CN214467221U - Reaction tube fixing module and reaction furnace - Google Patents

Abstract

The utility model discloses a fixed module of reaction tube and reacting furnace, the fixed module of reaction tube includes the reaction tube, cup joints piece and two at least flexible support piece: the sleeve joint piece is used for being connected with an external component, is sleeved outside the reaction tube and has a gap with the reaction tube; the flexible supporting pieces are sleeved on the outer side of the reaction tube, positioned in the gap and respectively contacted with the reaction tube and the sleeved piece, and are distributed along the axial direction of the reaction tube. The utility model discloses in the fixed module of reaction tube, cup joint the piece and support the reaction tube through two at least flexible support piece along the axial distribution of reaction tube, can avoid the reaction tube to take place to break with the cup joint piece direct contact of stereoplasm, two at least flexible support piece can provide a plurality of support positions to the atress of balanced reaction tube reduces the pressure of reaction tube support position, realizes the stability of reaction tube and places.

Description

Reaction tube fixing module and reaction furnace

Technical Field

The utility model relates to a wafer manufacturing field especially relates to fixed module of reaction tube and reacting furnace.

Background

With the rapid development of the semiconductor industry in China, the requirements of related semiconductor equipment are increasing, wafers are processed in the reaction tube, one end of the reaction tube needs to be fixed in some occasions, the other end of the reaction tube is suspended, the end fixing is usually realized by using a flange plate in the related technology, and the fixed end of the reaction tube needs to bear a larger acting force and is made of fragile materials (such as quartz), so the reaction tube is easy to crack after being contacted with the flange plate.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a fixed module of reaction tube can avoid the reaction tube cracked.

The utility model also discloses a reaction furnace of using above-mentioned fixed module of reaction tube.

According to the utility model discloses module is fixed to reaction tube of first embodiment, include:

a reaction tube;

the sleeve joint piece is used for being connected with an external component, is sleeved outside the reaction tube and has a gap with the reaction tube;

the flexible supporting pieces are sleeved on the outer side of the reaction tube, positioned in the gap and respectively contacted with the reaction tube and the sleeved piece, and each flexible supporting piece is distributed along the axial direction of the reaction tube.

According to the utility model discloses module is fixed to reaction tube has following beneficial effect at least:

the socket joint piece supports the reaction tube through at least two flexible supporting pieces distributed along the axial direction of the reaction tube, the reaction tube can be prevented from being broken due to direct contact with the hard socket joint piece, and the at least two flexible supporting pieces can provide a plurality of supporting positions, so that stress of the reaction tube is balanced, pressure of the supporting positions of the reaction tube is reduced, and stable placement of the reaction tube is realized.

According to some embodiments of the invention, the socket has a first annular groove with the flexible support therein;

the reaction tube fixing module further comprises a first connecting piece, wherein the first connecting piece is sleeved on the outer side of the reaction tube and connected with the sleeved piece so as to limit the flexible supporting piece in the corresponding first annular groove.

According to some embodiments of the invention, the first connecting member can press the corresponding flexible support member so that the flexible support member extends along a radial direction of the reaction tube.

According to some embodiments of the utility model, first connecting piece has and stretches into extrusion in the first ring channel, follows the direction of stretching into of extrusion, the cell wall of first ring channel with distance between the reaction tube reduces gradually.

According to some embodiments of the utility model, the fixed module of reaction tube still includes flexible packing, flexible packing fill in the clearance, and with the reaction tube contacts.

According to some embodiments of the present invention, the flexible filler is heat conductive silica gel.

According to some embodiments of the utility model, the fixed module of reaction tube still includes height adjusting part, height adjusting part with cup joint the piece and connect, support in the below of reaction tube can follow vertical direction motion.

According to some embodiments of the utility model, the height adjusting part includes installation department and regulating part, the installation department with cup joint the piece and connect, the regulating part with the installation department is connected, have with the indent cambered surface that the reaction tube contacted, the hardness of regulating part is less than the hardness of installation department.

According to some embodiments of the utility model, the piece that cup joints has first heat dissipation chamber, and with first entry and the first export of first heat dissipation chamber intercommunication, first entry is used for letting in heat dissipation medium to each flexible support piece dispels the heat.

