CN214516310U

CN214516310U - Silicon wafer circulating cleaning equipment

Info

Publication number: CN214516310U
Application number: CN202120048263.5U
Authority: CN
Inventors: 祝凯
Original assignee: Kaihua Core Electronics Co ltd
Current assignee: Kaihua Core Electronics Co ltd
Priority date: 2021-01-08
Filing date: 2021-01-08
Publication date: 2021-10-29
Anticipated expiration: 2031-01-08

Abstract

The utility model provides a silicon chip circulation cleaning equipment relates to the silicon chip field. The silicon wafer circulating cleaning equipment comprises a box body, wherein a taking hole communicated with the interior of the box body is formed in the left side of the box body, a fixing plate is fixedly connected to the inner wall of the right side of the box body, a water pump is fixedly connected to the lower surface of the fixing plate, a guide pipe is fixedly connected to a left water outlet of the water pump, a three-way pipe is fixedly connected to one end, away from the water pump, of the guide pipe, and a water guide pipe is fixedly connected to the lower portion of the three-way pipe. This silicon chip circulation cleaning equipment through the water tank, stand, filter hopper, outlet pipe, water pump, guiding tube, three-way pipe, aqueduct and flushing pipe mutually support, reaches the water that can wash the silicon chip and carries out the recycle, filters the collection with the piece that the silicon chip surface was washd simultaneously, has solved current silicon chip cleaning equipment after wasing the silicon chip, and water is generally directly discharged together with the piece, has both wasted the water resource, has also polluted the problem of environment.

Description

Silicon wafer circulating cleaning equipment

Technical Field

The utility model relates to a silicon chip technology field specifically is a silicon chip circulation cleaning equipment.

Background

On a silicon chip with large grains of rice, 16 ten thousand transistors can be integrated, which is another milestone of scientific and technical progress, and the earth crust contains 25.8 percent of silicon element, thereby providing an inexhaustible source for the production of monocrystalline silicon. Because silicon element is one of the most abundant elements in the earth crust, for a product which is destined to enter a large-scale market like a solar cell, the advantage of the reserve is also one of the reasons that silicon becomes a main material of photovoltaic, a silicon wafer is produced by slicing on the basis of a silicon rod, fragments are easy to remain on the surface of the sliced silicon wafer and need to be cleaned by using cleaning equipment, and after the silicon wafer is cleaned by the existing silicon wafer cleaning equipment, water and the fragments are generally directly discharged, so that water resources are wasted, and the environment is polluted.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a silicon chip circulation cleaning equipment has solved current silicon chip cleaning equipment and is wasing the back with the silicon chip, and water has both wasted the water resource together with the general direct emission of piece, has also polluted the problem of environment.

Technical scheme

In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: a silicon wafer circulating cleaning device comprises a box body, wherein a taking hole communicated with the interior of the box body is formed in the left side of the box body, a fixing plate is fixedly connected to the inner wall of the right side of the box body, a water pump is fixedly connected to the lower surface of the fixing plate, a guide pipe is fixedly connected to a left side water outlet of the water pump, a three-way pipe is fixedly connected to one end, away from the water pump, of the guide pipe, a water guide pipe is fixedly connected to the lower portion of the three-way pipe, a spray header is fixedly connected to the bottom end of the water guide pipe, a flushing pipe is fixedly connected to the left side of the three-way pipe, a high-pressure spray head is fixedly connected to the bottom end of the flushing pipe, a water outlet pipe is fixedly connected to a right side water inlet of the water pump, a water tank is lapped on the inner bottom wall of the box body, one end, away from the water outlet pipe, is communicated with the interior of the water tank, a stand column is lapped on the inner bottom wall of the water tank, and a movable ring is sleeved on the surface of the stand column, the outer surface of the movable ring is fixedly connected with a filter hopper, and the top end of the upright post is fixedly connected with a supporting plate.

Furthermore, the outer surface of the supporting plate is fixedly connected with a connecting rod, and one end of the connecting rod, far away from the supporting plate, is fixedly connected with a surrounding baffle.

Furthermore, the left and right sides of water tank all overlap joint has the stopper, the lower surface of two stoppers all with the interior diapire fixed connection of box.

