CN210341125U - Electrode hole blocking plate device and single crystal furnace with same - Google Patents
Electrode hole blocking plate device and single crystal furnace with same Download PDFInfo
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- CN210341125U CN210341125U CN201921101361.XU CN201921101361U CN210341125U CN 210341125 U CN210341125 U CN 210341125U CN 201921101361 U CN201921101361 U CN 201921101361U CN 210341125 U CN210341125 U CN 210341125U
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Abstract
The application relates to an electrode hole blocking plate device and a single crystal furnace with the same. The periphery of the cover body of the upper gland is provided with a clamping part which is suitable for being clamped at a first opening of an electrode hole surrounded by the electrode seat so that the upper gland covers the first opening; a first boss is arranged on the end face, facing the electrode hole, of the cover body of the upper gland; the main body of the lower pressing cover is plate-shaped, and the lower pressing cover is suitable for covering a second opening of the electrode hole opposite to the first opening; wherein, the terminal surface of lower gland has seted up the through-hole, and the fastener passes the through-hole to with the first boss fixed connection of last gland. The parts of the electrode hole plugging plate device are reduced to 7 parts and can be disassembled, the installation is simple, the material is saved, the processing cost is reduced, and the structure is effectively simplified.
Description
Technical Field
The disclosure relates to the technical field of semiconductor process equipment, in particular to an electrode hole blocking plate device and a single crystal furnace with the same.
Background
In recent years, in the solar photovoltaic industry, in order to reduce the cost of monocrystalline silicon wafers, one measure is to continuously research and develop a new large-sized single crystal furnace (the inner diameter of a hearth is more than or equal to 1200mm), and the large-sized single crystal furnace is provided with a pair of electrode holes in consideration of upgrading the thermal field to be larger, and the existing method for plugging the reserved pair of electrode holes is as follows: through setting up electrode hole closure plate, adopt electrode hole closure plate to seal the electrode hole of reserving.
In the related art, the adopted electrode hole blocking plate has the same structure as the blocking plates of other main and auxiliary electrode holes, and comprises 12 parts such as a ceramic pad, an electrode rod, a polytetrafluoroethylene sleeve and the like, so that the structure is very complex.
Disclosure of Invention
In view of this, the present disclosure provides an electrode hole blocking plate device, which can greatly reduce the number of mounting members and effectively simplify the sealing structure of an electrode hole.
According to an aspect of the present disclosure, there is provided an electrode hole blocking plate apparatus including an upper pressing cover, a lower pressing cover, and a fastener;
the periphery of the cover body of the upper gland is provided with a clamping part which is suitable for being clamped at a first opening of an electrode hole surrounded by the electrode seat so that the upper gland covers the first opening;
a first boss is arranged on the end face, facing the electrode hole, of the cover body of the upper gland;
the main body of the lower pressing cover is plate-shaped, and the lower pressing cover is suitable for covering a second opening of the electrode hole opposite to the first opening;
the end face of the lower gland is provided with a through hole, and the fastener penetrates through the through hole and is fixedly connected with the first boss of the upper gland.
In a possible implementation manner, the cover body of the upper gland and the first boss are integrally formed.
In one possible implementation, the first boss is a cylinder;
wherein, the lateral wall of first boss is the echelonment.
In one possible implementation, the fastener includes a bolt; the first boss is provided with a fastening hole;
wherein the diameter of the screw of the bolt is the same as the aperture of the through hole; and is
And the inner wall of the fastening hole is provided with a thread matched with the bolt.
In a possible implementation manner, a washer is installed at a position where the head of the bolt contacts the through hole;
the inner diameter of the washer is the same as the diameter of the screw of the bolt.
In a possible implementation manner, the end face, facing the electrode hole, of the lower pressing cover is provided with a second boss;
the second boss is a cylinder, and the side wall of the second boss is attached to the hole wall of the through hole.
In a possible implementation manner, a first seal groove of an annular structure is formed at a position where the cover body of the lower gland is connected with the second boss;
a first sealing ring is arranged in the first sealing groove;
the inner diameter of the first sealing ring is the same as the aperture of the through hole.
In a possible implementation manner, a second sealing groove is formed in an end face, opposite to the second opening of the electrode hole, of the lower pressing cover;
the second sealing groove is positioned on the periphery of the through hole and arranged around the through hole;
a second sealing ring is arranged in the second sealing groove;
the inner diameter of the second sealing ring is the same as the aperture of the through hole.