According to some embodiments of the utility model, the cover connects including cup jointing the portion of cup jointing on the reaction tube, and with the protruding portion that the portion of cup jointing is connected, the protruding portion is followed the axial of reaction tube surpasses the open end of reaction tube, the terminal surface of protruding portion has the second annular groove, the fixed module group of reaction tube still includes first sealing washer, first sealing washer is located the second annular groove.

According to some embodiments of the present invention, the protruding portion has a second heat dissipation chamber, and a second inlet and a second outlet communicated with the second heat dissipation chamber, the second inlet is used for letting in a heat dissipation medium, so as to be right the first sealing ring dissipates heat.

According to some embodiments of the invention, the flexible support towards the open end of the reaction tube is a second sealing ring.

According to some embodiments of the utility model, the fixed module of reaction tube still includes the setting element, the setting element with cup joint the piece and connect, with the open end contact of reaction tube is in order to carry out axial positioning, the hardness of setting element is less than cup joint the hardness of piece.

According to the utility model discloses reaction furnace of second embodiment includes:

a base;

the reaction tube fixing module is connected with the base through the sleeve joint piece;

the furnace body, with the base is connected, the reaction tube is located in the furnace body.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The invention will be further described with reference to the following drawings and examples, in which:

fig. 1 is a schematic perspective view of a reaction tube fixing module according to an embodiment of the present invention;

FIG. 2 is a sectional view of the reaction tube fixing module of FIG. 1;

FIG. 3 is an enlarged view of area A of FIG. 2;

FIG. 4 is a schematic perspective view of the reaction tube fixing module shown in FIG. 1, with the sleeve member hidden;

FIG. 5 is a perspective view of the socket of the reaction tube fixing module shown in FIG. 1;

fig. 6 is a cross-sectional view of the coupling of fig. 5.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, a plurality of means is one or more, a plurality of means is two or more, and the terms greater than, less than, exceeding, etc. are understood as not including the number, and the terms greater than, less than, within, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.

In the description of the present invention, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Referring to fig. 1 and 2, the reaction tube fixing module according to the embodiment of the present invention includes a reaction tube 100, a sleeve 200 and at least two flexible supporting members 300, the reaction tube 100 has a reaction chamber for placing a wafer, the sleeve 200 is used for connecting the reaction tube fixing module and an external member, and is used for supporting the reaction tube 100. The flexible supporting member 300 is located between the reaction tube 100 and the socket member 200, so that the socket member 200 can provide support for the reaction tube 100 and does not directly contact with the reaction tube 100, thereby avoiding the problem of cracking caused by hard contact between the reaction tube 100 and a metal part.

The reaction tube 100 may be a well-known structure, such as a circular tube, with an open end 110 at one end (e.g., the front end) and an opening 120 for wafer entry and exit into and from the reaction chamber, and a closed end at the other end. In the modification of the present invention, the open end 110 is supported by the socket 200 as a fixed end, and the other end (e.g., the rear end as shown) of the reaction tube 100 is suspended as a suspended end, thereby forming a cantilever fixing structure. In the present invention, the terms "open end", "fixed end" and "free end" are used to describe a rough positional relationship, and are not to be construed as limiting a specific range.

The socket 200 may be a sleeve structure adapted to the sectional shape of the reaction tube 100, which is sleeved outside the reaction tube 100 with a gap 101 between the socket and the reaction tube 100, so that the socket 200 is not in direct contact with the reaction tube 100. Taking the example shown in the figures, the socket 200 is sleeved outside the open end 110. Socket 200 may be a metal member, such as a metal flange, having sufficient strength to make a connection with an external member.

The flexible supporting member 300 may be a sleeve structure adapted to the cross-sectional shape of the reaction tube 100, which is sleeved outside the reaction tube 100, and is located in the gap 101 between the sleeve member 200 and the reaction tube 100, and is respectively in contact with the reaction tube 100 and the sleeve member 200, so that the sleeve member 200 supports the reaction tube 100 through the flexible supporting member 300, and since the hardness of the flexible supporting member 300 is small, a certain degree of deformation may occur when being stressed, thereby being able to avoid the breakage of the reaction tube 100. The reaction tube fixing module of the present embodiment includes at least two flexible supporting members 300, and each of the flexible supporting members 300 is distributed along the axial direction of the reaction tube 100 to provide a plurality of supporting positions, so as to realize stable support of the socket member 200 to the reaction tube 100. The flexible support 300 may be made of a known flexible material, such as rubber, silicon rubber, etc.