Furthermore, a thread groove is formed in the bottom end of the upright post, a screw rod is connected to the inner thread of the thread groove, and the bottom end of the screw rod is fixedly connected with the inner bottom wall of the water tank.

Further, flexible groove has all been seted up to the left and right sides of stand, the equal fixedly connected with spring of inner wall in two flexible grooves, the equal fixedly connected with dog of the opposite one end of two springs, the upper surface of two dogs and the lower surface overlap joint of activity ring.

Furthermore, a reinforcing frame is fixedly connected between the inner walls of the left side and the right side of the box body, and the surface of the spray header is fixedly connected with the inside of the reinforcing frame.

The utility model provides a silicon chip circulation cleaning equipment. The method has the following beneficial effects:

1. this silicon chip circulation cleaning equipment through the water tank, stand, filter hopper, outlet pipe, water pump, guiding tube, three-way pipe, aqueduct and flushing pipe mutually support, reaches the water that can wash the silicon chip and carries out the recycle, filters the collection with the piece that the silicon chip surface was washd simultaneously, has solved current silicon chip cleaning equipment after wasing the silicon chip, and water is generally directly discharged together with the piece, has both wasted the water resource, has also polluted the problem of environment.

2. This silicon chip circulation cleaning equipment through the connecting rod with enclose the cooperation that keeps off, reach and carry on the silicon chip spacing simultaneously can so that the water after using gets into the water tank through enclosing the clearance between fender and the layer board inside, through the cooperation of thread groove and screw rod, reach and can follow the inside dismantlement of water tank with the stand, through the cooperation of flexible groove, spring and dog, reach and to fight to filter and demolish from the stand and clear up inside piece.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is an enlarged view of a portion A of FIG. 1;

fig. 3 is an enlarged view of a portion B of fig. 1 according to the present invention.

The device comprises a box body 1, a taking hole 2, a reinforcing frame 3, a spray header 4, a flushing pipe 5, a tee pipe 6, a water guide pipe 7, a guide pipe 8, a fixing plate 9, a water pump 10, a supporting plate 11, a column 12, a water outlet pipe 13, a limiting block 14, a water tank 15, a filter hopper 16, a connecting rod 17, an enclosure baffle 18, a high-pressure spray head 19, a telescopic groove 20, a spring 21, a stop block 22, a movable ring 23, a threaded groove 24 and a threaded rod 25.

Detailed Description

As shown in FIGS. 1-3, the embodiment of the utility model provides a silicon wafer circulating cleaning device, which comprises a box body 1, wherein the left side of the box body 1 is provided with a taking hole 2 communicated with the inside of the box body 1, the right side inner wall of the box body 1 is fixedly connected with a fixing plate 9, the lower surface of the fixing plate 9 is fixedly connected with a water pump 10, the left side water outlet of the water pump 10 is fixedly connected with a guide pipe 8, one end of the guide pipe 8 far away from the water pump 10 is fixedly connected with a three-way pipe 6, the lower part of the three-way pipe 6 is fixedly connected with a water guide pipe 7, the bottom end of the water guide pipe 7 is fixedly connected with a spray header 4, a reinforcing frame 3 is fixedly connected between the left side inner wall and the right side inner wall of the box body 1, the surface of the spray header 4 is fixedly connected with the inside of the reinforcing frame 3, the left side of the three-way pipe 6 is fixedly connected with a flushing pipe 5, the bottom end of the flushing pipe 5 is fixedly connected with a high-pressure spray header 19, and the right side water inlet of the water pump 10 is fixedly connected with a water outlet pipe 13, a water tank 15 is lapped on the inner bottom wall of the box body 1, limit blocks 14 are lapped on the left side and the right side of the water tank 15, the lower surfaces of the two limit blocks 14 are fixedly connected with the inner bottom wall of the box body 1, one end, away from the water pump 10, of the water outlet pipe 13 is communicated with the inside of the water tank 15, a stand column 12 is lapped on the inner bottom wall of the water tank 15, a thread groove 24 is formed in the bottom end of the stand column 12, a screw 25 is connected to the inner thread of the thread groove 24, the bottom end of the screw 25 is fixedly connected with the inner bottom wall of the water tank 15, a movable ring 23 is sleeved on the surface of the stand column 12, telescopic grooves 20 are formed in the left side and the right side of the stand column 12, springs 21 are fixedly connected with the inner walls of the two telescopic grooves 20, check blocks 22 are fixedly connected with the opposite ends of the two springs 21, the upper surfaces of the two check blocks 22 are lapped with the lower surface of the movable ring 23, a filtering hopper 16 is fixedly connected with the outer surface of the movable ring 23, a supporting plate 11 is fixedly connected with the top end of the stand column 12, the outer surface of layer board 11 is fixedly connected with connecting rod 17, and the one end fixedly connected with that connecting rod 17 keeps away from layer board 11 encloses fender 18.