In one possible implementation, the cover body of the lower cover is integrally formed with the second boss.
According to an aspect of the present disclosure, there is also provided a single crystal furnace including the electrode hole blocking plate device as described in any one of the above.
The utility model discloses electrode hole closure plate device, through setting up gland and lower gland, cover the first opening and the second opening in electrode hole respectively by last gland and lower gland, and pass the through-hole that lower gland was seted up through the fastener, realize the sealed of electrode hole with last gland fixed connection, compare in the mode that needs adopt 12 spare parts to carry out the sealed of electrode hole among the correlation technique, the number of spare part has significantly reduced, thereby the sealed degree of difficulty in electrode hole has been reduced, and convenient the dismantlement, the installation is simple, save material, the processing cost is reduced, the structure has been simplified effectively.
Other features and aspects of the present disclosure will become apparent from the following detailed description of exemplary embodiments, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate exemplary embodiments, features, and aspects of the disclosure and, together with the description, serve to explain the principles of the disclosure.
Fig. 1 shows a sectional view of a main structure of an electrode hole blocking plate device according to an embodiment of the present disclosure;
fig. 2 illustrates a top view of a body of an electrode aperture plate apparatus of an embodiment of the present disclosure.
Detailed Description
Various exemplary embodiments, features and aspects of the present disclosure will be described in detail below with reference to the accompanying drawings. In the drawings, like reference numbers can indicate functionally identical or similar elements. While the various aspects of the embodiments are presented in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the invention or for simplicity in description, and do not indicate or imply that the device or element so indicated must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments.
Furthermore, in the following detailed description, numerous specific details are set forth in order to provide a better understanding of the present disclosure. It will be understood by those skilled in the art that the present disclosure may be practiced without some of these specific details. In some instances, methods, means, elements and circuits that are well known to those skilled in the art have not been described in detail so as not to obscure the present disclosure.
Fig. 1 shows a sectional view of a main structure of an electrode hole blocking plate device according to an embodiment of the present disclosure. As shown in fig. 1, the electrode hole blocking plate device includes: an upper gland 110, a lower gland 120, and fasteners 130. The periphery of the cover body of the upper gland 110 is provided with a clamping portion, and the clamping portion is suitable for being clamped at a first opening of an electrode hole surrounded by the electrode holder 200, so that the upper gland 110 covers the first opening. The end surface of the cover body of the upper gland 110 facing the electrode hole is provided with a first boss 180, the main body of the lower gland 120 is plate-shaped, and the lower gland 120 is adapted to cover a second opening of the electrode hole opposite to the first opening.
The end surface of the lower cover 120 is provided with a through hole, and the fastening member 130 passes through the through hole and is fixedly connected to the first boss 180 of the upper cover 110.
Therefore, the electrode hole blocking plate device of the embodiment of the present disclosure, by setting the upper gland 110 and the lower gland 120, the upper gland 110 and the lower gland 120 cover the first opening and the second opening of the electrode hole respectively, and the fastening member 130 passes through the through hole formed in the lower gland 120, and is fixedly connected to the upper gland 110 to realize the sealing of the electrode hole, compared with the manner that 12 parts are required to be adopted to seal the electrode hole in the related art, the number of the parts is greatly reduced, thereby simplifying the sealing structure of the electrode hole, and simultaneously reducing the sealing difficulty of the electrode hole.
In one possible implementation, the first boss 180 of the upper gland 110 and the lower gland 120 may be threaded. Such as: referring to fig. 1, in the electrode hole blocking plate device according to the embodiment of the present disclosure, the fastening member 130 is a bolt, and the first boss 180 is provided with a fastening hole, wherein the diameter of the bolt is the same as the aperture of the through hole; and the inner wall of the fastening hole is provided with a thread matched with the bolt.
Therefore, when the electrode hole is plugged, the screw of the bolt directly penetrates through the through hole to be in threaded connection with the fastening hole of the first boss 180, so that the lower gland 120 and the upper gland 110 cover the first opening and the second opening of the electrode hole of the electrode holder 200, and the sealing effect is achieved. The installation mode is simple and easy to realize.
It should be noted that, in the electrode hole blocking plate device according to the embodiment of the present disclosure, referring to fig. 2, both the upper pressing cover 110 and the lower pressing cover 120 may be circular cover bodies. Wherein, the electrode holder 200 is enclosed into an electrode hole, and the upper gland 110 and the lower gland 120 respectively cover both ends of the electrode holder 200, so as to seal the openings (i.e. the first opening and the second opening) at both ends of the electrode hole.