In the above reaction tube fixing module, the socket 200 supports the reaction tube 100 through at least two flexible supporting members 300 distributed along the axial direction of the reaction tube 100, so that the reaction tube 100 can be prevented from being cracked due to direct contact with the hard socket 200, the at least two flexible supporting members 300 can provide a plurality of supporting positions, stress of the reaction tube 100 can be balanced, pressure of the supporting positions of the reaction tube 100 is reduced, and stable placement of the reaction tube 100 is realized.

Referring to fig. 3, the socket 200 has a first annular groove 210, the first annular groove 210 has at least a first opening disposed toward the reaction tube 100, and the flexible support 300 is located in the first annular groove 210 and can contact the reaction tube 100 through the first opening. Taking the example shown in the figure, the reaction tube fixing module includes two flexible supporting members 300, and correspondingly, the socket member 200 has two first annular grooves 210, the two first annular grooves 210 are respectively located at two ends of the socket member 200 covering the socket part 290 of the reaction tube 100, and each first annular groove 210 forms a second opening on a corresponding end surface of the socket part 290.

The reaction tube fixing module further includes a first connector 400, and the first connector 400 may be a sleeve structure adapted to the cross-sectional shape of the reaction tube 100, such as a sleeve ring, which is sleeved on the outer side of the reaction tube 100 and connected to the sleeve 200 to limit the flexible support 300 in the corresponding first annular groove 210 and prevent the flexible support 300 from coming out. Specifically, the end surface of the socket 290 has a first threaded hole 291, the first connector 400 has an axial first through hole 410, and the first connector 400 and the socket 200 can be fixedly connected by screwing the threaded fastener into the first threaded hole 291 after passing through the first through hole 410.

Referring to fig. 3, the first connector 400 can press the corresponding flexible support 300 to extend the flexible support 300 in a radial direction of the reaction tube 100, thereby achieving close contact of the flexible support 300 with the socket 200 and the reaction tube 100. Specifically, the first connection member 400 has an extrusion portion 420 extending into the first annular groove 210, and the distance between the groove wall of the first annular groove 210 and the reaction tube 100 is gradually reduced along the extending direction of the extrusion portion 420. Taking the first annular groove 210 and the first connecting member 400 at the front end of the sleeve 290 shown in fig. 3 as an example, the distance between the groove wall of the first annular groove 210 and the reaction tube 100 gradually decreases along the front-to-back direction, and when the extrusion part 420 extends into the groove, the flexible supporting member 300 is pushed to contact with the inclined groove wall, so as to limit the flexible supporting member 300.

It should be noted that the first connecting member 400 may not be provided with the pressing portion 420 capable of extending into the first annular groove 210, and the axial dimension of the flexible supporting member 300 is greater than the axial dimension of the first annular groove 210, so that part of the flexible supporting member 300 is located outside the first annular groove 210, and thus, when the first connecting member 400 is connected with the socket member 200, the flexible supporting member 300 may also be pressed.

As an improvement of the above-mentioned reaction tube fixing module, the reaction tube fixing module further includes a flexible filling member, not shown, which is filled in the gap 101, for example, between the two flexible supporting members 300, and is in contact with the reaction tube 100. The contact area between the flexible filling member and the reaction tube 100 may be larger than the contact area between the flexible supporting member 300 and the reaction tube 100, so as to play a role of supporting and buffering, and further prevent the reaction tube 100 from being broken. In some embodiments, the flexible filling member may be a heat dissipation silica gel, which is in contact with the reaction tube 100 and the socket member 200, respectively, the socket member 200 may be made of a material with good thermal conductivity, the heat of the reaction tube 100 may be transferred to the socket member 200 through the flexible filling member, and the socket member 200 may dissipate heat in an active or passive manner, so as to achieve rapid cooling of the reaction tube 100.

