the telescopic driving device supporting plate 33 through a fixing nut, and a rubber protective sleeve is arranged on the outer side of the limiting upright post.
Example 3
As shown in fig. 1 to 3, a production fixing device for a wafer includes: a fixed support rod 1, wherein one end of the fixed support rod 1 is provided with a left clamping fixing device 3, the other end is provided with a right clamping fixing device 2, the left clamping fixing device 3 and the right clamping fixing device 2 are symmetrically arranged, the middle part of the fixed support rod 1 is provided with a rotary fixing seat 4, the rotary fixing seat 4 is arranged on a rotary supporting seat 5 through a fixing bolt, the rotary supporting seat 5 is fixedly arranged on the output end of a rotary driving motor 6, the shell of the rotary driving motor 6 is arranged on an equipment bracket through a motor fixing seat 7, the left clamping fixing device 3 and the right clamping fixing device 2 comprise wafer positioning bulges 31, the wafer positioning bulges 31 are arranged on a bulge fixing seat 32, the bulge fixing seat 32 is fixed on a clamping plate 314, the clamping plate 314 is arranged on a clamping driving device, the clamping driving device comprises a telescopic driving device supporting plate 33, telescopic driving device supporting plate 33 passes through fixing bolt and installs on fixed support rod 1, telescopic driving device supporting plate 33 one side is equipped with the flexible actuating cylinder 34 that drives, flexible driving head 37 of installing on the output of actuating cylinder 34 that drives, flexible driving head 37 passes through transmission structure and connects in equipment mounting panel 313, be equipped with flexible guider 312 between equipment mounting panel 313 and the flexible actuating device supporting plate 33, clamp plate 314 passes through fixing bolt and installs on equipment mounting panel 13. The telescopic guide device 312 comprises a telescopic guide slide rail and a telescopic guide slide block, the telescopic guide slide block is slidably mounted on the telescopic guide slide rail, the telescopic guide slide rail is mounted on the telescopic driving device support plate 33 through a fixing bolt, and the telescopic guide slide block is mounted on the equipment mounting plate 313 through a fixing bolt.
The utility model discloses be equipped with a left side and press from both sides tight fixing device 3, the other end is equipped with the right side and press from both sides tight fixing device 2 in 1 one end of fixed support bar, a left side presss from both sides tight fixing device 3, the right side and presss from both sides the symmetry setting between the tight fixing device 2, 1 middle part of fixed support bar is equipped with rotatory fixing base 4, rotatory fixing base 4 passes through fixing bolt and installs on rotatory supporting seat 5, 5 fixed mounting of rotatory supporting seat are on the output of rotary driving motor 6, the casing of rotary driving motor 6 passes through motor fixing base 7 and installs on the equipment support, can realize the quick fixed of wafer, moreover, can realize the accurate positioning of wafer, simultaneously, can adapt to different processing equipment, improved the machining efficiency of wafer greatly.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. A production fixture for wafers, comprising: fixed support pole (1), fixed support pole (1) one end is equipped with left side and presss from both sides tight fixing device (3), and the other end is equipped with right side and presss from both sides tight fixing device (2), its characterized in that: the left clamping fixing device (3) and the right clamping fixing device (2) are symmetrically arranged, a rotary fixing seat (4) is arranged in the middle of the fixed supporting rod (1), the rotary fixing seat (4) is installed on a rotary supporting seat (5) through a fixing bolt, the rotary supporting seat (5) is fixedly installed on the output end of a rotary driving motor (6), a shell of the rotary driving motor (6) is installed on an equipment support through a motor fixing seat (7), the left clamping fixing device (3) and the right clamping fixing device (2) comprise wafer positioning bulges (31), the wafer positioning bulges (31) are installed on a bulge fixing seat (32), the bulge fixing seat (32) is fixed on a clamping plate (314), the clamping plate (314) is installed on a clamping driving device, and the clamping driving device comprises a telescopic driving device supporting plate (33), the telescopic driving device supporting plate (33) is installed on the fixed supporting rod (1) through a fixing bolt, one side of the telescopic driving device supporting plate (33) is provided with a telescopic driving cylinder (34), a telescopic driving head (37) is installed at the output end of the telescopic driving cylinder (34), the telescopic driving head (37) is connected to the equipment mounting plate (313) through a transmission structure, a telescopic guide device (312) is arranged between the equipment mounting plate (313) and the telescopic driving device supporting plate (33), and the clamping plate (314) is installed on the equipment mounting plate (313) through a fixing bolt.
2. A production fixture for wafers as recited in claim 1, wherein: the cylinder body of flexible actuating cylinder (34) is installed on cylinder mount pad (35) through rotatory support pin, cylinder mount pad (35) are installed on cylinder mounting panel (36) through fixing bolt, cylinder mounting panel (36) are installed on flexible drive arrangement backup pad (33) through fixing bolt.
3. A production fixture for wafers as recited in claim 1, wherein: the transmission structure comprises a telescopic driving rod (310) and a telescopic supporting plate (38), wherein the telescopic driving head (37) is installed at one end of the telescopic driving rod (310) and the telescopic supporting plate (38) through a rotary supporting pin, the other end of the telescopic supporting plate (38) is installed on a supporting plate installing seat (39) through a rotary supporting pin, the supporting plate installing seat (39) is installed on a telescopic driving device supporting plate (33) through a fixing bolt, the other end of the telescopic driving rod (310) is installed on a telescopic driving block (311) through a rotary supporting pin, and an equipment installing plate (313) is arranged on the telescopic driving block (311).
4. A production fixture for wafers as recited in claim 3, wherein: the telescopic driving device is characterized in that a limiting upright post is arranged on a telescopic driving device supporting plate (33) on the upper side of the telescopic driving head (37), the limiting upright post is installed on the telescopic driving device supporting plate (33) through a fixing nut, and a rubber protective sleeve is arranged on the outer side of the limiting upright post.
5. A production fixture for wafers as recited in claim 1, wherein: the telescopic guide device (312) comprises a telescopic guide sliding rail and a telescopic guide sliding block, the telescopic guide sliding block is slidably mounted on the telescopic guide sliding rail, the telescopic guide sliding rail is mounted on the telescopic driving device supporting plate (33) through a fixing bolt, and the telescopic guide sliding block is mounted on the equipment mounting plate (313) through a fixing bolt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023311439.6U CN214519717U (en) | 2020-12-31 | 2020-12-31 | Production fixing device for wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023311439.6U CN214519717U (en) | 2020-12-31 | 2020-12-31 | Production fixing device for wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214519717U true CN214519717U (en) | 2021-10-29 |
Family
ID=78299181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023311439.6U Active CN214519717U (en) | 2020-12-31 | 2020-12-31 | Production fixing device for wafers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214519717U (en) |
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2020
- 2020-12-31 CN CN202023311439.6U patent/CN214519717U/en active Active
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