CN214488097U - Gallium arsenide wafer box cleaning device - Google Patents
Gallium arsenide wafer box cleaning device Download PDFInfo
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- CN214488097U CN214488097U CN202021504912.XU CN202021504912U CN214488097U CN 214488097 U CN214488097 U CN 214488097U CN 202021504912 U CN202021504912 U CN 202021504912U CN 214488097 U CN214488097 U CN 214488097U
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Abstract
The utility model relates to the technical field of wafer box cleaning, in particular to a gallium arsenide wafer box cleaning device, which comprises a cleaning device body, wherein the top side of the cleaning device body is provided with a top cover, the inner side of the cleaning device body is provided with an electric slide rail A, the inner side of the electric slide rail A is provided with a slide block A, one side of the slide block A is provided with a connecting plate A, the bottom side of the connecting plate A is provided with an electric slide rail B, the inner side of the electric slide rail B is provided with a slide block B, the bottom side of the slide block B is provided with an electric slide rail C, the inner side of the electric slide rail C is provided with a clamping block, one end of the bottom side of the cleaning device body is provided with a cleaner, the top side of the cleaner is provided with a cleaning pool, one side of the cleaner is provided with a clapboard A and an atomization cleaning pool, the gallium arsenide wafer box cleaning device is high in cleaning quality, large in cleaning quantity, convenient to move, capable of being dried after cleaning and convenient to store.
Description
Technical Field
The utility model relates to a spool box washs technical field, especially relates to a gallium arsenide wafer spool box belt cleaning device.
Background
The gallium arsenide wafer is a compound synthesized by two elements of gallium and arsenic, is also an important IIIA group and VA group compound semiconductor material, and is used for manufacturing elements such as a microwave integrated circuit, an infrared light emitting diode, a semiconductor laser, a solar cell and the like.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing a gallium arsenide wafer box cleaning device.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the gallium arsenide wafer box cleaning device comprises a cleaning device body, wherein the cleaning device body is of a cavity structure, the top side of the cleaning device body is connected with a top cover through a hinge in a turnover mode, an electric slide rail A is fixedly connected to the inner side wall of the cleaning device body, a slide block A is connected to the inner side of the electric slide rail A in a sliding mode, a connecting plate A is fixedly connected to one side of the slide block A, an electric slide rail B is fixedly arranged at the bottom side of the connecting plate A, a slide block B is connected to the inner side of the electric slide rail B in a sliding mode, a connecting plate B is fixedly connected to the bottom side of the slide block B, a plurality of electric slide rails C are fixedly arranged on the bottom side of the connecting plate B in an equidistant mode, clamping blocks are symmetrically connected to the inner side of the electric slide rails C in a sliding mode in a parallel mode, one end of the bottom side of the cleaning device body is detachably connected with a cleaner through a buckle, a cleaning pool is fixedly arranged on the top side of the cleaner, a partition plate A is arranged on one side of the cleaner, the bottom side of the partition plate A is fixedly connected to the bottom end of the inner side of the cleaning device body, an atomization cleaning pool is fixedly arranged on one side of the partition plate A, a water suction pump is fixedly connected to the bottom side of the atomization cleaning pool, the output end of the water suction pump is rotatably connected with a connecting pipe through threads, a plurality of atomization spray heads are rotatably connected to one side of the connecting pipe in an equal-distance mode, a drying pool is fixedly arranged on one side of the atomization cleaning pool, a partition plate B is fixedly arranged between the drying pool and the side opposite to the atomization cleaning pool, a ventilation groove is fixedly arranged on the inner side of the partition plate B, a ventilation hole is fixedly arranged on one side opposite to the partition plate B of the cleaning device body, the ventilation hole and the ventilation groove are of a communicated structure, and one side of the partition plate B close to the ventilation groove is movably connected with a plurality of drying fans, one side that the belt cleaning device body is relative with the stoving pond is connected with the turnover door through the hinge upset, one side fixedly connected with of belt cleaning device body controls the electronic box, control electronic box, purger, electronic slide rail A, electronic slide rail B, electronic slide rail C, suction pump and drying fan and all pass through wire electric connection external power supply.
Preferably, the bottom side of the cleaning device body is fixedly connected with a supporting leg, and the bottom side of the supporting leg is rotatably connected with a roller.
Preferably, one side of the partition board B is rotatably connected with an electric heating wire at a position close to the drying fan, and one side of the electric heating wire is electrically connected with an external power supply through a wire.
Preferably, the cleaner is an ultrasonic cleaner member.
Preferably, the number of the clamping blocks is at least three.