Referring to fig. 4, as an improvement of the reaction tube fixing module, the reaction tube fixing module further includes a height adjusting member 600, the height adjusting member 600 is connected to the sleeve member 200, supported below the reaction tube 100, and can move along the vertical direction to finely adjust the reaction tube 100, so as to ensure the horizontal placement of the reaction tube 100. Specifically, the height adjusting member 600 includes a mounting portion 610 and an adjusting portion 620, the mounting portion 610 is connected to the socket member 200 by a not-shown threaded fastener, and the adjusting portion 620 is connected to the top of the mounting portion 610 and has a concave arc 621 contacting the reaction tube 100. During adjustment, the mounting portion 610 and the adjusting portion 620 can be driven to move up and down by rotating the threaded fastener. The hardness of the adjustment part 620 is less than that of the mounting part 610, for example, the mounting part 610 may be a metal member to secure the mounting strength, and the adjustment part 620 may be made of teflon or the like, or rubber, silicone or the like to prevent the hard metal member from directly contacting the reaction tube 100.

It should be noted that, a position of the socket 200 corresponding to the adjustment portion 620 is provided with an unillustrated avoidance hole, and the adjustment portion 620 can pass through the avoidance hole to contact the reaction tube 100.

Referring to fig. 2, 5, and 6, as an improvement of the reaction tube fixing module, the socket 200 has a first heat dissipation cavity 220, and a first inlet 230 and a first outlet 240 communicated with the first heat dissipation cavity 220, wherein a heat dissipation medium (e.g., cooling water) can flow into the first heat dissipation cavity 220 through the first inlet 230 and then flow out from the first outlet 240 to dissipate heat of the socket 200, so as to cool the flexible support 300 contacting the socket 200, thereby preventing the flexible support 300 from fast aging due to high temperature, and in addition, the heat conductive silica gel is combined to cool the socket 200, so as to dissipate heat of the reaction tube 100. To improve the cooling effect, the flexible supporting members 300 may be disposed adjacent to the first heat dissipation cavity 220, and the first heat dissipation cavity 220 is axially located between the two flexible supporting members 300, for example, so as to dissipate heat of the main body portion (e.g., the socket 290) of the socket member 200.

Referring to fig. 2, 5, and 6, one end of the socket 200 extends beyond the open end 110 of the reaction tube 100 along the axial direction of the reaction tube 100, that is, the socket 200 includes a socket 290 covering the reaction tube 100, and a protrusion 2100 connected to the socket 290 and protruding out of the reaction tube 100, an end surface of the protrusion 2100 has a second annular groove 250, and the reaction tube fixing module further includes a first sealing ring located in the second annular groove 250 and capable of being matched with an external sealing cover to isolate an inner cavity of the protrusion 2100 from the outside. In addition, referring to fig. 3, the flexible supporting member 300 facing the open end 110 of the reaction tube 100 is a second sealing ring, which can realize the sealing connection between the socket 200 and the reaction tube 100, and the sealing connection between the cap and the protrusion 2100 can make the inner cavity of the reaction tube 100 in a closed state, thereby facilitating the formation of a vacuum environment.

Note that, when it is not necessary to rely on the socket 200 to achieve sealing, the socket 200 may not be provided with the protrusion 2100.

Referring to fig. 5 and 6, the socket 200 has a second heat dissipation cavity 260, and a second inlet 270 and a second outlet 280 communicated with the second heat dissipation cavity 260, and a heat dissipation medium (for example, cooling water) can be used to flow into the second heat dissipation cavity 260 through the second inlet 270 and then flow out from the second outlet 280 to dissipate heat of the socket 200, so as to cool the first sealing ring in contact with the socket 200, thereby preventing the first sealing ring from rapidly aging due to high temperature. The second heat dissipation chamber 260 is disposed adjacent to the protrusion 2100 to secure a cooling effect on the first seal ring.

Referring to fig. 2 and 3, the reaction tube fixing module further includes a positioning member 500 and a second connecting member 700, the positioning member 500 is connected to the socket member 200 through the second connecting member 700 and contacts with the open end 110 of the reaction tube 100 to perform positioning, so as to prevent axial displacement of the reaction tube 100 caused by internal and external pressure differences after vacuum pumping. The hardness of the positioning member 500 is less than that of the socket member 200, for example, the socket member 200 may be a metal member to ensure the installation strength, and the positioning member 500 may be made of teflon or other materials, or rubber, silica gel or other materials, to prevent the hard metal member from directly contacting the reaction tube 100.