Here, the shapes of the upper and lower caps 110 and 120 are not limited to the above circular shapes, but may be other shapes as long as the shapes can completely cover and seal the openings at both ends of the electrode hole, and thus, they are not described in detail.
Meanwhile, in the electrode hole blocking plate apparatus according to the embodiment of the present disclosure, referring to fig. 1, the cover body of the upper gland 110 and the first boss 180 are integrally formed. Through the cover body and the first boss 180 integrated structure of the upper gland 110, when the upper gland 110 is processed, the corresponding mold is directly adopted for processing and preparation, and a complex process method is not needed. Meanwhile, the cover body of the upper gland 110 and the first boss 180 are integrally formed, so that the connection between the cover body of the upper gland 110 and the first boss 180 is more stable, the situation that the first boss 180 falls off from the cover body of the upper gland 110 is avoided, and the reliability of the electrode hole blocking plate device is effectively improved.
In addition, to simplify the manufacturing process, in one possible implementation, the first boss 180 may be provided as a cylinder. Meanwhile, in the electrode hole blocking plate apparatus according to the embodiment of the present disclosure, the sidewall of the first boss 180 is stepped. The sidewall of the first boss 180 of the upper gland 110 is arranged to be stepped, so that the electrode hole blocking plate device of the embodiment of the present disclosure can be applied to electrode holes of various specifications and sizes, and thus, the applicability of the upper gland 110 and the electrode hole blocking plate device is effectively improved.
Further, referring to fig. 1, in the electrode hole blocking plate apparatus according to the embodiment of the present disclosure, the end surface of the lower gland 120 facing the electrode hole is provided with a second boss 170. Here, the cover body of the lower cap 120 may be integrally formed with the second boss 170, as well.
The second boss 170 is a cylinder, and the sidewall of the second boss 170 is attached to the wall of the through hole, so that the second boss 170 can penetrate through the second opening of the electrode hole and be inserted into the electrode hole, and is closely attached to the wall of the electrode hole, thereby sealing the electrode hole.
Furthermore, a first sealing groove with an annular structure is formed at a position where the cover body of the lower pressure cover 120 is connected to the second boss 170, a first sealing ring 140 is installed in the first sealing groove, and the inner diameter of the first sealing ring 140 is the same as the aperture of the through hole. The first sealing groove is formed at the position where the cover body of the lower pressing cover 120 is connected with the second boss 170, the first sealing ring 140 is arranged in the first sealing groove, and the second opening of the electrode hole is further sealed by the first sealing ring 140, so that the sealing effect of the joint of the second opening of the electrode hole and the lower pressing cover 120 is further enhanced.
Meanwhile, referring to fig. 1, when a bolt is used as the fastening member 130 and is screwed with the first boss 180 of the upper gland 110 to seal the electrode hole, a second sealing groove is formed in an end surface of the lower gland 120 facing away from the second opening of the electrode hole; the second sealing groove is positioned at the periphery of the through hole and arranged around the through hole; a second sealing ring 150 is arranged in the second sealing groove, and the inner diameter of the second sealing ring 150 is the same as the aperture of the through hole. By providing the second sealing ring 150, the sealing effect between the screw and the through hole of the lower cap 120 is further enhanced.
Here, it should be noted that the first sealing ring 140 and the second sealing ring 150 may be rubber rings, but are not limited to rubber materials.
Such as: first sealing washer 140 has been placed with the first seal groove of lower gland 120 laminating department to the second opening in electrode hole, and first sealing washer 140 is the rubber circle, and second sealing washer 150 has been placed with the peripheral second seal groove in the through-hole of lower gland 120 to the screw rod, and second sealing washer 150 is the rubber circle, has further strengthened sealed effect.
Further, referring to fig. 1, when a bolt is used as the fastening member 130 and is screwed with the first boss 180 of the upper gland 110 to seal the electrode hole, a washer 160 is installed at a position where the head of the bolt contacts the through hole; the inner diameter of the washer 160 is the same as the diameter of the bolt shank. Among other things, the gasket 160 may be a metal ring in a flat shape. By installing the washer 160 at a position where the head of the bolt contacts the through-hole, the surface of the lower cover 120 can be effectively protected from being scratched by the head of the bolt, thereby increasing the durability of the lower cover 120. At the same time, the sealing performance of the second opening of the electrode hole can be further improved.