The working principle is as follows: pouring clear water into the water tank 15, placing the silicon wafer on the surface of the supporting plate 11 through the taking hole 2, then starting the water pump 10 to pump water, at the moment, water in the water tank 15 flows to the high-pressure spray head 19 and the spray head 4 through the water outlet pipe 13 and the guide pipe 8 respectively, the spray head 4 and the high-pressure spray head 19 clean the silicon wafer on the surface of the supporting plate 11, and the cleaned water flows downwards through a gap between the enclosure 18 and the supporting plate 11 and returns to the inside of the water tank 15 through the filtering of the filtering hopper 16.

Claims

1. The utility model provides a silicon chip circulation cleaning equipment, includes box (1), its characterized in that: a taking hole (2) communicated with the inside of the box body (1) is formed in the left side of the box body (1), a fixing plate (9) is fixedly connected to the inner wall of the right side of the box body (1), a water pump (10) is fixedly connected to the lower surface of the fixing plate (9), a guide pipe (8) is fixedly connected to a left side water outlet of the water pump (10), a three-way pipe (6) is fixedly connected to one end, away from the water pump (10), of the guide pipe (8), a water guide pipe (7) is fixedly connected to the lower portion of the three-way pipe (6), a spray header (4) is fixedly connected to the bottom end of the water guide pipe (7), a flushing pipe (5) is fixedly connected to the left side of the three-way pipe (6), a high-pressure spray nozzle (19) is fixedly connected to the bottom end of the flushing pipe (5), a water outlet pipe (13) is fixedly connected to a right side water inlet of the water pump (10), and a water tank (15) is lapped on the inner bottom wall of the box body (1), the one end that water pump (10) was kept away from in outlet pipe (13) communicates with the inside of water tank (15), the inner diapire overlap joint of water tank (15) has stand (12), the surface of stand (12) has cup jointed activity ring (23), the outer fixed surface of activity ring (23) is connected with filter hopper (16), the top fixedly connected with layer board (11) of stand (12).

2. The silicon wafer circulating cleaning equipment as claimed in claim 1, wherein: the outer surface of the supporting plate (11) is fixedly connected with a connecting rod (17), and one end of the connecting rod (17) far away from the supporting plate (11) is fixedly connected with a surrounding baffle (18).

3. The silicon wafer circulating cleaning equipment as claimed in claim 1, wherein: the left side and the right side of the water tank (15) are respectively provided with a limiting block (14), and the lower surfaces of the two limiting blocks (14) are fixedly connected with the inner bottom wall of the tank body (1).

4. The silicon wafer circulating cleaning equipment as claimed in claim 1, wherein: thread groove (24) have been seted up to the bottom of stand (12), the inside threaded connection of thread groove (24) has screw rod (25), the bottom of screw rod (25) and the interior diapire fixed connection of water tank (15).

5. The silicon wafer circulating cleaning equipment as claimed in claim 1, wherein: flexible groove (20) have all been seted up to the left and right sides of stand (12), the equal fixedly connected with spring (21) of inner wall in two flexible grooves (20), the equal fixedly connected with dog (22) of the opposite one end in two springs (21), the upper surface of two dog (22) and the lower surface overlap joint of activity ring (23).

6. The silicon wafer circulating cleaning equipment as claimed in claim 1, wherein: the inner walls of the left side and the right side of the box body (1) are fixedly connected with a reinforcing frame (3), and the surface of the spray header (4) is fixedly connected with the inner part of the reinforcing frame (3).