The second connector 700 may be a sleeve structure adapted to the cross-sectional shape of the reaction tube 100, for example, a sleeve ring, and the end surface of the second connector 700 facing the opening end 110 has a third annular groove 710, the end surface of the positioning member 500 facing the second connector 700 extends to have a clamping portion 510, and the clamping portion 510 is clamped in the third annular groove 710 to connect the positioning member 500 and the second connector 700. The end surface of the socket 290 has a second threaded hole, not shown, which is circumferentially distributed with the first threaded hole 291 along the socket 290. The second connector 700 also has a second through hole 720, the second through hole 720 being offset from the first through hole 410 so that the second connector 700 can be attached to the end face of the socket 290 also by a threaded fastener.

The utility model also discloses a reaction furnace, including base, the fixed module of above-mentioned reaction tube and furnace body, the fixed module of reaction tube is through cup jointing 200 and base fixed connection, and reaction tube 100 is located the furnace body, can heat through heating device.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art. Furthermore, the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.

Claims (14)

1. Fixed module of reaction tube, its characterized in that includes:

a reaction tube;

the sleeve joint piece is used for being connected with an external component, is sleeved outside the reaction tube and has a gap with the reaction tube;

the flexible supporting pieces are sleeved on the outer side of the reaction tube, positioned in the gap and respectively contacted with the reaction tube and the sleeved piece, and each flexible supporting piece is distributed along the axial direction of the reaction tube.

2. The reactor tube securing module according to claim 1, wherein the socket has a first annular groove with the flexible support therein;

the reaction tube fixing module further comprises a first connecting piece, wherein the first connecting piece is sleeved on the outer side of the reaction tube and connected with the sleeved piece so as to limit the flexible supporting piece in the corresponding first annular groove.

3. The reactor tube fixing module according to claim 2, wherein the first connecting member is capable of pressing the corresponding flexible supporting member to extend the flexible supporting member in a radial direction of the reactor tube.

4. The reaction tube fixing module according to claim 3, wherein the first connecting member has an extruding portion extending into the first annular groove, and a distance between a groove wall of the first annular groove and the reaction tube is gradually reduced in a direction in which the extruding portion extends.

5. The reaction tube fixing module according to claim 1, further comprising a flexible packing member filled in the gap and contacting the reaction tube.

6. The reaction tube fixing module according to claim 5, wherein the flexible filling member is a thermally conductive silicone.

7. The reaction tube fixing module according to claim 1, further comprising a height adjusting member connected to the socket member, supported below the reaction tubes, and capable of moving in a vertical direction.

8. The reaction tube fixing module according to claim 7, wherein the height adjusting member comprises an installation part and an adjusting part, the installation part is connected with the sleeve member, the adjusting part is connected with the installation part and has a concave arc surface contacted with the reaction tube, and the hardness of the adjusting part is less than that of the installation part.

9. The reaction tube fixing module according to claim 1, wherein the socket has a first heat dissipation chamber, and a first inlet and a first outlet communicated with the first heat dissipation chamber, and the first inlet is used for introducing a heat dissipation medium to dissipate heat of each of the flexible supporting members.

10. The reaction tube fixing module according to claim 1, wherein the socket comprises a socket part which is sleeved on the reaction tube, and a protrusion part which is connected with the socket part, the protrusion part extends beyond the open end of the reaction tube along the axial direction of the reaction tube, the end surface of the protrusion part is provided with a second annular groove, and the reaction tube fixing module further comprises a first sealing ring which is located in the second annular groove.

11. The reaction tube fixing module according to claim 10, wherein the protrusion has a second heat dissipation chamber, and a second inlet and a second outlet communicated with the second heat dissipation chamber, the second inlet is used for introducing a heat dissipation medium to dissipate heat of the first sealing ring.

12. The reactor tube holding module of claim 10, wherein said flexible support toward the open end of said reactor tube is a second gasket.

13. The reaction tube fixing module according to claim 1, further comprising a positioning member connected to the socket member and contacting the open end of the reaction tube for axial positioning, wherein the positioning member has a hardness less than that of the socket member.

14. A reactor, characterized by comprising:

a base;

the reactor tube holding module of any one of claims 1 to 13, connected to the base by the socket;

the furnace body, with the base is connected, the reaction tube is located in the furnace body.

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