It should be noted that the fastening member 130 is not limited to a bolt, as long as it can be fixedly connected to the first boss 180 of the upper gland 110 and enable the upper gland 110 and the lower gland 120 to cover and seal the first opening and the second opening of the electrode hole, respectively.
The shape of the through hole formed in the lower cover 120 is not limited as long as it matches the shape of the fastening member 130. Meanwhile, the gasket 160 is not limited to metal, and may protect the lower cover 120 from friction.
It should be noted that although the electrode hole plugging plate device of the present application is described by way of example in fig. 1, those skilled in the art will appreciate that the present disclosure should not be limited thereto. In fact, the user can flexibly set the structure of the electrode hole blocking plate device according to personal preference and/or practical application scenes as long as the required functional effect is achieved.
In addition, based on any one of the electrode hole blocking plate devices, the single crystal furnace is further provided by the disclosure. The single crystal furnace provided by the present disclosure comprises the electrode hole blocking plate device described in any one of the above. The parts of the electrode hole plugging plate device are reduced to less than 7 parts, and the electrode hole plugging plate device is detachable, simple to mount, material-saving, low in processing cost and effectively simplified in structure.
Having described embodiments of the present disclosure, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (10)
1. An electrode hole blocking plate device is characterized by comprising an upper pressing cover, a lower pressing cover and a fastener;
the periphery of the cover body of the upper gland is provided with a clamping part which is suitable for being clamped at a first opening of an electrode hole surrounded by the electrode seat so that the upper gland covers the first opening;
a first boss is arranged on the end face, facing the electrode hole, of the cover body of the upper gland;
the main body of the lower pressing cover is plate-shaped, and the lower pressing cover is suitable for covering a second opening of the electrode hole opposite to the first opening;
the end face of the lower gland is provided with a through hole, and the fastener penetrates through the through hole and is fixedly connected with the first boss of the upper gland.
2. The electrode hole plugging plate device according to claim 1, wherein the cover body of the upper gland is integrally formed with the first boss.
3. The electrode hole plugging plate device according to claim 1, wherein said first boss is a cylinder;
wherein, the lateral wall of first boss is the echelonment.
4. The electrode aperture blanking plate apparatus of claim 1 wherein the fastener comprises a bolt; the first boss is provided with a fastening hole;
wherein the diameter of the screw of the bolt is the same as the aperture of the through hole; and is
And the inner wall of the fastening hole is provided with a thread matched with the bolt.
5. The electrode hole plugging plate device according to claim 4, wherein a washer is installed at a position where the head of the bolt contacts the through hole;
the inner diameter of the washer is the same as the diameter of the screw of the bolt.
6. The electrode hole blocking plate device according to any one of claims 1 to 5, wherein the end surface of the lower gland facing the electrode hole is provided with a second boss;
the second boss is a cylinder, and the side wall of the second boss is attached to the hole wall of the through hole.
7. The electrode hole blocking plate device according to claim 6, wherein a first sealing groove of an annular structure is formed at a position where the cover body of the lower gland is connected with the second boss;
a first sealing ring is arranged in the first sealing groove;
the inner diameter of the first sealing ring is the same as the aperture of the through hole.
8. The electrode hole blocking plate device according to claim 1, wherein a second sealing groove is formed in an end surface of the lower gland facing away from the second opening of the electrode hole;
the second sealing groove is positioned on the periphery of the through hole and arranged around the through hole;
a second sealing ring is arranged in the second sealing groove;
the inner diameter of the second sealing ring is the same as the aperture of the through hole.
9. The electrode hole plugging plate device according to claim 6, wherein the cover body of the lower gland is integrally formed with the second boss.
10. A single crystal furnace comprising the electrode hole plugging plate device according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921101361.XU CN210341125U (en) | 2019-07-12 | 2019-07-12 | Electrode hole blocking plate device and single crystal furnace with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921101361.XU CN210341125U (en) | 2019-07-12 | 2019-07-12 | Electrode hole blocking plate device and single crystal furnace with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210341125U true CN210341125U (en) | 2020-04-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921101361.XU Active CN210341125U (en) | 2019-07-12 | 2019-07-12 | Electrode hole blocking plate device and single crystal furnace with same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210341125U (en) |
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2019
- 2019-07-12 CN CN201921101361.XU patent/CN210341125U/en active Active
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