The utility model provides a pair of gallium arsenide wafer box belt cleaning device, beneficial effect lies in: the bottom side of the cleaning device body is fixedly connected with a supporting leg, the bottom side of the supporting leg is rotatably connected with a roller, the device can be conveniently moved, a stable support property is provided, the device can be moved freely and conveniently and quickly during use, one side of a partition plate B is rotatably connected with an electric heating wire at a position close to a drying fan, one side of the electric heating wire is electrically connected with an external power supply through a lead, hot air can be blown out, hot air drying is carried out, drying efficiency is improved, water stains are eliminated, the cleaning quality can be improved by adopting an ultrasonic cleaner component as a cleaner, the cleaning is clean and efficient, a large number of gallium arsenide wafer box cleaning devices can be simultaneously carried out through at least three clamping blocks, working efficiency is improved, a large number of work is carried out, time consumption is reduced, working hours consumption is reduced, the cleaning quality is high, and the cleaning quantity is large, the movable clothes rack is convenient to move, can be dried after being cleaned, and is convenient to store.
Drawings
Fig. 1 is a schematic diagram of an isometric structure of a cleaning device for a gallium arsenide wafer cassette according to the present invention;
fig. 2 is a schematic view of a front view cross-sectional structure of a cleaning device for a gallium arsenide wafer cassette according to the present invention;
fig. 3 is a schematic diagram of a right-view structure of a cleaning device for a gallium arsenide wafer cassette according to the present invention.
In the figure: cleaning device body 1, top cap 2, electronic slide rail A3, slider A4, connecting plate A5, electronic slide rail B6, slider B7, connecting plate B8, electronic slide rail C9, clamp block 10, purger 11, washing pond 12, baffle A13, atomizing clearance pond 14, suction pump 15, connecting pipe 16, atomizer 17, stoving pond 18, baffle B19, ventilation groove 20, ventilation hole 21, drying fan 22, upset door 23, control electronic box 24, supporting leg 25, gyro wheel 26, heating wire 27.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-3, a gallium arsenide wafer cassette cleaning device, comprising a cleaning device body 1, wherein the cleaning device body 1 is a cavity structure, the top side of the cleaning device body 1 is connected with a top cover 2 through a hinge in a turning manner, the inner side wall of the cleaning device body 1 is fixedly connected with an electric slide rail A3, the inner side of the electric slide rail A3 is connected with a slide block a4 in a sliding manner, one side of the slide block a4 is fixedly connected with a connecting plate a5, the bottom side of the connecting plate a5 is fixedly provided with an electric slide rail B6, the inner side of the electric slide rail B6 is connected with a slide block B7 in a sliding manner, the bottom side of the slide block B7 is fixedly connected with a connecting plate B8, the bottom side of the connecting plate B8 is equally and fixedly provided with a plurality of electric slide rails C9, the inner sides of the electric slide rails C9 are symmetrically and parallelly connected with clamping blocks 10 in a sliding manner, one end of the bottom side of the cleaning device body 1 is detachably connected with a cleaner 11 through a buckle, the top side of the cleaner 11 is fixedly provided with a cleaning pool 12, a partition plate A13 is arranged on one side of the cleaning device 11, the bottom side of the partition plate A13 is fixedly connected to the bottom end of the inner side of the cleaning device body 1, an atomization cleaning pool 14 is fixedly arranged on one side of the partition plate A13, a water suction pump 15 is fixedly connected to the bottom side of the atomization cleaning pool 14, the output end of the water suction pump 15 is rotatably connected with a connecting pipe 16 through threads, a plurality of atomization nozzles 17 are equally and rotatably connected to one side of the connecting pipe 16, a drying pool 18 is fixedly arranged on one side of the atomization cleaning pool 14, a partition plate B19 is fixedly arranged between the drying pool 18 and the side opposite to the atomization cleaning pool 14, a ventilation groove 20 is fixedly arranged on the inner side of the partition plate B19, a ventilation hole 21 is fixedly arranged on the side of the cleaning device body 1 opposite to the partition plate B19, the ventilation hole 21 and the ventilation groove 20 are in a communicated structure, a plurality of drying fans 22 are movably connected to one side of the partition plate B19 close to the ventilation groove 20, a turnover door 23 is connected to the side of the cleaning device body 1 opposite to the drying pool 18 through hinges in a turnover manner, one side fixedly connected with of belt cleaning device body 1 controls electronic box 24, purger 11, electronic slide rail A3, electronic slide rail B6, electronic slide rail C9, suction pump 15 and drying fan 22 and all passes through wire electric connection external power source.
The utility model discloses in, through the bottom side fixedly connected with supporting leg 25 of belt cleaning device body 1, the bottom side of supporting leg 25 is rotated and is connected with gyro wheel 26, can conveniently remove the device, provides a stable support nature, and the removal is free during the use, convenient and fast.
The utility model discloses in, the position rotation that is close to drying fan 22 through one side of baffle B19 is connected with heating wire 27, and wire electric connection external power supply is passed through to one side of heating wire 27, can make it blow off hot-blastly to carry out hot air drying, improve drying efficiency, eliminate water stain.
The utility model discloses in, adopt through purger 11 and be the ultrasonic cleaner component, can improve cleaning quality, make it wash cleanly, high-efficient washing.
The utility model discloses in, be three at least through the quantity of pressing from both sides tight piece 10, can wash simultaneously by the multi-volume, improve work efficiency, the multi-volume work reduces the time consumption, reduces man-hour consumption, this gallium arsenide wafer box belt cleaning device, and the cleaning quality is high, washs in large quantity, and it is convenient to remove, can dry after wasing, conveniently deposits.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (5)
1. The utility model provides a gallium arsenide wafer box cleaning device, includes belt cleaning device body (1), its characterized in that, belt cleaning device body (1) is the cavity structure, the top side of belt cleaning device body (1) is connected with top cap (2) through the hinge upset, fixedly connected with electronic slide rail A (3) on the inside wall of belt cleaning device body (1), the inboard sliding connection of electronic slide rail A (3) has slider A (4), one side fixedly connected with connecting plate A (5) of slider A (4), the bottom side of connecting plate A (5) is fixed with electronic slide rail B (6), the inboard sliding connection of electronic slide rail B (6) has slider B (7), the bottom side fixedly connected with connecting plate B (8) of slider B (7), the bottom side equidistance of connecting plate B (8) is equallyd divide and is fixed to be equipped with a plurality of electronic slide rail C (9), the cleaning device is characterized in that the inner side of the electric sliding rail C (9) is symmetrically connected with a clamping block (10) in a sliding manner in parallel, one end of the bottom side of the cleaning device body (1) is detachably connected with a cleaning device (11) through a buckle, a cleaning pool (12) is fixedly arranged on the top side of the cleaning device (11), a partition plate A (13) is arranged on one side of the cleaning device (11), the bottom side of the partition plate A (13) is fixedly connected with the bottom end of the inner side of the cleaning device body (1), an atomization cleaning pool (14) is fixedly arranged on one side of the partition plate A (13), a water suction pump (15) is fixedly connected with the bottom side of the atomization cleaning pool (14), the output end of the water suction pump (15) is rotatably connected with a connecting pipe (16) through threads, a plurality of atomization nozzles (17) are rotatably connected with one side of the connecting pipe (16) in an equal distance, and a drying pool (18) is fixedly arranged on one side of the atomization cleaning pool (14), a baffle plate B (19) is fixedly arranged between one side of the drying pool (18) opposite to the atomization cleaning pool (14), a ventilation groove (20) is fixedly arranged on the inner side of the clapboard B (19), a ventilation hole (21) is fixedly arranged on one side of the cleaning device body (1) opposite to the clapboard B (19), the ventilation holes (21) are communicated with the ventilation groove (20), one side of the clapboard B (19) close to the ventilation groove (20) is movably connected with a plurality of drying fans (22), the side of the cleaning device body (1) opposite to the drying pool (18) is connected with a turnover door (23) through a hinge in a turnover way, one side of the cleaning device body (1) is fixedly connected with a control electric box (24), the control electric box (24), the cleaner (11), the electric sliding rail A (3), the electric sliding rail B (6), the electric sliding rail C (9), the water suction pump (15) and the drying fan (22) are all electrically connected with an external power supply through wires.
2. The gallium arsenide wafer cassette cleaning device according to claim 1, wherein the bottom side of the cleaning device body (1) is fixedly connected with support legs (25), and the bottom side of the support legs (25) is rotatably connected with rollers (26).
3. The cleaning device for the GaAs wafer cassette of claim 1, wherein a heating wire (27) is rotatably connected to a side of the partition plate B (19) near the drying fan (22), and one side of the heating wire (27) is electrically connected to an external power source through a wire.
4. A gaas wafer cassette cleaning device according to claim 1, wherein said cleaner (11) is an ultrasonic cleaner component.
5. A gaas wafer cassette cleaning device according to claim 1, characterized in that said clamping blocks (10) are at least three in number.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021504912.XU CN214488097U (en) | 2020-07-27 | 2020-07-27 | Gallium arsenide wafer box cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021504912.XU CN214488097U (en) | 2020-07-27 | 2020-07-27 | Gallium arsenide wafer box cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214488097U true CN214488097U (en) | 2021-10-26 |
Family
ID=78196199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021504912.XU Active CN214488097U (en) | 2020-07-27 | 2020-07-27 | Gallium arsenide wafer box cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214488097U (en) |
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2020
- 2020-07-27 CN CN202021504912.XU patent/CN214488097U/en active Active
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